JP2005114731A - 後方照射を有する半導体放射線撮像装置 - Google Patents
後方照射を有する半導体放射線撮像装置 Download PDFInfo
- Publication number
- JP2005114731A JP2005114731A JP2004292258A JP2004292258A JP2005114731A JP 2005114731 A JP2005114731 A JP 2005114731A JP 2004292258 A JP2004292258 A JP 2004292258A JP 2004292258 A JP2004292258 A JP 2004292258A JP 2005114731 A JP2005114731 A JP 2005114731A
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- Prior art keywords
- scintillator material
- ray
- photosensitive elements
- disposed
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000463 material Substances 0.000 claims abstract description 134
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- 239000011521 glass Substances 0.000 claims description 13
- 230000005540 biological transmission Effects 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
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- 229920000642 polymer Polymers 0.000 description 6
- 230000002792 vascular Effects 0.000 description 6
- XQPRBTXUXXVTKB-UHFFFAOYSA-M caesium iodide Chemical compound [I-].[Cs+] XQPRBTXUXXVTKB-UHFFFAOYSA-M 0.000 description 5
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
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- 238000012546 transfer Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 206010073306 Exposure to radiation Diseases 0.000 description 2
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- 238000002834 transmittance Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
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- 238000004458 analytical method Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
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- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 229910052760 oxygen Inorganic materials 0.000 description 1
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Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/2018—Scintillation-photodiode combinations
- G01T1/20187—Position of the scintillator with respect to the photodiode, e.g. photodiode surrounding the crystal, the crystal surrounding the photodiode, shape or size of the scintillator
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/2018—Scintillation-photodiode combinations
- G01T1/20188—Auxiliary details, e.g. casings or cooling
- G01T1/2019—Shielding against direct hits
Landscapes
- Spectroscopy & Molecular Physics (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- High Energy & Nuclear Physics (AREA)
- Molecular Biology (AREA)
- Health & Medical Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Measurement Of Radiation (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Light Receiving Elements (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/681,767 US7019304B2 (en) | 2003-10-06 | 2003-10-06 | Solid-state radiation imager with back-side irradiation |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005114731A true JP2005114731A (ja) | 2005-04-28 |
| JP2005114731A5 JP2005114731A5 (enExample) | 2007-11-15 |
Family
ID=34377590
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004292258A Pending JP2005114731A (ja) | 2003-10-06 | 2004-10-05 | 後方照射を有する半導体放射線撮像装置 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US7019304B2 (enExample) |
| JP (1) | JP2005114731A (enExample) |
| DE (1) | DE102004048756A1 (enExample) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010029876A1 (ja) * | 2008-09-11 | 2010-03-18 | 富士フイルム株式会社 | 固体撮像装置の製造方法 |
| JP2010237162A (ja) * | 2009-03-31 | 2010-10-21 | Fujifilm Corp | 放射線検出装置 |
| JP2011017683A (ja) * | 2009-07-10 | 2011-01-27 | Fujifilm Corp | 放射線画像検出器及びその製造方法 |
| JP2011155231A (ja) * | 2010-01-28 | 2011-08-11 | Fujifilm Corp | 放射線画像検出器及びその製造方法、並びに保護部材 |
Families Citing this family (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4220819B2 (ja) * | 2003-03-27 | 2009-02-04 | 浜松ホトニクス株式会社 | 放射線検出器 |
| US7412024B1 (en) | 2004-04-09 | 2008-08-12 | Xradia, Inc. | X-ray mammography |
| US7286640B2 (en) * | 2004-04-09 | 2007-10-23 | Xradia, Inc. | Dual-band detector system for x-ray imaging of biological samples |
| CN101346649B (zh) * | 2005-12-23 | 2010-09-01 | 3M创新有限公司 | 包含热塑性有机硅嵌段共聚物的膜 |
| KR101309394B1 (ko) * | 2005-12-23 | 2013-09-17 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 열가소성 실리콘 블록 공중합체를 포함하는 다층 필름 |
| US7772558B1 (en) * | 2006-03-29 | 2010-08-10 | Radiation Monitoring Devices, Inc. | Multi-layer radiation detector and related methods |
| DE102006038969B4 (de) * | 2006-08-21 | 2013-02-28 | Siemens Aktiengesellschaft | Röntgenkonverterelement und Verfahren zu dessen Herstellung |
| JP4894453B2 (ja) * | 2006-10-25 | 2012-03-14 | コニカミノルタエムジー株式会社 | 放射線画像検出器 |
| JP2008139064A (ja) * | 2006-11-30 | 2008-06-19 | Konica Minolta Medical & Graphic Inc | シンチレータパネルの製造方法、シンチレータパネル及び真空蒸着装置 |
