JP2005057154A - 露光装置 - Google Patents

露光装置 Download PDF

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Publication number
JP2005057154A
JP2005057154A JP2003288438A JP2003288438A JP2005057154A JP 2005057154 A JP2005057154 A JP 2005057154A JP 2003288438 A JP2003288438 A JP 2003288438A JP 2003288438 A JP2003288438 A JP 2003288438A JP 2005057154 A JP2005057154 A JP 2005057154A
Authority
JP
Japan
Prior art keywords
space
optical system
exposure apparatus
exposure
reticle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003288438A
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English (en)
Japanese (ja)
Other versions
JP2005057154A5 (enExample
Inventor
Shigeru Terajima
茂 寺島
Takayasu Hasegawa
敬恭 長谷川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2003288438A priority Critical patent/JP2005057154A/ja
Priority to US10/912,926 priority patent/US7050152B2/en
Publication of JP2005057154A publication Critical patent/JP2005057154A/ja
Publication of JP2005057154A5 publication Critical patent/JP2005057154A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B27/00—Photographic printing apparatus
    • G03B27/32—Projection printing apparatus, e.g. enlarger, copying camera
    • G03B27/42—Projection printing apparatus, e.g. enlarger, copying camera for automatic sequential copying of the same original
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70841—Constructional issues related to vacuum environment, e.g. load-lock chamber

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Electron Beam Exposure (AREA)
JP2003288438A 2003-08-07 2003-08-07 露光装置 Pending JP2005057154A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2003288438A JP2005057154A (ja) 2003-08-07 2003-08-07 露光装置
US10/912,926 US7050152B2 (en) 2003-08-07 2004-08-05 Exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003288438A JP2005057154A (ja) 2003-08-07 2003-08-07 露光装置

Publications (2)

Publication Number Publication Date
JP2005057154A true JP2005057154A (ja) 2005-03-03
JP2005057154A5 JP2005057154A5 (enExample) 2006-09-07

Family

ID=34114044

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003288438A Pending JP2005057154A (ja) 2003-08-07 2003-08-07 露光装置

Country Status (2)

Country Link
US (1) US7050152B2 (enExample)
JP (1) JP2005057154A (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7525106B2 (en) 2006-03-14 2009-04-28 Canon Kabushiki Kaisha Exposure apparatus, pressure control method for the same, and device manufacturing method
JP2010503980A (ja) * 2006-09-19 2010-02-04 カール・ツァイス・エスエムティー・アーゲー 光学装置、特にｅｕｖリソグラフィ用投影露光装置並びに汚れの少ない反射光学素子
JP2011135078A (ja) * 2009-12-23 2011-07-07 Asml Netherlands Bv リソグラフィ装置および方法
JP2011222975A (ja) * 2010-04-05 2011-11-04 Media Lario S.R.L. Ｅｕｖの集光を強化したｅｕｖ集光器システム
TWI412897B (zh) * 2006-06-13 2013-10-21 Edwards Ltd 控制表面污染之方法
JP2015084454A (ja) * 2007-09-21 2015-04-30 カール・ツァイス・エスエムティー・ゲーエムベーハー マイクロリソグラフィ用の掩蔽瞳を有する投影対物系

