KR100493524B1 - 미세-전자기계로 재구성 가능한 광학격자 - Google Patents
미세-전자기계로 재구성 가능한 광학격자 Download PDFInfo
- Publication number
- KR100493524B1 KR100493524B1 KR10-2003-7008318A KR20037008318A KR100493524B1 KR 100493524 B1 KR100493524 B1 KR 100493524B1 KR 20037008318 A KR20037008318 A KR 20037008318A KR 100493524 B1 KR100493524 B1 KR 100493524B1
- Authority
- KR
- South Korea
- Prior art keywords
- grating
- delete delete
- optical
- micro
- electromechanical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 77
- 230000005540 biological transmission Effects 0.000 claims abstract description 9
- 230000008878 coupling Effects 0.000 claims description 12
- 238000010168 coupling process Methods 0.000 claims description 12
- 238000005859 coupling reaction Methods 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 10
- 229910052710 silicon Inorganic materials 0.000 claims description 10
- 239000010703 silicon Substances 0.000 claims description 10
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 claims description 6
- 230000000737 periodic effect Effects 0.000 claims description 5
- 239000002356 single layer Substances 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 4
- 238000000206 photolithography Methods 0.000 claims description 3
- 238000000926 separation method Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 12
- 239000004065 semiconductor Substances 0.000 description 8
- 230000008859 change Effects 0.000 description 5
- 230000033001 locomotion Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
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- 239000013307 optical fiber Substances 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
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- 239000011521 glass Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
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- 230000003595 spectral effect Effects 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
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- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
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- 230000008569 process Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000010897 surface acoustic wave method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1828—Diffraction gratings having means for producing variable diffraction
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29304—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating
- G02B6/29305—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating as bulk element, i.e. free space arrangement external to a light guide
- G02B6/29313—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating as bulk element, i.e. free space arrangement external to a light guide characterised by means for controlling the position or direction of light incident to or leaving the diffractive element, e.g. for varying the wavelength response
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
- G02B6/2938—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device for multiplexing or demultiplexing, i.e. combining or separating wavelengths, e.g. 1xN, NxM
- G02B6/29382—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device for multiplexing or demultiplexing, i.e. combining or separating wavelengths, e.g. 1xN, NxM including at least adding or dropping a signal, i.e. passing the majority of signals
- G02B6/29383—Adding and dropping
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3566—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details involving bending a beam, e.g. with cantilever
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/357—Electrostatic force
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/358—Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Integrated Circuits (AREA)
- Semiconductor Lasers (AREA)
- Optical Couplings Of Light Guides (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Lenses (AREA)
- Eyeglasses (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/739,013 | 2000-12-20 | ||
| US09/739,013 US6628851B1 (en) | 2000-12-20 | 2000-12-20 | MEMS reconfigurable optical grating |
| PCT/US2001/046980 WO2002059678A2 (en) | 2000-12-20 | 2001-12-06 | Mems reconfigurable optical grating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20030064850A KR20030064850A (ko) | 2003-08-02 |
| KR100493524B1 true KR100493524B1 (ko) | 2005-06-07 |
Family
ID=24970449
