JP2004526942A5 - - Google Patents

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Publication number
JP2004526942A5
JP2004526942A5 JP2002546232A JP2002546232A JP2004526942A5 JP 2004526942 A5 JP2004526942 A5 JP 2004526942A5 JP 2002546232 A JP2002546232 A JP 2002546232A JP 2002546232 A JP2002546232 A JP 2002546232A JP 2004526942 A5 JP2004526942 A5 JP 2004526942A5
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JP
Japan
Prior art keywords
output signal
sensor output
analog sensor
filtered
pass filter
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Pending
Application number
JP2002546232A
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English (en)
Japanese (ja)
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JP2004526942A (ja
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Publication date
Priority claimed from DE10059775A external-priority patent/DE10059775C2/de
Application filed filed Critical
Publication of JP2004526942A publication Critical patent/JP2004526942A/ja
Publication of JP2004526942A5 publication Critical patent/JP2004526942A5/ja
Pending legal-status Critical Current

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JP2002546232A 2000-12-01 2001-11-30 容量性センサのアナログ出力信号を処理するための方法および装置 Pending JP2004526942A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10059775A DE10059775C2 (de) 2000-12-01 2000-12-01 Verfahren und Vorrichtung zur Verarbeitung von analogen Ausgangssignalen von kapazitiven Sensoren
PCT/EP2001/014022 WO2002044741A1 (de) 2000-12-01 2001-11-30 Verfahren und vorrichtung zur verarbeitung von analogen ausgangssignalen von kapazitiven sensoren

Publications (2)

Publication Number Publication Date
JP2004526942A JP2004526942A (ja) 2004-09-02
JP2004526942A5 true JP2004526942A5 (enExample) 2005-04-28

Family

ID=7665445

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002546232A Pending JP2004526942A (ja) 2000-12-01 2001-11-30 容量性センサのアナログ出力信号を処理するための方法および装置

Country Status (6)

Country Link
US (1) US7054778B2 (enExample)
EP (1) EP1337861B1 (enExample)
JP (1) JP2004526942A (enExample)
AT (1) ATE443872T1 (enExample)
DE (1) DE10059775C2 (enExample)
WO (1) WO2002044741A1 (enExample)

