JP2004535306A5 - - Google Patents

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Publication number
JP2004535306A5
JP2004535306A5 JP2003513743A JP2003513743A JP2004535306A5 JP 2004535306 A5 JP2004535306 A5 JP 2004535306A5 JP 2003513743 A JP2003513743 A JP 2003513743A JP 2003513743 A JP2003513743 A JP 2003513743A JP 2004535306 A5 JP2004535306 A5 JP 2004535306A5
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JP
Japan
Prior art keywords
abrasive article
wear indicator
abrasive
fixed abrasive
composite element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2003513743A
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English (en)
Japanese (ja)
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JP2004535306A (ja
Filing date
Publication date
Priority claimed from US09/910,425 external-priority patent/US20020077037A1/en
Application filed filed Critical
Publication of JP2004535306A publication Critical patent/JP2004535306A/ja
Publication of JP2004535306A5 publication Critical patent/JP2004535306A5/ja
Withdrawn legal-status Critical Current

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JP2003513743A 2001-07-20 2002-07-12 摩耗インジケータを有する固定研磨物品 Withdrawn JP2004535306A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/910,425 US20020077037A1 (en) 1999-05-03 2001-07-20 Fixed abrasive articles
PCT/US2002/021940 WO2003008151A1 (en) 2001-07-20 2002-07-12 Fixed abrasive articles with wear indicators

Publications (2)

Publication Number Publication Date
JP2004535306A JP2004535306A (ja) 2004-11-25
JP2004535306A5 true JP2004535306A5 (enrdf_load_stackoverflow) 2006-01-05

Family

ID=25428766

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003513743A Withdrawn JP2004535306A (ja) 2001-07-20 2002-07-12 摩耗インジケータを有する固定研磨物品

Country Status (7)

Country Link
US (1) US20020077037A1 (enrdf_load_stackoverflow)
EP (1) EP1409201A1 (enrdf_load_stackoverflow)
JP (1) JP2004535306A (enrdf_load_stackoverflow)
KR (1) KR20040017328A (enrdf_load_stackoverflow)
CN (1) CN1535197A (enrdf_load_stackoverflow)
TW (1) TW565488B (enrdf_load_stackoverflow)
WO (1) WO2003008151A1 (enrdf_load_stackoverflow)

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KR200478500Y1 (ko) 2013-10-01 2015-10-14 김도영 양면 연마장치용 연마패드
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US11103117B2 (en) * 2016-04-29 2021-08-31 3M Innovative Properties Company Cleaning articles including scouring bodies that form printed instructions
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JP6732381B2 (ja) * 2016-10-03 2020-07-29 株式会社ディスコ 切削装置
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CN107685288B (zh) * 2017-09-05 2019-05-10 南京航空航天大学 一种游离磨粒轨迹检测方法
CN109420973B (zh) * 2017-09-05 2020-11-17 联华电子股份有限公司 晶片研磨盘与其使用方法
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CN108127582B (zh) * 2017-12-13 2019-12-31 湖北鼎汇微电子材料有限公司 一种制备抛光层的模具及制备方法
CN109108800A (zh) * 2018-08-13 2019-01-01 芜湖九鼎电子科技有限公司 一种全自动仪表镜面磨光机
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CN113260486A (zh) 2018-12-18 2021-08-13 3M创新有限公司 具有间隔颗粒的涂层磨料制品及其制备方法和设备
CN113226648A (zh) 2018-12-18 2021-08-06 3M创新有限公司 磨料制品产生中改善的颗粒接收
CN113226647A (zh) 2018-12-18 2021-08-06 3M创新有限公司 具有不同加工速度的磨料制品制造机
CN109454547A (zh) * 2018-12-27 2019-03-12 杭州众硅电子科技有限公司 一种用于cmp抛光垫寿命在线检测的系统和方法
CN111896407A (zh) * 2020-06-09 2020-11-06 河北招岳聚氨酯制品有限公司 一种筛板磨损监测系统
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