JP2004526942A5 - - Google Patents
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- JP2004526942A5 JP2004526942A5 JP2002546232A JP2002546232A JP2004526942A5 JP 2004526942 A5 JP2004526942 A5 JP 2004526942A5 JP 2002546232 A JP2002546232 A JP 2002546232A JP 2002546232 A JP2002546232 A JP 2002546232A JP 2004526942 A5 JP2004526942 A5 JP 2004526942A5
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- JP
- Japan
- Prior art keywords
- output signal
- sensor output
- analog sensor
- filtered
- pass filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 238000005070 sampling Methods 0.000 claims 1
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Claims (1)
- 請求項5に記載の方法において、
上記アナログセンサ出力信号(S4)の低周波数成分を本質的に取り除くために、上記増幅されたアナログセンサ出力信号は、上記サンプリング工程の前にハイパスフィルタにより濾波されることを特徴とする方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10059775A DE10059775C2 (de) | 2000-12-01 | 2000-12-01 | Verfahren und Vorrichtung zur Verarbeitung von analogen Ausgangssignalen von kapazitiven Sensoren |
PCT/EP2001/014022 WO2002044741A1 (de) | 2000-12-01 | 2001-11-30 | Verfahren und vorrichtung zur verarbeitung von analogen ausgangssignalen von kapazitiven sensoren |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004526942A JP2004526942A (ja) | 2004-09-02 |
JP2004526942A5 true JP2004526942A5 (ja) | 2005-04-28 |
Family
ID=7665445
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002546232A Pending JP2004526942A (ja) | 2000-12-01 | 2001-11-30 | 容量性センサのアナログ出力信号を処理するための方法および装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7054778B2 (ja) |
EP (1) | EP1337861B1 (ja) |
JP (1) | JP2004526942A (ja) |
AT (1) | ATE443872T1 (ja) |
DE (1) | DE10059775C2 (ja) |
WO (1) | WO2002044741A1 (ja) |
Families Citing this family (43)
Publication number | Priority date | Publication date | Assignee | Title |
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DE10233604A1 (de) * | 2002-07-24 | 2004-02-19 | Alfred Brühn | Parametrische Verstärkungstechnik als Verfahren zur hochempfindlichen Phasenmessung in Vorrichtungen und Geräten als universelle Sensor- und Brückenverstärker |
DE10307950B4 (de) * | 2003-02-25 | 2005-10-27 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Einrichtung zur Überwachung einer rotierenden Welle und/oder daran angebrachter Elemente |
DE10321962B4 (de) * | 2003-05-15 | 2005-08-18 | Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. | Verfahren und Vorrichtung zum Simulieren einer Drehrate und Verwendung von simulierten Drehraten zur initialen Kalibrierung von Drehratensensoren oder zur In-Betrieb-Nachkalibrierung von Drehratensensoren |
DE102004003181B3 (de) * | 2004-01-22 | 2005-08-11 | Robert Bosch Gmbh | Mikromechanischer Sensor mit einer Auswerteschaltung |
JP4411529B2 (ja) * | 2004-08-05 | 2010-02-10 | 株式会社デンソー | 振動型角速度センサ |
JP4600031B2 (ja) * | 2004-12-17 | 2010-12-15 | パナソニック電工株式会社 | 角速度検出装置 |
KR100688527B1 (ko) * | 2005-02-03 | 2007-03-02 | 삼성전자주식회사 | 아날로그 반도체 장치를 테스트하는 디지털 테스트 장치 |
US7477711B2 (en) * | 2005-05-19 | 2009-01-13 | Mks Instruments, Inc. | Synchronous undersampling for high-frequency voltage and current measurements |
US8059102B2 (en) * | 2006-06-13 | 2011-11-15 | N-Trig Ltd. | Fingertip touch recognition for a digitizer |
WO2008007372A2 (en) | 2006-07-12 | 2008-01-17 | N-Trig Ltd. | Hover and touch detection for a digitizer |
US8686964B2 (en) * | 2006-07-13 | 2014-04-01 | N-Trig Ltd. | User specific recognition of intended user interaction with a digitizer |
JP4816346B2 (ja) * | 2006-09-06 | 2011-11-16 | トヨタ自動車株式会社 | 容量変化検出装置およびその方法 |
