JP2004283820A - Slit dye and method and device for manufacturing base having coating film - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a slit die which can gain a gap precision between lips easily and can form an even coating film with a high precision of coating film thickness, and a method and a device for manufacturing a base having the coating film using the slit die. <P>SOLUTION: The slit die 1 having a lip gap and a port of a coating liquid formed at the lower end of the gap between the lips by combining a pair of facing lips, in which at least one lip is put on in the vertical direction, consists of at least two blocks 4 and 5 capable of shifting relatively in the right-angled long direction of the above port, and is composed of a block engaging element 8 for engaging capable of adjusting a relative position of these blocks, a block combining element 9 combining these blocks with each other after adjusting the relative position, a position determining element 10 installed on an outer surface opposite to the above port and regulating the position of the relative shift of the blocks and a position determining element-fixing element 20 fixing the position determining element. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

The present invention relates to a slit die used for forming a coating film on a substrate surface. The present invention relates to a production method and a production apparatus for producing a substrate having a coating film by applying a coating liquid to a substrate surface using the slit die.

  The form of the substrate on which the coating film is formed according to the present invention includes a single sheet form and a long sheet form. A typical example of the single-wafer form is a glass substrate. The substrate in the form of a single wafer produced by the present invention is used, for example, as a color filter for a color liquid crystal display, an array substrate for a TFT, a back plate or a front plate for a plasma display, an optical filter, a printed circuit board, an integrated circuit, and a semiconductor. . The substrate in the form of a long sheet produced according to the present invention is used, for example, as a film, a metal sheet, a metal foil, or paper.

  The slit die is sometimes called a die, a die, a slot die, or a die. The slit die discharges the application liquid from a slit-shaped discharge port, which is an opening to the outside of the lip gap, through a lip gap formed between a pair of lips opposed to each other at an interval. It is widely used to form a coating film of a coating solution on the surface of a substrate positioned opposite to the substrate. In forming the coating film, the slit die and the substrate are relatively moved.

  As an example, a situation in a color filter having a fine lattice pattern of three primary colors on a glass substrate will be described. The color filter is manufactured by sequentially applying black, red, blue, and green coating solutions on a glass substrate. In the manufacturing process of this color filter, after forming a coating film of a photoresist material, pattern processing is performed by photolithography, and then columns for forming a space of liquid crystal injected between the color filter and the array substrate are formed. It may include a step or a step of forming an overcoat film for minimizing surface irregularities.

  In this type of coating film forming process, spinners are often used, because the viscosity of the coating solution used is several tens mPa · s or less, and a uniform coating film can be easily formed. Was. However, recently, the reduction of consumption of expensive coating liquid and the difficulty of increasing the size of the apparatus due to the increase in the size of the substrate to be coated have become difficult. The die coater used has come to be used.

  One of the important functions required of the slit die is to form a coating film having a uniform thickness. In particular, in the slit die applied to the production of display members such as color filters for color liquid crystal displays and back plates for plasma displays, the length of the components has been increasing year by year with the enlargement of the display screen, The demands on the uniformity of the coating thickness over a large application area are becoming more stringent. Recently, it has been required to achieve extremely high coating thickness accuracy with a maximum deviation of 3% or less from the average thickness of the coating film.

  In order to satisfy this requirement, it is necessary that the lip gap, which is usually set to 0.05 mm to 0.7 mm when the die is assembled, is uniformly formed with a submicron order deviation. . However, conventional slit dies cannot achieve the lip gap accuracy on the order of submicron due to the structure thereof, and cannot achieve the above-described coating thickness accuracy.

  The problem of the conventional slit die will be specifically described. FIGS. 11, 12 and 13 show cross sections of different known slit dies 201, 301 and 401, respectively.

  11, a slit die 201 includes a die hopper 205, a right lip 202, and a left lip 203. The right lip 202 and the left lip 203 are opposed to each other with a lip gap 212 therebetween. The upper surface of the right lip 202 and the upper surface of the left lip 203 are respectively in contact with the lower surface of the die hopper 205, and are attached to the die hopper 205 by bolts 206 and 207, respectively, and are integrated.

  The lip gap 212 has a lip gap width L. This slit die 201 is disclosed in, for example, Patent Document 1. In the slit die 201 having this configuration, a complicated assembling operation for positioning both the lips 202 and 203 with respect to the die hopper 205 while measuring the lip gap width L in the longitudinal direction of the lip gap 212 (direction perpendicular to the paper surface). Is required. It is practically impossible to achieve a lip gap accuracy on the order of submicron with this assembly operation alone.

  12, the slit die 301 includes a right lip 302, a left lip 303, and a shim 304. The two lips 302 and 303 are connected and integrated by a bolt 305 with a shim 304 interposed therebetween. The lip gap 312 is formed by the thickness St of the shim 304.

  The lip gap 312 has a lip gap width L. This slit die 301 is disclosed in, for example, Patent Document 2 or Patent Document 3. In the slit die 301 having this configuration, the lip gap width L of the lip gap 312 is equal to the thickness St of the shim 304 regardless of the assembling method. Therefore, in order to realize a lip gap accuracy on the order of submicron, a thin shim 304 having a thickness St of about 0.05 to 0.7 mm is required to have a thickness accuracy on the order of submicron.

  However, in general, the shim 304 made of a plate material manufactured from a rolled steel plate has an in-plane thickness unevenness of several microns due to uneven rolling. Furthermore, since it is thin, it is difficult to improve the thickness accuracy by additional processing. Therefore, even in the case of the slit die 301, the lip gap accuracy on the order of submicron cannot be realized.

  In FIG. 13, the slit die 401 includes a right lip 402 and a left lip 403. Both lips 402, 403 have a mating surface 415 on their upper part. The lip inner surface 420 of the right lip 402 is located with a step L from the mating surface 415. The inner surface 421 of the left lip 403 is in the same plane as the mating surface 415, forming a flat lip. A lip gap 412 is formed between the inner surface 420 of the right lip 402 and the inner surface 421 of the left lip 403.

The lip gap 412 has a lip gap width L equal to the step amount L. This slit die 401 is disclosed in, for example, Patent Document 4 or Patent Document 5. In the slit die 401 having this configuration, the lip gap width L of the lip gap 412 becomes equal to the step amount L provided on the lip 402. Therefore, in order to realize the lip gap accuracy on the order of submicron, the lip 402 must be aligned. It is necessary that the step between the surface 415 and the lip inner surface 420 is formed by high-precision finishing on the order of submicron.
However, it is difficult to finish a long and large-area large part such as a lip with sub-micron-order precision by machining using a known grinder or the like or by manual lapping. Therefore, even with the slit die 401, the lip gap accuracy on the order of submicron cannot be realized.
JP-A-10-264229 (FIG. 2) JP 2001-46949 A (FIG. 1) JP 2001-191004 A (FIG. 1) JP-A-10-146556 (FIG. 1) JP-A-10-151395 (FIG. 4)

  The present invention aims to solve the problems of the prior art. An object of the present invention is to provide a slit die in which a lip gap accuracy on the order of submicron can be easily obtained. ADVANTAGE OF THE INVENTION The slit die which concerns on this invention makes it possible to form a coating film uniformly with extremely high coating thickness accuracy of 3% or less without special adjustment after assembling the die.

An object of the present invention is to provide a method for manufacturing a substrate having a coating film using the slit die, and a manufacturing apparatus.
The substrate having a coating film produced according to the present invention is preferably used as a member for a color liquid crystal display or a member for a plasma display.

  The above object of the present invention is achieved by the following means.

