JP2004525400A5 - - Google Patents

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Publication number
JP2004525400A5
JP2004525400A5 JP2002559742A JP2002559742A JP2004525400A5 JP 2004525400 A5 JP2004525400 A5 JP 2004525400A5 JP 2002559742 A JP2002559742 A JP 2002559742A JP 2002559742 A JP2002559742 A JP 2002559742A JP 2004525400 A5 JP2004525400 A5 JP 2004525400A5
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JP
Japan
Prior art keywords
grating
mems
tunable optical
portions
optical grating
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JP2002559742A
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English (en)
Japanese (ja)
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JP2004525400A (ja
JP3899031B2 (ja
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Priority claimed from US09/739,013 external-priority patent/US6628851B1/en
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Publication of JP2004525400A publication Critical patent/JP2004525400A/ja
Publication of JP2004525400A5 publication Critical patent/JP2004525400A5/ja
Application granted granted Critical
Publication of JP3899031B2 publication Critical patent/JP3899031B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2002559742A 2000-12-20 2001-12-06 Ｍｅｍｓリコンフィグレーション可能な光格子 Expired - Fee Related JP3899031B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/739,013 US6628851B1 (en) 2000-12-20 2000-12-20 MEMS reconfigurable optical grating
PCT/US2001/046980 WO2002059678A2 (en) 2000-12-20 2001-12-06 Mems reconfigurable optical grating

Publications (3)

Publication Number Publication Date
JP2004525400A JP2004525400A (ja) 2004-08-19
JP2004525400A5 true JP2004525400A5 (https=) 2005-04-21
JP3899031B2 JP3899031B2 (ja) 2007-03-28

Family

ID=24970449

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002559742A Expired - Fee Related JP3899031B2 (ja) 2000-12-20 2001-12-06 Ｍｅｍｓリコンフィグレーション可能な光格子

Country Status (9)

Country Link
US (1) US6628851B1 (https=)
EP (1) EP1346241B1 (https=)
JP (1) JP3899031B2 (https=)
KR (1) KR100493524B1 (https=)
CN (1) CN1275056C (https=)
AT (1) ATE298429T1 (https=)
AU (1) AU2002253803A1 (https=)
DE (1) DE60111649T2 (https=)
WO (1) WO2002059678A2 (https=)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030016911A1 (en) * 2001-07-19 2003-01-23 Samad Talebpour Random access optical add/drop switch
US6879755B2 (en) * 2001-07-25 2005-04-12 Teraxion Inc. Optical structure for the compensation of chromatic dispersion and dispersion slope in a light signal
US6865319B2 (en) * 2001-07-25 2005-03-08 Teraxion Inc. Optical structure for the compensation of chromatic dispersion in a light signal
US6973231B2 (en) * 2001-10-22 2005-12-06 International Optics Communications Corporation Waveguide grating-based wavelength selective switch actuated by thermal mechanism
US6891989B2 (en) * 2001-10-22 2005-05-10 Integrated Optics Communications Corporation Optical switch systems using waveguide grating-based wavelength selective switch modules
US20030179998A1 (en) * 2002-03-22 2003-09-25 Jianjun Zhang Switchable bragg grating filter
US20030123798A1 (en) * 2001-12-10 2003-07-03 Jianjun Zhang Wavelength-selective optical switch with integrated Bragg gratings
KR100478508B1 (ko) * 2002-08-29 2005-03-28 한국전자통신연구원 광신호 삽입/추출장치
US20040228574A1 (en) * 2003-05-14 2004-11-18 Yu Chen Switchable optical dispersion compensator using Bragg-grating
US20050018964A1 (en) * 2003-07-24 2005-01-27 Yu Chen Compensation of Bragg wavelength shift in a grating assisted direct coupler
US7173764B2 (en) * 2004-04-22 2007-02-06 Sandia Corporation Apparatus comprising a tunable nanomechanical near-field grating and method for controlling far-field emission
US20050265720A1 (en) * 2004-05-28 2005-12-01 Peiching Ling Wavelength division multiplexing add/drop system employing optical switches and interleavers
US8195118B2 (en) 2008-07-15 2012-06-05 Linear Signal, Inc. Apparatus, system, and method for integrated phase shifting and amplitude control of phased array signals
US8699141B2 (en) 2009-03-13 2014-04-15 Knowles Electronics, Llc Lens assembly apparatus and method
US8659835B2 (en) 2009-03-13 2014-02-25 Optotune Ag Lens systems and method
US20100290503A1 (en) * 2009-05-13 2010-11-18 Prime Photonics, Lc Ultra-High Temperature Distributed Wireless Sensors
US8872719B2 (en) 2009-11-09 2014-10-28 Linear Signal, Inc. Apparatus, system, and method for integrated modular phased array tile configuration
US8737846B2 (en) * 2012-01-30 2014-05-27 Oracle International Corporation Dynamic-grid comb optical source
US9412480B2 (en) 2013-05-09 2016-08-09 Uchicago Argonne, Llc Diffraction leveraged modulation of X-ray pulses using MEMS-based X-ray optics
CN104459677B (zh) * 2014-12-23 2017-02-22 苏州江奥光电科技有限公司 一种复合游标式光栅及其测距系统
EP3635460B1 (en) * 2017-06-07 2021-12-08 The Charles Stark Draper Laboratory, Inc. Integrated mems switches for selectively coupling light in and out of a waveguide
WO2020087016A1 (en) 2018-10-26 2020-04-30 The Charles Stark Draper Laboratory, Inc. Adaptive lidar scanning techniques for improved frame rate and safety

