JP3899031B2 - Ｍｅｍｓリコンフィグレーション可能な光格子 - Google Patents

Ｍｅｍｓリコンフィグレーション可能な光格子 Download PDF

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Publication number
JP3899031B2
JP3899031B2 JP2002559742A JP2002559742A JP3899031B2 JP 3899031 B2 JP3899031 B2 JP 3899031B2 JP 2002559742 A JP2002559742 A JP 2002559742A JP 2002559742 A JP2002559742 A JP 2002559742A JP 3899031 B2 JP3899031 B2 JP 3899031B2
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JP
Japan
Prior art keywords
grating
mems
optical
bragg
tunable optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP2002559742A
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English (en)
Japanese (ja)
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JP2004525400A (ja
JP2004525400A5 (https=
Inventor
シー ランプフ，レイモンド
エム ニュートン，チャールズ
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Harris Corp
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Harris Corp
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Publication date
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Publication of JP2004525400A publication Critical patent/JP2004525400A/ja
Publication of JP2004525400A5 publication Critical patent/JP2004525400A5/ja
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Publication of JP3899031B2 publication Critical patent/JP3899031B2/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1828—Diffraction gratings having means for producing variable diffraction
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29304—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating
    • G02B6/29305—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating as bulk element, i.e. free space arrangement external to a light guide
    • G02B6/29313—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating as bulk element, i.e. free space arrangement external to a light guide characterised by means for controlling the position or direction of light incident to or leaving the diffractive element, e.g. for varying the wavelength response
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
    • G02B6/2938—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device for multiplexing or demultiplexing, i.e. combining or separating wavelengths, e.g. 1xN, NxM
    • G02B6/29382—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device for multiplexing or demultiplexing, i.e. combining or separating wavelengths, e.g. 1xN, NxM including at least adding or dropping a signal, i.e. passing the majority of signals
    • G02B6/29383—Adding and dropping
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3566—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details involving bending a beam, e.g. with cantilever
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/358—Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Integrated Circuits (AREA)
  • Semiconductor Lasers (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Lenses (AREA)
  • Eyeglasses (AREA)
JP2002559742A 2000-12-20 2001-12-06 Ｍｅｍｓリコンフィグレーション可能な光格子 Expired - Fee Related JP3899031B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/739,013 US6628851B1 (en) 2000-12-20 2000-12-20 MEMS reconfigurable optical grating
PCT/US2001/046980 WO2002059678A2 (en) 2000-12-20 2001-12-06 Mems reconfigurable optical grating

Publications (3)

Publication Number Publication Date
JP2004525400A JP2004525400A (ja) 2004-08-19
JP2004525400A5 JP2004525400A5 (https=) 2005-04-21
JP3899031B2 true JP3899031B2 (ja) 2007-03-28

Family

ID=24970449

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002559742A Expired - Fee Related JP3899031B2 (ja) 2000-12-20 2001-12-06 Ｍｅｍｓリコンフィグレーション可能な光格子

Country Status (9)