| US7687790B2 (en) * | 2007-06-07 | 2010-03-30 | General Electric Company | EMI shielding of digital x-ray detectors with non-metallic enclosures |
| US7723687B2 (en) * | 2007-07-03 | 2010-05-25 | Radiation Monitoring Devices, Inc. | Lanthanide halide microcolumnar scintillators |
| DE102009024225A1 (de) * | 2009-06-08 | 2010-12-16 | Siemens Aktiengesellschaft | Röntgendetektor |
| FR2948379B1 (fr) | 2009-07-21 | 2011-08-19 | Saint Gobain Cristaux Et Detecteurs | Scintillateur en halogenure de terre rare revetu d'un absorbeur ou reflecteur de lumiere |
| US8710853B2 (en) * | 2010-08-31 | 2014-04-29 | Infineon Technologies Ag | Capacitance sensing |
| JP5485860B2 (ja) * | 2010-11-18 | 2014-05-07 | 富士フイルム株式会社 | 放射線画像撮影装置 |
| KR101195415B1 (ko) * | 2010-12-29 | 2012-10-29 | 포항공과대학교 산학협력단 | 원자층 증착을 이용한 엑스선(Xray)/감마선(γray)집속 광학계의 제조방법 |
| JP5792472B2 (ja) | 2011-01-25 | 2015-10-14 | 浜松ホトニクス株式会社 | 放射線画像取得装置 |
| EP2689269B1 (en) | 2011-03-24 | 2015-05-13 | Koninklijke Philips N.V. | Production of a spectral imaging detector |
| JP5944254B2 (ja) | 2012-07-20 | 2016-07-05 | 浜松ホトニクス株式会社 | 放射線画像取得装置 |
| JP6277721B2 (ja) * | 2012-11-01 | 2018-02-14 | 東レ株式会社 | 放射線検出装置およびその製造方法 |
| US9702986B2 (en) * | 2013-05-24 | 2017-07-11 | Teledyne Dalsa B.V. | Moisture protection structure for a device and a fabrication method thereof |
| KR102529855B1 (ko) * | 2015-09-30 | 2023-05-09 | 하마마츠 포토닉스 가부시키가이샤 | 방사선 화상 취득 시스템 및 방사선 화상 취득 방법 |
| JP2018009803A (ja) * | 2016-07-11 | 2018-01-18 | コニカミノルタ株式会社 | シンチレータパネル |
| WO2019226859A1 (en) | 2018-05-23 | 2019-11-28 | The Research Foundation For The State University Of New York | Flat panel x-ray imager with scintillating glass substrate |
| JP7325295B2 (ja) * | 2019-10-24 | 2023-08-14 | 浜松ホトニクス株式会社 | シンチレータパネル、放射線検出器、シンチレータパネルの製造方法、及び、放射線検出器の製造方法 |
| CN212696098U (zh) * | 2020-06-22 | 2021-03-12 | 上海耕岩智能科技有限公司 | 图像传感器及电子设备 |
| KR20230109134A (ko) * | 2020-11-25 | 2023-07-19 | 하마마츠 포토닉스 가부시키가이샤 | 촬상 유닛 및 촬상 시스템 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5083031A (en) * | 1986-08-19 | 1992-01-21 | International Sensor Technology, Inc. | Radiation dosimeters |
| EP0562143B1 (en) * | 1992-03-27 | 1997-06-25 | Nichia Kagaku Kogyo K.K. | Solid-state image converting device |
| US5686733A (en) * | 1996-03-29 | 1997-11-11 | Mcgill University | Megavoltage imaging method using a combination of a photoreceptor with a high energy photon converter and intensifier |
| CA2184667C (en) * | 1996-09-03 | 2000-06-20 | Bradley Trent Polischuk | Multilayer plate for x-ray imaging and method of producing same |
| US6031234A (en) * | 1997-12-08 | 2000-02-29 | General Electric Company | High resolution radiation imager |
| US6060714A (en) * | 1998-01-23 | 2000-05-09 | Ois Optical Imaging Systems, Inc. | Large area imager with photo-imageable interface barrier layer |
| US6541774B1 (en) * | 2000-11-03 | 2003-04-01 | General Electric Company | Radiation imager cover |
| US6784433B2 (en) * | 2001-07-16 | 2004-08-31 | Edge Medical Devices Ltd. | High resolution detector for X-ray imaging |
| US6895077B2 (en) * | 2001-11-21 | 2005-05-17 | University Of Massachusetts Medical Center | System and method for x-ray fluoroscopic imaging |
| US7122804B2 (en) | 2002-02-15 | 2006-10-17 | Varian Medical Systems Technologies, Inc. | X-ray imaging device |
-
2003
- 2003-10-06 US US10/681,767 patent/US7019304B2/en not_active Expired - Lifetime
-
2004
- 2004-10-05 JP JP2004292258A patent/JP2005114731A/ja active Pending
- 2004-10-05 DE DE102004048756A patent/DE102004048756A1/de not_active Withdrawn
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010029876A1 (ja) * | 2008-09-11 | 2010-03-18 | 富士フイルム株式会社 | 固体撮像装置の製造方法 |
| JP2010067836A (ja) * | 2008-09-11 | 2010-03-25 | Fujifilm Corp | 固体撮像装置の製造方法 |
| US8772070B2 (en) | 2008-09-11 | 2014-07-08 | Fujifilm Corporation | Method for manufacturing solid-state imaging device |
| JP2010237162A (ja) * | 2009-03-31 | 2010-10-21 | Fujifilm Corp | 放射線検出装置 |
| JP2011017683A (ja) * | 2009-07-10 | 2011-01-27 | Fujifilm Corp | 放射線画像検出器及びその製造方法 |
| US8049177B2 (en) | 2009-07-10 | 2011-11-01 | Fujifilm Corporation | Radiation image detection apparatus and manufacturing method of the same |
| JP2011155231A (ja) * | 2010-01-28 | 2011-08-11 | Fujifilm Corp | 放射線画像検出器及びその製造方法、並びに保護部材 |
| US8647965B2 (en) | 2010-01-28 | 2014-02-11 | Fujifilm Corporation | Radiographic image detector, method of producing the same, and protective member |
Also Published As
| Publication number | Publication date |
|---|---|
| US7019304B2 (en) | 2006-03-28 |
| US20050072931A1 (en) | 2005-04-07 |
| DE102004048756A1 (de) | 2005-04-21 |
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