The slit die according to the present invention includes a first lip and a second lip, and the first lip and the second lip have an inner surface of the first lip and an inner surface of the second lip. The liquid supply passage and the lip gap extending in the longitudinal direction of the lip are formed by being integrated by the lip fastening element in the opposed state, and a part of the opposing inner surfaces being spaced apart, the lip gap being formed. A lower end of the lip gap forms an outwardly open discharge port, both longitudinal ends of the lip gap are closed to the outside, and an upper end of the lip gap is connected to the liquid supply passage. At the die
(A) the first lip comprises a first block and a second block,
(B) the first block and the second block so that the relative position between the first block and the second block in a direction perpendicular to the surface of the first lip forming the lip gap can be adjusted; A block engaging element for engaging with the block of
(C) a block fastening element for fastening and integrating the first block and the second block after the relative position is adjusted;
(D) engaging the outer surface of the first block and the outer surface of the second block on the opposite side of the inner surface of the first lip, and connecting the first block and the second block; A positioning element that defines the relative position;
(E) a positioning element fixing element for fixing the positioning element to the first lip,
(F) The gap width distribution in the longitudinal direction of the lip gap can be adjusted by the positioning element and the fixing element of the positioning element.

  In the slit die of the present invention, it is preferable that a plurality of the positioning elements are provided at intervals in a longitudinal direction of the lip.

  In the slit die according to the aspect of the invention, the positioning element includes a positioning block, and the positioning block has a position defining surface that contacts at least one of the outer surface of the first block and the outer surface of the second block. If there is a portion that does not come into contact with the other outer surface, it is preferable to have a position defining assisting means that engages with that portion and the outer surface.

  In the slit die of the present invention, it is preferable that the maximum height Ry of the surface roughness of the position defining surface of the positioning block is 0.1S to 1.0S.

  In the slit die of the present invention, the first block and the second block each have a thickness in a direction perpendicular to a surface forming the lip gap of 30 mm or more, and are along the position defining surface of the positioning block. The cross-sectional shape in the direction is a quadrangle, and the length in the longitudinal direction of the lip of the quadrangle is 20 mm to 100 mm, and the length in the direction perpendicular to the longitudinal direction is 20 mm to 100 mm, and at least the position definition. It is preferable that a thickness of the positioning block at a position where a surface is located is 30% or more of a thickness of the second block.

  In the slit die of the present invention, it is preferable that a plurality of the positioning blocks are provided at intervals in a longitudinal direction of the lip. When a plurality of positioning blocks are arranged, it is preferable that the arrangement interval between them is less than 100 mm.

  In the slit die of the present invention, the second lip may have a structure similar to that of the first lip.

  In the slit die of the present invention, the inner surface of the first block and the inner surface of the second lip are located in contact with each other, or are located via a shim, and the inner surface of the second block and the inner surface of the second lip are located. Preferably, the lip gap is formed between the inner surface of the second lip.

In the slit die of the present invention, the inner surface of the second lip facing the inner surface of the first block and the inner surface of the second lip forming the lip gap are located substantially on the same plane. May be.
In the slit die of the present invention, the inner surface of the first block facing the inner surface of the second lip and the inner surface of the second block forming the lip gap are located substantially on the same plane. May be.

  The method for producing a substrate having a coating film of the present invention uses the slit die of the present invention, supplies the coating liquid to the liquid supply path of the slit die, and passes the coating liquid from the discharge port through the lip gap. While discharging, at least one of the member to be coated and the slit die positioned at an interval with respect to the discharge port is relatively moved, and the coating liquid discharged from the discharge port is placed on the member to be coated. And a coating film composed of the coating liquid is formed on the member to be coated.

  The apparatus for producing a substrate having a coating film according to the present invention includes a slit die according to the present invention, a coating liquid supply unit engaged with the liquid supply path of the slit die, and the liquid supply path. A coating liquid discharging unit that discharges the coating liquid from the discharge port through the lip gap, and relatively moves at least one of a member to be coated and the slit die positioned at an interval with respect to the discharge port, A coating film forming means for applying the coating liquid discharged from a discharge port on the member to be coated and forming a coating film of the coating liquid on the member to be coated.

  ADVANTAGE OF THE INVENTION According to this invention, in the manufacture of the base material which has a coating film, since the coating liquid can be uniformly apply | coated to the base material which is increasing in size, the economical efficiency of manufacture is aimed at.

  According to the present invention, conventionally, the point that the advantages of the die coater were not fully utilized has been improved, and without impairing the advantages of the die coater brought about by the good sealing property of the coating liquid, a film of a stable coating film can be obtained. Provided are a slit die used for manufacturing a base material having an extremely high quality coating film having thickness accuracy, and a method and an apparatus for manufacturing a base material having a coating film using the slit die.

  INDUSTRIAL APPLICABILITY The present invention is particularly suitable for forming a coating film on a single-wafer-type member to be coated. And the like, and a single-wafer coated product such as an integrated circuit and a semiconductor.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.

  1 and 2, the slit die 1 according to the present invention includes a first lip 3 and a second lip 2. The inner surfaces 15a, 15b of the first lip 3 and the inner surfaces 17a, 17b of the second lip 2 are integrated so as to be separated from each other by lip fastening elements in a state where they face each other. In this embodiment, six assembly bolts 7 spaced from one another are used as lip fastening elements, as shown in FIG.

  A part of the opposed inner surfaces 15a, 15b, 17a, 17b is located at an interval, thereby forming a liquid supply passage (manifold) 12 and a lip gap 13 extending in the longitudinal direction of the lips 2, 3. ing. The lower end of the lip gap 13 forms an outwardly open discharge port 14. Both ends in the longitudinal direction of the lip gap 13 are closed to the outside by the seal plates 6a and 6b. The upper end of the lip gap 13 is connected to the liquid supply passage (manifold) 12. The liquid supply passage (manifold) 12 has a coating liquid supply port 11, and a coating liquid supply unit (not shown) is connected to the coating liquid supply port 11 via a supply pipe (not shown). The coating liquid supplied from the coating liquid supply means flows into the manifold 12 from the coating liquid supply port 11, and the flow of the coating liquid is guided by the manifold 12 to the left and right sides around the coating liquid supply port 11, It flows into the lip gap 13 and is discharged from the discharge port 14.

  The first lip 3 is composed of a first block 4 and a second block 5. The longitudinal lengths of the lower surface of the first block 4 and the upper surface of the second block 5 are equal. The inner surface 17a of the second lip 2 and the inner surface 15a of the first block 4 are in contact with each other. The lower surface of the first block 4 and the upper surface of the second block 5 are in contact with each other.

  The first block 4 and the second block 5 can adjust the relative position in the direction perpendicular to the surface (the inner surface of the second block) 15b forming the lip gap 13 of the first lip 3. Are engaged by the corresponding block engaging element. In this embodiment, bolts 8 and nuts 9 are used as block engaging elements.

  After the relative position between the first block 4 and the second block 5 is adjusted, the first block 4 and the second block 5 are fastened by a block fastening element to be integrated. In this embodiment, bolts 8 and nuts 9 are used as block fastening elements. In this embodiment, the bolt 8 and the nut 9 function as a block engaging element and as a block fastening element. The block engaging element and the block fastening element may be formed of different members so as to perform their respective functions separately.

