JP2005055895A - ラスタ顕微鏡 - Google Patents
ラスタ顕微鏡 Download PDFInfo
- Publication number
- JP2005055895A JP2005055895A JP2004223880A JP2004223880A JP2005055895A JP 2005055895 A JP2005055895 A JP 2005055895A JP 2004223880 A JP2004223880 A JP 2004223880A JP 2004223880 A JP2004223880 A JP 2004223880A JP 2005055895 A JP2005055895 A JP 2005055895A
- Authority
- JP
- Japan
- Prior art keywords
- light
- detection
- detector
- raster microscope
- raster
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0052—Optical details of the image generation
- G02B21/0076—Optical details of the image generation arrangements using fluorescence or luminescence
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0032—Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/008—Details of detection or image processing, including general computer control
Abstract
任意の光学的検査に使用可能な検出器を提供すること。
【解決手段】
被検対象を照明するための光源と、検出ビーム路と、該検出ビーム路に配されると共に被検試料から射出する検出光を検出するための検出器とを有するラスタ顕微鏡において、検出光以外の光を、前記検出ビーム路に差込入射可能としかつ前記検出器に供給可能とする差込入射装置を有することを特徴とする。
【選択図】
図1
Description
更に、各従属請求項により、付加的な効果が後述の通りそれぞれ達成される。
(2)上記形態1のラスタ顕微鏡において、前記検出器は、マルチバンド検出器を含むことが好ましい(形態2)。
(3)上記形態1のラスタ顕微鏡において、前記検出器は、スペクトロメータを含むことが好ましい(形態3)。
(4)上記形態1〜3のラスタ顕微鏡において、前記検出光以外の光を前記差込入射装置に供給する光伝送ガイド部材を有することが好ましい(形態4)。
(5)上記形態4のラスタ顕微鏡において、前記光伝送ガイド部材が取り外されると、外部に対して光を(大幅にないし十分に)遮断するよう前記差込入射装置を自動的に閉鎖する閉鎖装置を有することが好ましい(形態5)。
(6)上記形態1〜5のラスタ顕微鏡において、前記検出光以外の光は、透過光を含むことが好ましい(形態6)。
(7)上記形態1〜6のラスタ顕微鏡は、共焦点ラスタ顕微鏡として構成可能である(形態7)。
3 光源
5 照明光ビーム
7 被検対象(試料)
8 走査ユニット
9 照明ピンホール絞り
11 主ビームスプリッタ
13 走査ミラー
15 顕微鏡対物レンズ
17 検出光
19 検出ピンホール絞り
21 検出器
23 分散要素(スペクトル分解要素)
25 ミラー装置
27 個別検出器(検出要素)
28 個別検出器(検出要素)
29 個別検出器(検出要素)
31 差込入射装置
33 非検出光光
35 差込結合部
37 光伝送ガイド部材
39 外部の装置ないし検査系
41 射出光学系
43 (偏向)ミラー(偏向要素)
45 半導体レーザ
46 プリズム
47 半導体レーザ
48 フィールドレンズ
49 偏向ミラー
51 絞り面(Blendenbacken)
53 絞り面
55 連続(発振)レーザ
57 透過光
59 コンデンサ
61 差込光学系
63 ランプハウジング
65 ビーム結合器
67 ビームトラップ
69 回転軸線
71 リンク装置
73 引っ張りバネ
Claims (7)
- 被検対象を照明するための光源と、検出ビーム路と、該検出ビーム路に配されると共に被検試料から射出する検出光を検出するための検出器とを有するラスタ顕微鏡において、
検出光以外の光を、前記検出ビーム路に差込入射可能としかつ前記検出器に供給可能とする差込入射装置を有すること
を特徴とするラスタ顕微鏡。 - 前記検出器は、マルチバンド検出器を含むこと
を特徴とする請求項1に記載のラスタ顕微鏡。 - 前記検出器は、スペクトロメータを含むこと
を特徴とする請求項1に記載のラスタ顕微鏡。 - 前記検出光以外の光を前記差込入射装置に供給する光伝送ガイド部材を有すること
を特徴とする請求項1〜3の何れか1項に記載のラスタ顕微鏡。 - 前記光伝送ガイド部材が取り外されると、外部に対して光を遮断するよう前記差込入射装置を自動的に閉鎖する閉鎖装置を有すること
を特徴とする請求項4に記載のラスタ顕微鏡。 - 前記検出光以外の光は、透過光を含むこと
を特徴とする請求項1〜5の何れか1項に記載のラスタ顕微鏡。 - 共焦点ラスタ顕微鏡として構成されること
を特徴とする請求項1〜6の何れか1項に記載のラスタ顕微鏡。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10335466A DE10335466B4 (de) | 2003-08-02 | 2003-08-02 | Rastermikroskop |
DE10335466.2 | 2003-08-02 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005055895A true JP2005055895A (ja) | 2005-03-03 |
JP4711649B2 JP4711649B2 (ja) | 2011-06-29 |
Family
ID=33547054
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004223880A Expired - Fee Related JP4711649B2 (ja) | 2003-08-02 | 2004-07-30 | ラスタ顕微鏡 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7151633B2 (ja) |
EP (1) | EP1505424B1 (ja) |
JP (1) | JP4711649B2 (ja) |
DE (2) | DE10335466B4 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012057071A (ja) * | 2010-09-09 | 2012-03-22 | Denki Kagaku Kogyo Kk | β型サイアロンの製造方法 |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005008925A1 (de) | 2005-02-24 | 2006-09-07 | Leica Microsystems Cms Gmbh | Laser-Mikrodissektionsgerät |
DE102007047187A1 (de) * | 2007-10-02 | 2009-04-09 | Carl Zeiss Sms Gmbh | Abbildungs- oder Inspektionssystem mit Energiemonitoring |
US8975572B2 (en) | 2008-04-04 | 2015-03-10 | Cvi Laser, Llc | Compact, thermally stable fiber-optic array mountable to flow cell |
US7903706B2 (en) | 2008-04-04 | 2011-03-08 | O'shaughnessy John | Compact, thermally stable multi-laser engine |
