JP2005171364A5 - - Google Patents
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- Publication number
- JP2005171364A5 JP2005171364A5 JP2003416422A JP2003416422A JP2005171364A5 JP 2005171364 A5 JP2005171364 A5 JP 2005171364A5 JP 2003416422 A JP2003416422 A JP 2003416422A JP 2003416422 A JP2003416422 A JP 2003416422A JP 2005171364 A5 JP2005171364 A5 JP 2005171364A5
- Authority
- JP
- Japan
- Prior art keywords
- forming
- thin film
- gold plating
- vacuum thin
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 11
- 239000010931 gold Substances 0.000 claims 11
- 229910052737 gold Inorganic materials 0.000 claims 11
- 238000007747 plating Methods 0.000 claims 7
- 239000010409 thin film Substances 0.000 claims 7
- 238000000034 method Methods 0.000 claims 5
- 238000006467 substitution reaction Methods 0.000 claims 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 4
- 239000010408 film Substances 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- 239000002184 metal Substances 0.000 claims 3
- 229910052751 metal Inorganic materials 0.000 claims 3
- 229910052759 nickel Inorganic materials 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000000059 patterning Methods 0.000 claims 1
- 238000001771 vacuum deposition Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003416422A JP2005171364A (ja) | 2003-12-15 | 2003-12-15 | 導電性金属膜の形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003416422A JP2005171364A (ja) | 2003-12-15 | 2003-12-15 | 導電性金属膜の形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005171364A JP2005171364A (ja) | 2005-06-30 |
| JP2005171364A5 true JP2005171364A5 (enExample) | 2006-12-28 |
Family
ID=34735623
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003416422A Pending JP2005171364A (ja) | 2003-12-15 | 2003-12-15 | 導電性金属膜の形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005171364A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012214858A (ja) * | 2011-04-01 | 2012-11-08 | Nikon Corp | パターン形成方法 |
-
2003
- 2003-12-15 JP JP2003416422A patent/JP2005171364A/ja active Pending
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