  The outer surface 16a of the first block 4 and the outer surface 16b of the second block 5 on the opposite side of the inner surface 15a of the first lip 3 are engaged, and the relative position between the first block 4 and the second block 5 is increased. A positioning element for defining the position is provided. In this embodiment, five stepped blocks 10 which are arranged at a distance from one another are used as positioning elements. The upper inner surface 10a of the step block 10 is in contact with the outer surface 16a of the first block 4, and the lower inner surface 10b of the step block 10 is in contact with the outer surface 16b of the second block 5. The inner surface 10a and the inner surface 10b form a position defining surface.

  A fixing element of the positioning element for fixing the positioning element (stepped block 10) to the first lip 3 including the first block 4 and the second block 5 is provided. In this embodiment, a bolt 20 is used as a fixing element for the positioning element (stepped block 10). In this embodiment, the inner surface 17a of the second lip 2 facing the inner surface 15a of the first block 4 and the inner surface 17b of the second lip 2 forming the lip gap 13 are substantially coplanar. It is located in.

  The lip gap width Lg of the lip gap 13 is adjusted by the positioning element (the step block 10) and the fixing element of the positioning element (the bolt 20) so as to be uniform in the longitudinal direction of the lip gap 13.

  Between the position of the inner surface 15a of the first block 4 and the position of the inner surface 15b of the second block 5, there is a difference in the position of the distance H in a direction perpendicular to the respective inner surfaces. The difference in the distance H is referred to as a step H, and the size of the step H is referred to as a step amount H.

  Between the position of the upper inner surface 10a and the position of the lower inner surface 10b of the stepped block 10, there is a difference in the position of the distance h in the direction perpendicular to the respective inner surfaces. The difference in the distance h is referred to as a step h, and the size of the step h is referred to as a step amount h.

  The step H having the step amount H is formed by pressing the five stepped blocks 10 having the step h against the outer surface 16a of the first block 4 and the outer surface 16b of the second block 5.

  The number and the arrangement interval of the stepped blocks 10 are not particularly limited, but as the slit die 1 becomes longer, the stepped blocks 10 have at least two or more, preferably five or more in the longitudinal direction. Preferably, they are provided. The arrangement interval is desirably 100 mm or less in order to form the step H having a uniform size over the longitudinal direction of the slit die 1.

  When the first lip 3 and the second lip 2 are assembled by the assembling bolts 7, the gap width Lg equal to the step height H between the inner surface 15a of the first block 4 and the inner surface 15b of the second block 5 is reduced. Is formed.

  The lip gap 13 has a role of giving a flow resistance to the coating liquid and discharging the coating liquid from the discharge port 14 with a uniform distribution. According to various coating conditions, the gap width Lg of the lip gap 13 is preferably 30 μm to 1,000 μm, and more preferably 50 μm to 600 μm, in order to give a desired flow resistance to the coating liquid. The length Ld of the lip gap 13 in the direction in which the coating liquid is discharged is preferably 3 mm to 100 mm, and more preferably 5 mm to 70 mm.

  The length in the longitudinal direction of the discharge port 14, which is the discharge width of the coating liquid, is determined by the arrangement distance Lw between the two seal plates 6a and 6b. The material and shape of the sealing plates 6a and 6b are not particularly limited as long as they can be sealed so as not to be affected by the solvent contained in the coating liquid and the coating liquid does not leak. A metal plate such as stainless steel having a slightly smaller thickness than that, an elastic member having a thickness slightly larger than the gap width Lg, and a resin sheet such as polyethylene terephthalate are preferably used.

  An example of forming the step H in the preferred first lip 3 in this embodiment will be described with reference to FIGS. 3A, 3B and 3C.

  As shown in FIG. 3A, the first block 4 and the second block 5 are vertically overlapped with each other so as to equalize their respective thicknesses Lt in a direction perpendicular to the respective inner surfaces 15a, 15b. And are simultaneously machined in a state of being temporarily fixed by the nut 9. In this state, as shown in FIG. 3B, all the stepped blocks 10 are connected to the outer surface 16a of the first block 4 with bolts 20.

  Next, as shown in FIG. 3C, the second block 5 is slid in a direction perpendicular to the inner surface 15 b, and the outer surface 16 b of the second block 5 is pressed against the lower inner surface 10 b of the stepped block 10. By fixing the attached block 10 to the second block 5 using bolts 20, the adjustment of the relative position between the first block 4 and the second block 5 is completed.

  As a result, a step H having a step amount H equal to the step amount h of the stepped block 10 is applied to the first lip 3 constituted by the first block 4 and the second block 5. It is formed uniformly over the longitudinal direction.

  According to this configuration, the step amount H between the first block 4 and the second block 5 can be finely adjusted by minutely changing the step amount h of each stepped block 10. As a result, the gap width Lg of the lip gap 13 equal to the step amount H can be finely adjusted freely in the longitudinal direction of the lip gap 13. By this fine adjustment, the lip gap 13 having a gap width Lg with a deviation on the order of submicron can be easily formed only by combining the first lip 3 and the second lip 2.

  As a method of minutely changing the step amount h of the stepped block 10, known processing means such as lapping and grinding can be used. At this time, in order to accurately measure the minute change in the step amount h, the contact surface between the first block 4 and the second block 5, that is, the upper inner surface 10a and the lower inner surface 10b of the stepped block 10 are required. Has a maximum height (Ry) defined in JIS-B-0031 (1994), preferably in the range of 0.1S to 1.0S.

  In order to facilitate fine adjustment of the step amount H between the first block 4 and the second block 5, it is preferable that the first block 4 and the second block 5 have high rigidity. Therefore, it is preferable that each thickness Lt is 30 mm or more. If the thickness Lt is less than 30 mm, the blocks 4 and 5 are likely to warp in the longitudinal direction in a section where the stepped block 10 does not exist, and it is difficult to finely adjust the step amount H.

  The shape of the stepped block 10 is preferably such that the width in the longitudinal direction of the slit die 1 is in the range of 20 mm to 100 mm, and the height in the direction perpendicular thereto is in the range of 20 mm to 100 mm. If the shape of the stepped block 10 is smaller than the lower limits of these ranges, the correction force required to freely finely adjust the step amount H is not sufficiently developed. On the other hand, if the upper limit of these ranges is exceeded, it becomes difficult to slightly change the step height h by processing means such as lapping or grinding. The stepped block 10 needs to have a rigidity necessary for finely adjusting the step amount H. For this purpose, the thickness of the stepped block 10 is set to be 30 times smaller than the thickness Lt of the second block 5 in the thinnest part (for example, the part corresponding to the dimension Lb shown in FIG. 3B). % Is preferable.

  In order to easily make the deviation of the gap width Lg of the lip gap 13 along the longitudinal direction of the slit die 1 into the order of submicron, the deviation of the step amount h between the plurality of stepped blocks 10 arranged in the longitudinal direction is required. Is preferably 1 μm or less, more preferably 0.5 μm or less.

  In order to reduce the adjustment amount of the step H between the first block 4 and the second block 5, the inner surfaces 17a and 17b of the second lip 2, the inner surface 15a and the outer surface 16a of the first block 4, In addition, it is preferable that each surface is finished so that the flatness of the inner surface 15b and the outer surface 16b of the second block 5 is preferably 5 μm or less, more preferably 2 μm or less. Here, the flatness is defined in JIS-B-0621 (1984) in the section of "Definition and Display of Some Deviation".

  In order to improve the assembly reproducibility of the slit die 1, it is preferable that the first lip 3 and the second lip 2 have the same rigidity. For this purpose, it is preferable that the thickness of the second lip 2 is equal to the thickness Lt of the first block 4 and the second block 5.

