JP2004509432A5 - - Google Patents

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Publication number
JP2004509432A5
JP2004509432A5 JP2002526807A JP2002526807A JP2004509432A5 JP 2004509432 A5 JP2004509432 A5 JP 2004509432A5 JP 2002526807 A JP2002526807 A JP 2002526807A JP 2002526807 A JP2002526807 A JP 2002526807A JP 2004509432 A5 JP2004509432 A5 JP 2004509432A5
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JP
Japan
Prior art keywords
glow discharge
discharge plasma
workpiece
electrodes
electrode
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Pending
Application number
JP2002526807A
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English (en)
Japanese (ja)
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JP2004509432A (ja
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Publication date
Priority claimed from US09/660,003 external-priority patent/US6441553B1/en
Application filed filed Critical
Publication of JP2004509432A publication Critical patent/JP2004509432A/ja
Publication of JP2004509432A5 publication Critical patent/JP2004509432A5/ja
Pending legal-status Critical Current

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JP2002526807A 2000-09-12 2001-09-06 グロー放電プラズマ処理装置及びグロー放電プラズマ処理方法 Pending JP2004509432A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/660,003 US6441553B1 (en) 1999-02-01 2000-09-12 Electrode for glow-discharge atmospheric-pressure plasma treatment
PCT/US2001/042079 WO2002023960A1 (en) 2000-09-12 2001-09-06 Electrode for glow-discharge atmospheric plasma treatment

Publications (2)

Publication Number Publication Date
JP2004509432A JP2004509432A (ja) 2004-03-25
JP2004509432A5 true JP2004509432A5 (https=) 2005-04-21

Family

ID=24647726

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002526807A Pending JP2004509432A (ja) 2000-09-12 2001-09-06 グロー放電プラズマ処理装置及びグロー放電プラズマ処理方法

Country Status (5)

Country Link
US (1) US6441553B1 (https=)
EP (1) EP1323338A4 (https=)
JP (1) JP2004509432A (https=)
AU (1) AU2001293260A1 (https=)
WO (1) WO2002023960A1 (https=)

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KR102124042B1 (ko) * 2013-02-18 2020-06-18 삼성디스플레이 주식회사 기상 증착 장치, 이를 이용한 증착 방법 및 유기 발광 표시 장치 제조 방법
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CN109790313A (zh) 2016-09-30 2019-05-21 简·探针公司 经等离子体处理的表面上的组合物
US11239057B2 (en) * 2017-07-28 2022-02-01 Sumitomo Electric Industries, Ltd. Showerhead and method for manufacturing the same
JP2021132148A (ja) * 2020-02-20 2021-09-09 東京エレクトロン株式会社 ステージ、プラズマ処理装置及びプラズマ処理方法
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