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DE10307950B4 (de) * 2003-02-25 2005-10-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Einrichtung zur Überwachung einer rotierenden Welle und/oder daran angebrachter Elemente
DE10321962B4 (de) * 2003-05-15 2005-08-18 Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. Verfahren und Vorrichtung zum Simulieren einer Drehrate und Verwendung von simulierten Drehraten zur initialen Kalibrierung von Drehratensensoren oder zur In-Betrieb-Nachkalibrierung von Drehratensensoren
DE102004003181B3 (de) 2004-01-22 2005-08-11 Robert Bosch Gmbh Mikromechanischer Sensor mit einer Auswerteschaltung
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JP4600031B2 (ja) * 2004-12-17 2010-12-15 パナソニック電工株式会社 角速度検出装置
KR100688527B1 (ko) * 2005-02-03 2007-03-02 삼성전자주식회사 아날로그 반도체 장치를 테스트하는 디지털 테스트 장치
US7477711B2 (en) * 2005-05-19 2009-01-13 Mks Instruments, Inc. Synchronous undersampling for high-frequency voltage and current measurements
US8059102B2 (en) * 2006-06-13 2011-11-15 N-Trig Ltd. Fingertip touch recognition for a digitizer
JP5324440B2 (ja) 2006-07-12 2013-10-23 エヌ−トリグ リミテッド デジタイザのためのホバリングおよびタッチ検出
US8686964B2 (en) * 2006-07-13 2014-04-01 N-Trig Ltd. User specific recognition of intended user interaction with a digitizer
JP4816346B2 (ja) * 2006-09-06 2011-11-16 トヨタ自動車株式会社 容量変化検出装置およびその方法
DE102006055589B4 (de) * 2006-11-24 2012-07-19 Infineon Technologies Ag Messvorrichtung und Messgrößensensor mit gekoppelter Verarbeitungs- und Anregungsfrequenz
JP4591580B2 (ja) * 2008-02-07 2010-12-01 株式会社デンソー 周期信号処理装置
JP2009258009A (ja) 2008-04-18 2009-11-05 Panasonic Corp 物理量検出回路およびそれを備える物理量センサ装置
US20100079170A1 (en) * 2008-09-29 2010-04-01 Infineon Technologies Ag Apparatus and method for the analysis of a periodic signal
JP4879252B2 (ja) * 2008-12-03 2012-02-22 日立オートモティブシステムズ株式会社 角速度検出装置
IT1392553B1 (it) * 2008-12-11 2012-03-09 St Microelectronics Rousset Dispositivo elettronico a capacita' variabile e dispositivo microelettromeccanico incorporante tale dispositivo elettronico
US9278845B2 (en) 2010-09-18 2016-03-08 Fairchild Semiconductor Corporation MEMS multi-axis gyroscope Z-axis electrode structure
US9455354B2 (en) 2010-09-18 2016-09-27 Fairchild Semiconductor Corporation Micromachined 3-axis accelerometer with a single proof-mass
EP2616771B8 (en) 2010-09-18 2018-12-19 Fairchild Semiconductor Corporation Micromachined monolithic 6-axis inertial sensor
CN103221331B (zh) 2010-09-18 2016-02-03 快捷半导体公司 用于微机电系统的密封封装
DE112011103124B4 (de) 2010-09-18 2025-10-30 Fairchild Semiconductor Corporation Biegelager zum Verringern von Quadratur für mitschwingende mikromechanische Vorrichtungen
WO2012037492A2 (en) 2010-09-18 2012-03-22 Janusz Bryzek Multi-die mems package
EP2619130A4 (en) 2010-09-20 2014-12-10 Fairchild Semiconductor SILICONE CONTINUITY WITH REDUCED CROSS-CAPACITY
EP2619536B1 (en) 2010-09-20 2016-11-02 Fairchild Semiconductor Corporation Microelectromechanical pressure sensor including reference capacitor
DE102010041967A1 (de) 2010-10-05 2012-04-05 Zf Friedrichshafen Ag Verfahren zum Ermitteln einer Neigung eines Fahrzeuges in Fahrtrichtung
US9062972B2 (en) 2012-01-31 2015-06-23 Fairchild Semiconductor Corporation MEMS multi-axis accelerometer electrode structure
US8978475B2 (en) 2012-02-01 2015-03-17 Fairchild Semiconductor Corporation MEMS proof mass with split z-axis portions
US9488693B2 (en) 2012-04-04 2016-11-08 Fairchild Semiconductor Corporation Self test of MEMS accelerometer with ASICS integrated capacitors
US9069006B2 (en) 2012-04-05 2015-06-30 Fairchild Semiconductor Corporation Self test of MEMS gyroscope with ASICs integrated capacitors
EP2648334B1 (en) 2012-04-05 2020-06-10 Fairchild Semiconductor Corporation Mems device front-end charge amplifier
EP2647955B8 (en) 2012-04-05 2018-12-19 Fairchild Semiconductor Corporation MEMS device quadrature phase shift cancellation
EP2647952B1 (en) 2012-04-05 2017-11-15 Fairchild Semiconductor Corporation Mems device automatic-gain control loop for mechanical amplitude drive
US9094027B2 (en) 2012-04-12 2015-07-28 Fairchild Semiconductor Corporation Micro-electro-mechanical-system (MEMS) driver
US9625272B2 (en) 2012-04-12 2017-04-18 Fairchild Semiconductor Corporation MEMS quadrature cancellation and signal demodulation
DE102013014881B4 (de) 2012-09-12 2023-05-04 Fairchild Semiconductor Corporation Verbesserte Silizium-Durchkontaktierung mit einer Füllung aus mehreren Materialien
DE102013100045B4 (de) * 2012-12-18 2022-07-14 Endress + Hauser Wetzer Gmbh + Co Kg Verfahren und Vorrichtung zur Bestimmung einer Prozessgröße
US9644963B2 (en) 2013-03-15 2017-05-09 Fairchild Semiconductor Corporation Apparatus and methods for PLL-based gyroscope gain control, quadrature cancellation and demodulation
US9668035B2 (en) * 2014-04-18 2017-05-30 Rosemount Aerospace, Inc. Microelectromechanical rate sensor
DE102016207987A1 (de) * 2016-05-10 2017-11-16 Robert Bosch Gmbh Sensor- und/oder Aktorvorrichtung und Verfahren zum Versetzen einer seismischen Masse in harmonische Schwingungen
US20180335458A1 (en) * 2017-05-18 2018-11-22 Cirrus Logic International Semiconductor Ltd. Capacitance sensor
DE102020213286A1 (de) * 2020-10-21 2022-04-21 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren zur Bestimmung einer Phasenlage eines Drehratensignals oder eines Quadratursignals, Verfahren zur Anpassung einer Demodulationsphase und Drehratensensor
CN118707135B (zh) * 2024-06-06 2025-11-04 浙江大学 一种可变量程的摆式加速度计差分电容测量电路的制作方法

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US5805583A (en) * 1995-08-25 1998-09-08 Terayon Communication Systems Process for communicating multiple channels of digital data in distributed systems using synchronous code division multiple access
DE19653021A1 (de) 1996-12-19 1998-06-25 Bosch Gmbh Robert Vorrichtung zur Ermittlung einer Drehrate
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