  According to the slit die 1 shown in this embodiment, since it has the above-described configuration, it is a slit die that is long, that is, a slit die that forms a large-area coating film. Nevertheless, lip gap accuracy on the order of submicrons is easily provided. For this reason, according to the slit die 1, the stepped block 10 is fixed to the first lip 3, and after the slit die 1 is assembled, the coating thickness accuracy is extremely high of 3% or less without any special adjustment. Enables the formation of a coating film having

  In particular, the slit die 1 is suitably used as a slit die in a coating apparatus for manufacturing a display member such as a color filter for a color liquid crystal display or a back plate for a plasma display, which requires formation of a uniform coating film.

  If the coating liquid flowing through the manifold 12 has a large change in viscosity and the uniformity of the coating film is impaired due to factors other than the lip gap distribution, a stepped block located in a portion where the coating film thickness change is large. By adjusting the step height h of 10, the unevenness in the thickness of the coating film due to this factor can be improved.

  In order to cope with various operating conditions, the size of the step width h of the stepped block 10 is changed to change the size of the gap width Lg of the lip gap 13 or a plurality of pieces arranged in the longitudinal direction. It is also possible to form the lip gap 13 having a distribution corresponding to the thickness profile of an arbitrary coating by changing the step amount h of each of the stepped blocks 10.

  The positioning element for relatively sliding and positioning the first block 4 and the second block 5 is not limited to the stepped block 10. Examples of positioning elements other than the stepped block will be described below.

  FIG. 4 shows another embodiment of the slit die of the present invention. 4, the slit die 101 includes a first lip 3, a second lip 2, and a first block 4 and a second block constituting the first lip 3, as in the embodiment shown in FIG. 5 and a bolt 8 and a nut 9 for engaging and fastening the first block 4 and the second block 5.

  The slit die 101 has a lip gap 13, a discharge port 14, and a manifold 12, as in the embodiment shown in FIG. As in the embodiment shown in FIG. 2, the slit die 101 forms the lip gap 13 with the inner surface 17 a of the second lip 2 facing the inner surface 15 a of the first block 4. The inner surface 17b is located substantially on the same plane.

  The slit die 101 has, instead of the stepped block 10 in the embodiment shown in FIG. 2, a positioning element composed of a flat block 110 and a shim 111 (positioning assisting means). The inner surface 110a of the flat block 110 has a single plane. The inner surface 110a is in contact with the outer surface 16b of the second block 5.

  There is a step between the outer surface 16a of the first block 4 and the outer surface 16b of the second block 5. A shim 111 is interposed in a gap formed between the outer surface 16a of the first block 4 and the inner surface 110a of the flat block 110. The shim 111 is attached to the gap when the flat block 110 and the second block 4 are fixed by the bolts 20 of the flat block 110. The thickness of the shim 111 is adjusted to be equal to the gap width Lg of the lip gap 13.

  Fine adjustment of the step height H between the first block 4 and the second block 5 is performed by fine adjustment of the surface roughness of the inner surface 110a of the flat block 110 or fine adjustment of the thickness of the shim 111. . By this fine adjustment, the gap width Lg of the lip gap 13 of the slit die 101 is uniformly adjusted in the longitudinal direction of the lip gap 13 by the positioning element including the flat block 110, the shim 111, and the bolt 20, and the fixing element of the positioning element. You.

  FIG. 5 shows another embodiment of the slit die of the present invention. In FIG. 5, the slit die 102 includes a first lip 3, a second lip 2, and a first block 4 and a second block constituting the first lip 3, as in the embodiment shown in FIG. 5 and a bolt 8 and a nut 9 for engaging and fastening the first block 4 and the second block 5.

  The slit die 102 has a lip gap 13, a discharge port 14, and a manifold 12, as in the embodiment shown in FIG. As in the embodiment shown in FIG. 2, the slit die 102 forms the lip gap 13 with the inner surface 17 a of the second lip 2 facing the inner surface 15 a of the first block 4. The inner surface 17b is located substantially on the same plane.

  In FIG. 5, the slit die 102 has a positioning element including a flat block 110 and an expansion / contraction unit 112 (position specifying auxiliary unit) instead of the stepped block 10 shown in FIG. The inner surface 110a of the flat block 110 has a single plane. The inner surface 110a is in contact with the outer surface 16b of the second block 5. There is a step between the outer surface 16a of the first block 4 and the outer surface 16b of the second block 5. The expansion / contraction means 112 is interposed in a gap formed between the outer surface 16a of the first block 4 and the inner surface 110a of the flat block 110 formed by the step. The expansion / contraction means 112 is composed of, for example, a micrometer head or a linear actuator.

  The expansion / contraction means 112 is fixed to the upper part of the flat block 110. The telescopic member 112a of the telescopic means 112 protrudes from the inner surface 110a of the flat block 110 toward the first block 4, and its tip is pressed against the outer surface 16a of the first block. The protrusion length of the elastic member 112a from the inner surface 110a of the flat block 110 to the outer surface 16a of the first block 4 is adjusted to be equal to the gap width Lg of the lip gap 13.

  The fine adjustment of the step difference H between the first block 4 and the second block 5 is performed by finely adjusting the length of protrusion of the elastic member 112a of the elastic means 112. By this fine adjustment, the gap width Lg of the lip gap 13 of the slit die 102 is uniformly adjusted in the longitudinal direction of the lip gap 13 by the positioning element including the flat block 110, the expansion / contraction means 112, and the bolt 20, and the positioning element fixing element. Is done.

  In the slit die of the present invention, the method of measuring the step difference H is not particularly limited as long as it can be measured with a required resolution with high accuracy. For example, two linear gauges, which are set at zero point by pressing at right angles to a uniform surface such as a precision surface plate, are pressed at right angles to the inner surface 15a of the first block 4 and the inner surface 15b of the second block 5, respectively. A method of reading a value displayed on the other linear gauge when one of the linear gauges displays zero is preferable because the measurement can be performed with high accuracy and easily.

  In the slit die of the present invention, the lip gap accuracy is defined as the maximum width of the gap width of the lip gap (for example, the gap width Lg in FIG. 2) measured at multiple points in the longitudinal direction of the lip gap. As a measuring method, the gap width of the discharge port is measured in a state where the discharge port (for example, the discharge port 14 in FIG. 2) is magnified 450 to 2,000 times by an optical microscope or a microscope, and this is measured. The method of setting the gap width of the lip gap is preferable.

  Next, still another embodiment of the slit die of the present invention will be described.

  In the embodiment described above, the first block 4 and the second block 5 having the same thickness Lt are used to provide the step H in the second lip 3. However, the method of forming the step H is not limited to this. FIG. 6 shows an example of another method of forming the step H.

  6, the slit die 103 of the present invention is similar to the embodiment shown in FIG. 2 in that the first lip 3, the second lip 2, the first block 4a constituting the first lip 3 A second block 5a, and a bolt 8 and a nut 9 for engaging and fastening the first block 4a and the second block 5a.

  The slit die 103 has a lip gap 13, a discharge port 14, and a manifold 12, as in the embodiment shown in FIG. As in the embodiment shown in FIG. 2, the slit die 103 forms the lip gap 13 with the inner surface 17a of the second lip 2 facing the inner surface 15a of the first block 4a. The inner surface 17b is located substantially on the same plane.

  However, the first block 4a and the second block 5a in the slit die 103 have different thicknesses in a direction perpendicular to the inner surface 15b of the second block 5a forming the lip gap 13. In this respect, the slit die 103 differs from the slit dies 1, 101 and 102 shown in FIGS. In FIG. 6, the first block 4a has a thickness Lta, and the second block 5a has a thickness Ltb. The difference between the thickness Lta and the thickness Ltb forms a step H1 between the inner surface 15a of the first block 4a and the inner surface 15b of the second block 5a.

