JP2005109331A5 - - Google Patents
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- Publication number
- JP2005109331A5 JP2005109331A5 JP2003343229A JP2003343229A JP2005109331A5 JP 2005109331 A5 JP2005109331 A5 JP 2005109331A5 JP 2003343229 A JP2003343229 A JP 2003343229A JP 2003343229 A JP2003343229 A JP 2003343229A JP 2005109331 A5 JP2005109331 A5 JP 2005109331A5
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- guide portion
- stage apparatus
- bearing
- movable part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003507 refrigerant Substances 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 3
- 238000001514 detection method Methods 0.000 claims 2
- 238000001816 cooling Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003343229A JP4510419B2 (ja) | 2003-10-01 | 2003-10-01 | ステージ装置、露光装置およびデバイス製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003343229A JP4510419B2 (ja) | 2003-10-01 | 2003-10-01 | ステージ装置、露光装置およびデバイス製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005109331A JP2005109331A (ja) | 2005-04-21 |
| JP2005109331A5 true JP2005109331A5 (cg-RX-API-DMAC7.html) | 2006-11-16 |
| JP4510419B2 JP4510419B2 (ja) | 2010-07-21 |
Family
ID=34537271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003343229A Expired - Fee Related JP4510419B2 (ja) | 2003-10-01 | 2003-10-01 | ステージ装置、露光装置およびデバイス製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4510419B2 (cg-RX-API-DMAC7.html) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4546881B2 (ja) * | 2005-06-15 | 2010-09-22 | 住友重機械工業株式会社 | 温調機能付きステージ |
| JP2012032666A (ja) * | 2010-07-30 | 2012-02-16 | Hitachi High-Technologies Corp | 露光装置、露光方法、及び表示用パネル基板の製造方法 |
| JP7227834B2 (ja) * | 2019-04-16 | 2023-02-22 | キヤノン株式会社 | 基板処理装置及び物品の製造方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2510874B2 (ja) * | 1988-01-29 | 1996-06-26 | キヤノン株式会社 | 精密移動テ―ブル |
| JPH05203773A (ja) * | 1991-07-09 | 1993-08-10 | Nikon Corp | ステ−ジ装置の調整方法、およびステ−ジ装置 |
| JPH10127035A (ja) * | 1996-10-16 | 1998-05-15 | Canon Inc | リニアモータおよびこれを用いたステージ装置ならびに露光装置 |
| JP4088728B2 (ja) * | 1998-07-09 | 2008-05-21 | 株式会社ニコン | 平面モータ装置、駆動装置及び露光装置 |
| TW439116B (en) * | 1998-12-16 | 2001-06-07 | Nippon Kogaku Kk | Platen motor device and assembly method thereof, platen motor device driving method, stage device and driving method thereof, exposure device and method thereof, and device and production method thereof |
| JP2002118050A (ja) * | 2000-10-10 | 2002-04-19 | Canon Inc | ステージ装置、露光装置、半導体デバイス製造方法、半導体製造工場、および露光装置の保守方法 |
| JP2002217082A (ja) * | 2001-01-12 | 2002-08-02 | Nikon Corp | ステージ装置及び露光装置 |
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2003
- 2003-10-01 JP JP2003343229A patent/JP4510419B2/ja not_active Expired - Fee Related