US9413130B2 (en) | 2012-12-12 | 2016-08-09 | Cvi Laser, Llc | Optical systems |
US10114213B2 (en) | 2008-04-04 | 2018-10-30 | Cvi Laser, Llc | Laser systems and optical devices for manipulating laser beams |
US8964286B2 (en) | 2008-07-24 | 2015-02-24 | Hologic Inc | System and device for non-destructive Raman analysis |
US20100020393A1 (en) * | 2008-07-24 | 2010-01-28 | Hologic Inc. | System and Device for Non-Destructive Raman Analysis |
JP5307629B2 (ja) * | 2009-05-22 | 2013-10-02 | オリンパス株式会社 | 走査型顕微鏡装置 |
DE102014016850B9 (de) * | 2014-11-13 | 2017-07-27 | Carl Zeiss Meditec Ag | Optisches System zur Fluoreszenzbeobachtung |
US11067509B2 (en) * | 2015-07-06 | 2021-07-20 | Indiana University Research And Technology Corporation | Fluorescent microscope |
US11506877B2 (en) | 2016-11-10 | 2022-11-22 | The Trustees Of Columbia University In The City Of New York | Imaging instrument having objective axis and light sheet or light beam projector axis intersecting at less than 90 degrees |
DE102017203414A1 (de) * | 2017-03-02 | 2018-09-06 | Carl Zeiss Microscopy Gmbh | Detektorbaugruppe und Mikroskop mit einer solchen Detektorbaugruppe |
US11378808B2 (en) | 2018-07-18 | 2022-07-05 | Idex Health & Science Llc | Laser systems and optical devices for laser beam shaping |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02188711A (ja) * | 1989-01-18 | 1990-07-24 | Olympus Optical Co Ltd | レーザ光学装置 |
JPH05142144A (ja) * | 1991-04-12 | 1993-06-08 | Bayer Ag | 分光学的に相関関係のある光走査顕微鏡検査法 |
JP2001235684A (ja) * | 2000-02-01 | 2001-08-31 | Leica Microsystems Heidelberg Gmbh | 共焦点走査型顕微鏡 |
JP2002221663A (ja) * | 2001-01-29 | 2002-08-09 | Nikon Corp | 走査型共焦点顕微鏡 |
JP2002267933A (ja) * | 2001-03-13 | 2002-09-18 | Olympus Optical Co Ltd | レーザ顕微鏡 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1990000754A1 (en) * | 1988-07-13 | 1990-01-25 | Martin Russell Harris | Scanning confocal microscope |
CA1325537C (en) * | 1988-08-01 | 1993-12-28 | Timothy Peter Dabbs | Confocal microscope |
GB9014570D0 (en) * | 1990-06-29 | 1990-08-22 | Dixon Arthur E | Method for transmitted-light and reflected-light imaging |
DE4330347C2 (de) * | 1993-09-08 | 1998-04-09 | Leica Lasertechnik | Verwendung einer Vorrichtung zur Selektion und Detektion mindestens zweier Spektralbereiche eines Lichtstrahls |
US5886784A (en) * | 1993-09-08 | 1999-03-23 | Leica Lasertechink Gmbh | Device for the selection and detection of at least two spectral regions in a beam of light |
US6631226B1 (en) * | 1997-01-27 | 2003-10-07 | Carl Zeiss Jena Gmbh | Laser scanning microscope |
US5896223A (en) * | 1997-06-13 | 1999-04-20 | Tigliev; George S. | Optical system having an unlimited depth of focus |
DE59801938D1 (de) * | 1997-11-11 | 2001-12-06 | Haag Streit Ag Koeniz | Vorrichtung zur stereoskopischen Untersuchung eines Patientenauges |
DE19902625A1 (de) * | 1998-01-28 | 1999-09-30 | Leica Microsystems | Vorrichtung zur gleichzeitigen Detektion mehrerer Spektralbereiche eines Lichtstrahls |
US5936728A (en) * | 1998-04-14 | 1999-08-10 | Noran Instruments, Inc. | Flash photolysis method and apparatus |
DE19944355B4 (de) * | 1999-09-16 | 2004-11-18 | Leica Microsystems Heidelberg Gmbh | Optische Anordnung |
DE19949272C2 (de) * | 1999-10-12 | 2003-09-11 | Leica Microsystems | Scanmikroskop |
JP3644884B2 (ja) * | 1999-10-25 | 2005-05-11 | 古河電気工業株式会社 | 遮光シャッター付きアダプタおよび遮光シャッター付き光モジュールレセプタクル |
DE10039520A1 (de) * | 2000-08-08 | 2002-02-21 | Leica Microsystems | Vorrichtung zur Untersuchung und Manipulation von mikroskopischen Objekten |
DE10120424B4 (de) * | 2001-04-26 | 2004-08-05 | Leica Microsystems Heidelberg Gmbh | Scanmikroskop und Auskoppelelement |