  A flat block 111 as a positioning element is fixed to an outer surface 16a of the first block 4a and an outer surface 16b of the second block 5a by a bolt 20 as a fixing element. The inner surface 111a of the flat block 111 is in contact with the outer surface 16a of the first block 4a and the outer surface 16b of the second block 5a.

  When the first lip 3 and the second lip 2 are assembled by the assembling bolts 7 (see FIG. 1), the step H1 between the inner surface 15a of the first block 4a and the inner surface 15b of the second block 5a is reduced. A lip gap 13 having the same gap width Lg is formed.

  The number of steps H (H1) forming the lip gap 13 having the gap width Lg is not limited to one step as in the above embodiment. Two or more steps may be formed on the first lip 3 by overlapping three or more blocks.

  In the above-described embodiment, the first lip 3 has been described as being composed of the two blocks of the first block 4 (4a) and the second block 5 (5a). It is not something that can be done. Each of the first lip 3 and the second lip 2 may be formed of a plurality of blocks vertically, and the relative position of each block may be adjusted.

  The slit die of the present invention can also be applied to a slit die for simultaneously forming a plurality of coating films on a member to be coated, that is, a slit die for simultaneous multilayer coating in which two or more lip gaps are formed by three or more lips. .

  The method of forming the lip gap 13 is not limited to a form formed by steps formed between a plurality of blocks.

  FIG. 7 shows an example of another step formation. In FIG. 7, the slit die 104 of the present invention is similar to the embodiment shown in FIG. 2 in that the first lip 3, the second lip 2, the first block 4 forming the first lip 3, The second block 5 includes a bolt 8 and a nut 9 that engage and fasten the first block 4 and the second block 5.

  The slit die 104 has a lip gap 13, a discharge port 14, and a manifold 12, as in the embodiment shown in FIG.

  The slit die 104 has a positioning element consisting of a flat block 111, as in the embodiment shown in FIG. The inner surface 111a of the flat block 111 has a single plane. The inner surface 111a is in contact with the outer surface 16a of the first block 4 and the outer surface 16b of the second block 5.

  In the slit die 104, as in the embodiment shown in FIG. 2, the second lip 2 forming the lip gap 13 with the inner surface 17a of the second lip 2 facing the inner surface 15a of the first block 4. The inner surface 17b is located substantially on the same plane.

  However, in the slit die 104, there is no step between the inner surface 15a of the first block 4 and the inner surface 15b of the second block 5, and both inner surfaces 15a and 15b are located on the same plane. In this respect, the slit die 104 differs from the embodiments shown in FIGS.

  With this configuration, the slit die 104 has a gap between the inner surface 17a of the second lip 2 and the inner surface 15a of the first block 4. This gap is filled with a shim 113. The shim 113 is set between the first lip 3 and the second lip 2 when assembling the slit die 104, and then is tightened and fixed by the first block 4 and the second lip 2. I have. A step H2 is formed by the shim 113.

  FIG. 8 shows still another embodiment of the slit die of the present invention. The slit die 105 in FIG. 8 replaces the shim 113 in the slit die 104 in FIG. 7 with the inner surface 17a of the second lip 2 in the direction of the inner surface 15a of the first block 4 corresponding to the thickness of the shim 113. The inner surface 17a and the inner surface 15a are in contact with each other. As a result, a step H3 is formed. The structure of other parts of the slit die 105 is the same as the slit die 104 of FIG.

  Although several embodiments have been described above, in the slit die of the present invention, a lip gap can be formed by a combination of a pair of lips, at least one lip is constituted by at least two independent blocks, and provided for the block. It is essential that the gap width of the lip gap can be corrected in the longitudinal direction of the lip gap by the relative positioning element between the blocks and the fixing element of the positioning element. That is, the individual components and their combinations may be in any form as long as this structure is satisfied.

  The realization of submicron-order lip gap accuracy in a slit die having a configuration such as the slit die 104 shown in FIG. 7 or the slit die 105 shown in FIG. 8 configures the first lip 3 according to the lip gap accuracy. The relative position between the first block 4 and the second block 5 can be determined by providing a small step in the flat block 111.

  The manifold 12 inside the slit die 1 may be provided on the first lip 3 instead of the second lip 2, or may be provided on both the first lip 3 and the second lip 2. It may be.

  As shown in FIG. 1, the front shape of the manifold 12 is a T-shape extending in the left-right longitudinal direction around the coating liquid supply port 11 or inclined in the left-right longitudinal direction around the coating liquid supply port 11. It may be a coat hanger type having a shape. The manifold 12 is not limited to one, and may be provided in a plurality of stages in the application liquid discharge direction. The manifold 12 may be penetrated at both ends in the longitudinal direction of the lip. In this case, regulation of the discharge width of the coating liquid and liquid leakage sealing are performed by side plates attached to both ends in the longitudinal direction of the lip.

  The application liquid supply means (not shown) may be a known one. As the application liquid supply means, for example, a gear pump, a mono pump, a diaphragm pump, or a syringe pump is used. Known filters and valves are provided in the coating liquid flow path between the coating liquid supply means and the slit die 1 as necessary.

  In the slit die of the present invention, the material of the lip is not particularly limited. Examples of the material include a cemented carbide, ceramics, stainless steel, or a material obtained by applying a surface treatment to these materials. Stainless steel is preferable as a material because it has chemical resistance and is inexpensive.

  The length LA of the tip 18 of the second lip 2 and the length LB of the tip 19 of the first lip 3 shown in FIG. 2 are set according to the direction in which the coating film is formed. Is done. For example, when the member to be coated relatively moves from the second lip 2 toward the first lip 3 and a coating film is formed on the downstream side of the second lip 3, the tip of the second lip 2 The length LA of 18 is preferably 0.1 mm to 15 mm, more preferably 0.5 mm to 5 mm, and the length LB of the tip 19 of the first lip 3 is preferably 0.03 mm to 2 mm, more preferably It is desirable that the length is between 0.05 mm and 1 mm, and that the length LB of the tip 19 of the first lip 3 is shorter than the length LA of the tip 18 of the second lip 2.

  The straightness in the longitudinal direction of the tip 18 of the second lip 2 and the tip 19 of the first lip 3, that is, the magnitude of the undulation in the macroscopic direction is preferably 10 μm or less, more preferably 5 μm. It is as follows.

  The surface roughness of the liquid contact surface is a maximum height (Ry), preferably 0.4 S or less, more preferably 0.2 S or less. It is more preferable to finish the tip 18 of the second lip 2 and the tip 19 of the first lip 3 with 0.1S or less in order to improve coating quality.

  Next, an embodiment of a method and apparatus for manufacturing a substrate having a coating film using the slit die of the present invention will be described.

  FIG. 9 is a schematic perspective view of a coating apparatus (die coater) using the slit die of the present invention for performing the method of manufacturing a substrate having a coating film of the present invention. FIG. 10 is a schematic configuration diagram showing the die coater of FIG. 9 including a coating liquid supply system.

  FIG. 9 shows a coating apparatus (die coater) 21 that applies a coating liquid to a single-wafer substrate (member to be coated) such as a glass substrate to form a coating film. The die coater 21 has a base 22. A pair of guide groove rails 24 is provided on the base 22, and a stage 26 is arranged on these guide groove rails 24. The upper surface of the stage 26 is a suction surface. The stage 26 is reciprocally movable in a horizontal direction on the guide groove rail 24 via a pair of slide legs 28.

