JP2005197702A - 半導体素子及びその製造方法 - Google Patents
半導体素子及びその製造方法 Download PDFInfo
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- JP2005197702A JP2005197702A JP2004376188A JP2004376188A JP2005197702A JP 2005197702 A JP2005197702 A JP 2005197702A JP 2004376188 A JP2004376188 A JP 2004376188A JP 2004376188 A JP2004376188 A JP 2004376188A JP 2005197702 A JP2005197702 A JP 2005197702A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 51
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 26
- 239000000758 substrate Substances 0.000 claims abstract description 55
- 125000006850 spacer group Chemical group 0.000 claims abstract description 38
- 238000000034 method Methods 0.000 claims description 42
- 239000012535 impurity Substances 0.000 claims description 22
- 150000002500 ions Chemical class 0.000 claims description 17
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 13
- 150000004767 nitrides Chemical class 0.000 claims description 12
- 238000000059 patterning Methods 0.000 claims description 10
- 238000005530 etching Methods 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 abstract description 3
- 238000002955 isolation Methods 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 229920005591 polysilicon Polymers 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 230000007261 regionalization Effects 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000000368 destabilizing effect Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66606—Lateral single gate silicon transistors with final source and drain contacts formation strictly before final or dummy gate formation, e.g. contact first technology
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66545—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using a dummy, i.e. replacement gate in a process wherein at least a part of the final gate is self aligned to the dummy gate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66613—Lateral single gate silicon transistors with a gate recessing step, e.g. using local oxidation
- H01L29/66628—Lateral single gate silicon transistors with a gate recessing step, e.g. using local oxidation recessing the gate by forming single crystalline semiconductor material at the source or drain location
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Abstract
【解決手段】本発明による半導体素子は、ゲートの側面に形成されているスペーサが基板のソース領域及びドレーン領域上に形成されているエピタキシャル層の上部と一部重畳する。
【選択図】図2
Description
図2は本発明の第1実施例による半導体素子の構造を示した断面図である。
図2に示したように、半導体基板100に素子分離領域102によって複数の活性領域が限定されている。そして、各々の活性領域にはウォール(図示せず)が形成されている。
図4は本発明の第2実施例による半導体素子の構造を示した断面図である。
第2実施例は第1実施例とほとんど同一な構造を有するが、エピタキシャル層106のプロファイルが第1実施例と異なる。つまり、第2実施例は、第1実施例とは異なり、スペーサ116と接合するエピタキシャル層106部分が垂直な形態に形成されている。
その後、図5Cに示したように、基板100を熱酸化してパッド酸化膜108を形成し、パッド酸化膜108上に多結晶シリコンを蒸着して多結晶シリコン膜を形成する。
101 犠牲酸化膜
102 素子分離領域
103 犠牲窒化膜
104 酸化膜パターン
105 犠牲膜パターン
106 エピタキシャル層
108 パッド酸化膜
110 ゲート
112 低濃度ドーピング領域
114 バッファ酸化膜
116 スペーサ
118 ドレーン領域
Claims (8)
- 半導体基板と、
前記基板上に形成されているゲートと、
前記ゲートの側面に形成されているスペーサと、
前記基板上に形成されているエピタキシャル層と、
前記エピタキシャル層下の基板に形成されているソース領域及びドレーン領域及び前記スペーサ下の基板に形成されている低濃度ドーピング領域を含み、
前記スペーサは、前記エピタキシャル層の上部と一部重畳することを特徴とする半導体素子。 - 前記スペーサと重畳する前記エピタキシャル層の側面は、垂直なプロファイルを有することを特徴とする請求項1に記載の半導体素子。
- 半導体基板上に犠牲膜パターンを形成する段階と、
前記基板上にエピタキシャル層を形成する段階と、
前記犠牲膜パターンを除去した後で前記基板上にパッド酸化膜を形成する段階と、