DE102006055589B4 (de) | 2006-11-24 | 2012-07-19 | Infineon Technologies Ag | Messvorrichtung und Messgrößensensor mit gekoppelter Verarbeitungs- und Anregungsfrequenz |
JP4591580B2 (ja) | 2008-02-07 | 2010-12-01 | 株式会社デンソー | 周期信号処理装置 |
JP2009258009A (ja) * | 2008-04-18 | 2009-11-05 | Panasonic Corp | 物理量検出回路およびそれを備える物理量センサ装置 |
US20100079170A1 (en) * | 2008-09-29 | 2010-04-01 | Infineon Technologies Ag | Apparatus and method for the analysis of a periodic signal |
JP4879252B2 (ja) * | 2008-12-03 | 2012-02-22 | 日立オートモティブシステムズ株式会社 | 角速度検出装置 |
IT1392553B1 (it) * | 2008-12-11 | 2012-03-09 | St Microelectronics Rousset | Dispositivo elettronico a capacita' variabile e dispositivo microelettromeccanico incorporante tale dispositivo elettronico |
US9278845B2 (en) | 2010-09-18 | 2016-03-08 | Fairchild Semiconductor Corporation | MEMS multi-axis gyroscope Z-axis electrode structure |
WO2012037540A2 (en) | 2010-09-18 | 2012-03-22 | Fairchild Semiconductor Corporation | Micromachined monolithic 3-axis gyroscope with single drive |
EP2616389B1 (en) | 2010-09-18 | 2017-04-05 | Fairchild Semiconductor Corporation | Multi-die mems package |
EP2616771B8 (en) | 2010-09-18 | 2018-12-19 | Fairchild Semiconductor Corporation | Micromachined monolithic 6-axis inertial sensor |
KR101443730B1 (ko) | 2010-09-18 | 2014-09-23 | 페어차일드 세미컨덕터 코포레이션 | 미세기계화 다이, 및 직교 오차가 작은 서스펜션을 제조하는 방법 |
WO2012037536A2 (en) | 2010-09-18 | 2012-03-22 | Fairchild Semiconductor Corporation | Packaging to reduce stress on microelectromechanical systems |
CN103221795B (zh) | 2010-09-20 | 2015-03-11 | 快捷半导体公司 | 包括参考电容器的微机电压力传感器 |
WO2012040245A2 (en) | 2010-09-20 | 2012-03-29 | Fairchild Semiconductor Corporation | Through silicon via with reduced shunt capacitance |
DE102010041967A1 (de) | 2010-10-05 | 2012-04-05 | Zf Friedrichshafen Ag | Verfahren zum Ermitteln einer Neigung eines Fahrzeuges in Fahrtrichtung |
US9062972B2 (en) | 2012-01-31 | 2015-06-23 | Fairchild Semiconductor Corporation | MEMS multi-axis accelerometer electrode structure |
US8978475B2 (en) | 2012-02-01 | 2015-03-17 | Fairchild Semiconductor Corporation | MEMS proof mass with split z-axis portions |
US9488693B2 (en) | 2012-04-04 | 2016-11-08 | Fairchild Semiconductor Corporation | Self test of MEMS accelerometer with ASICS integrated capacitors |
EP2648334B1 (en) | 2012-04-05 | 2020-06-10 | Fairchild Semiconductor Corporation | Mems device front-end charge amplifier |
EP2647955B8 (en) | 2012-04-05 | 2018-12-19 | Fairchild Semiconductor Corporation | MEMS device quadrature phase shift cancellation |
EP2647952B1 (en) | 2012-04-05 | 2017-11-15 | Fairchild Semiconductor Corporation | Mems device automatic-gain control loop for mechanical amplitude drive |
US9069006B2 (en) | 2012-04-05 | 2015-06-30 | Fairchild Semiconductor Corporation | Self test of MEMS gyroscope with ASICs integrated capacitors |
US9625272B2 (en) | 2012-04-12 | 2017-04-18 | Fairchild Semiconductor Corporation | MEMS quadrature cancellation and signal demodulation |
KR101999745B1 (ko) | 2012-04-12 | 2019-10-01 | 페어차일드 세미컨덕터 코포레이션 | 미세 전자 기계 시스템 구동기 |
DE102013014881B4 (de) | 2012-09-12 | 2023-05-04 | Fairchild Semiconductor Corporation | Verbesserte Silizium-Durchkontaktierung mit einer Füllung aus mehreren Materialien |
DE102013100045B4 (de) * | 2012-12-18 | 2022-07-14 | Endress + Hauser Wetzer Gmbh + Co Kg | Verfahren und Vorrichtung zur Bestimmung einer Prozessgröße |
US9644963B2 (en) | 2013-03-15 | 2017-05-09 | Fairchild Semiconductor Corporation | Apparatus and methods for PLL-based gyroscope gain control, quadrature cancellation and demodulation |
