JP2005031076A - 合成石英ガラスのパルスレーザー耐性を定量的に決定する方法 - Google Patents
合成石英ガラスのパルスレーザー耐性を定量的に決定する方法 Download PDFInfo
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- JP2005031076A JP2005031076A JP2004195925A JP2004195925A JP2005031076A JP 2005031076 A JP2005031076 A JP 2005031076A JP 2004195925 A JP2004195925 A JP 2004195925A JP 2004195925 A JP2004195925 A JP 2004195925A JP 2005031076 A JP2005031076 A JP 2005031076A
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- 238000000034 method Methods 0.000 title claims abstract description 21
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 19
- 239000005350 fused silica glass Substances 0.000 title abstract 6
- 238000010521 absorption reaction Methods 0.000 claims abstract description 33
- 238000005259 measurement Methods 0.000 claims abstract description 27
- 230000007547 defect Effects 0.000 claims description 10
- 230000005540 biological transmission Effects 0.000 claims description 5
- 238000012790 confirmation Methods 0.000 claims description 2
- 238000000206 photolithography Methods 0.000 claims description 2
- 238000012886 linear function Methods 0.000 claims 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 229920006395 saturated elastomer Polymers 0.000 claims 1
- 238000007689 inspection Methods 0.000 abstract description 7
- 230000007774 longterm Effects 0.000 abstract description 7
- 230000001419 dependent effect Effects 0.000 abstract description 4
- 239000000463 material Substances 0.000 abstract description 3
- 239000000523 sample Substances 0.000 description 17
- 230000001965 increasing effect Effects 0.000 description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 230000002427 irreversible effect Effects 0.000 description 3
- 230000032683 aging Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000008034 disappearance Effects 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000001499 laser induced fluorescence spectroscopy Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000013074 reference sample Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/6402—Atomic fluorescence; Laser induced fluorescence
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N17/00—Investigating resistance of materials to the weather, to corrosion, or to light
- G01N17/004—Investigating resistance of materials to the weather, to corrosion, or to light to light
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- Investigating Or Analysing Materials By Optical Means (AREA)
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Abstract
【解決手段】本発明は、煩雑でコストのかかる測定を回避し、材料を節約しながら、合成石英ガラスのパルスレーザー耐性を定量的に決定する方法に関する。最初に種々の異なるエネルギー密度で石英ガラスの吸収を測定し、得られた測定値から非直線的関数α1(H)を求める。次に石英ガラスをより高いエネルギー密度で一定の吸収値に達するまで照射する。更に、種々の異なるエネルギー密度で石英ガラスの吸収を測定し、そこから非直線的関数α2(H)を求める。これらの非直線的関数の差からエネルギー密度に依存した吸収の増加量を決定する。
【選択図】 図2
Description
Claims (3)
- 合成石英ガラスのパルスレーザー耐性を直接的な吸収測定により定量的に決定する方法であって、種々の異なるエネルギー密度で石英ガラスの吸収を測定し、そこから非直線的関数α1(H)を求め、次に石英ガラスを光学的リソグラフィーの典型的な用途において通常用いられるエネルギー密度より高いエネルギー密度で一定の吸収値に達するまで照射した後、種々の異なるエネルギー密度で石英ガラスの吸収を測定し、そこから非直線的関数α2(H)を求め、更にこれらの非直線的関数の差からエネルギー密度に依存した吸収の増加量を決定することを特徴とする方法。
- 温度範囲T<200Kにおいて吸収性欠陥中心の生成が飽和するまで照射を行うことを特徴とする、請求項1記載の方法。
- 吸収性欠陥中心の生成が飽和に達したことの確認を、吸収測定、透過測定又は蛍光測定によって行うことを特徴とする、請求項2記載の方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10331589A DE10331589B3 (de) | 2003-07-09 | 2003-07-09 | Verfahren zur quantitativen Bestimmung der Pulslaserbeständigkeit von synthetischem Quarzglas |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005031076A true JP2005031076A (ja) | 2005-02-03 |
JP4653430B2 JP4653430B2 (ja) | 2011-03-16 |
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JP2004195925A Expired - Fee Related JP4653430B2 (ja) | 2003-07-09 | 2004-07-01 | 合成石英ガラスのパルスレーザー耐性を定量的に決定する方法 |
Country Status (4)
