JP2004526942A - 容量性センサのアナログ出力信号を処理するための方法および装置 - Google Patents

容量性センサのアナログ出力信号を処理するための方法および装置 Download PDF

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JP2004526942A
JP2004526942A JP2002546232A JP2002546232A JP2004526942A JP 2004526942 A JP2004526942 A JP 2004526942A JP 2002546232 A JP2002546232 A JP 2002546232A JP 2002546232 A JP2002546232 A JP 2002546232A JP 2004526942 A JP2004526942 A JP 2004526942A
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signal
sensor
frequency
sampling
output signal
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JP2004526942A5 (enExample
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ヴォルフラム ガイガー
アレクサンダー ガイサー
ノルベルト ニクラッシュ
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ハーン−シッカート−ゲゼルシャフト フア アンゲワンテ フォルシュンク アインゲトラーゲナー フェライン
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719

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  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Gyroscopes (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
JP2002546232A 2000-12-01 2001-11-30 容量性センサのアナログ出力信号を処理するための方法および装置 Pending JP2004526942A (ja)

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DE10059775A DE10059775C2 (de) 2000-12-01 2000-12-01 Verfahren und Vorrichtung zur Verarbeitung von analogen Ausgangssignalen von kapazitiven Sensoren
PCT/EP2001/014022 WO2002044741A1 (de) 2000-12-01 2001-11-30 Verfahren und vorrichtung zur verarbeitung von analogen ausgangssignalen von kapazitiven sensoren

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JP2004526942A true JP2004526942A (ja) 2004-09-02
JP2004526942A5 JP2004526942A5 (enExample) 2005-04-28

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US (1) US7054778B2 (enExample)
EP (1) EP1337861B1 (enExample)
JP (1) JP2004526942A (enExample)
AT (1) ATE443872T1 (enExample)
DE (1) DE10059775C2 (enExample)
WO (1) WO2002044741A1 (enExample)

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JP2006170914A (ja) * 2004-12-17 2006-06-29 Matsushita Electric Works Ltd 角速度検出装置
JP2008064528A (ja) * 2006-09-06 2008-03-21 Toyota Motor Corp 容量変化検出装置およびその方法
JP2009210553A (ja) * 2008-02-07 2009-09-17 Denso Corp 周期信号処理装置
WO2010064562A1 (ja) * 2008-12-03 2010-06-10 日立オートモティブシステムズ株式会社 角速度検出装置
US8093926B2 (en) 2008-04-18 2012-01-10 Panasonic Corporation Physical quantity detection circuit and physical quantity sensor device

