JP2005128028A5 - - Google Patents

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Publication number
JP2005128028A5
JP2005128028A5 JP2004362951A JP2004362951A JP2005128028A5 JP 2005128028 A5 JP2005128028 A5 JP 2005128028A5 JP 2004362951 A JP2004362951 A JP 2004362951A JP 2004362951 A JP2004362951 A JP 2004362951A JP 2005128028 A5 JP2005128028 A5 JP 2005128028A5
Authority
JP
Japan
Prior art keywords
electrode
sheet
frame plate
probe
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004362951A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005128028A (ja
JP3781048B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004362951A priority Critical patent/JP3781048B2/ja
Priority claimed from JP2004362951A external-priority patent/JP3781048B2/ja
Publication of JP2005128028A publication Critical patent/JP2005128028A/ja
Publication of JP2005128028A5 publication Critical patent/JP2005128028A5/ja
Application granted granted Critical
Publication of JP3781048B2 publication Critical patent/JP3781048B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2004362951A 2003-05-13 2004-12-15 シート状プローブおよびその応用 Expired - Fee Related JP3781048B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004362951A JP3781048B2 (ja) 2003-05-13 2004-12-15 シート状プローブおよびその応用

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003134450 2003-05-13
JP2004362951A JP3781048B2 (ja) 2003-05-13 2004-12-15 シート状プローブおよびその応用

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2004131764A Division JP3649245B2 (ja) 2003-05-13 2004-04-27 シート状プローブの製造方法

Publications (3)

Publication Number Publication Date
JP2005128028A JP2005128028A (ja) 2005-05-19
JP2005128028A5 true JP2005128028A5 (enrdf_load_stackoverflow) 2005-09-29
JP3781048B2 JP3781048B2 (ja) 2006-05-31

Family

ID=34655468

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004362951A Expired - Fee Related JP3781048B2 (ja) 2003-05-13 2004-12-15 シート状プローブおよびその応用

Country Status (1)

Country Link
JP (1) JP3781048B2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200624817A (en) * 2004-11-11 2006-07-16 Jsr Corp Sheet-form probe, probe card, and wafer inspection method
WO2006051878A1 (ja) * 2004-11-11 2006-05-18 Jsr Corporation シート状プローブおよびプローブカードならびにウエハの検査方法

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