Country Link
US (1) US6628851B1 (https=)
EP (1) EP1346241B1 (https=)
JP (1) JP3899031B2 (https=)
KR (1) KR100493524B1 (https=)
CN (1) CN1275056C (https=)
AT (1) ATE298429T1 (https=)
AU (1) AU2002253803A1 (https=)
DE (1) DE60111649T2 (https=)
WO (1) WO2002059678A2 (https=)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030016911A1 (en) * 2001-07-19 2003-01-23 Samad Talebpour Random access optical add/drop switch
US6879755B2 (en) * 2001-07-25 2005-04-12 Teraxion Inc. Optical structure for the compensation of chromatic dispersion and dispersion slope in a light signal
US6865319B2 (en) * 2001-07-25 2005-03-08 Teraxion Inc. Optical structure for the compensation of chromatic dispersion in a light signal
US6973231B2 (en) * 2001-10-22 2005-12-06 International Optics Communications Corporation Waveguide grating-based wavelength selective switch actuated by thermal mechanism
US6891989B2 (en) * 2001-10-22 2005-05-10 Integrated Optics Communications Corporation Optical switch systems using waveguide grating-based wavelength selective switch modules
US20030179998A1 (en) * 2002-03-22 2003-09-25 Jianjun Zhang Switchable bragg grating filter
US20030123798A1 (en) * 2001-12-10 2003-07-03 Jianjun Zhang Wavelength-selective optical switch with integrated Bragg gratings
KR100478508B1 (ko) * 2002-08-29 2005-03-28 한국전자통신연구원 광신호 삽입/추출장치
US20040228574A1 (en) * 2003-05-14 2004-11-18 Yu Chen Switchable optical dispersion compensator using Bragg-grating
US20050018964A1 (en) * 2003-07-24 2005-01-27 Yu Chen Compensation of Bragg wavelength shift in a grating assisted direct coupler
US7173764B2 (en) * 2004-04-22 2007-02-06 Sandia Corporation Apparatus comprising a tunable nanomechanical near-field grating and method for controlling far-field emission
US20050265720A1 (en) * 2004-05-28 2005-12-01 Peiching Ling Wavelength division multiplexing add/drop system employing optical switches and interleavers
US8195118B2 (en) 2008-07-15 2012-06-05 Linear Signal, Inc. Apparatus, system, and method for integrated phase shifting and amplitude control of phased array signals
US8699141B2 (en) 2009-03-13 2014-04-15 Knowles Electronics, Llc Lens assembly apparatus and method
US8659835B2 (en) 2009-03-13 2014-02-25 Optotune Ag Lens systems and method
US20100290503A1 (en) * 2009-05-13 2010-11-18 Prime Photonics, Lc Ultra-High Temperature Distributed Wireless Sensors
US8872719B2 (en) 2009-11-09 2014-10-28 Linear Signal, Inc. Apparatus, system, and method for integrated modular phased array tile configuration
US8737846B2 (en) * 2012-01-30 2014-05-27 Oracle International Corporation Dynamic-grid comb optical source
US9412480B2 (en) 2013-05-09 2016-08-09 Uchicago Argonne, Llc Diffraction leveraged modulation of X-ray pulses using MEMS-based X-ray optics
CN104459677B (zh) * 2014-12-23 2017-02-22 苏州江奥光电科技有限公司 一种复合游标式光栅及其测距系统
EP3635460B1 (en) * 2017-06-07 2021-12-08 The Charles Stark Draper Laboratory, Inc. Integrated mems switches for selectively coupling light in and out of a waveguide
WO2020087016A1 (en) 2018-10-26 2020-04-30 The Charles Stark Draper Laboratory, Inc. Adaptive lidar scanning techniques for improved frame rate and safety