  A casing 32 extending along the guide groove rails 24 is disposed between the pair of guide groove rails 24, and the casing 32 has a built-in feed mechanism. The feed mechanism has a feed screw 34 composed of a ball screw as shown in FIG. The feed screw 34 is screwed to the nut-like portion of the connector 36 having a nut-like portion fixed to the lower surface of the stage 26, and extends through the connector 36. Both ends of the feed screw 34 are rotatably supported by bearings (not shown), and one end thereof is connected to an AC servomotor 38. An opening that allows the connector 36 to move is formed in the upper surface or side surface of the casing 32, but illustration of this opening is omitted.

  In this embodiment, a method in which the stage 26 reciprocates is adopted, but the present invention is not limited to this, and a method in which the slit die 1 reciprocates with respect to the stage 26 may be used. In short, at least one of the stage 26 and the slit die 1 only needs to reciprocate.

  An inverted L-shaped sensor support 40 is disposed on one end of the upper surface of the base 22. The tip of the sensor support 40 extends to above one of the guide groove rails 24, and an electric lifting actuator 41 is attached thereto. A thickness sensor 42 is attached to the lifting actuator 41 so as to face downward. As the thickness sensor 42, a laser displacement gauge, an ultrasonic thickness gauge, or the like is used, and a sensor using a laser is particularly preferable.

  On the upper surface of the base 22, a die support 44 having an inverted L-shape similar to the sensor support 40 is arranged at a position closer to the center of the base 22 than the sensor support 40. The tip of the die support 44 is located above the pair of guide groove rails 24, that is, above the reciprocating path of the stage 26. An elevating mechanism 46 is attached to the tip of the die support 44. Although not shown in detail in FIG. 9, the lifting mechanism 46 includes a lifting bracket. This elevating bracket is attached to a pair of guide rods so as to be able to move up and down. A feed screw composed of a ball screw is disposed between the guide rods. The feed screw is screwed into a nut of the lifting bracket and extends through the nut.

  An AC servomotor 50 is connected to the upper end of the feed screw, and the AC servomotor 50 is attached to the upper surface of the casing 48. The above-described guide rod and feed screw are housed in a casing 48 and are rotatably supported via bearings.

  A die holder 52 composed of a flat plate and side plates provided at both ends of the flat plate is rotatably attached to the lifting bracket by a support shaft (not shown) in a vertical plane. The die holder 52 extends horizontally between the guide groove rails 24 above the pair of guide groove rails 24.

  A horizontal bar 56 is fixed to the lifting bracket at a position above the die holder 52, and the horizontal bar 56 extends along the die holder 52. Electric adjustment actuators 58 are attached to both ends of the horizontal bar 56, respectively. The adjustment actuator 58 has extensible rods protruding from the lower surface of the horizontal bar 56, and the lower ends of these extensible rods are in contact with both ends of the die holder 52, respectively.

  In the die holder 52, the slit die 1 of the present invention is mounted. As shown in FIG. 10, a supply hose 62 for the coating liquid 90 extends from the slit die 1, and a distal end of the supply hose 62 is connected to a supply port of an electromagnetic switching valve 66 in the syringe pump 64. I have. A suction hose 68 extends from a suction port of the electromagnetic switching valve 66, and the tip of the suction hose 68 is inserted into a tank 70 in which a coating liquid 90 is stored.

  The pump body 72 of the syringe pump 64 can be selectively connected to one of the supply hose 62 and the suction hose 68 by the switching operation of the electromagnetic switching valve 66. The electromagnetic switching valve 66 and the pump main body 72 are electrically connected to a computer 74, and the operation thereof is controlled by receiving a control signal from the computer 74. The computer 74 is also electrically connected to the lifting actuator 41 and the thickness sensor 42.

  Computer 74 is also electrically connected to sequencer 76 to control the operation of syringe pump 64. The sequencer 76 controls the sequence of the operation of the AC servomotor 38 of the feed screw 34 on the stage 26 side and the operation of the AC servomotor 50 of the lifting mechanism 46. For the sequence control, the sequencer 76 includes a signal indicating an operation state of the AC servomotors 38 and 50, a signal from a position sensor 78 for detecting a moving position of the stage 26, and a sensor for detecting an operation state of the slit die 1. (Not shown). On the other hand, a signal indicating a sequence operation is output from the sequencer 76 to the computer 74.

  Instead of using the position sensor 78, an encoder may be incorporated in the AC servomotor 38, and the position of the stage 26 may be detected by the sequencer 76 based on a pulse signal output from the encoder. It is also possible to incorporate control by the computer 74 into the sequencer 76.

  Although not shown, the die coater 21 has a loader for supplying a sheet substrate as a member to be coated on the stage 26, for example, a glass substrate A for a color filter, and an unloader for removing the glass substrate A from the stage 26. Is provided. In these loaders and unloaders, for example, an industrial robot having a cylindrical coordinate system can be used as a main component.

  As is clear from FIG. 9, the slit die 1 extends horizontally in a direction perpendicular to the reciprocating direction of the stage 26, that is, in the width direction of the stage 26, and both ends thereof are supported by the die holder 52. I have.

  The horizontal adjustment of the slit die 1 is performed by extending and retracting a telescopic rod of an adjustment actuator 58 provided at both ends of the horizontal bar 56, and rotating the die holder 52 around its support axis.

  Next, one process related to the production of a color filter, that is, a method for producing a substrate having a coating film, which is performed using the above-described die coater 21, will be described.

  In FIGS. 9 and 10, first, the origin return of each operation unit in the die coater 21 is performed. At this stage, the stage 26 is positioned below the thickness sensor 42. At this stage, the coating liquid 90 is filled in the path from the tank 70 through the suction hose 68 and the supply hose 62 to the manifold 12 and the lip gap 13 in the slit die 1. Further, at this stage, as an application preparation operation, the electromagnetic switching valve 66 of the syringe pump 64 is switched so that the pump body 72 is connected to the suction hose 68 side. This causes the pump body 72 to perform a suction operation in which the application liquid 90 in the tank 70 is suctioned through the suction hose 68. When a predetermined amount of the coating liquid 90 is sucked into the syringe pump 64, the electromagnetic switching valve 66 of the syringe pump 64 is switched to connect the pump body 72 and the supply hose 62.

  In this state, the glass substrate A is supplied from the loader (not shown) onto the stage 26, and the glass substrate A is held on the stage 26 by receiving a suction pressure. Thus, the loading of the glass substrate A is completed. The glass substrate A has a width substantially equal to or larger than the discharge width of the discharge port 14 in the slit die 1, that is, the distance Lw between the seal plates 6a and 6b.

  When the loading of the glass substrate A is completed, the thickness sensor 42 is lowered to a predetermined position, and the thickness of the glass substrate A is measured by the thickness sensor 42. After the measurement, the thickness sensor 42 moves up to the original position.

  When the loading of the glass substrate A is completed, the stage 26 moves toward the slit die 1 and stops immediately before the slit die 1. Thereafter, the slit die 1 descends, and a predetermined clearance, for example, a gap of 100 μm is secured between the lower surface of the slit die 1 and the upper surface of the glass substrate A. The clearance is determined based on an output signal from a distance sensor (not shown) that measures the distance between the stage 26 and the slit die 1 in consideration of the thickness of the glass substrate A measured by the thickness sensor 42. Is positioned and set accurately.