Country | Link |
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US (1) | US7271911B2 (ja) |
JP (1) | JP4653430B2 (ja) |
CN (1) | CN100529732C (ja) |
DE (1) | DE10331589B3 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009036706A (ja) * | 2007-08-03 | 2009-02-19 | Josho Gakuen | 光学材料のレーザ損傷耐性推定方法及びレーザ損傷耐性推定装置 |
CN111007052A (zh) * | 2019-10-10 | 2020-04-14 | 中国科学院上海光学精密机械研究所 | 大口径熔石英玻璃低损伤阈值缺陷的测量装置和测量方法 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005024678B3 (de) * | 2005-05-30 | 2006-08-31 | Schott Ag | Verfahren zur Bestimmung von irreversiblen Strahlenschäden von optischem Material |
DE102006038902A1 (de) * | 2006-08-18 | 2008-02-21 | Schott Ag | Verfahren zur Bestimmung der Laserstabilität von optischen Material sowie damit erhaltene Kristalle und deren Verwendung |
DE102013013069B3 (de) * | 2013-08-06 | 2015-01-22 | Leibniz-Institut für Photonische Technologien e. V. | Verfahren zur beschleunigten Degradation von OH-armen Quarzgläsern für UV-VUV-Anwendungen |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07291644A (ja) * | 1994-04-21 | 1995-11-07 | Nikon Corp | 石英ガラス部材及びその評価方法 |
JPH1019727A (ja) * | 1996-07-01 | 1998-01-23 | Nikon Corp | エキシマレ−ザ照射耐久性の予測方法 及び石英ガラス部材 |
JPH11108839A (ja) * | 1997-10-07 | 1999-04-23 | Nikon Corp | エキシマレーザ照射に対する光学部材の耐久性予測方法及び石英ガラス光学部材の選択方法 |
JPH11148883A (ja) * | 1997-11-14 | 1999-06-02 | Nikon Corp | レーザー耐久性評価方法 |
JPH11292551A (ja) * | 1997-11-28 | 1999-10-26 | Nikon Corp | 合成石英ガラスの製造方法及びこの方法により得られた合成石英ガラス |
JP2000146755A (ja) * | 1998-11-06 | 2000-05-26 | Nikon Corp | 光吸収量測定方法および光吸収量測定装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10232197A (ja) * | 1997-02-19 | 1998-09-02 | Nikon Corp | レーザー耐久性評価方法 |
JP2000081367A (ja) * | 1998-09-07 | 2000-03-21 | Nikon Corp | 光透過性光学部材、その製造方法、その評価方法、および光リソグラフィー装置 |
DE10050349C2 (de) * | 2000-10-11 | 2002-11-07 | Schott Glas | Verfahren zur Bestimmung der Strahlenbeständigkeit von Kristallen und deren Verwendung |
DE10139906B4 (de) * | 2000-11-30 | 2009-04-23 | Schott Ag | Anordnung zur optischen Bestimmung der Absorption |
DE10225842A1 (de) * | 2002-06-04 | 2003-12-24 | Zeiss Carl Smt Ag | Verfahren und Vorrichtung zur Bestimmung der Strahlungsbeständigkeit eines optischen Materials |
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2003
- 2003-07-09 DE DE10331589A patent/DE10331589B3/de not_active Expired - Fee Related
-
2004
- 2004-07-01 JP JP2004195925A patent/JP4653430B2/ja not_active Expired - Fee Related
- 2004-07-08 CN CNB2004100633829A patent/CN100529732C/zh not_active Expired - Fee Related
- 2004-07-08 US US10/887,421 patent/US7271911B2/en not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07291644A (ja) * | 1994-04-21 | 1995-11-07 | Nikon Corp | 石英ガラス部材及びその評価方法 |
JPH1019727A (ja) * | 1996-07-01 | 1998-01-23 | Nikon Corp | エキシマレ−ザ照射耐久性の予測方法 及び石英ガラス部材 |
JPH11108839A (ja) * | 1997-10-07 | 1999-04-23 | Nikon Corp | エキシマレーザ照射に対する光学部材の耐久性予測方法及び石英ガラス光学部材の選択方法 |
JPH11148883A (ja) * | 1997-11-14 | 1999-06-02 | Nikon Corp | レーザー耐久性評価方法 |
JPH11292551A (ja) * | 1997-11-28 | 1999-10-26 | Nikon Corp | 合成石英ガラスの製造方法及びこの方法により得られた合成石英ガラス |
JP2000146755A (ja) * | 1998-11-06 | 2000-05-26 | Nikon Corp | 光吸収量測定方法および光吸収量測定装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009036706A (ja) * | 2007-08-03 | 2009-02-19 | Josho Gakuen | 光学材料のレーザ損傷耐性推定方法及びレーザ損傷耐性推定装置 |
CN111007052A (zh) * | 2019-10-10 | 2020-04-14 | 中国科学院上海光学精密机械研究所 | 大口径熔石英玻璃低损伤阈值缺陷的测量装置和测量方法 |
Also Published As
Publication number | Publication date |
---|---|
DE10331589B3 (de) | 2005-03-24 |
CN100529732C (zh) | 2009-08-19 |
US7271911B2 (en) | 2007-09-18 |
CN1576820A (zh) | 2005-02-09 |
US20050007595A1 (en) | 2005-01-13 |
JP4653430B2 (ja) | 2011-03-16 |
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