US9668035B2 (en) * | 2014-04-18 | 2017-05-30 | Rosemount Aerospace, Inc. | Microelectromechanical rate sensor |
DE102016207987A1 (de) * | 2016-05-10 | 2017-11-16 | Robert Bosch Gmbh | Sensor- und/oder Aktorvorrichtung und Verfahren zum Versetzen einer seismischen Masse in harmonische Schwingungen |
US20180335458A1 (en) * | 2017-05-18 | 2018-11-22 | Cirrus Logic International Semiconductor Ltd. | Capacitance sensor |
DE102020213286A1 (de) * | 2020-10-21 | 2022-04-21 | Robert Bosch Gesellschaft mit beschränkter Haftung | Verfahren zur Bestimmung einer Phasenlage eines Drehratensignals oder eines Quadratursignals, Verfahren zur Anpassung einer Demodulationsphase und Drehratensensor |
Family Cites Families (16)
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US4253066A (en) * | 1980-05-13 | 1981-02-24 | Fisher Charles B | Synchronous detection with sampling |
US4509017A (en) * | 1981-09-28 | 1985-04-02 | E-Systems, Inc. | Method and apparatus for pulse angle modulation |
US4547737A (en) * | 1983-07-29 | 1985-10-15 | Rca Corporation | Demodulator of sampled data FM signals from sets of four successive samples |
US5258720A (en) * | 1984-03-02 | 1993-11-02 | Itt Corporation | Digital sample and hold phase detector |
US4613974A (en) * | 1984-03-16 | 1986-09-23 | Vokac Peter R | Method and system for modulating a carrier signal |
US5142286A (en) * | 1990-10-01 | 1992-08-25 | General Electric Company | Read-out photodiodes using sigma-delta oversampled analog-to-digital converters |
US5162723A (en) * | 1991-02-11 | 1992-11-10 | Hewlett-Packard Company | Sampling signal analyzer |
US5461916A (en) * | 1992-08-21 | 1995-10-31 | Nippondenso Co., Ltd. | Mechanical force sensing semiconductor device |
US5459432A (en) * | 1993-07-22 | 1995-10-17 | Rockwell International Corporation | Use of a chopper and a sigma-delta modulator for downconverting and digitizing an analog signal including information modulated by a carrier |
US5512843A (en) * | 1993-11-15 | 1996-04-30 | Martin Marietta Energy Systems, Inc. | Monitoring method and apparatus using high-frequency carrier |
US5495204A (en) * | 1994-12-19 | 1996-02-27 | Bei Electronics, Inc. | Digital FM demodulator and method with enhanced resolution |
DE4447005A1 (de) * | 1994-12-29 | 1996-07-04 | Bosch Gmbh Robert | Vorrichtung zur Ermittlung einer Drehrate |
US5805583A (en) * | 1995-08-25 | 1998-09-08 | Terayon Communication Systems | Process for communicating multiple channels of digital data in distributed systems using synchronous code division multiple access |
DE19653021A1 (de) * | 1996-12-19 | 1998-06-25 | Bosch Gmbh Robert | Vorrichtung zur Ermittlung einer Drehrate |
DE19653020A1 (de) * | 1996-12-19 | 1998-06-25 | Bosch Gmbh Robert | Vorrichtung zur Ermittlung einer Drehrate |
DE10107547A1 (de) * | 2001-02-17 | 2002-08-29 | Bosch Gmbh Robert | Verfahren und Vorrichtung zur Synchronmodulation mehrfach modulierter Signale |
-
2000
- 2000-12-01 DE DE10059775A patent/DE10059775C2/de not_active Expired - Lifetime
-
2001
- 2001-11-30 US US10/433,177 patent/US7054778B2/en not_active Expired - Lifetime
- 2001-11-30 WO PCT/EP2001/014022 patent/WO2002044741A1/de active Application Filing
- 2001-11-30 EP EP01998839A patent/EP1337861B1/de not_active Expired - Lifetime
- 2001-11-30 JP JP2002546232A patent/JP2004526942A/ja active Pending
- 2001-11-30 AT AT01998839T patent/ATE443872T1/de active
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