JP2004301851A - ３次元構造観察用試料作製装置、電子顕微鏡及びその方法 - Google Patents

３次元構造観察用試料作製装置、電子顕微鏡及びその方法 Download PDF

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Publication number
JP2004301851A
JP2004301851A JP2004166546A JP2004166546A JP2004301851A JP 2004301851 A JP2004301851 A JP 2004301851A JP 2004166546 A JP2004166546 A JP 2004166546A JP 2004166546 A JP2004166546 A JP 2004166546A JP 2004301851 A JP2004301851 A JP 2004301851A
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sample
projection
dimensional structure
ion beam
observation
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JP2004301851A5 (https=
Inventor
Ruriko Tokida
るり子 常田
Hiroshi Kakibayashi
博司 柿林
Masanari Takaguchi
雅成 高口
Kuniyasu Nakamura
邦康 中村
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Hitachi Ltd
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Hitachi Ltd
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Priority to JP2004166546A priority Critical patent/JP2004301851A/ja
Publication of JP2004301851A publication Critical patent/JP2004301851A/ja
Publication of JP2004301851A5 publication Critical patent/JP2004301851A5/ja
Withdrawn legal-status Critical Current

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  • Sampling And Sample Adjustment (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2004166546A 2004-06-04 2004-06-04 ３次元構造観察用試料作製装置、電子顕微鏡及びその方法 Withdrawn JP2004301851A (ja)

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JP2004166546A JP2004301851A (ja) 2004-06-04 2004-06-04 ３次元構造観察用試料作製装置、電子顕微鏡及びその方法

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JP2004166546A JP2004301851A (ja) 2004-06-04 2004-06-04 ３次元構造観察用試料作製装置、電子顕微鏡及びその方法

Related Parent Applications (1)

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JP26406796A Division JP3677895B2 (ja) 1996-10-04 1996-10-04 ３次元構造観察用試料作製装置、電子顕微鏡及びその方法

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JP2004301851A true JP2004301851A (ja) 2004-10-28
JP2004301851A5 JP2004301851A5 (https=) 2005-06-23

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011169784A (ja) * 2010-02-19 2011-09-01 Disco Corp 検査用試料作製方法
WO2013111453A1 (ja) * 2012-01-25 2013-08-01 株式会社 日立ハイテクノロジーズ 電子顕微鏡用試料ホルダ

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011169784A (ja) * 2010-02-19 2011-09-01 Disco Corp 検査用試料作製方法
WO2013111453A1 (ja) * 2012-01-25 2013-08-01 株式会社 日立ハイテクノロジーズ 電子顕微鏡用試料ホルダ
JP2013152831A (ja) * 2012-01-25 2013-08-08 Hitachi High-Technologies Corp 電子顕微鏡用試料ホルダ
US9558910B2 (en) 2012-01-25 2017-01-31 Hitachi High-Technologies Corporation Sample holder for electron microscope

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