JP2005057147A5 - - Google Patents

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Publication number
JP2005057147A5
JP2005057147A5 JP2003288375A JP2003288375A JP2005057147A5 JP 2005057147 A5 JP2005057147 A5 JP 2005057147A5 JP 2003288375 A JP2003288375 A JP 2003288375A JP 2003288375 A JP2003288375 A JP 2003288375A JP 2005057147 A5 JP2005057147 A5 JP 2005057147A5
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JP
Japan
Prior art keywords
silicon
film
germanium film
silicon germanium
silicon substrate
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Pending
Application number
JP2003288375A
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English (en)
Japanese (ja)
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JP2005057147A (ja
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Priority to JP2003288375A priority Critical patent/JP2005057147A/ja
Priority claimed from JP2003288375A external-priority patent/JP2005057147A/ja
Publication of JP2005057147A publication Critical patent/JP2005057147A/ja
Publication of JP2005057147A5 publication Critical patent/JP2005057147A5/ja
Pending legal-status Critical Current

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JP2003288375A 2003-08-07 2003-08-07 半導体装置の製造方法 Pending JP2005057147A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003288375A JP2005057147A (ja) 2003-08-07 2003-08-07 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003288375A JP2005057147A (ja) 2003-08-07 2003-08-07 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JP2005057147A JP2005057147A (ja) 2005-03-03
JP2005057147A5 true JP2005057147A5 (cg-RX-API-DMAC7.html) 2006-09-21

Family

ID=34367042

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003288375A Pending JP2005057147A (ja) 2003-08-07 2003-08-07 半導体装置の製造方法

Country Status (1)

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JP (1) JP2005057147A (cg-RX-API-DMAC7.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5096681B2 (ja) * 2006-02-21 2012-12-12 ルネサスエレクトロニクス株式会社 半導体装置の製造方法
KR100775963B1 (ko) 2006-07-12 2007-11-15 삼성전자주식회사 반도체 장치 및 그 제조 방법
KR101223417B1 (ko) 2007-12-18 2013-01-17 삼성전자주식회사 반도체 소자 및 이의 제조방법

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