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2669120A1 (fr) 1990-11-13 1992-05-15 Thomson Csf Modulateur spatial bidimensionnel de lumiere a commande piezoelectrique, comprenant un reseau de bragg.
JP2986604B2 (ja) 1992-01-13 1999-12-06 キヤノン株式会社 半導体光フィルタ、その選択波長の制御方法及びそれを用いた光通信システム
FR2716303B1 (fr) * 1994-02-11 1996-04-05 Franck Delorme Laser à réflecteurs de Bragg distribués, accordable en longueur d'onde, à réseaux de diffraction virtuels activés sélectivement.
US5502782A (en) * 1995-01-09 1996-03-26 Optelecom, Inc. Focused acoustic wave fiber optic reflection modulator
US5781341A (en) 1995-06-30 1998-07-14 Dicon Fiberoptics, Inc. Motorized tunable filter and motorized variable attenuator
US5757536A (en) 1995-08-30 1998-05-26 Sandia Corporation Electrically-programmable diffraction grating
IL116536A0 (en) 1995-12-24 1996-03-31 Harunian Dan Direct integration of sensing mechanisms with single crystal based micro-electric-mechanics systems
WO1997031289A1 (en) 1996-02-23 1997-08-28 Electrophotonics Corporation Apparatus and method for controlling the spectral response of a waveguide bragg grating
US5699468A (en) * 1996-06-28 1997-12-16 Jds Fitel Inc. Bragg grating variable optical attenuator
US5706375A (en) * 1996-09-10 1998-01-06 Jds Fitel Inc. Variable-attenuation tunable optical router
US6124663A (en) 1996-12-16 2000-09-26 The Boeing Company Fiber optic connector having a microelectromechanical positioning apparatus and an associated fabrication method
US5962949A (en) 1996-12-16 1999-10-05 Mcnc Microelectromechanical positioning apparatus
US6097859A (en) 1998-02-12 2000-08-01 The Regents Of The University Of California Multi-wavelength cross-connect optical switch
US6069392A (en) 1997-04-11 2000-05-30 California Institute Of Technology Microbellows actuator
US5999319A (en) 1997-05-02 1999-12-07 Interscience, Inc. Reconfigurable compound diffraction grating
US5808384A (en) * 1997-06-05 1998-09-15 Wisconsin Alumni Research Foundation Single coil bistable, bidirectional micromechanical actuator
US6035080A (en) 1997-06-20 2000-03-07 Henry; Charles Howard Reconfigurable add-drop multiplexer for optical communications systems
US6122095A (en) 1997-08-29 2000-09-19 Lucent Technologies Inc. Wavelength-selective and loss-less optical add/drop multiplexer
US6127908A (en) 1997-11-17 2000-10-03 Massachusetts Institute Of Technology Microelectro-mechanical system actuator device and reconfigurable circuits utilizing same
US5974207A (en) 1997-12-23 1999-10-26 Lucent Technologies, Inc. Article comprising a wavelength-selective add-drop multiplexer
US6011881A (en) 1997-12-29 2000-01-04 Ifos, Intelligent Fiber Optic Systems Fiber-optic tunable filter
US5960131A (en) 1998-02-04 1999-09-28 Hewlett-Packard Company Switching element having an expanding waveguide core
US6282340B1 (en) * 1998-04-23 2001-08-28 The Furukawa Electric Co., Ltd. Light wavelength tuning device and light source optical demultiplexer and wavelength division multiplexed optical communication system using the tuning device
US6055348A (en) 1998-09-23 2000-04-25 Lucent Technologies Inc. Tunable grating device and optical communication devices and systems comprising same
US6154471A (en) * 1999-02-22 2000-11-28 Lucent Technologies Inc. Magnetically tunable and latchable broad-range semiconductor laser
US6363183B1 (en) * 2000-01-04 2002-03-26 Seungug Koh Reconfigurable and scalable intergrated optic waveguide add/drop multiplexing element using micro-opto-electro-mechanical systems and methods of fabricating thereof
US6529659B2 (en) 2000-05-02 2003-03-04 Parvenu, Inc. Waveguide tunable Bragg grating using compliant microelectromechanical system (MEMS) technology
US6396855B1 (en) * 2000-10-06 2002-05-28 The Hong Kong Polytechnic University Fibre gratings

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