JP2004521489A5 - - Google Patents
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- Publication number
- JP2004521489A5 JP2004521489A5 JP2002558345A JP2002558345A JP2004521489A5 JP 2004521489 A5 JP2004521489 A5 JP 2004521489A5 JP 2002558345 A JP2002558345 A JP 2002558345A JP 2002558345 A JP2002558345 A JP 2002558345A JP 2004521489 A5 JP2004521489 A5 JP 2004521489A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- lattice constant
- forming
- substrate
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000758 substrate Substances 0.000 claims 33
- 239000004065 semiconductor Substances 0.000 claims 26
- 238000000034 method Methods 0.000 claims 20
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims 13
- 239000000463 material Substances 0.000 claims 7
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 claims 6
- 238000000137 annealing Methods 0.000 claims 5
- 238000004519 manufacturing process Methods 0.000 claims 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 229910052732 germanium Inorganic materials 0.000 claims 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/766,797 US6558973B2 (en) | 2001-01-22 | 2001-01-22 | Metamorphic long wavelength high-speed photodiode |
| PCT/US2002/001969 WO2002058162A2 (en) | 2001-01-22 | 2002-01-22 | Metamorphic long wavelength high-speed photodiode |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004521489A JP2004521489A (ja) | 2004-07-15 |
| JP2004521489A5 true JP2004521489A5 (enExample) | 2005-12-22 |
Family
ID=25077568
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002558345A Withdrawn JP2004521489A (ja) | 2001-01-22 | 2002-01-22 | 変性長波長高速フォトダイオード |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US6558973B2 (enExample) |
| EP (1) | EP1354363A2 (enExample) |
| JP (1) | JP2004521489A (enExample) |
| AU (1) | AU2002248380A1 (enExample) |
| CA (1) | CA2435607A1 (enExample) |
| WO (1) | WO2002058162A2 (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6780703B2 (en) * | 2002-08-27 | 2004-08-24 | Freescale Semiconductor, Inc. | Method for forming a semiconductor device |
| US7326970B2 (en) * | 2005-03-11 | 2008-02-05 | The Boeing Company | Metamorphic avalanche photodetector |
| WO2007039891A2 (en) * | 2005-10-04 | 2007-04-12 | Passave Ltd. | Burst mode pin diode for passive optical networks (pon) applications |
| JP2011176552A (ja) * | 2010-02-24 | 2011-09-08 | Renesas Electronics Corp | 光増幅回路及びフォトカプラ |
| EP2909601B1 (en) | 2012-10-16 | 2019-09-11 | Abbott Laboratories | Method of increasing the debye length on a sensor surface within a sample solution and corresponding computer readable strorage medium |
| CN108630779B (zh) * | 2018-05-04 | 2019-12-17 | 中国电子科技集团公司第十三研究所 | 碳化硅探测器及其制备方法 |
| WO2022256847A1 (en) * | 2021-06-04 | 2022-12-08 | Alliance For Sustainable Energy, Llc | CONTROL OF SURFACE MORPHOLOGY DURING THE GROWTH OF (110)-ORIENTED GaAs BY HYDRIDE VAPOR PHASE EPITAXY |
| US12437954B2 (en) | 2022-11-02 | 2025-10-07 | L3Harris Technologies, Inc. | Substrate stack epitaxies for photocathodes for extended wavelengths |
| US12308198B2 (en) | 2022-11-22 | 2025-05-20 | L3Harris Technologies, Inc. | Lattice matched photocathodes for extended wavelengths |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3936856A (en) * | 1974-05-28 | 1976-02-03 | International Business Machines Corporation | Space-charge-limited integrated circuit structure |
| EP0133342B1 (en) * | 1983-06-24 | 1989-11-29 | Nec Corporation | A superlattice type semiconductor structure having a high carrier density |
| US4607272A (en) * | 1983-10-06 | 1986-08-19 | The United States Of America As Represented By The United States Department Of Energy | Electro-optical SLS devices for operating at new wavelength ranges |
| US4558336A (en) * | 1984-03-02 | 1985-12-10 | The United States Of America As Represented By The Secretary Of The Army | MBE Growth technique for matching superlattices grown on GaAs substrates |
| US4807006A (en) * | 1987-06-19 | 1989-02-21 | International Business Machines Corporation | Heterojunction interdigitated schottky barrier photodetector |
| US4926226A (en) * | 1988-09-06 | 1990-05-15 | General Motors Corporation | Magnetic field sensors |
| US5204284A (en) * | 1989-01-19 | 1993-04-20 | Hewlett-Packard Company | Method of making a high band-gap opto-electronic device |
| US5148267A (en) * | 1989-09-08 | 1992-09-15 | Hewlett-Packard Company | Double heterostructure step recovery diode with internal drift field |
| DE19515667A1 (de) * | 1995-04-28 | 1996-10-31 | Daimler Benz Ag | Halbleiteranordnung |
| US5969385A (en) * | 1995-08-17 | 1999-10-19 | Northrop Grumman Corporation | Ultra-low power-delay product NNN/PPP logic devices |
| US5770868A (en) * | 1995-11-08 | 1998-06-23 | Martin Marietta Corporation | GaAs substrate with compositionally graded AlGaAsSb buffer for fabrication of high-indium fets |
| FR2753577B1 (fr) * | 1996-09-13 | 1999-01-08 | Alsthom Cge Alcatel | Procede de fabrication d'un composant optoelectronique a semiconducteur et composant et matrice de composants fabriques selon ce procede |
| US5877519A (en) * | 1997-03-26 | 1999-03-02 | Picolight Incoporated | Extended wavelength opto-electronic devices |
| US5952701A (en) * | 1997-08-18 | 1999-09-14 | National Semiconductor Corporation | Design and fabrication of semiconductor structure having complementary channel-junction insulated-gate field-effect transistors whose gate electrodes have work functions close to mid-gap semiconductor value |
| FR2768556A1 (fr) * | 1997-09-17 | 1999-03-19 | Pigogiga Sa | Composant semiconducteur iii-v a heterojonction |
| US20010042503A1 (en) * | 1999-02-10 | 2001-11-22 | Lo Yu-Hwa | Method for design of epitaxial layer and substrate structures for high-quality epitaxial growth on lattice-mismatched substrates |
| CN1347581A (zh) * | 1999-03-26 | 2002-05-01 | 松下电器产业株式会社 | 带有应变补偿层的半导体结构及其制备方法 |
| US6320212B1 (en) * | 1999-09-02 | 2001-11-20 | Hrl Laboratories, Llc. | Superlattice fabrication for InAs/GaSb/AISb semiconductor structures |
-
2001
- 2001-01-22 US US09/766,797 patent/US6558973B2/en not_active Expired - Lifetime
-
2002
- 2002-01-22 AU AU2002248380A patent/AU2002248380A1/en not_active Abandoned
- 2002-01-22 EP EP02717369A patent/EP1354363A2/en not_active Withdrawn
- 2002-01-22 JP JP2002558345A patent/JP2004521489A/ja not_active Withdrawn
- 2002-01-22 WO PCT/US2002/001969 patent/WO2002058162A2/en not_active Ceased
- 2002-01-22 CA CA002435607A patent/CA2435607A1/en not_active Abandoned
-
2003
- 2003-04-14 US US10/413,186 patent/US7009224B2/en not_active Expired - Fee Related
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