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2669120A1 (fr) 1990-11-13 1992-05-15 Thomson Csf Modulateur spatial bidimensionnel de lumiere a commande piezoelectrique, comprenant un reseau de bragg.
JP2986604B2 (ja) 1992-01-13 1999-12-06 キヤノン株式会社 半導体光フィルタ、その選択波長の制御方法及びそれを用いた光通信システム
FR2716303B1 (fr) * 1994-02-11 1996-04-05 Franck Delorme Laser à réflecteurs de Bragg distribués, accordable en longueur d'onde, à réseaux de diffraction virtuels activés sélectivement.
US5502782A (en) * 1995-01-09 1996-03-26 Optelecom, Inc. Focused acoustic wave fiber optic reflection modulator
US5781341A (en) 1995-06-30 1998-07-14 Dicon Fiberoptics, Inc. Motorized tunable filter and motorized variable attenuator
US5757536A (en) 1995-08-30 1998-05-26 Sandia Corporation Electrically-programmable diffraction grating
IL116536A0 (en) 1995-12-24 1996-03-31 Harunian Dan Direct integration of sensing mechanisms with single crystal based micro-electric-mechanics systems
WO1997031289A1 (en) 1996-02-23 1997-08-28 Electrophotonics Corporation Apparatus and method for controlling the spectral response of a waveguide bragg grating
US5699468A (en) * 1996-06-28 1997-12-16 Jds Fitel Inc. Bragg grating variable optical attenuator
US5706375A (en) * 1996-09-10 1998-01-06 Jds Fitel Inc. Variable-attenuation tunable optical router
US6124663A (en) 1996-12-16 2000-09-26 The Boeing Company Fiber optic connector having a microelectromechanical positioning apparatus and an associated fabrication method
US5962949A (en) 1996-12-16 1999-10-05 Mcnc Microelectromechanical positioning apparatus
US6097859A (en) 1998-02-12 2000-08-01 The Regents Of The University Of California Multi-wavelength cross-connect optical switch
US6069392A (en) 1997-04-11 2000-05-30 California Institute Of Technology Microbellows actuator
US5999319A (en) 1997-05-02 1999-12-07 Interscience, Inc. Reconfigurable compound diffraction grating
US5808384A (en) * 1997-06-05 1998-09-15 Wisconsin Alumni Research Foundation Single coil bistable, bidirectional micromechanical actuator
US6035080A (en) 1997-06-20 2000-03-07 Henry; Charles Howard Reconfigurable add-drop multiplexer for optical communications systems
US6122095A (en) 1997-08-29 2000-09-19 Lucent Technologies Inc. Wavelength-selective and loss-less optical add/drop multiplexer
US6127908A (en) 1997-11-17 2000-10-03 Massachusetts Institute Of Technology Microelectro-mechanical system actuator device and reconfigurable circuits utilizing same
US5974207A (en) 1997-12-23 1999-10-26 Lucent Technologies, Inc. Article comprising a wavelength-selective add-drop multiplexer
US6011881A (en) 1997-12-29 2000-01-04 Ifos, Intelligent Fiber Optic Systems Fiber-optic tunable filter
US5960131A (en) 1998-02-04 1999-09-28 Hewlett-Packard Company Switching element having an expanding waveguide core
US6282340B1 (en) * 1998-04-23 2001-08-28 The Furukawa Electric Co., Ltd. Light wavelength tuning device and light source optical demultiplexer and wavelength division multiplexed optical communication system using the tuning device
US6055348A (en) 1998-09-23 2000-04-25 Lucent Technologies Inc. Tunable grating device and optical communication devices and systems comprising same
US6154471A (en) * 1999-02-22 2000-11-28 Lucent Technologies Inc. Magnetically tunable and latchable broad-range semiconductor laser
US6363183B1 (en) * 2000-01-04 2002-03-26 Seungug Koh Reconfigurable and scalable intergrated optic waveguide add/drop multiplexing element using micro-opto-electro-mechanical systems and methods of fabricating thereof
US6529659B2 (en) 2000-05-02 2003-03-04 Parvenu, Inc. Waveguide tunable Bragg grating using compliant microelectromechanical system (MEMS) technology
US6396855B1 (en) * 2000-10-06 2002-05-28 The Hong Kong Polytechnic University Fibre gratings

Also Published As

Publication number Publication date
CN1275056C (zh) 2006-09-13
JP2004525400A (ja) 2004-08-19
CN1620618A (zh) 2005-05-25
DE60111649T2 (de) 2006-05-18
AU2002253803A1 (en) 2002-08-06
ATE298429T1 (de) 2005-07-15
KR100493524B1 (ko) 2005-06-07
EP1346241B1 (en) 2005-06-22
US20030194179A1 (en) 2003-10-16
DE60111649D1 (de) 2005-07-28
WO2002059678A2 (en) 2002-08-01
EP1346241A2 (en) 2003-09-24
KR20030064850A (ko) 2003-08-02
US6628851B1 (en) 2003-09-30
WO2002059678A3 (en) 2003-06-05

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