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005129898A (ja) * 2003-09-29 2005-05-19 Canon Inc 露光装置およびデバイス製造方法
US20050223973A1 (en) * 2004-03-30 2005-10-13 Infineon Technologies Ag EUV lithography system and chuck for releasing reticle in a vacuum isolated environment
DE102006050835A1 (de) * 2006-10-27 2008-05-08 Carl Zeiss Smt Ag Verfahren und Vorrichtung zum Austausch von Objetkivteilen
EP2684871B1 (en) * 2006-12-19 2016-05-04 F. Hoffmann-La Roche AG Heteroaryl pyrrolidinyl and piperidinyl ketone derivatives
JP5902884B2 (ja) * 2007-10-26 2016-04-13 カール・ツァイス・エスエムティー・ゲーエムベーハー 結像光学系及びこの種の結像光学系を含むマイクロリソグラフィ用の投影露光装置
DE102007051671A1 (de) 2007-10-26 2009-05-07 Carl Zeiss Smt Ag Abbildende Optik sowie Projektionsbelichtungsanlage für die Mikrolithographie mit einer derartigen abbildenden Optik
CN102819197B (zh) 2007-10-26 2016-06-22 卡尔蔡司Smt有限责任公司 成像光学系统、投射曝光设备、微结构部件及其产生方法
KR20140097574A (ko) * 2007-11-06 2014-08-06 칼 짜이스 에스엠티 게엠베하 광학면으로부터 오염층을 제거하는 방법, 세정 가스를 생성하는 방법 및 대응하는 세정 및 세정 가스 생성 장치들
US20090141257A1 (en) * 2007-11-27 2009-06-04 Nikon Corporation Illumination optical apparatus, exposure apparatus, and method for producing device
NL1036957A1 (nl) * 2008-06-13 2009-12-15 Asml Netherlands Bv Lithographic apparatus and device manufacturing method.
DE102009029282A1 (de) * 2009-09-08 2011-03-24 Carl Zeiss Smt Gmbh Optische Anordnung, insbesondere in einer Projektionsbelichtungsanlage für die EUV-Lithographie
DE102016210698A1 (de) * 2016-06-15 2017-12-21 Carl Zeiss Smt Gmbh Optische Anordnung und Verfahren zum Betreiben der optischen Anordnung
NL2025089A (en) * 2019-04-01 2020-10-06 Asml Netherlands Bv A lithographic apparatus and related methods
US12158706B2 (en) 2019-07-09 2024-12-03 Asml Netherlands B.V. Lithographic apparatus and method with improved contaminant particle capture

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2691865B2 (ja) 1994-03-18 1997-12-17 株式会社ソルテック 極紫外線縮小投影露光装置
US6198792B1 (en) * 1998-11-06 2001-03-06 Euv Llc Wafer chamber having a gas curtain for extreme-UV lithography
US6333775B1 (en) * 1999-01-13 2001-12-25 Euv Llc Extreme-UV lithography vacuum chamber zone seal
AU2327800A (en) * 1999-02-12 2000-08-29 Nikon Corporation Exposure method and apparatus
WO2000055891A1 (en) * 1999-03-12 2000-09-21 Nikon Corporation Exposure device, exposure method, and device manufacturing method
US6791661B2 (en) * 1999-12-09 2004-09-14 Nikon Corporation Gas replacement method and apparatus, and exposure method and apparatus

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7525106B2 (en) 2006-03-14 2009-04-28 Canon Kabushiki Kaisha Exposure apparatus, pressure control method for the same, and device manufacturing method
TWI412897B (zh) * 2006-06-13 2013-10-21 Edwards Ltd 控制表面污染之方法
JP2010503980A (ja) * 2006-09-19 2010-02-04 カール・ツァイス・エスエムティー・アーゲー 光学装置、特にｅｕｖリソグラフィ用投影露光装置並びに汚れの少ない反射光学素子
KR101529939B1 (ko) * 2006-09-19 2015-06-18 칼 짜이스 에스엠테 게엠베하 광학 장치, 특히 ｅｕｖ 리소그래피용 투영 노광 장치, 및 오염이 감소된 반사형 광학 요소
JP2015084454A (ja) * 2007-09-21 2015-04-30 カール・ツァイス・エスエムティー・ゲーエムベーハー マイクロリソグラフィ用の掩蔽瞳を有する投影対物系
JP2011135078A (ja) * 2009-12-23 2011-07-07 Asml Netherlands Bv リソグラフィ装置および方法
JP2011222975A (ja) * 2010-04-05 2011-11-04 Media Lario S.R.L. Ｅｕｖの集光を強化したｅｕｖ集光器システム

Also Published As

Publication number Publication date
US7050152B2 (en) 2006-05-23
US20050030504A1 (en) 2005-02-10

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