JP2005046747A - ガス分離装置 - Google Patents
ガス分離装置 Download PDFInfo
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- JP2005046747A JP2005046747A JP2003282062A JP2003282062A JP2005046747A JP 2005046747 A JP2005046747 A JP 2005046747A JP 2003282062 A JP2003282062 A JP 2003282062A JP 2003282062 A JP2003282062 A JP 2003282062A JP 2005046747 A JP2005046747 A JP 2005046747A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/025—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with wetted adsorbents; Chromatography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
- Y02C20/00—Capture or disposal of greenhouse gases
- Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Treating Waste Gases (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Drying Of Semiconductors (AREA)
Abstract
【解決手段】製造工程10から生じるCF4、C2F6を含むPFCガスを含有する排ガスを濃縮装置18で濃縮した後、窒素をキャリアガスとしてクロマト分離装置20でクロマト分離する。このクロマト分離装置20には、モレキュラーシーブ13XやF−9を充填しておく。これによって、PFCガス中のCF4,C2F6を効果的に分離することができる。
【選択図】図1
Description
図6の構成の試験装置により実験を行った。この図6の装置は、図2の構成に対応するものである。
図7の構成の試験装置により実験を行った。試験用のカラム50として外径1/8インチ、10MのSUS管に椰子ガラ活性炭で比表面積1158m2/g、粒径60〜80メッシュのものを充填した後、モレキュラーシーブ−13X(ジーエルサイエンス社製)で、粒径60〜80メッシュのものを充填したカラムを用いた。これによって、図5のように、被処理ガスの流通方向に沿ってゼオライト(モレキュラーシーブ−13X)30と、活性炭(椰子ガラ活性炭)32が配置される。これら充填材の充填比率は1:1である。
Claims (5)
- 複数の特定ガスを含有する被処理ガスから各特定ガスを分離するガス分離装置であって、
異なる充填材が充填された複数のカラムを含み、これらカラムを直列接続することで、被処理ガスに複数のカラムの充填材を順次通過させて、被処理ガスから各特定ガスをクロマト分離することを特徴とするガス分離装置。 - 複数の特定ガスを含有する被処理ガスから各特定ガスを分離するガス分離装置であって、
異なる充填材が充填されたカラムを含み、被処理ガスにカラム内の複数の充填材を通過させて被処理ガスから各特定ガスをクロマト分離することを特徴とするガス分離装置。 - 請求項1または2に記載の装置において、
前記特定ガスは、半導体製造工程から排出されるPFCガスであり、前記被処理ガスはその他ガスとして窒素ガスを含むことを特徴とするガス分離装置。 - 請求項3に記載の装置において、
前記特定ガスは、NF3、CF4、C2F6を含み、
前記充填材は、ゼオライトおよび活性炭を含むことを特徴とするガス分離装置。 - 請求項4に記載の装置において、
前記ゼオライトは、モレキュラーシーブ13Xまたはその同等品であることを特徴とするガス分離装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003282062A JP4538622B2 (ja) | 2003-07-29 | 2003-07-29 | ガス分離装置 |
US10/566,489 US7527676B2 (en) | 2003-07-29 | 2004-06-02 | Unit for separating gas |
KR1020067001536A KR20060041269A (ko) | 2003-07-29 | 2004-06-02 | 가스분리장치 |
PCT/JP2004/007616 WO2005009595A1 (ja) | 2003-07-29 | 2004-06-02 | ガス分離装置 |
TW093120644A TW200510054A (en) | 2003-07-29 | 2004-07-09 | Unit for separating gas |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003282062A JP4538622B2 (ja) | 2003-07-29 | 2003-07-29 | ガス分離装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005046747A true JP2005046747A (ja) | 2005-02-24 |
JP4538622B2 JP4538622B2 (ja) | 2010-09-08 |
Family
ID=34100982
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003282062A Expired - Fee Related JP4538622B2 (ja) | 2003-07-29 | 2003-07-29 | ガス分離装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7527676B2 (ja) |
JP (1) | JP4538622B2 (ja) |
KR (1) | KR20060041269A (ja) |
TW (1) | TW200510054A (ja) |
WO (1) | WO2005009595A1 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4212106B2 (ja) | 2005-04-19 | 2009-01-21 | オルガノ株式会社 | ガス分離装置及びガス分離方法 |
SE529053C2 (sv) | 2005-07-08 | 2007-04-17 | Plasma Surgical Invest Ltd | Plasmaalstrande anordning, plasmakirurgisk anordning och användning av en plasmakirurgisk anordning |
JP2009018269A (ja) * | 2007-07-12 | 2009-01-29 | Japan Organo Co Ltd | ガス分離装置及びガス分離方法 |
KR101514801B1 (ko) * | 2013-06-25 | 2015-04-24 | (주)파인텍 | 과불화화합물의 분리 및 재활용시스템 |
DE102014212907A1 (de) * | 2014-07-03 | 2016-01-07 | Siemens Aktiengesellschaft | Verfahren zum Reinigen eines Abgases aus einem Metallreduktionsprozess |
US9302214B2 (en) * | 2014-08-22 | 2016-04-05 | Air Products And Chemicals, Inc. | Purification of nitrogen trifluoride by pressure swing absorption |
CN114288812A (zh) * | 2021-11-30 | 2022-04-08 | 浙江大学 | 一种分离含氟电子特气的方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05506315A (ja) * | 1991-01-30 | 1993-09-16 | フィリップス.ジョン.ブルース | クロマトグラフィ技術及び装置 |