-
2003
- 2003-08-02 DE DE10335466A patent/DE10335466B4/de not_active Expired - Fee Related
-
2004
- 2004-07-21 EP EP04103465A patent/EP1505424B1/de not_active Expired - Fee Related
- 2004-07-21 DE DE502004003515T patent/DE502004003515D1/de active Active
- 2004-07-30 US US10/903,139 patent/US7151633B2/en active Active
- 2004-07-30 JP JP2004223880A patent/JP4711649B2/ja not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02188711A (ja) * | 1989-01-18 | 1990-07-24 | Olympus Optical Co Ltd | レーザ光学装置 |
JPH05142144A (ja) * | 1991-04-12 | 1993-06-08 | Bayer Ag | 分光学的に相関関係のある光走査顕微鏡検査法 |
JP2001235684A (ja) * | 2000-02-01 | 2001-08-31 | Leica Microsystems Heidelberg Gmbh | 共焦点走査型顕微鏡 |
JP2002221663A (ja) * | 2001-01-29 | 2002-08-09 | Nikon Corp | 走査型共焦点顕微鏡 |
JP2002267933A (ja) * | 2001-03-13 | 2002-09-18 | Olympus Optical Co Ltd | レーザ顕微鏡 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012057071A (ja) * | 2010-09-09 | 2012-03-22 | Denki Kagaku Kogyo Kk | β型サイアロンの製造方法 |
Also Published As
Publication number | Publication date |
---|---|
EP1505424B1 (de) | 2007-04-18 |
US7151633B2 (en) | 2006-12-19 |
DE10335466A1 (de) | 2005-03-03 |
DE10335466B4 (de) | 2005-09-01 |
DE502004003515D1 (de) | 2007-05-31 |
US20050024721A1 (en) | 2005-02-03 |
EP1505424A1 (de) | 2005-02-09 |
JP4711649B2 (ja) | 2011-06-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7369308B2 (en) | Total internal reflection fluorescence microscope | |
JP4711649B2 (ja) | ラスタ顕微鏡 | |
JP6282658B2 (ja) | 自由に調整可能な試料走査を有する共焦点顕微鏡 | |
US7477380B2 (en) | Scanning microscope comprising a confocal slit scanner for imaging an object | |
US7480046B2 (en) | Scanning microscope with evanescent wave illumination | |
US20070051869A1 (en) | Scanning microscope and method for examining a sample by using scanning microscopy | |
US6388807B1 (en) | Confocal laser scanning microscope | |
US8154796B2 (en) | Microscope apparatus | |
JP2003028795A (ja) | 試料検査方法及び走査型顕微鏡 | |
US6924490B2 (en) | Microscope system | |
US20070176085A1 (en) | Microscope | |
US7817271B2 (en) | Confocal microscope and method for detecting by means of a confocal microscope | |
JP4854880B2 (ja) | レーザー顕微鏡 | |
US6958858B2 (en) | Method for scanning microscopy; and scanning microscope | |
JP7397673B2 (ja) | 光シート顕微鏡機能ユニットを有する顕微鏡システム | |
JP2007500368A (ja) | 走査型顕微鏡 | |
JP2004354937A (ja) | レーザ顕微鏡 | |
JP5623654B2 (ja) | 共焦点レーザー走査顕微鏡 | |
US6906312B2 (en) | Scanning microscope having a microscope stand | |
US7675617B2 (en) | Optical array for the spectrally selective identification of light of a light beam | |
JP4722464B2 (ja) | 全反射蛍光照明装置 | |
JP2016537674A (ja) | エバネッセント照明及び点状ラスタスキャン照明のための顕微鏡 | |
JP4878751B2 (ja) | 顕微鏡用照明装置および蛍光顕微鏡装置 | |
US20080266659A1 (en) | Lens for evanescent wave illumination and corresponding microscope | |
JP2006010406A (ja) | 蛍光検出装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20041102 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20070215 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100413 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100705 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100817 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20101108 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20101111 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20101202 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20101207 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110216 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20110308 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20110322 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4711649 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |