JP2005150445A - 接着剤塗布装置とそれを用いた半導体チップの実装方法 - Google Patents
接着剤塗布装置とそれを用いた半導体チップの実装方法 Download PDFInfo
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- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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Abstract
【解決手段】接着剤8を収容するシリンジ1と、このシリンジ1の一方に接続するニードル部4とを設け、このニードル部4を複数のニードルを束ねて所定形状とし、シリンジ1の内部の接着剤8を所定形状に塗布する接着剤塗布装置であり、所定形状に最適量の接着剤8を容易に塗布することができる。
【選択図】図1
Description
図1は本発明の実施の形態1における接着剤塗布装置の構成を示す側面図である。
図8は本発明の実施の形態2における接着剤塗布装置の構成を示す側面図である。
3 マスク
4 ニードル部
5 開口
6 ベース部
7 ニードル
8 接着剤
10 回路基板
12 接着剤
13 半導体チップ
14 バンプ
15 複数の孔を有するブロック体
16 貫通孔
Claims (7)
- 接着剤を収容するシリンジと、このシリンジの一方に接続するニードル部とを設け、このニードル部を複数のニードルを束ねて所定形状とし、前記シリンジ内の接着剤を所定形状に塗布する接着剤塗布装置。
- 接着剤を収容するシリンジと、このシリンジの一方に接続するニードル部とを設け、このニードル部をブロック体に複数の貫通孔を設けて所定形状とし、前記シリンジ内の接着剤を所定形状に塗布する接着剤塗布装置。
- ニードル部のニードルの輪郭形状を円、楕円、多角形、線状のいずれかとした請求項1に記載の接着剤塗布装置。
- ブロック体に設けた複数の貫通孔で形成する輪郭形状を円、楕円、多角形、線状のいずれかとした請求項2に記載の接着剤塗布装置。
- シリンジとニードル部との間に所定形状の開口を形成したマスクを設けた請求項1または2に記載の接着剤塗布装置。
- マスクを取り換え可能とする請求項5に記載の接着剤塗布装置。
- 請求項1または2に記載の接着剤塗布装置により接着剤としての接着剤を回路基板上に塗布する工程と、半導体チップのバンプと前記回路基板の電極とを対向させて位置合わせする工程と、前記半導体チップを背面より加圧および加熱し前記接着剤を硬化する工程とからなる半導体チップの実装方法。
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JP2003386617A JP2005150445A (ja) | 2003-11-17 | 2003-11-17 | 接着剤塗布装置とそれを用いた半導体チップの実装方法 |
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JP2003386617A JP2005150445A (ja) | 2003-11-17 | 2003-11-17 | 接着剤塗布装置とそれを用いた半導体チップの実装方法 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2007043152A1 (ja) * | 2005-10-06 | 2009-04-16 | 富士通マイクロエレクトロニクス株式会社 | 半導体装置及びその製造方法 |
JP2012127781A (ja) * | 2010-12-15 | 2012-07-05 | Denso Corp | 力学量センサ |
-
2003
- 2003-11-17 JP JP2003386617A patent/JP2005150445A/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2007043152A1 (ja) * | 2005-10-06 | 2009-04-16 | 富士通マイクロエレクトロニクス株式会社 | 半導体装置及びその製造方法 |
JP4695148B2 (ja) * | 2005-10-06 | 2011-06-08 | 富士通セミコンダクター株式会社 | 半導体装置及びその製造方法 |
JP2012127781A (ja) * | 2010-12-15 | 2012-07-05 | Denso Corp | 力学量センサ |
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