JP2005114731A - 後方照射を有する半導体放射線撮像装置 - Google Patents

後方照射を有する半導体放射線撮像装置 Download PDF

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Publication number
JP2005114731A
JP2005114731A JP2004292258A JP2004292258A JP2005114731A JP 2005114731 A JP2005114731 A JP 2005114731A JP 2004292258 A JP2004292258 A JP 2004292258A JP 2004292258 A JP2004292258 A JP 2004292258A JP 2005114731 A JP2005114731 A JP 2005114731A
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JP
Japan
Prior art keywords
scintillator material
ray
photosensitive elements
disposed
substrate
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Pending
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JP2004292258A
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English (en)
Japanese (ja)
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JP2005114731A5 (enExample
Inventor
Douglas Albagli
ダグラス・アルバグリー
Joseph John Shiang
ジョセフ・ジョン・シアン
George Edward Possin
ジョージ・エドワード・ポッシン
William Andrew Hennessy
ウィリアム・アンドリュー・ヘネシー
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General Electric Co
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General Electric Co
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Application filed by General Electric Co filed Critical General Electric Co
Publication of JP2005114731A publication Critical patent/JP2005114731A/ja
Publication of JP2005114731A5 publication Critical patent/JP2005114731A5/ja
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01TMEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16Measuring radiation intensity
    • G01T1/20Measuring radiation intensity with scintillation detectors
    • G01T1/2018Scintillation-photodiode combinations
    • G01T1/20187Position of the scintillator with respect to the photodiode, e.g. photodiode surrounding the crystal, the crystal surrounding the photodiode, shape or size of the scintillator
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01TMEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16Measuring radiation intensity
    • G01T1/20Measuring radiation intensity with scintillation detectors
    • G01T1/2018Scintillation-photodiode combinations
    • G01T1/20188Auxiliary details, e.g. casings or cooling
    • G01T1/2019Shielding against direct hits

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  • Spectroscopy & Molecular Physics (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Health & Medical Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Measurement Of Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Light Receiving Elements (AREA)
JP2004292258A 2003-10-06 2004-10-05 後方照射を有する半導体放射線撮像装置 Pending JP2005114731A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/681,767 US7019304B2 (en) 2003-10-06 2003-10-06 Solid-state radiation imager with back-side irradiation

Publications (2)

Publication Number Publication Date
JP2005114731A true JP2005114731A (ja) 2005-04-28
JP2005114731A5 JP2005114731A5 (enExample) 2007-11-15

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ID=34377590

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004292258A Pending JP2005114731A (ja) 2003-10-06 2004-10-05 後方照射を有する半導体放射線撮像装置

Country Status (3)

Country Link
US (1) US7019304B2 (enExample)
JP (1) JP2005114731A (enExample)
DE (1) DE102004048756A1 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010029876A1 (ja) * 2008-09-11 2010-03-18 富士フイルム株式会社 固体撮像装置の製造方法
JP2010237162A (ja) * 2009-03-31 2010-10-21 Fujifilm Corp 放射線検出装置
JP2011017683A (ja) * 2009-07-10 2011-01-27 Fujifilm Corp 放射線画像検出器及びその製造方法
JP2011155231A (ja) * 2010-01-28 2011-08-11 Fujifilm Corp 放射線画像検出器及びその製造方法、並びに保護部材

