JP2004530937A5 - - Google Patents

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Publication number
JP2004530937A5
JP2004530937A5 JP2003507611A JP2003507611A JP2004530937A5 JP 2004530937 A5 JP2004530937 A5 JP 2004530937A5 JP 2003507611 A JP2003507611 A JP 2003507611A JP 2003507611 A JP2003507611 A JP 2003507611A JP 2004530937 A5 JP2004530937 A5 JP 2004530937A5
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JP
Japan
Prior art keywords
objective lens
optical group
optical
grating
group
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Application number
JP2003507611A
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English (en)
Japanese (ja)
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JP4252447B2 (ja
JP2004530937A (ja
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Publication date
Priority claimed from DE10130212A external-priority patent/DE10130212A1/de
Application filed filed Critical
Publication of JP2004530937A publication Critical patent/JP2004530937A/ja
Publication of JP2004530937A5 publication Critical patent/JP2004530937A5/ja
Application granted granted Critical
Publication of JP4252447B2 publication Critical patent/JP4252447B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003507611A 2001-06-22 2002-06-19 対物レンズ Expired - Fee Related JP4252447B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10130212A DE10130212A1 (de) 2001-06-22 2001-06-22 Objektiv
PCT/EP2002/006798 WO2003001272A2 (de) 2001-06-22 2002-06-19 Objektiv

Publications (3)

Publication Number Publication Date
JP2004530937A JP2004530937A (ja) 2004-10-07
JP2004530937A5 true JP2004530937A5 (cg-RX-API-DMAC7.html) 2008-12-04
JP4252447B2 JP4252447B2 (ja) 2009-04-08

Family

ID=7689120

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003507611A Expired - Fee Related JP4252447B2 (ja) 2001-06-22 2002-06-19 対物レンズ

Country Status (6)

Country Link
US (1) US20040174607A1 (cg-RX-API-DMAC7.html)
EP (1) EP1397716A2 (cg-RX-API-DMAC7.html)
JP (1) JP4252447B2 (cg-RX-API-DMAC7.html)
DE (1) DE10130212A1 (cg-RX-API-DMAC7.html)
TW (1) TWI226938B (cg-RX-API-DMAC7.html)
WO (1) WO2003001272A2 (cg-RX-API-DMAC7.html)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10318560A1 (de) * 2003-04-24 2004-11-11 Carl Zeiss Sms Gmbh Anordnung zur Inspektion von Objekten, insbesondere von Masken in der Mikrolithographie
DE10319269A1 (de) 2003-04-25 2004-11-25 Carl Zeiss Sms Gmbh Abbildungssystem für ein, auf extrem ultravioletter (EUV) Strahlung basierendem Mikroskop
DE102004009212B4 (de) * 2004-02-25 2015-08-20 Carl Zeiss Meditec Ag Kontaktelement für Laserbearbeitung und Laserbearbeitungsvorrichtung
DE102005042005A1 (de) 2004-12-23 2006-07-06 Carl Zeiss Smt Ag Hochaperturiges Objektiv mit obskurierter Pupille
DE102005062237A1 (de) * 2005-12-22 2007-07-05 Carl Zeiss Jena Gmbh Verfahren und Vorrichtung zur Untersuchung des Abbildungsverhaltens einer Abbildungsoptik
WO2007093433A1 (de) 2006-02-17 2007-08-23 Carl Zeiss Smt Ag Beleuchtungssystem für die mikro-lithographie, projektionsbelichtungsanlage mit einem derartigen beleuchtungssystem
DE102007023411A1 (de) 2006-12-28 2008-07-03 Carl Zeiss Smt Ag Optisches Element, Beleuchtungsoptik für die Mikrolithographie mit mindestens einem derartigen optischen Element sowie Beleuchtungssystem mit einer derartigen Beleuchtungsoptik
DE102007043896A1 (de) 2007-09-14 2009-04-02 Carl Zeiss Smt Ag Mikrooptik zur Messung der Position eines Luftbildes
JP5614448B2 (ja) * 2010-06-16 2014-10-29 株式会社ニコン 顕微鏡対物レンズ
EP2610662B1 (en) * 2010-08-25 2018-04-04 Nikon Corporation Microscope optical assembly and microscope system
DE102019124919B4 (de) 2019-09-17 2021-08-26 Ri Research Instruments Gmbh Mikroskopisches System zur Prüfung von Strukturen und Defekten auf EUV-Lithographie-Photomasken
US20220404262A1 (en) * 2019-11-06 2022-12-22 Sony Group Corporation Optical measurement device and lens structure
WO2022153736A1 (ja) * 2021-01-14 2022-07-21 ソニーグループ株式会社 粒子分析装置、粒子分析方法及び光学測定装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4032259A1 (de) * 1990-10-11 1992-04-16 Jenoptik Jena Gmbh Mikroskopobjektiv
JPH04361201A (ja) * 1991-06-10 1992-12-14 Olympus Optical Co Ltd フレネルゾーンプレートを用いた光学系
US5349471A (en) * 1993-02-16 1994-09-20 The University Of Rochester Hybrid refractive/diffractive achromatic lens for optical data storage systems
JPH08286113A (ja) * 1995-04-17 1996-11-01 Olympus Optical Co Ltd 対物レンズ
JPH09197283A (ja) * 1996-01-12 1997-07-31 Olympus Optical Co Ltd 対物レンズ
US5995286A (en) * 1997-03-07 1999-11-30 Minolta Co., Ltd. Diffractive optical element, an optical system having a diffractive optical element, and a method for manufacturing a diffractive optical element
JP3746894B2 (ja) * 1998-02-05 2006-02-15 ペンタックス株式会社 色消しレンズ系
JP4097781B2 (ja) * 1998-05-13 2008-06-11 オリンパス株式会社 対物レンズ
JP3950571B2 (ja) * 1999-03-10 2007-08-01 キヤノン株式会社 撮影光学系
JP2001100017A (ja) * 1999-09-29 2001-04-13 Canon Inc 光学素子

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