  Next, the stage 26 is further moved, and the stage 26 is temporarily stopped when the start line for starting the formation of the coating film on the upper surface of the glass substrate A is positioned immediately below the discharge port 14 of the slit die 1. Let it.

  At substantially the same time as the stage 26 temporarily stops, the syringe pump 64 starts the discharge operation of the coating liquid 90, and supplies the coating liquid 90 to the slit die 1. Thus, the coating liquid 90 is discharged onto the glass substrate A from the discharge port 14 of the slit die 1. Here, the discharge port 14 has a constant gap along the longitudinal direction of the slit die 1, that is, the direction perpendicular to the reciprocating direction of the stage 26. The coating liquid 90 is discharged uniformly along the line. Thereby, a liquid pool C of a coating liquid called a bead is formed between the slit die 1 and the glass substrate A along the start line.

  When the stage 26 is moved in the forward direction at a constant speed while continuously discharging the coating liquid 90 from the discharge port 14 simultaneously with the formation of the liquid pool C, as shown in FIG. A coating film D of the coating liquid 90 is continuously formed on the upper surface.

  In forming the coating film D, the coating liquid 90 is discharged from the discharge port 14 at the timing when the start line of the glass substrate A passes through the discharge port 14 of the slit die 1 without temporarily stopping the movement of the stage 26. You may do it.

  With the progress of the stage 26, when the finish line on which the formation of the coating film D is to be completed on the glass substrate A reaches the position immediately before the discharge port 14 of the slit die 1, the discharge operation of the syringe pump 64 is started at this time. Stopped. Even if the discharge of the coating liquid 90 from the discharge port 14 of the slit die 1 is stopped in this way, the formation of the coating film D is continued to the finish line while consuming the coating liquid of the liquid pool C on the glass substrate A. You. The discharge operation of the syringe pump 64 may be stopped when the finish line on the glass substrate A passes through the discharge port 14 of the slit die 1.

  When the finish line on the glass substrate A passes or passes through the discharge port 14, the suction operation of the syringe pump 64 is slightly performed, whereby the coating liquid 90 in the lip gap 13 of the slit die 1 It is sucked into the manifold 12 side. At the same time, the slit die 1 moves up to the original position, and the application of the coating liquid 90 by the slit die 1 ends.

  Next, a discharge operation is given to the syringe pump 64 by the same amount as the suction operation so that no air remains in the lip gap 13 of the slit die 1. Thereafter, the electromagnetic switching valve 66 of the syringe pump 64 is switched to connect the pump body 72 to the suction hose 68, and the pump body 72 performs a suction operation of sucking the application liquid in the tank 70 through the suction hose 68. Let When a predetermined amount of the application liquid is sucked into the syringe pump 64, the electromagnetic switching valve 66 of the syringe pump 64 is switched to connect the pump body 72 and the supply hose 62. Thereafter, at the ascending position of the slit die 1, the coating liquid 90 adhering to the lower end surface thereof is wiped off by a cleaner (not shown).

  On the other hand, the forward movement of the stage 26 is continued even after the application of the application liquid 90 is completed, and the forward movement is stopped when the stage 26 reaches the end of the guide groove rail 24. In this state, the glass substrate A on which the coating film D is formed is released from the stage 26 by the unloader after the suction by the suction is released. Thereafter, the stage 26 moves back, returns to the initial position shown in FIG. 9, and a series of coating steps is completed. At the initial position, the stage 26 waits until a new glass substrate is loaded.

  The coating liquid 90 used for forming the coating film is not particularly limited as long as it is a liquid having fluidity. For example, a coating liquid for coloring, a coating liquid for resist, a coating liquid for surface protection, a coating liquid for antistatic, or And a lubricating coating solution. As the coating liquid, a liquid in which an inorganic material such as a polymer material, glass, or a metal is dissolved or dispersed in water or an organic solvent is often used.

  The viscosity of the coating solution 90 used is preferably 1 mPa · s to 100,000 mPa · s, more preferably 5 mPa · s to 50,000 mPa · s. Newtonian is preferred from the viewpoint of coating properties, but a coating solution having thixotropic properties can also be used.

  As the substrate A, other than glass, a metal plate such as aluminum, a ceramic plate, a silicon wafer, or the like may be used.

  As the application conditions to be used, the clearance (for necessary ones) is preferably 20 μm to 500 μm, more preferably 50 μm to 400 μm, and the application speed is preferably 0.1 m / min to 50 m / min. Preferably, it is 0.5 m / min to 10 m / min, the lip gap is preferably 30 μm to 1,000 μm, more preferably 50 μm to 600 μm, and the coating thickness is preferably 3 μm to 500 μm, more preferably 5 μm. To 300 μm.

The method for producing a substrate having a coating film of the present invention is preferably used for producing a display member. Examples of the display member include a color filter used for a liquid crystal display, and a back plate and a front plate of a plasma display.
In the above embodiment, the application to a single-wafer substrate such as a glass substrate has been described. However, the application to a long web (a long member to be applied) such as a film, a metal sheet, a metal foil, and paper is performed by rolling the web. This can be realized by bringing the slit die 1 of the present invention close to the portion to be supported and transported, and discharging the coating liquid from the discharge port 14 of the slit die 1 to the web.

Next, the present invention will be further described using specific examples.
Example 1 and Comparative Examples 1 and 2:
A pitch of 254 μm in the width direction of the substrate, a pitch of 85 μm in the longitudinal direction of the substrate, a line width of 20 μm, a number of RGB pixel shapes of 4, 800 (longitudinal direction of the substrate) × 1,200 (width direction of the substrate), a diagonal length of 508 mm (20 inches) (305 mm in the width direction of the substrate, 406 mm in the longitudinal direction of the substrate), and a thickness of 1 μm Was prepared.

  The black matrix film used titanium oxynitride as a light-shielding material and polyamic acid as a binder.

  Subsequently, particles on the substrate were removed by wet cleaning. Then, a mixture of polyamic acid as a binder, γ-butyrolactone, a mixture of N-methyl-2-pyrrolidone and 3-methyl-methoxybutanol as a solvent, and Pigment Red 177 as a pigment were mixed at a solid content concentration of 10%. Was adjusted to 50 mPa · s to prepare an R-color coating solution.

  Each of the slit die 1 of the present invention (Example 1) shown in FIG. 1, the conventional slit die 301 (Comparative Example 1) shown in FIG. 12, and the conventional slit die 401 (Comparative Example 2) shown in FIG. The prepared coating liquid was applied to the entire surface of the glass substrate by the die coater 21 shown in FIG. 9 under the following application conditions.

  The substrate coated with each slit die was dried at 100 ° C. for 20 minutes using a drying device using a hot plate. The thickness accuracy of the coating film on the dried substrate was measured over the entire surface of the substrate by an optical interference type non-contact film thickness meter. Table 1 shows the measurement results. In addition, the coating thickness accuracy shown in Table 1 is obtained by dividing the maximum deviation of the coating thickness unevenness by the average value of the coating thickness, and is expressed as a percentage (%).

Application condition:
Coating thickness: 20 μm, coating speed: 3 m / min, clearance: 100 μm
The schematic shape dimensions and main accuracy of each component in the slit die 1 of the first embodiment are as follows.

