JP2005114881A5 - - Google Patents

Download PDF

Info

Publication number
JP2005114881A5
JP2005114881A5 JP2003346573A JP2003346573A JP2005114881A5 JP 2005114881 A5 JP2005114881 A5 JP 2005114881A5 JP 2003346573 A JP2003346573 A JP 2003346573A JP 2003346573 A JP2003346573 A JP 2003346573A JP 2005114881 A5 JP2005114881 A5 JP 2005114881A5
Authority
JP
Japan
Prior art keywords
lens group
optical system
projection optical
lens
refractive power
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2003346573A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005114881A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2003346573A priority Critical patent/JP2005114881A/ja
Priority claimed from JP2003346573A external-priority patent/JP2005114881A/ja
Publication of JP2005114881A publication Critical patent/JP2005114881A/ja
Publication of JP2005114881A5 publication Critical patent/JP2005114881A5/ja
Withdrawn legal-status Critical Current

Links

JP2003346573A 2003-10-06 2003-10-06 投影光学系、露光装置、および露光方法 Withdrawn JP2005114881A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003346573A JP2005114881A (ja) 2003-10-06 2003-10-06 投影光学系、露光装置、および露光方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003346573A JP2005114881A (ja) 2003-10-06 2003-10-06 投影光学系、露光装置、および露光方法

Publications (2)

Publication Number Publication Date
JP2005114881A JP2005114881A (ja) 2005-04-28
JP2005114881A5 true JP2005114881A5 (enExample) 2008-02-28

Family

ID=34539455

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003346573A Withdrawn JP2005114881A (ja) 2003-10-06 2003-10-06 投影光学系、露光装置、および露光方法

Country Status (1)

Country Link
JP (1) JP2005114881A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7869122B2 (en) 2004-01-14 2011-01-11 Carl Zeiss Smt Ag Catadioptric projection objective
US8199400B2 (en) 2004-01-14 2012-06-12 Carl Zeiss Smt Gmbh Catadioptric projection objective

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1690139B1 (en) * 2003-12-02 2009-01-14 Carl Zeiss SMT AG Projection optical system
JP5201435B2 (ja) 2004-03-30 2013-06-05 株式会社ニコン 光学系
JP4433390B2 (ja) 2004-03-30 2010-03-17 株式会社ニコン 反射防止膜並びにこの反射防止膜を有する光学素子及び光学系
KR20170129271A (ko) 2004-05-17 2017-11-24 칼 짜이스 에스엠티 게엠베하 중간이미지를 갖는 카타디옵트릭 투사 대물렌즈
JP5253081B2 (ja) 2008-10-14 2013-07-31 キヤノン株式会社 投影光学系、露光装置及びデバイスの製造方法
CN113835209B (zh) * 2021-11-19 2024-04-26 中导光电设备股份有限公司 一种大视场duv物镜

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7869122B2 (en) 2004-01-14 2011-01-11 Carl Zeiss Smt Ag Catadioptric projection objective
US8199400B2 (en) 2004-01-14 2012-06-12 Carl Zeiss Smt Gmbh Catadioptric projection objective
US8208198B2 (en) 2004-01-14 2012-06-26 Carl Zeiss Smt Gmbh Catadioptric projection objective
US8208199B2 (en) 2004-01-14 2012-06-26 Carl Zeiss Smt Gmbh Catadioptric projection objective
US8289619B2 (en) 2004-01-14 2012-10-16 Carl Zeiss Smt Gmbh Catadioptric projection objective
US8339701B2 (en) 2004-01-14 2012-12-25 Carl Zeiss Smt Gmbh Catadioptric projection objective
US8355201B2 (en) 2004-01-14 2013-01-15 Carl Zeiss Smt Gmbh Catadioptric projection objective
US8416490B2 (en) 2004-01-14 2013-04-09 Carl Zeiss Smt Gmbh Catadioptric projection objective
US8730572B2 (en) 2004-01-14 2014-05-20 Carl Zeiss Smt Gmbh Catadioptric projection objective
US8804234B2 (en) 2004-01-14 2014-08-12 Carl Zeiss Smt Gmbh Catadioptric projection objective including an aspherized plate

Similar Documents

Publication Publication Date Title
JP2005519332A5 (enExample)
JP2005519348A5 (enExample)
JPH10115779A5 (ja) 投影光学系、露光装置及び露光方法
EP1884815A3 (en) Fixed-focal objective of the retrofocus type for projector
JP2004522187A5 (enExample)
ATE507498T1 (de) Abbildungslinse
JPH116957A (ja) 投影光学系および投影露光装置並びに投影露光方法
JPH1054936A5 (enExample)
EP1245984A3 (en) A projection optical system, a projection exposure apparatus, and a projection exposure method
KR970071147A (ko) 투영 광학계 및 노광 장치
JP4683944B2 (ja) 投写用レンズシステムおよびプロジェクタ装置
JP2009186569A5 (enExample)
KR960024688A (ko) 노광 장치
JPH1197347A5 (ja) 投影光学系、投影露光装置、及びパターン転写方法
KR960035158A (ko) 노광 장치
JPH10161021A5 (enExample)
JP5102069B2 (ja) 投写レンズおよびこれを用いた投写型表示装置
JP2008268613A5 (enExample)
JP2005114881A5 (enExample)
JP2008519433A5 (enExample)
JP2007316146A5 (enExample)
JP2000275522A5 (enExample)
JP2001356268A5 (enExample)
JP2007513372A5 (enExample)
JP2002244035A5 (enExample)