前記パッド酸化膜上に多結晶シリコン膜を形成する段階と、
前記多結晶シリコン膜をパターニングしてゲートを形成する段階と、
前記パッド酸化膜をパターニングしてゲート酸化膜を形成する段階と、
前記基板の所定の領域に導電型不純物イオンを低濃度にドーピングして低濃度ドーピング領域を形成する段階と、
前記ゲートの側面にバッファ酸化膜及びスペーサを形成する段階と、
前記基板の所定の領域に導電型不純物イオンを高濃度にドーピングしてソース領域及びドレーン領域を形成する段階と、を含むことを特徴とする半導体素子の製造方法。 - 前記犠牲膜パターン形成段階で、前記犠牲膜パターンは、酸化膜を形成した後に選択的エッチング工程でパターニングして形成することを特徴とする請求項3に記載の半導体素子の製造方法。
- 前記犠牲膜パターン形成段階で、前記犠牲膜パターンは、酸化膜及び窒化膜を形成した後に選択的エッチング工程でパターニングして形成することを特徴とする請求項3に記載の半導体素子の製造方法。
- 前記犠牲膜パターンの側面は垂直なプロファイルを有し、前記犠牲膜パターンの厚さは前記エピタキシャル層と同一またはより厚く形成することを特徴とする請求項5に記載の半導体素子の製造方法。
- 前記エピタキシャル層を形成する段階以降に、前記スペーサを形成する段階を進めることを特徴とする請求項3に記載の半導体素子の製造方法。
- 前記スペーサは、前記エピタキシャル層の上部と重畳するように形成することを特徴とする請求項7に記載の半導体素子の製造方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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KR1020030101895A KR100579849B1 (ko) | 2003-12-31 | 2003-12-31 | 반도체 소자 및 그의 제조 방법 |
Publications (2)
Publication Number | Publication Date |
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JP2005197702A true JP2005197702A (ja) | 2005-07-21 |
JP3818452B2 JP3818452B2 (ja) | 2006-09-06 |
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Application Number | Title | Priority Date | Filing Date |
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JP2004376188A Expired - Fee Related JP3818452B2 (ja) | 2003-12-31 | 2004-12-27 | 半導体素子の製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7153748B2 (ja) |
JP (1) | JP3818452B2 (ja) |
KR (1) | KR100579849B1 (ja) |
DE (1) | DE102004063589A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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KR100935194B1 (ko) * | 2007-11-14 | 2010-01-06 | 주식회사 하이닉스반도체 | 반도체 소자 및 그의 제조방법 |
US9192251B1 (en) | 2014-06-06 | 2015-11-24 | Target Brands, Inc. | Double end frame |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
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US5200352A (en) * | 1991-11-25 | 1993-04-06 | Motorola Inc. | Transistor having a lightly doped region and method of formation |
US5683924A (en) * | 1994-10-31 | 1997-11-04 | Sgs-Thomson Microelectronics, Inc. | Method of forming raised source/drain regions in a integrated circuit |
TW454254B (en) * | 1998-05-20 | 2001-09-11 | Winbond Electronics Corp | Method to manufacture devices with elevated source/drain |
US6232641B1 (en) * | 1998-05-29 | 2001-05-15 | Kabushiki Kaisha Toshiba | Semiconductor apparatus having elevated source and drain structure and manufacturing method therefor |
US6429084B1 (en) * | 2001-06-20 | 2002-08-06 | International Business Machines Corporation | MOS transistors with raised sources and drains |
-
2003
- 2003-12-31 KR KR1020030101895A patent/KR100579849B1/ko not_active IP Right Cessation
-
2004
- 2004-12-27 JP JP2004376188A patent/JP3818452B2/ja not_active Expired - Fee Related
- 2004-12-30 US US11/027,539 patent/US7153748B2/en not_active Expired - Fee Related
- 2004-12-30 DE DE102004063589A patent/DE102004063589A1/de not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
JP3818452B2 (ja) | 2006-09-06 |
US20050139933A1 (en) | 2005-06-30 |
US7153748B2 (en) | 2006-12-26 |
DE102004063589A1 (de) | 2005-08-04 |
KR20050069634A (ko) | 2005-07-05 |
KR100579849B1 (ko) | 2006-05-12 |
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