JP2005172830A5 - - Google Patents

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Publication number
JP2005172830A5
JP2005172830A5 JP2004356910A JP2004356910A JP2005172830A5 JP 2005172830 A5 JP2005172830 A5 JP 2005172830A5 JP 2004356910 A JP2004356910 A JP 2004356910A JP 2004356910 A JP2004356910 A JP 2004356910A JP 2005172830 A5 JP2005172830 A5 JP 2005172830A5
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Japan
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profile
measurement signal
parameter
simulated measurement
parameters
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JP2004356910A
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Japanese (ja)
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JP4824299B2 (ja
JP2005172830A (ja
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Priority claimed from US10/735,212 external-priority patent/US7126700B2/en
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Publication of JP4824299B2 publication Critical patent/JP4824299B2/ja
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JP2004356910A 2003-12-12 2004-12-09 集積回路構造のプロファイルを決定する方法及びシステム又はコンピュータ読取可能な記録媒体 Expired - Fee Related JP4824299B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/735,212 US7126700B2 (en) 2003-12-12 2003-12-12 Parametric optimization of optical metrology model
US10/735212 2003-12-12

Publications (3)

Publication Number Publication Date
JP2005172830A JP2005172830A (ja) 2005-06-30
JP2005172830A5 true JP2005172830A5 (https=) 2008-01-17
JP4824299B2 JP4824299B2 (ja) 2011-11-30

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JP2004356910A Expired - Fee Related JP4824299B2 (ja) 2003-12-12 2004-12-09 集積回路構造のプロファイルを決定する方法及びシステム又はコンピュータ読取可能な記録媒体

Country Status (3)

Country Link
US (1) US7126700B2 (https=)
EP (1) EP1541960A3 (https=)
JP (1) JP4824299B2 (https=)

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