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DE102004003181B3 (de) 2004-01-22 2005-08-11 Robert Bosch Gmbh Mikromechanischer Sensor mit einer Auswerteschaltung
JP4411529B2 (ja) * 2004-08-05 2010-02-10 株式会社デンソー 振動型角速度センサ
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US7477711B2 (en) * 2005-05-19 2009-01-13 Mks Instruments, Inc. Synchronous undersampling for high-frequency voltage and current measurements
US8059102B2 (en) * 2006-06-13 2011-11-15 N-Trig Ltd. Fingertip touch recognition for a digitizer
JP5324440B2 (ja) 2006-07-12 2013-10-23 エヌ−トリグ リミテッド デジタイザのためのホバリングおよびタッチ検出
US8686964B2 (en) * 2006-07-13 2014-04-01 N-Trig Ltd. User specific recognition of intended user interaction with a digitizer
DE102006055589B4 (de) * 2006-11-24 2012-07-19 Infineon Technologies Ag Messvorrichtung und Messgrößensensor mit gekoppelter Verarbeitungs- und Anregungsfrequenz
US20100079170A1 (en) * 2008-09-29 2010-04-01 Infineon Technologies Ag Apparatus and method for the analysis of a periodic signal
IT1392553B1 (it) * 2008-12-11 2012-03-09 St Microelectronics Rousset Dispositivo elettronico a capacita' variabile e dispositivo microelettromeccanico incorporante tale dispositivo elettronico
US9278845B2 (en) 2010-09-18 2016-03-08 Fairchild Semiconductor Corporation MEMS multi-axis gyroscope Z-axis electrode structure
US9455354B2 (en) 2010-09-18 2016-09-27 Fairchild Semiconductor Corporation Micromachined 3-axis accelerometer with a single proof-mass
EP2616771B8 (en) 2010-09-18 2018-12-19 Fairchild Semiconductor Corporation Micromachined monolithic 6-axis inertial sensor
CN103221331B (zh) 2010-09-18 2016-02-03 快捷半导体公司 用于微机电系统的密封封装
DE112011103124B4 (de) 2010-09-18 2025-10-30 Fairchild Semiconductor Corporation Biegelager zum Verringern von Quadratur für mitschwingende mikromechanische Vorrichtungen
WO2012037492A2 (en) 2010-09-18 2012-03-22 Janusz Bryzek Multi-die mems package
EP2619130A4 (en) 2010-09-20 2014-12-10 Fairchild Semiconductor SILICONE CONTINUITY WITH REDUCED CROSS-CAPACITY
EP2619536B1 (en) 2010-09-20 2016-11-02 Fairchild Semiconductor Corporation Microelectromechanical pressure sensor including reference capacitor
DE102010041967A1 (de) 2010-10-05 2012-04-05 Zf Friedrichshafen Ag Verfahren zum Ermitteln einer Neigung eines Fahrzeuges in Fahrtrichtung
US9062972B2 (en) 2012-01-31 2015-06-23 Fairchild Semiconductor Corporation MEMS multi-axis accelerometer electrode structure
US8978475B2 (en) 2012-02-01 2015-03-17 Fairchild Semiconductor Corporation MEMS proof mass with split z-axis portions
US9488693B2 (en) 2012-04-04 2016-11-08 Fairchild Semiconductor Corporation Self test of MEMS accelerometer with ASICS integrated capacitors
US9069006B2 (en) 2012-04-05 2015-06-30 Fairchild Semiconductor Corporation Self test of MEMS gyroscope with ASICs integrated capacitors
EP2648334B1 (en) 2012-04-05 2020-06-10 Fairchild Semiconductor Corporation Mems device front-end charge amplifier
EP2647955B8 (en) 2012-04-05 2018-12-19 Fairchild Semiconductor Corporation MEMS device quadrature phase shift cancellation
EP2647952B1 (en) 2012-04-05 2017-11-15 Fairchild Semiconductor Corporation Mems device automatic-gain control loop for mechanical amplitude drive
US9094027B2 (en) 2012-04-12 2015-07-28 Fairchild Semiconductor Corporation Micro-electro-mechanical-system (MEMS) driver
US9625272B2 (en) 2012-04-12 2017-04-18 Fairchild Semiconductor Corporation MEMS quadrature cancellation and signal demodulation
DE102013014881B4 (de) 2012-09-12 2023-05-04 Fairchild Semiconductor Corporation Verbesserte Silizium-Durchkontaktierung mit einer Füllung aus mehreren Materialien
DE102013100045B4 (de) * 2012-12-18 2022-07-14 Endress + Hauser Wetzer Gmbh + Co Kg Verfahren und Vorrichtung zur Bestimmung einer Prozessgröße
US9644963B2 (en) 2013-03-15 2017-05-09 Fairchild Semiconductor Corporation Apparatus and methods for PLL-based gyroscope gain control, quadrature cancellation and demodulation
US9668035B2 (en) * 2014-04-18 2017-05-30 Rosemount Aerospace, Inc. Microelectromechanical rate sensor
DE102016207987A1 (de) * 2016-05-10 2017-11-16 Robert Bosch Gmbh Sensor- und/oder Aktorvorrichtung und Verfahren zum Versetzen einer seismischen Masse in harmonische Schwingungen
US20180335458A1 (en) * 2017-05-18 2018-11-22 Cirrus Logic International Semiconductor Ltd. Capacitance sensor
DE102020213286A1 (de) * 2020-10-21 2022-04-21 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren zur Bestimmung einer Phasenlage eines Drehratensignals oder eines Quadratursignals, Verfahren zur Anpassung einer Demodulationsphase und Drehratensensor
CN118707135B (zh) * 2024-06-06 2025-11-04 浙江大学 一种可变量程的摆式加速度计差分电容测量电路的制作方法

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006170914A (ja) * 2004-12-17 2006-06-29 Matsushita Electric Works Ltd 角速度検出装置
JP2008064528A (ja) * 2006-09-06 2008-03-21 Toyota Motor Corp 容量変化検出装置およびその方法
JP2009210553A (ja) * 2008-02-07 2009-09-17 Denso Corp 周期信号処理装置
US8151098B2 (en) 2008-02-07 2012-04-03 Denso Corporation Periodic signal processing apparatus
US8093926B2 (en) 2008-04-18 2012-01-10 Panasonic Corporation Physical quantity detection circuit and physical quantity sensor device
WO2010064562A1 (ja) * 2008-12-03 2010-06-10 日立オートモティブシステムズ株式会社 角速度検出装置
JP2010133804A (ja) * 2008-12-03 2010-06-17 Hitachi Automotive Systems Ltd 角速度検出装置

Also Published As

Publication number Publication date
EP1337861B1 (de) 2009-09-23
WO2002044741A1 (de) 2002-06-06
US20040174832A1 (en) 2004-09-09
DE10059775A1 (de) 2002-06-13
US7054778B2 (en) 2006-05-30
EP1337861A1 (de) 2003-08-27
ATE443872T1 (de) 2009-10-15
DE10059775C2 (de) 2003-11-27

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