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR10-2003-7008318A Expired - Lifetime KR100493524B1 (ko) | 2000-12-20 | 2001-12-06 | 미세-전자기계로 재구성 가능한 광학격자 |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US6628851B1 (https=) |
| EP (1) | EP1346241B1 (https=) |
| JP (1) | JP3899031B2 (https=) |
| KR (1) | KR100493524B1 (https=) |
| CN (1) | CN1275056C (https=) |
| AT (1) | ATE298429T1 (https=) |
| AU (1) | AU2002253803A1 (https=) |
| DE (1) | DE60111649T2 (https=) |
| WO (1) | WO2002059678A2 (https=) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030016911A1 (en) * | 2001-07-19 | 2003-01-23 | Samad Talebpour | Random access optical add/drop switch |
| US6879755B2 (en) * | 2001-07-25 | 2005-04-12 | Teraxion Inc. | Optical structure for the compensation of chromatic dispersion and dispersion slope in a light signal |
| US6865319B2 (en) * | 2001-07-25 | 2005-03-08 | Teraxion Inc. | Optical structure for the compensation of chromatic dispersion in a light signal |
| US6973231B2 (en) * | 2001-10-22 | 2005-12-06 | International Optics Communications Corporation | Waveguide grating-based wavelength selective switch actuated by thermal mechanism |
| US6891989B2 (en) * | 2001-10-22 | 2005-05-10 | Integrated Optics Communications Corporation | Optical switch systems using waveguide grating-based wavelength selective switch modules |
| US20030179998A1 (en) * | 2002-03-22 | 2003-09-25 | Jianjun Zhang | Switchable bragg grating filter |
| US20030123798A1 (en) * | 2001-12-10 | 2003-07-03 | Jianjun Zhang | Wavelength-selective optical switch with integrated Bragg gratings |
| KR100478508B1 (ko) * | 2002-08-29 | 2005-03-28 | 한국전자통신연구원 | 광신호 삽입/추출장치 |
| US20040228574A1 (en) * | 2003-05-14 | 2004-11-18 | Yu Chen | Switchable optical dispersion compensator using Bragg-grating |
| US20050018964A1 (en) * | 2003-07-24 | 2005-01-27 | Yu Chen | Compensation of Bragg wavelength shift in a grating assisted direct coupler |
| US7173764B2 (en) * | 2004-04-22 | 2007-02-06 | Sandia Corporation | Apparatus comprising a tunable nanomechanical near-field grating and method for controlling far-field emission |
| US20050265720A1 (en) * | 2004-05-28 | 2005-12-01 | Peiching Ling | Wavelength division multiplexing add/drop system employing optical switches and interleavers |
| US8195118B2 (en) | 2008-07-15 | 2012-06-05 | Linear Signal, Inc. | Apparatus, system, and method for integrated phase shifting and amplitude control of phased array signals |
| US8699141B2 (en) | 2009-03-13 | 2014-04-15 | Knowles Electronics, Llc | Lens assembly apparatus and method |
| US8659835B2 (en) | 2009-03-13 | 2014-02-25 | Optotune Ag | Lens systems and method |
| US20100290503A1 (en) * | 2009-05-13 | 2010-11-18 | Prime Photonics, Lc | Ultra-High Temperature Distributed Wireless Sensors |
| US8872719B2 (en) | 2009-11-09 | 2014-10-28 | Linear Signal, Inc. | Apparatus, system, and method for integrated modular phased array tile configuration |
| US8737846B2 (en) * | 2012-01-30 | 2014-05-27 | Oracle International Corporation | Dynamic-grid comb optical source |
| US9412480B2 (en) | 2013-05-09 | 2016-08-09 | Uchicago Argonne, Llc | Diffraction leveraged modulation of X-ray pulses using MEMS-based X-ray optics |
| CN104459677B (zh) * | 2014-12-23 | 2017-02-22 | 苏州江奥光电科技有限公司 | 一种复合游标式光栅及其测距系统 |
| EP3635460B1 (en) * | 2017-06-07 | 2021-12-08 | The Charles Stark Draper Laboratory, Inc. | Integrated mems switches for selectively coupling light in and out of a waveguide |
| WO2020087016A1 (en) | 2018-10-26 | 2020-04-30 | The Charles Stark Draper Laboratory, Inc. | Adaptive lidar scanning techniques for improved frame rate and safety |
Family Cites Families (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2669120A1 (fr) | 1990-11-13 | 1992-05-15 | Thomson Csf | Modulateur spatial bidimensionnel de lumiere a commande piezoelectrique, comprenant un reseau de bragg. |
| JP2986604B2 (ja) | 1992-01-13 | 1999-12-06 | キヤノン株式会社 | 半導体光フィルタ、その選択波長の制御方法及びそれを用いた光通信システム |
| FR2716303B1 (fr) * | 1994-02-11 | 1996-04-05 | Franck Delorme | Laser à réflecteurs de Bragg distribués, accordable en longueur d'onde, à réseaux de diffraction virtuels activés sélectivement. |
| US5502782A (en) * | 1995-01-09 | 1996-03-26 | Optelecom, Inc. | Focused acoustic wave fiber optic reflection modulator |
| US5781341A (en) | 1995-06-30 | 1998-07-14 | Dicon Fiberoptics, Inc. | Motorized tunable filter and motorized variable attenuator |
| US5757536A (en) | 1995-08-30 | 1998-05-26 | Sandia Corporation | Electrically-programmable diffraction grating |
