JP2005171364A - 導電性金属膜の形成方法 - Google Patents

導電性金属膜の形成方法 Download PDF

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Publication number
JP2005171364A
JP2005171364A JP2003416422A JP2003416422A JP2005171364A JP 2005171364 A JP2005171364 A JP 2005171364A JP 2003416422 A JP2003416422 A JP 2003416422A JP 2003416422 A JP2003416422 A JP 2003416422A JP 2005171364 A JP2005171364 A JP 2005171364A
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JP
Japan
Prior art keywords
gold plating
thin film
forming
film
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
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JP2003416422A
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English (en)
Japanese (ja)
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JP2005171364A5 (enExample
Inventor
Minoru Yoshikawa
実 吉川
Yasuhiro Koida
泰浩 小井田
Masanori Doge
昌紀 道下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micro Gijutsu Kenkyusho KK
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Micro Gijutsu Kenkyusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by Micro Gijutsu Kenkyusho KK filed Critical Micro Gijutsu Kenkyusho KK
Priority to JP2003416422A priority Critical patent/JP2005171364A/ja
Publication of JP2005171364A publication Critical patent/JP2005171364A/ja
Publication of JP2005171364A5 publication Critical patent/JP2005171364A5/ja
Pending legal-status Critical Current

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  • Chemically Coating (AREA)
  • Physical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Electrodes Of Semiconductors (AREA)
JP2003416422A 2003-12-15 2003-12-15 導電性金属膜の形成方法 Pending JP2005171364A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003416422A JP2005171364A (ja) 2003-12-15 2003-12-15 導電性金属膜の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003416422A JP2005171364A (ja) 2003-12-15 2003-12-15 導電性金属膜の形成方法

Publications (2)

Publication Number Publication Date
JP2005171364A true JP2005171364A (ja) 2005-06-30
JP2005171364A5 JP2005171364A5 (enExample) 2006-12-28

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ID=34735623

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003416422A Pending JP2005171364A (ja) 2003-12-15 2003-12-15 導電性金属膜の形成方法

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JP (1) JP2005171364A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012214858A (ja) * 2011-04-01 2012-11-08 Nikon Corp パターン形成方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012214858A (ja) * 2011-04-01 2012-11-08 Nikon Corp パターン形成方法

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