JP2004502105A5 - - Google Patents

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Publication number
JP2004502105A5
JP2004502105A5 JP2002506335A JP2002506335A JP2004502105A5 JP 2004502105 A5 JP2004502105 A5 JP 2004502105A5 JP 2002506335 A JP2002506335 A JP 2002506335A JP 2002506335 A JP2002506335 A JP 2002506335A JP 2004502105 A5 JP2004502105 A5 JP 2004502105A5
Authority
JP
Japan
Prior art keywords
valve body
valve
shaft
valve assembly
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002506335A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004502105A (ja
JP4785326B2 (ja
Filing date
Publication date
Priority claimed from US09/606,382 external-priority patent/US6328051B1/en
Application filed filed Critical
Publication of JP2004502105A publication Critical patent/JP2004502105A/ja
Publication of JP2004502105A5 publication Critical patent/JP2004502105A5/ja
Application granted granted Critical
Publication of JP4785326B2 publication Critical patent/JP4785326B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2002506335A 2000-06-28 2001-06-21 二重ペンドラム弁アセンブリ Expired - Fee Related JP4785326B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/606,382 2000-06-28
US09/606,382 US6328051B1 (en) 2000-06-28 2000-06-28 Dual pendulum valve assembly
PCT/US2001/019765 WO2002001035A2 (en) 2000-06-28 2001-06-21 Dual pendulum valve assembly

Publications (3)

Publication Number Publication Date
JP2004502105A JP2004502105A (ja) 2004-01-22
JP2004502105A5 true JP2004502105A5 (enExample) 2005-11-04
JP4785326B2 JP4785326B2 (ja) 2011-10-05

Family

ID=24427741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002506335A Expired - Fee Related JP4785326B2 (ja) 2000-06-28 2001-06-21 二重ペンドラム弁アセンブリ

Country Status (5)

Country Link
US (1) US6328051B1 (enExample)
JP (1) JP4785326B2 (enExample)
DE (2) DE10165035B3 (enExample)
GB (1) GB2380242B (enExample)
WO (1) WO2002001035A2 (enExample)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6776394B2 (en) 2002-12-30 2004-08-17 Mks Instruments, Inc. Pendulum valve assembly
US6863256B2 (en) 2003-02-20 2005-03-08 Mks Instruments, Inc. Seal ring for pendulum valve assembly
US7032882B2 (en) * 2003-09-29 2006-04-25 Mks Instruments, Inc. Valve assembly having novel flow characteristics
US7422653B2 (en) * 2004-07-13 2008-09-09 Applied Materials, Inc. Single-sided inflatable vertical slit valve
US7278444B2 (en) * 2005-02-22 2007-10-09 Mks Instruments, Inc. Valve assembly having improved pump-down performance
FR2915550B1 (fr) * 2007-04-27 2012-05-11 Snecma Vanne a clapet pour un systeme de refroidissement dans une turbomachine
US7762526B2 (en) * 2007-08-27 2010-07-27 Nor-Cal Products, Inc. Pendulum valve having independently and rapidly controllable theta-and z-axis motion
JP4714835B1 (ja) * 2009-12-01 2011-06-29 プログレッシオ合同会社 真空用ゲートバルブ
JP4654370B1 (ja) * 2010-08-10 2011-03-16 プログレッシオ合同会社 真空用ゲートバルブ
US8833383B2 (en) 2011-07-20 2014-09-16 Ferrotec (Usa) Corporation Multi-vane throttle valve
JP5533839B2 (ja) 2011-11-04 2014-06-25 Ｓｍｃ株式会社 無摺動型ゲートバルブ
TW201340045A (zh) * 2012-03-26 2013-10-01 Hon Hai Prec Ind Co Ltd 基於無線傳輸的監測系統及其監測方法
JP6507516B2 (ja) * 2014-08-06 2019-05-08 株式会社島津製作所 真空バルブ
US9638335B2 (en) 2015-01-08 2017-05-02 King Lai Hygienic Materials Co., Ltd. Double sealing valve
WO2016155976A1 (de) 2015-03-27 2016-10-06 Vat Holding Ag Vakuumventil
KR101739729B1 (ko) 2016-08-09 2017-06-14 주식회사 세이프티연구개발 비상용 슬라이드를 더 구비한 차단밸브
EP3372881A1 (de) * 2017-03-07 2018-09-12 VAT Holding AG Optimierte druckregelung für und mit einem vakuumventil
US10704715B2 (en) * 2017-05-29 2020-07-07 Shimadzu Corporation Vacuum pumping device, vacuum pump, and vacuum valve
EP3421852A1 (de) * 2017-06-30 2019-01-02 VAT Holding AG Vakuumventil mit inertialsensor
DE102022129356A1 (de) * 2022-11-07 2024-05-08 Vat Holding Ag Vakuumventil

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GB1050435A (enExample)
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FR2251369B1 (enExample) * 1973-11-15 1978-02-10 Radiotechnique Compelec
US3973753A (en) 1974-03-18 1976-08-10 Varian Associates High vacuum gate valve
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DE2550203B2 (de) 1975-11-08 1980-03-13 Leybold-Heraeus Gmbh, 5000 Koeln Pendelschieber
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US4073468A (en) 1976-09-16 1978-02-14 Erwin Robert L Rotary plug valve
US4135854A (en) * 1976-12-16 1979-01-23 Westinghouse Electric Corp. Control system for variable pitch axial fan for utility boiler
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US4442996A (en) 1982-03-08 1984-04-17 Josiephine R. Erwin Tapered rotary plug valve
US4524796A (en) * 1982-09-24 1985-06-25 The United States Of America As Represented By The United States Department Of Energy Sliding-gate valve for use with abrasive materials
US4519578A (en) 1983-03-11 1985-05-28 Dover Corporation High pressure cam seal valve
DE3444417A1 (de) 1984-12-04 1986-06-12 Mtu Motoren- Und Turbinen-Union Friedrichshafen Gmbh, 7990 Friedrichshafen Schwenkschieberventil
JPS63231071A (ja) * 1987-03-18 1988-09-27 Kikkoman Corp 耐圧仕切弁
US4785844A (en) 1987-08-26 1988-11-22 C & S Valve Company Double-seal flexible gate valve
JPH01146073U (enExample) * 1988-03-30 1989-10-06
DE3831249A1 (de) 1988-09-14 1990-03-22 Schertler Siegfried Ventilschieber
US5120019A (en) 1989-08-03 1992-06-09 Brooks Automation, Inc. Valve
US5314164A (en) 1992-07-17 1994-05-24 Mks Instruments, Inc. Pivotal diaphragm, flow control valve
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JP4055032B2 (ja) * 1998-09-30 2008-03-05 トキコテクノ株式会社 弁装置
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US6089537A (en) * 1999-06-23 2000-07-18 Mks Instruments, Inc. Pendulum valve assembly

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