JPH11509314A (ja) * | 1995-06-26 | 1999-08-17 | パーセプティブ バイオシステムズ,インコーポレーテッド | 高速自動化連続流、多次元分子選別および分析 |
JP2002035527A (ja) * | 2000-07-26 | 2002-02-05 | Japan Atom Energy Res Inst | ガス分離装置 |
JP2003521688A (ja) * | 2000-01-25 | 2003-07-15 | ザ ステイト オブ オレゴン アクティング バイ アンド スルー ザ ステイト ボード オブ ハイヤー エデュケイション オン ビハーフ オブ ポートランド ステイト ユニヴァーシティ | 分析用のサンプルを濃縮するための方法及び装置 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3285701A (en) * | 1963-01-18 | 1966-11-15 | Sinclair Research Inc | Process and apparatus for separating and analyzing a fluid mixture |
US3724170A (en) * | 1971-09-13 | 1973-04-03 | Mobil Oil Corp | Staged separations of aromatic mixtures with zeolites |
US4534207A (en) * | 1983-05-31 | 1985-08-13 | Shell Oil Company | Reformer process analyzer |
US4772296A (en) * | 1987-05-12 | 1988-09-20 | Eagle-Picher Industries, Inc. | Method of purifying and depositing group IIIa and group Va compounds to produce epitaxial films |
JPH0798648B2 (ja) * | 1990-01-10 | 1995-10-25 | セントラル硝子株式会社 | Nf3ガスの精製方法 |
IT1256355B (it) * | 1992-08-31 | 1995-12-01 | Procedimento e apparecchiatura per la determinazione dell'azoto totale mediante analisi elementare | |
US6074459A (en) * | 1998-01-05 | 2000-06-13 | Uop Llc | Ultra pure gases: removal of halocarbons, fluorocarbons, and sulfur compounds from gas streams |
JP2002035528A (ja) * | 2000-07-26 | 2002-02-05 | Japan Atom Energy Res Inst | ガス分離装置 |
JP2002147948A (ja) * | 2000-11-10 | 2002-05-22 | Japan Organo Co Ltd | ガス分離装置及びガス分離方法 |
US6547861B2 (en) * | 2000-12-26 | 2003-04-15 | Matheson Tri-Gas,, Inc. | Method and materials for purifying reactive gases using preconditioned ultra-low emission carbon material |
US6425946B1 (en) * | 2000-12-26 | 2002-07-30 | Matheson Tri-Gas, Inc. | Method and apparatus for removing trace impurities from a gas using superactivated carbon material |
US6685903B2 (en) * | 2001-03-01 | 2004-02-03 | Praxair Technology, Inc. | Method of purifying and recycling argon |
JP5093635B2 (ja) | 2001-03-21 | 2012-12-12 | 独立行政法人日本原子力研究開発機構 | ガス分離装置 |
US6702989B2 (en) * | 2001-12-10 | 2004-03-09 | The Regents Of The University Of Michigan | Pulsed carrier gas flow modulation for selectivity enhancements with gas chromatography using series-coupled column ensembles |
US6706534B2 (en) * | 2001-12-10 | 2004-03-16 | The Regents Of The University Of Michigan | Pulsed carrier gas flow modulation for selectivity enhancements with gas chroma tography using series-coupled ensembles |
-
2003
- 2003-07-29 JP JP2003282062A patent/JP4538622B2/ja not_active Expired - Fee Related
-
2004
- 2004-06-02 KR KR1020067001536A patent/KR20060041269A/ko not_active Application Discontinuation
- 2004-06-02 WO PCT/JP2004/007616 patent/WO2005009595A1/ja active Application Filing
- 2004-06-02 US US10/566,489 patent/US7527676B2/en not_active Expired - Fee Related
- 2004-07-09 TW TW093120644A patent/TW200510054A/zh not_active IP Right Cessation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05506315A (ja) * | 1991-01-30 | 1993-09-16 | フィリップス.ジョン.ブルース | クロマトグラフィ技術及び装置 |
JPH11509314A (ja) * | 1995-06-26 | 1999-08-17 | パーセプティブ バイオシステムズ,インコーポレーテッド | 高速自動化連続流、多次元分子選別および分析 |
JP2003521688A (ja) * | 2000-01-25 | 2003-07-15 | ザ ステイト オブ オレゴン アクティング バイ アンド スルー ザ ステイト ボード オブ ハイヤー エデュケイション オン ビハーフ オブ ポートランド ステイト ユニヴァーシティ | 分析用のサンプルを濃縮するための方法及び装置 |
JP2002035527A (ja) * | 2000-07-26 | 2002-02-05 | Japan Atom Energy Res Inst | ガス分離装置 |
Also Published As
Publication number | Publication date |
---|---|
TWI295934B (ja) | 2008-04-21 |
US7527676B2 (en) | 2009-05-05 |
KR20060041269A (ko) | 2006-05-11 |
JP4538622B2 (ja) | 2010-09-08 |
TW200510054A (en) | 2005-03-16 |
US20070084345A1 (en) | 2007-04-19 |
WO2005009595A1 (ja) | 2005-02-03 |
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