JP2005194060A5 - - Google Patents

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Publication number
JP2005194060A5
JP2005194060A5 JP2004002798A JP2004002798A JP2005194060A5 JP 2005194060 A5 JP2005194060 A5 JP 2005194060A5 JP 2004002798 A JP2004002798 A JP 2004002798A JP 2004002798 A JP2004002798 A JP 2004002798A JP 2005194060 A5 JP2005194060 A5 JP 2005194060A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004002798A
Other languages
Japanese (ja)
Other versions
JP2005194060A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004002798A priority Critical patent/JP2005194060A/ja
Priority claimed from JP2004002798A external-priority patent/JP2005194060A/ja
Publication of JP2005194060A publication Critical patent/JP2005194060A/ja
Publication of JP2005194060A5 publication Critical patent/JP2005194060A5/ja
Pending legal-status Critical Current

Links

JP2004002798A 2004-01-08 2004-01-08 基板搬送装置 Pending JP2005194060A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004002798A JP2005194060A (ja) 2004-01-08 2004-01-08 基板搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004002798A JP2005194060A (ja) 2004-01-08 2004-01-08 基板搬送装置

Publications (2)

Publication Number Publication Date
JP2005194060A JP2005194060A (ja) 2005-07-21
JP2005194060A5 true JP2005194060A5 (enExample) 2007-01-25

Family

ID=34817884

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004002798A Pending JP2005194060A (ja) 2004-01-08 2004-01-08 基板搬送装置

Country Status (1)

Country Link
JP (1) JP2005194060A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4544470B2 (ja) * 2005-12-06 2010-09-15 大日本スクリーン製造株式会社 塗布装置
JP4796889B2 (ja) * 2006-05-08 2011-10-19 Ｎｅｃ液晶テクノロジー株式会社 パネル洗浄機及び洗浄方法
KR101204089B1 (ko) * 2007-12-24 2012-11-22 삼성테크윈 주식회사 롤투롤 기판 이송 장치, 이를 포함하는 습식 식각 장치 및회로 기판 제조 장치
JP4860664B2 (ja) * 2008-06-05 2012-01-25 積水化学工業株式会社 表面処理装置
JP6213188B2 (ja) * 2013-11-27 2017-10-18 旭硝子株式会社 ガラス板の切断装置、ガラス板の切断方法、及びガラス板の製造方法

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