JP2005141158A - 照明光学系及び露光装置 - Google Patents

照明光学系及び露光装置 Download PDF

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Publication number
JP2005141158A
JP2005141158A JP2003380075A JP2003380075A JP2005141158A JP 2005141158 A JP2005141158 A JP 2005141158A JP 2003380075 A JP2003380075 A JP 2003380075A JP 2003380075 A JP2003380075 A JP 2003380075A JP 2005141158 A JP2005141158 A JP 2005141158A
Authority
JP
Japan
Prior art keywords
mirror
optical system
light
illumination optical
light source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2003380075A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005141158A5 (enExample
Inventor
Toshihiko Tsuji
俊彦 辻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2003380075A priority Critical patent/JP2005141158A/ja
Priority to US10/980,341 priority patent/US20050105290A1/en
Priority to TW093133867A priority patent/TWI270120B/zh
Priority to EP04026463A priority patent/EP1530087A3/en
Priority to KR1020040090676A priority patent/KR20050045849A/ko
Publication of JP2005141158A publication Critical patent/JP2005141158A/ja
Publication of JP2005141158A5 publication Critical patent/JP2005141158A5/ja
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70225—Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70075—Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/702—Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Light Sources And Details Of Projection-Printing Devices (AREA)
  • Microscoopes, Condenser (AREA)
  • Lenses (AREA)
JP2003380075A 2003-11-10 2003-11-10 照明光学系及び露光装置 Withdrawn JP2005141158A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2003380075A JP2005141158A (ja) 2003-11-10 2003-11-10 照明光学系及び露光装置
US10/980,341 US20050105290A1 (en) 2003-11-10 2004-11-04 Illumination optical system and exposure apparatus
TW093133867A TWI270120B (en) 2003-11-10 2004-11-05 Illumination optical system and exposure apparatus
EP04026463A EP1530087A3 (en) 2003-11-10 2004-11-08 Illumination optical system and exposure apparatus
KR1020040090676A KR20050045849A (ko) 2003-11-10 2004-11-09 조명광학계 및 노광장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003380075A JP2005141158A (ja) 2003-11-10 2003-11-10 照明光学系及び露光装置

Publications (2)

Publication Number Publication Date
JP2005141158A true JP2005141158A (ja) 2005-06-02
JP2005141158A5 JP2005141158A5 (enExample) 2006-12-14

Family

ID=34431393

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003380075A Withdrawn JP2005141158A (ja) 2003-11-10 2003-11-10 照明光学系及び露光装置

Country Status (5)

Country Link
US (1) US20050105290A1 (enExample)
EP (1) EP1530087A3 (enExample)
JP (1) JP2005141158A (enExample)
KR (1) KR20050045849A (enExample)
TW (1) TWI270120B (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008098527A (ja) * 2006-10-13 2008-04-24 Canon Inc 露光装置
JP2009032938A (ja) * 2007-07-27 2009-02-12 Canon Inc 照明光学系及びそれを有する露光装置
JP2009206227A (ja) * 2008-02-27 2009-09-10 Canon Inc 照明光学系およびこれを用いた投影露光装置
JP2010502003A (ja) * 2006-08-24 2010-01-21 カール・ツァイス・エスエムティー・アーゲー マイクロリソグラフィ投影露光装置のための照明システム
JP2010062281A (ja) * 2008-09-03 2010-03-18 Canon Inc 照明光学系及び露光装置

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005235959A (ja) * 2004-02-18 2005-09-02 Canon Inc 光発生装置及び露光装置
TWI417649B (zh) * 2005-12-28 2013-12-01 尼康股份有限公司 十字標記運送裝置、曝光裝置、十字標記運送方法以及十字標記的處理方法
US7470033B2 (en) * 2006-03-24 2008-12-30 Nikon Corporation Reflection-type projection-optical systems, and exposure apparatus comprising same
TWI303115B (en) 2006-04-13 2008-11-11 Epistar Corp Semiconductor light emitting device
ATE489839T1 (de) 2006-05-16 2010-12-15 Koninkl Philips Electronics Nv Verfahren zur erhöhung der umwandlungseffizienz einer euv- und/oder weichen röntgenstrahlenlampe und entsprechendes gerät
CN100510970C (zh) * 2006-07-19 2009-07-08 东元电机股份有限公司 X光曝光机
JP5534910B2 (ja) * 2009-04-23 2014-07-02 ギガフォトン株式会社 極端紫外光源装置
DE102017219179B3 (de) * 2017-10-26 2018-12-27 Carl Zeiss Smt Gmbh Verfahren zum Wiedererstellen eines Beleuchtungssystems für eine EUV-Anlage, Detektormodul sowie Verfahren zum Überwachen eines in einer EUV-Anlage eingebauten Beleuchtungssystems
CN107870417B (zh) * 2017-11-08 2020-12-22 北京仿真中心 一种背景辐射可控的红外点源目标模拟器

