JP2004361395A5 - - Google Patents
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- Publication number
- JP2004361395A5 JP2004361395A5 JP2004131764A JP2004131764A JP2004361395A5 JP 2004361395 A5 JP2004361395 A5 JP 2004361395A5 JP 2004131764 A JP2004131764 A JP 2004131764A JP 2004131764 A JP2004131764 A JP 2004131764A JP 2004361395 A5 JP2004361395 A5 JP 2004361395A5
- Authority
- JP
- Japan
- Prior art keywords
- forming
- electrode
- insulating film
- frame plate
- sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002184 metal Substances 0.000 claims 16
- 239000011347 resin Substances 0.000 claims 9
- 229920005989 resin Polymers 0.000 claims 9
- 238000000034 method Methods 0.000 claims 7
- 230000015572 biosynthetic process Effects 0.000 claims 6
- 238000004519 manufacturing process Methods 0.000 claims 6
- 239000000523 sample Substances 0.000 claims 6
- 238000005530 etching Methods 0.000 claims 3
- 230000000149 penetrating effect Effects 0.000 claims 3
- 238000007747 plating Methods 0.000 claims 3
- 230000002093 peripheral effect Effects 0.000 claims 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004131764A JP3649245B2 (ja) | 2003-05-13 | 2004-04-27 | シート状プローブの製造方法 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003134450 | 2003-05-13 | ||
| JP2004131764A JP3649245B2 (ja) | 2003-05-13 | 2004-04-27 | シート状プローブの製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004362951A Division JP3781048B2 (ja) | 2003-05-13 | 2004-12-15 | シート状プローブおよびその応用 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004361395A JP2004361395A (ja) | 2004-12-24 |
| JP3649245B2 JP3649245B2 (ja) | 2005-05-18 |
| JP2004361395A5 true JP2004361395A5 (enrdf_load_stackoverflow) | 2005-06-30 |
Family
ID=34067169
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004131764A Expired - Fee Related JP3649245B2 (ja) | 2003-05-13 | 2004-04-27 | シート状プローブの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3649245B2 (enrdf_load_stackoverflow) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005103730A1 (ja) * | 2004-04-27 | 2005-11-03 | Jsr Corporation | シート状プローブおよびその製造方法並びにその応用 |
| EP1806589A4 (en) * | 2004-10-29 | 2012-02-29 | Jsr Corp | SONDER TO WAFER INSPECTION, WAFER INSPECTION SAMPLE CARD AND WAFER INSPECTION DEVICES |
| US20070268032A1 (en) * | 2004-11-12 | 2007-11-22 | Jsr Corporation | Probe Member for Wafer Inspection, Probe Card for Wafer Inspection and Wafer Inspection Apparatus |
| JP2006237242A (ja) * | 2005-02-24 | 2006-09-07 | Jsr Corp | ウエハ検査用プローブカードおよびウエハ検査装置 |
| JP2008089377A (ja) * | 2006-09-29 | 2008-04-17 | Jsr Corp | シート状プローブおよびその製造方法ならびにその応用 |
| KR200445395Y1 (ko) * | 2007-08-13 | 2009-07-27 | 주식회사 아이에스시테크놀러지 | 도전성 콘택터 |
| JP5112496B2 (ja) * | 2010-10-29 | 2013-01-09 | 日本航空電子工業株式会社 | Ｉｃソケット |
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2004
- 2004-04-27 JP JP2004131764A patent/JP3649245B2/ja not_active Expired - Fee Related