JP2004296436A5 - - Google Patents

Description

Furthermore, it is also known that, as a vapor deposition mask for multi-panel formation, productivity is increased by attaching the vapor deposition mask to a frame having n openings (for example, see Patent Document 3). It has no effect on suppressing local bending.
JP 2000-160323 A JP 2000-12238 A Japanese Patent Application No. 2003-152114 (Japanese Patent Application Laid-Open No. 2003-323984)

In order to solve the above problems, the present invention has the following configurations. That is,
An organic electroluminescent device having two or more luminescent pixels, wherein at least one of the luminescent pixels is formed by depositing a luminescent organic compound on a luminescent layer included in the pixel by a mask deposition method. In the manufacturing method, the vapor deposition mask used for vapor deposition of the light emitting layer includes an effective opening, and a dummy opening around the effective opening region, and the number of the effective openings is m in the vertical direction and in the horizontal direction. While n pieces are arranged, m + 1 or more pieces are arranged in the vertical direction or n + 1 or more pieces in the horizontal direction as the whole opening, and at least a part of the dummy opening has another mask member and / or mask member. producing how the organic light emitting device characterized by being covered with a frame for holding
, Is the main idea.

Further, as a method of obtaining the effects of the present invention, it is not preferable to design that does not have a 10mm or more linear portions at the boundary between the mask area and the opening area. As a result, it becomes possible to disperse the local deflection that appears at the boundary between the mask region and the opening region.

Further, by using these methods, 7, prepared it is easy of deposition mask corresponding to multi-surface as shown in FIG. Further, when the evaporation mask is combined with the frame as shown in FIG. 10 , the evaporation mask does not necessarily have to be fixed to the crosspiece of the frame.

Further, n plane on a single substrate (n is an integer of 2 or more) to manufacture an organic electroluminescence device of, Having passed through the as engineering of cutting the substrate into n, the mass production because the productivity is improved It is preferable in terms of manufacturing cost.

Example 6
A superstructure with a 200 x 214 mm outer diameter and a cross bar added, with a 270 µm vertical and 100 µm horizontal opening arranged at 300 µm vertical and horizontal pitches over the entire area (90% or more) of the evaporation mask as a light emitting layer vapor deposition mask. Affixed to an Invar steel frame. At this time, the bar was also bonded to the evaporation mask. Thus, an evaporation mask for a light emitting layer as shown in FIG. 9 was prepared. Otherwise in the same manner as in Example 4, an organic electroluminescent device was produced. By adding a cross bar to the frame, four light emitting layer patterns formed by the deposition mask are formed slightly larger than the light emitting region.

Plan view showing one example of a pixel set FIG. 2 is a schematic perspective view illustrating an example of the structure of an organic electroluminescent device, excluding a partial configuration. Schematic view showing an example of a deposition mask (a) Plan view (b) Cross section Schematic perspective view showing an example of a vapor deposition mask (a) An example of a vapor deposition mask in which a reinforcing line is not introduced (b) An example of a vapor deposition mask in which a reinforcing line is introduced (c) Another example of a vapor deposition mask in which a reinforcing line is introduced Schematic diagram illustrating the mask evaporation method Schematic diagram of a lamination type deposition mask (one-chamfered deposition mask) and its deposition pattern. (A) Deposition mask (b) Deposition pattern Schematic diagram of a lamination type deposition mask (four-chamfered deposition mask) and its deposition pattern. (A) Deposition mask (b) Deposition pattern Plan view showing an example of a deposition mask having a dummy opening A deposition mask with a crosspiece added to the frame (there is adhesion between the crosspiece and the deposition mask) Schematic diagram of turn (a) Deposition mask (b) Deposition pattern Evaporation mask with crossbar added to frame (no adhesion between crossbar and vaporization mask) and its vapor deposition Schematic diagram of pattern (a) evaporation mask (b) evaporation pattern

1 substrate 2 first electrode 3 insulating layer 4 common organic layer 5 light-emitting layer 6 the second electrode 7 mask region 8 the mask frame 9 opening region 10 opening 11 reinforcing wire 12 vapor deposition source 13 effective opening area 14 dummy opening
1 6 Deposition mask for forming a striped pattern without reinforcement lines 17 Deposition mask with one reinforcement line 18 Deposition mask with three reinforcement lines 19 Red light emitting pixel 20 Green light emitting pixel 21 Blue light emitting pixel 22 Pixel set 23 Frame 24 added to the mask

Claims (2)

An organic electroluminescent device having two or more luminescent pixels, wherein at least one of the luminescent pixels is formed by depositing a luminescent organic compound on a luminescent layer included in the pixel by a mask deposition method. In a manufacturing method, a vapor deposition mask used for vapor deposition of the light emitting layer includes an opening for forming a light emitting layer used for a light emitting pixel (hereinafter referred to as an effective opening) and an opening region in which the effective openings are arranged. (Hereinafter referred to as an effective opening area) and an opening (hereinafter referred to as a dummy opening) which is not used for forming a light-emitting pixel , wherein m effective openings are arranged in a vertical direction and n effective openings are arranged in a horizontal direction. On the other hand, m + 1 or more in the vertical direction or n + 1 or more in the horizontal direction as the entire opening, and at least a part of the dummy opening is a frame holding another mask member and / or a mask member. Concealed A method of fabricating an organic light emitting device characterized by there. In the deposition mask, 90% or more of the portion other than the portion used for fixing to the frame (hereinafter, the deposition mask utilization region) is occupied by the opening region including the effective opening and the dummy opening. the area of the opening occupied per unit area of the opening and the dummy openings (hereinafter, opening ratio) method of fabricating an organic light emitting device according to claim 1, wherein the ratio of 50 to 200%.

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