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5486919A (en) * 1992-04-27 1996-01-23 Canon Kabushiki Kaisha Inspection method and apparatus for inspecting a particle, if any, on a substrate having a pattern
US5861952A (en) * 1992-11-16 1999-01-19 Canon Kabushiki Kaisha Optical inspection method and apparatus including intensity modulation of a light beam and detection of light scattered at an inspection position
JP3211538B2 (ja) * 1994-01-13 2001-09-25 キヤノン株式会社 検査装置及びそれを用いた半導体デバイスの製造方法
JPH07209202A (ja) * 1994-01-21 1995-08-11 Canon Inc 表面状態検査装置、該表面状態検査装置を備える露光装置及び該露光装置を用いてデバイスを製造する方法
JP3183046B2 (ja) * 1994-06-06 2001-07-03 キヤノン株式会社 異物検査装置及びそれを用いた半導体デバイスの製造方法
JPH0815169A (ja) * 1994-06-28 1996-01-19 Canon Inc 異物検査装置及びそれを用いた半導体デバイスの製造 方法
JPH09320952A (ja) * 1996-05-29 1997-12-12 Nikon Corp 露光装置
JP3706691B2 (ja) * 1996-08-26 2005-10-12 キヤノン株式会社 Ｘ線縮小投影露光装置及びこれを用いた半導体デバイス製造方法
JP3005203B2 (ja) * 1997-03-24 2000-01-31 キヤノン株式会社 照明装置、露光装置及びデバイス製造方法
US6398374B1 (en) * 1998-12-31 2002-06-04 The Regents Of The University Of California Condenser for ring-field deep ultraviolet and extreme ultraviolet lithography
US6392742B1 (en) * 1999-06-01 2002-05-21 Canon Kabushiki Kaisha Illumination system and projection exposure apparatus
JP3919419B2 (ja) * 2000-03-30 2007-05-23 キヤノン株式会社 照明装置及びそれを有する露光装置
DE10134387A1 (de) * 2001-07-14 2003-01-23 Zeiss Carl Optisches System mit mehreren optischen Elementen
US6919951B2 (en) * 2001-07-27 2005-07-19 Canon Kabushiki Kaisha Illumination system, projection exposure apparatus and device manufacturing method
JPWO2003050857A1 (ja) * 2001-12-12 2005-04-21 株式会社ニコン 反射型照明光学素子、反射型照明光学系、及びｄｕｖ〜ｅｕｖ光露光装置
JP3564104B2 (ja) * 2002-01-29 2004-09-08 キヤノン株式会社 露光装置及びその制御方法、これを用いたデバイスの製造方法
JP3720788B2 (ja) * 2002-04-15 2005-11-30 キヤノン株式会社 投影露光装置及びデバイス製造方法

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010502003A (ja) * 2006-08-24 2010-01-21 カール・ツァイス・エスエムティー・アーゲー マイクロリソグラフィ投影露光装置のための照明システム
JP2008098527A (ja) * 2006-10-13 2008-04-24 Canon Inc 露光装置
KR100917418B1 (ko) * 2006-10-13 2009-09-14 캐논 가부시끼가이샤 노광장치
US7714987B2 (en) 2006-10-13 2010-05-11 Canon Kabushiki Kaisha Exposure apparatus
JP2009032938A (ja) * 2007-07-27 2009-02-12 Canon Inc 照明光学系及びそれを有する露光装置
US7538856B2 (en) 2007-07-27 2009-05-26 Canon Kabushiki Kaisha Illumination optical system and exposure apparatus including the same
KR100987033B1 (ko) * 2007-07-27 2010-10-11 캐논 가부시끼가이샤 조명 광학계 및 그것을 포함한 노광장치
JP2009206227A (ja) * 2008-02-27 2009-09-10 Canon Inc 照明光学系およびこれを用いた投影露光装置
JP2010062281A (ja) * 2008-09-03 2010-03-18 Canon Inc 照明光学系及び露光装置
US8284378B2 (en) 2008-09-03 2012-10-09 Canon Kabushiki Kaisha Illumination optical system and exposure apparatus

Also Published As

Publication number Publication date
TWI270120B (en) 2007-01-01
KR20050045849A (ko) 2005-05-17
EP1530087A2 (en) 2005-05-11
EP1530087A3 (en) 2006-01-04
TW200520055A (en) 2005-06-16
US20050105290A1 (en) 2005-05-19

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