JP5235158B2 - 追尾式レーザ干渉測長計 - Google Patents
追尾式レーザ干渉測長計 Download PDFInfo
- Publication number
- JP5235158B2 JP5235158B2 JP2009097810A JP2009097810A JP5235158B2 JP 5235158 B2 JP5235158 B2 JP 5235158B2 JP 2009097810 A JP2009097810 A JP 2009097810A JP 2009097810 A JP2009097810 A JP 2009097810A JP 5235158 B2 JP5235158 B2 JP 5235158B2
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- JP
- Japan
- Prior art keywords
- reference sphere
- retro
- laser beam
- tracking
- retroreflector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02056—Passive reduction of errors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/66—Tracking systems using electromagnetic waves other than radio waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/15—Cat eye, i.e. reflection always parallel to incoming beam
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Computer Networks & Wireless Communication (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Radar Systems And Details Thereof (AREA)
Description
612…支柱
614…基準球
614R…反射膜
620…測定側反射体
630…キャリッジ
632…円形フレーム
634…円筒型回転テーブル
636…モータ
638…平行レーザビーム
640…干渉計本体部
642…測定光
652…干渉光
660…追尾用位置検出手段
670…制御部
680…対物レンズ
Claims (2)
- 固定位置に配設された透明な基準球と、
移動体に配設された再帰逆反射体と、
前記基準球の中心を中心として回動するように設計されたキャリッジと、
該キャリッジに固定配設され、前記再帰逆反射体と前記基準球の間でレーザビームを往復させる光学系を含み、前記再帰逆反射体と前記基準球の間の距離を干渉測長する測長手段と、
前記キャリッジに固定配設され、前記再帰逆反射体の入射光と反射光の光軸のずれ量に応じた信号を出力する追尾用位置検出手段と、
該追尾用位置検出手段により得られる前記光軸のずれ量がゼロとなるように前記キャリッジの回動を制御する制御部と、
を備えた追尾式レーザ干渉測長計において、
前記基準球に入射されるレーザビームが、基準球の中心に焦点を結び、入射側と反対の内側球面で反射されるようにしたことを特徴とする追尾式レーザ干渉測長計。 - 請求項1に記載の追尾式レーザ干渉測長計において、
前記再帰逆反射体と前記基準球の間でレーザビームを往復させる場合、先に移動体に配設された再帰逆反射体にレーザビームを向け、その反射するレーザビームを基準球に向けることを特徴とする追尾式レーザ干渉測長計。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009097810A JP5235158B2 (ja) | 2009-04-14 | 2009-04-14 | 追尾式レーザ干渉測長計 |
EP20100159846 EP2244055B1 (en) | 2009-04-14 | 2010-04-14 | Tracking type laser interferometer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009097810A JP5235158B2 (ja) | 2009-04-14 | 2009-04-14 | 追尾式レーザ干渉測長計 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010249595A JP2010249595A (ja) | 2010-11-04 |
JP5235158B2 true JP5235158B2 (ja) | 2013-07-10 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009097810A Active JP5235158B2 (ja) | 2009-04-14 | 2009-04-14 | 追尾式レーザ干渉測長計 |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP2244055B1 (ja) |
JP (1) | JP5235158B2 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011191175A (ja) * | 2010-03-15 | 2011-09-29 | Mitsutoyo Corp | レーザ反射体 |
JP6747151B2 (ja) * | 2016-08-03 | 2020-08-26 | 株式会社ミツトヨ | 追尾式レーザ干渉計による位置決め機械の検査方法及び装置 |
JP6173628B1 (ja) * | 2017-01-30 | 2017-08-02 | 株式会社ミツトヨ | 形状測定装置の制御方法 |
CN106989670B (zh) * | 2017-02-27 | 2019-06-04 | 上海大学 | 一种机器人协同的非接触式高精度大型工件跟踪测量方法 |
US10429661B2 (en) * | 2017-08-08 | 2019-10-01 | Sensors Unlimited, Inc. | Retroreflector detectors |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3930729A (en) * | 1973-06-29 | 1976-01-06 | International Business Machines Corporation | Interferometer apparatus incorporating a spherical element of index of refraction of two |
JPS586125B2 (ja) * | 1973-10-05 | 1983-02-03 | タイヨウサンギヨウ カブシキガイシヤ | ザヒヨウイチソクテイソウチ |
JP2603429B2 (ja) * | 1993-10-25 | 1997-04-23 | 工業技術院長 | 追尾式レーザ干渉計 |
JPH07333412A (ja) * | 1994-06-07 | 1995-12-22 | Agency Of Ind Science & Technol | リトロリフレクター |
GB9722068D0 (en) * | 1997-10-17 | 1997-12-17 | Secretary Trade Ind Brit | Tracking system |
JP4771898B2 (ja) * | 2006-09-04 | 2011-09-14 | 株式会社ミツトヨ | レーザ干渉追尾測長方法及び装置 |
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2009
- 2009-04-14 JP JP2009097810A patent/JP5235158B2/ja active Active
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2010
- 2010-04-14 EP EP20100159846 patent/EP2244055B1/en active Active
Also Published As
Publication number | Publication date |
---|---|
JP2010249595A (ja) | 2010-11-04 |
EP2244055A1 (en) | 2010-10-27 |
EP2244055B1 (en) | 2013-05-29 |
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