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4220819B2 (ja) * 2003-03-27 2009-02-04 浜松ホトニクス株式会社 放射線検出器
US7412024B1 (en) 2004-04-09 2008-08-12 Xradia, Inc. X-ray mammography
US7286640B2 (en) * 2004-04-09 2007-10-23 Xradia, Inc. Dual-band detector system for x-ray imaging of biological samples
CN101346649B (zh) * 2005-12-23 2010-09-01 3M创新有限公司 包含热塑性有机硅嵌段共聚物的膜
KR101309394B1 (ko) * 2005-12-23 2013-09-17 쓰리엠 이노베이티브 프로퍼티즈 컴파니 열가소성 실리콘 블록 공중합체를 포함하는 다층 필름
US7772558B1 (en) * 2006-03-29 2010-08-10 Radiation Monitoring Devices, Inc. Multi-layer radiation detector and related methods
DE102006038969B4 (de) * 2006-08-21 2013-02-28 Siemens Aktiengesellschaft Röntgenkonverterelement und Verfahren zu dessen Herstellung
JP4894453B2 (ja) * 2006-10-25 2012-03-14 コニカミノルタエムジー株式会社 放射線画像検出器
JP2008139064A (ja) * 2006-11-30 2008-06-19 Konica Minolta Medical & Graphic Inc シンチレータパネルの製造方法、シンチレータパネル及び真空蒸着装置
US7687790B2 (en) * 2007-06-07 2010-03-30 General Electric Company EMI shielding of digital x-ray detectors with non-metallic enclosures
US7723687B2 (en) * 2007-07-03 2010-05-25 Radiation Monitoring Devices, Inc. Lanthanide halide microcolumnar scintillators
DE102009024225A1 (de) * 2009-06-08 2010-12-16 Siemens Aktiengesellschaft Röntgendetektor
FR2948379B1 (fr) 2009-07-21 2011-08-19 Saint Gobain Cristaux Et Detecteurs Scintillateur en halogenure de terre rare revetu d'un absorbeur ou reflecteur de lumiere
US8710853B2 (en) * 2010-08-31 2014-04-29 Infineon Technologies Ag Capacitance sensing
JP5485860B2 (ja) * 2010-11-18 2014-05-07 富士フイルム株式会社 放射線画像撮影装置
KR101195415B1 (ko) * 2010-12-29 2012-10-29 포항공과대학교 산학협력단 원자층 증착을 이용한 엑스선(X­ray)/감마선(γ­ray)집속 광학계의 제조방법
JP5792472B2 (ja) 2011-01-25 2015-10-14 浜松ホトニクス株式会社 放射線画像取得装置
EP2689269B1 (en) 2011-03-24 2015-05-13 Koninklijke Philips N.V. Production of a spectral imaging detector
JP5944254B2 (ja) 2012-07-20 2016-07-05 浜松ホトニクス株式会社 放射線画像取得装置
JP6277721B2 (ja) * 2012-11-01 2018-02-14 東レ株式会社 放射線検出装置およびその製造方法
US9702986B2 (en) * 2013-05-24 2017-07-11 Teledyne Dalsa B.V. Moisture protection structure for a device and a fabrication method thereof
KR102529855B1 (ko) * 2015-09-30 2023-05-09 하마마츠 포토닉스 가부시키가이샤 방사선 화상 취득 시스템 및 방사선 화상 취득 방법
JP2018009803A (ja) * 2016-07-11 2018-01-18 コニカミノルタ株式会社 シンチレータパネル
WO2019226859A1 (en) 2018-05-23 2019-11-28 The Research Foundation For The State University Of New York Flat panel x-ray imager with scintillating glass substrate
JP7325295B2 (ja) * 2019-10-24 2023-08-14 浜松ホトニクス株式会社 シンチレータパネル、放射線検出器、シンチレータパネルの製造方法、及び、放射線検出器の製造方法
CN212696098U (zh) * 2020-06-22 2021-03-12 上海耕岩智能科技有限公司 图像传感器及电子设备
KR20230109134A (ko) * 2020-11-25 2023-07-19 하마마츠 포토닉스 가부시키가이샤 촬상 유닛 및 촬상 시스템

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5083031A (en) * 1986-08-19 1992-01-21 International Sensor Technology, Inc. Radiation dosimeters
EP0562143B1 (en) * 1992-03-27 1997-06-25 Nichia Kagaku Kogyo K.K. Solid-state image converting device
US5686733A (en) * 1996-03-29 1997-11-11 Mcgill University Megavoltage imaging method using a combination of a photoreceptor with a high energy photon converter and intensifier
CA2184667C (en) * 1996-09-03 2000-06-20 Bradley Trent Polischuk Multilayer plate for x-ray imaging and method of producing same
US6031234A (en) * 1997-12-08 2000-02-29 General Electric Company High resolution radiation imager
US6060714A (en) * 1998-01-23 2000-05-09 Ois Optical Imaging Systems, Inc. Large area imager with photo-imageable interface barrier layer
US6541774B1 (en) * 2000-11-03 2003-04-01 General Electric Company Radiation imager cover
US6784433B2 (en) * 2001-07-16 2004-08-31 Edge Medical Devices Ltd. High resolution detector for X-ray imaging
US6895077B2 (en) * 2001-11-21 2005-05-17 University Of Massachusetts Medical Center System and method for x-ray fluoroscopic imaging
US7122804B2 (en) 2002-02-15 2006-10-17 Varian Medical Systems Technologies, Inc. X-ray imaging device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010029876A1 (ja) * 2008-09-11 2010-03-18 富士フイルム株式会社 固体撮像装置の製造方法
JP2010067836A (ja) * 2008-09-11 2010-03-25 Fujifilm Corp 固体撮像装置の製造方法
US8772070B2 (en) 2008-09-11 2014-07-08 Fujifilm Corporation Method for manufacturing solid-state imaging device
JP2010237162A (ja) * 2009-03-31 2010-10-21 Fujifilm Corp 放射線検出装置
JP2011017683A (ja) * 2009-07-10 2011-01-27 Fujifilm Corp 放射線画像検出器及びその製造方法
US8049177B2 (en) 2009-07-10 2011-11-01 Fujifilm Corporation Radiation image detection apparatus and manufacturing method of the same
JP2011155231A (ja) * 2010-01-28 2011-08-11 Fujifilm Corp 放射線画像検出器及びその製造方法、並びに保護部材
US8647965B2 (en) 2010-01-28 2014-02-11 Fujifilm Corporation Radiographic image detector, method of producing the same, and protective member

Also Published As

Publication number Publication date
US7019304B2 (en) 2006-03-28
US20050072931A1 (en) 2005-04-07
DE102004048756A1 (de) 2005-04-21

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