| IL116536A0 (en) | 1995-12-24 | 1996-03-31 | Harunian Dan | Direct integration of sensing mechanisms with single crystal based micro-electric-mechanics systems |
| WO1997031289A1 (en) | 1996-02-23 | 1997-08-28 | Electrophotonics Corporation | Apparatus and method for controlling the spectral response of a waveguide bragg grating |
| US5699468A (en) * | 1996-06-28 | 1997-12-16 | Jds Fitel Inc. | Bragg grating variable optical attenuator |
| US5706375A (en) * | 1996-09-10 | 1998-01-06 | Jds Fitel Inc. | Variable-attenuation tunable optical router |
| US6124663A (en) | 1996-12-16 | 2000-09-26 | The Boeing Company | Fiber optic connector having a microelectromechanical positioning apparatus and an associated fabrication method |
| US5962949A (en) | 1996-12-16 | 1999-10-05 | Mcnc | Microelectromechanical positioning apparatus |
| US6097859A (en) | 1998-02-12 | 2000-08-01 | The Regents Of The University Of California | Multi-wavelength cross-connect optical switch |
| US6069392A (en) | 1997-04-11 | 2000-05-30 | California Institute Of Technology | Microbellows actuator |
| US5999319A (en) | 1997-05-02 | 1999-12-07 | Interscience, Inc. | Reconfigurable compound diffraction grating |
| US5808384A (en) * | 1997-06-05 | 1998-09-15 | Wisconsin Alumni Research Foundation | Single coil bistable, bidirectional micromechanical actuator |
| US6035080A (en) | 1997-06-20 | 2000-03-07 | Henry; Charles Howard | Reconfigurable add-drop multiplexer for optical communications systems |
| US6122095A (en) | 1997-08-29 | 2000-09-19 | Lucent Technologies Inc. | Wavelength-selective and loss-less optical add/drop multiplexer |
| US6127908A (en) | 1997-11-17 | 2000-10-03 | Massachusetts Institute Of Technology | Microelectro-mechanical system actuator device and reconfigurable circuits utilizing same |
| US5974207A (en) | 1997-12-23 | 1999-10-26 | Lucent Technologies, Inc. | Article comprising a wavelength-selective add-drop multiplexer |
| US6011881A (en) | 1997-12-29 | 2000-01-04 | Ifos, Intelligent Fiber Optic Systems | Fiber-optic tunable filter |
| US5960131A (en) | 1998-02-04 | 1999-09-28 | Hewlett-Packard Company | Switching element having an expanding waveguide core |
| US6282340B1 (en) * | 1998-04-23 | 2001-08-28 | The Furukawa Electric Co., Ltd. | Light wavelength tuning device and light source optical demultiplexer and wavelength division multiplexed optical communication system using the tuning device |
| US6055348A (en) | 1998-09-23 | 2000-04-25 | Lucent Technologies Inc. | Tunable grating device and optical communication devices and systems comprising same |
| US6154471A (en) * | 1999-02-22 | 2000-11-28 | Lucent Technologies Inc. | Magnetically tunable and latchable broad-range semiconductor laser |
| US6363183B1 (en) * | 2000-01-04 | 2002-03-26 | Seungug Koh | Reconfigurable and scalable intergrated optic waveguide add/drop multiplexing element using micro-opto-electro-mechanical systems and methods of fabricating thereof |
| US6529659B2 (en) | 2000-05-02 | 2003-03-04 | Parvenu, Inc. | Waveguide tunable Bragg grating using compliant microelectromechanical system (MEMS) technology |
| US6396855B1 (en) * | 2000-10-06 | 2002-05-28 | The Hong Kong Polytechnic University | Fibre gratings |
-
2000
- 2000-12-20 US US09/739,013 patent/US6628851B1/en not_active Expired - Lifetime
-
2001
- 2001-12-06 EP EP01270125A patent/EP1346241B1/en not_active Expired - Lifetime
- 2001-12-06 AT AT01270125T patent/ATE298429T1/de not_active IP Right Cessation
- 2001-12-06 KR KR10-2003-7008318A patent/KR100493524B1/ko not_active Expired - Lifetime
- 2001-12-06 CN CNB018221289A patent/CN1275056C/zh not_active Expired - Fee Related
- 2001-12-06 AU AU2002253803A patent/AU2002253803A1/en not_active Abandoned
- 2001-12-06 DE DE60111649T patent/DE60111649T2/de not_active Expired - Lifetime
- 2001-12-06 WO PCT/US2001/046980 patent/WO2002059678A2/en not_active Ceased
- 2001-12-06 JP JP2002559742A patent/JP3899031B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN1275056C (zh) | 2006-09-13 |
| JP2004525400A (ja) | 2004-08-19 |
| CN1620618A (zh) | 2005-05-25 |
| DE60111649T2 (de) | 2006-05-18 |
| AU2002253803A1 (en) | 2002-08-06 |
| ATE298429T1 (de) | 2005-07-15 |
| EP1346241B1 (en) | 2005-06-22 |
| US20030194179A1 (en) | 2003-10-16 |
| DE60111649D1 (de) | 2005-07-28 |
| WO2002059678A2 (en) | 2002-08-01 |
| EP1346241A2 (en) | 2003-09-24 |
| KR20030064850A (ko) | 2003-08-02 |
| US6628851B1 (en) | 2003-09-30 |
| JP3899031B2 (ja) | 2007-03-28 |
| WO2002059678A3 (en) | 2003-06-05 |
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