JP2005194060A - 基板搬送装置 - Google Patents

基板搬送装置 Download PDF

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Publication number
JP2005194060A
JP2005194060A JP2004002798A JP2004002798A JP2005194060A JP 2005194060 A JP2005194060 A JP 2005194060A JP 2004002798 A JP2004002798 A JP 2004002798A JP 2004002798 A JP2004002798 A JP 2004002798A JP 2005194060 A JP2005194060 A JP 2005194060A
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JP
Japan
Prior art keywords
substrate
mounting member
endless traveling
traveling body
endless
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Pending
Application number
JP2004002798A
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English (en)
Japanese (ja)
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JP2005194060A5 (enExample
Inventor
Yoshihisa Konishi
善久 小西
Ichiro Kawashima
一郎 川島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Takatori Corp
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Takatori Corp
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Publication date
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Priority to JP2004002798A priority Critical patent/JP2005194060A/ja
Publication of JP2005194060A publication Critical patent/JP2005194060A/ja
Publication of JP2005194060A5 publication Critical patent/JP2005194060A5/ja
Pending legal-status Critical Current

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JP2004002798A 2004-01-08 2004-01-08 基板搬送装置 Pending JP2005194060A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004002798A JP2005194060A (ja) 2004-01-08 2004-01-08 基板搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004002798A JP2005194060A (ja) 2004-01-08 2004-01-08 基板搬送装置

Publications (2)

Publication Number Publication Date
JP2005194060A true JP2005194060A (ja) 2005-07-21
JP2005194060A5 JP2005194060A5 (enExample) 2007-01-25

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ID=34817884

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004002798A Pending JP2005194060A (ja) 2004-01-08 2004-01-08 基板搬送装置

Country Status (1)

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JP (1) JP2005194060A (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007152251A (ja) * 2005-12-06 2007-06-21 Dainippon Screen Mfg Co Ltd 塗布装置
KR100850122B1 (ko) * 2006-05-08 2008-08-04 엔이씨 엘씨디 테크놀로지스, 엘티디. 패널 세정기 및 세정 방법
JP2009295806A (ja) * 2008-06-05 2009-12-17 Sekisui Chem Co Ltd 表面処理装置
KR101204089B1 (ko) * 2007-12-24 2012-11-22 삼성테크윈 주식회사 롤투롤 기판 이송 장치, 이를 포함하는 습식 식각 장치 및회로 기판 제조 장치
KR20150061601A (ko) * 2013-11-27 2015-06-04 아사히 가라스 가부시키가이샤 유리판의 절단 장치, 유리판의 절단 방법 및 유리판의 제조 방법

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007152251A (ja) * 2005-12-06 2007-06-21 Dainippon Screen Mfg Co Ltd 塗布装置
KR100850122B1 (ko) * 2006-05-08 2008-08-04 엔이씨 엘씨디 테크놀로지스, 엘티디. 패널 세정기 및 세정 방법
KR101204089B1 (ko) * 2007-12-24 2012-11-22 삼성테크윈 주식회사 롤투롤 기판 이송 장치, 이를 포함하는 습식 식각 장치 및회로 기판 제조 장치
JP2009295806A (ja) * 2008-06-05 2009-12-17 Sekisui Chem Co Ltd 表面処理装置
KR20150061601A (ko) * 2013-11-27 2015-06-04 아사히 가라스 가부시키가이샤 유리판의 절단 장치, 유리판의 절단 방법 및 유리판의 제조 방법
JP2015101522A (ja) * 2013-11-27 2015-06-04 旭硝子株式会社 ガラス板の切断装置、ガラス板の切断方法、及びガラス板の製造方法
TWI624438B (zh) * 2013-11-27 2018-05-21 Asahi Glass Co Ltd Glass plate cutting device, glass plate cutting method, and glass plate manufacturing method
KR102237439B1 (ko) 2013-11-27 2021-04-07 에이지씨 가부시키가이샤 유리판의 절단 장치, 유리판의 절단 방법 및 유리판의 제조 방법

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