Second lip 2:
Dimensions: width 400mm x height 75mm x thickness 30mm
Length LA of tip 18: 0.5 mm
Flatness of inner surface 17a: 1.5 μm
Shape of manifold 12: T-shaped 358 mm wide x 4 mm deep Length Ld of lip gap 13 in discharge direction: 30 mm
First lip 3:
External dimensions of the first block 4: width 400 mm x height 35 mm x thickness 30 mm
External dimensions of the second block 5: width 400 mm x height 40 mm x thickness 30 mm
Flatness of inner surface 15a of first block 4: 1.4 μm
Flatness of inner surface 15b of second block 5: 1.5 μm
External dimensions of stepped block 10: width 26 mm x height 26 mm x thickness 14 mm
The number and arrangement interval of the stepped blocks 10: 8, 27 mm
Surface roughness of stepped surfaces 10a and 10b of stepped block 10: 0.5S
Length LB of tip 19: 0.05 mm.

  The step H of the first lip 3 changes each step amount h of the eight stepped blocks 10 minutely by wrapping, and the maximum deviation of the step amount H is 0.1 mm in the range of the application width over the longitudinal direction. Fine adjustment was made to 2 μm. The average step height H was 101.5 μm. The second lip 2 and the first lip 3 are interposed between the two stainless-steel sealing plates 6a and 6b having a thickness of 101.3 μm so that the discharge width becomes 358 mm. Combined. As a result, a lip gap 13 having a gap width Lg of 101.5 μm was formed. The lip gap accuracy at this time was 0.4 μm.

  Regarding the conventional slit dies of Comparative Examples 1 and 2, the discharge width, the shape of the lip tip, the manifold shape, and the length of the lip gap in the discharge direction were the same as those of the slit die of Example 1. The dimensions and accuracy of other parts are as follows.

Comparative Example 1:
External dimensions of right lip 302 and left lip 303: width 400 mm x height 75 mm x thickness 30 mm
Flatness of inner surface of right lip 302: 1.3 μm
Flatness of inner surface of left lip 303: 1.4 μm
Thickness of shim 304 (size L of lip gap 312): 101 μm
Lip gap accuracy: 2.8 μm
Comparative Example 2:
Outer dimensions of right lip 402 and left lip 403: width 400 mm x height 75 mm x thickness 30 mm
Step difference of right lip 402 (size L of lip gap 412): 103.3 μm
Deviation of the level difference of the right lip 402: 1.2 μm
Flatness of inner surface of left lip 403: 1.3 μm
Lip gap accuracy: 1.4 μm.

  Table 1 shows that the slit die of the present invention (Example 1) achieves a lip gap accuracy on the order of submicron. In addition, it can be seen that the thickness accuracy of the coating film is dramatically improved as compared with Comparative Example 1 and Comparative Example 2.

  Next, a resist solution having a solid content of 10% and a viscosity of 8 mPa · s was applied to a thickness of 10 μm on the dried R-color coating film. After the application, it was dried on a hot plate at 90 ° C. for 10 minutes. After drying, exposure, development, and peeling were performed to leave a color coating film only on the R pixel portion, and heating was performed on a hot plate at 260 ° C. for 30 minutes to cure.

  The same color coating film was formed for the G and B colors using the slit die and the die coater of Example 1 under the same coating conditions and the same process as for the R color.

  Here, the pigment of the R-color coating solution was used as the pigment green 36, the solid content concentration was 10%, and the viscosity was adjusted to 40 mPa · s for the G-color coating solution. As the B-color coating solution, a pigment of the R-color coating solution was used, which was changed to Pigment Blue 15 at a solid content of 10% and the viscosity was adjusted to 50 mPa · s.

Finally, ITO was attached by sputtering to produce a color filter. The obtained color filter had extremely uniform and uniform chromaticity over the entire surface of the substrate, and was excellent in quality.
Example 2 and Comparative Examples 3 and 4:
A photosensitive silver paste was screen-printed to a thickness of 5 μm on the entire surface of a soda glass substrate having a width of 340 mm, a length of 440 mm and a thickness of 2.8 mm. Thereafter, exposure was performed using a photomask, and through development and firing steps, 1,920 striped silver electrodes were formed at a pitch of 220 μm. A glass paste composed of glass and a binder was screen-printed on the electrode. Thereafter, the substrate was fired to form a dielectric layer.

  Next, a slit die 101 shown in FIG. 4 (Example 2), a conventional slit die 201 (Comparative Example 3) shown in FIG. 11, and a conventional slit die 301 shown in FIG. Each of (Comparative Example 4) was attached in order.

  Using these die coaters 21, a photosensitive glass paste composed of glass powder and a photosensitive organic component and having a viscosity of 20,000 mPa · s was applied on a substrate at an application thickness of 300 μm, an application speed of 1 m / min, and a clearance of 350 μm. . After the application, each substrate was taken out of the die coater 21 by a transfer machine, placed in a drying furnace using a radiation heater, and dried at 100 ° C. for 20 minutes. After drying, the thickness accuracy of the coating film formed on the substrate was measured over the entire surface of the substrate using a laser focus non-contact film thickness meter. Table 2 shows the measurement results. In addition, the coating thickness accuracy shown in Table 2 is obtained by dividing the maximum deviation of the coating thickness unevenness by the average value of the coating thickness and expressing the result as a percentage (%).

  The outline shape dimensions and main accuracy of the slit die 101 of the second embodiment are as follows.

Second lip 2:
Dimensions: width 470mm x height 100mm x thickness 50mm
Length LA of tip 18: 2.5 mm
Flatness of inner surface 17a: 1.3 μm
Shape of manifold 12: T-type having a width of 450 mm x a depth of 20 mm Length Ld in the discharge direction of lip gap 13: 20 mm
First lip 3:
External dimensions of first block 4: width 490 mm x height 100 mm x thickness 50 mm
External dimensions of second block 5: width 490 mm x height 100 mm x thickness 50 mm
Flatness of inner surface 15a of first block 4: 2.3 μm
Flatness of inner surface 15b of second block 5: 1.5 μm
External dimensions of the flat block 110: width 40 mm x height 35 mm x thickness 18 mm
Surface roughness of flat block 110: 0.8S
Number and arrangement interval of the flat blocks 110: 5, 70 mm
Size of shim 111: width 40mm x height 15mm
Each thickness of the shim 111: 501.0 μm to 501.8 μm
Length LB of tip 19: 1.0 mm.

  The step of the first lip 3 is changed by slightly changing the thickness of each of the five shims 111 by wrapping until the maximum deviation of the step H becomes 0.4 μm in the longitudinal direction in the range of the application width. Fine-tuned. The average step height H was 501.2 μm. Then, the second lip 2 and the first lip 3 are interposed at a distance Lw between the two stainless steel sealing plates 6a and 6b having a thickness of 501.3 μm so that the discharge width becomes 430 mm. Combined. As a result, a lip gap 13 having a gap width Lg of 501.6 μm was formed. The lip gap accuracy at this time was 0.5 μm.

  Regarding the conventional slit dies of Comparative Examples 3 and 4, the discharge width, the shape of the lip tip, the manifold shape, and the length of the lip gap in the discharge direction were the same as those of the slit die of Example 2. The dimensions and accuracy of the other components are as follows.

Comparative Example 3:
Outer dimensions of right lip 202 and left lip 203: width 490 mm x height 100 mm x thickness 50 mm
Flatness of inner surface of right lip 202: 1.7 μm
Flatness of the inner surface of the left lip 203: 2.2 μm
Average value of gap L between lips (size L of lip gap 212): 503.4 μm
Lip gap accuracy: 8.3 μm
Comparative Example 4:
External dimensions of right lip 302 and left lip 303: width 490 mm x height 100 mm x thickness 50 mm
Flatness of inner surface of right lip 302: 1.8 μm
Flatness of inner surface of left lip 303: 1.4 μm
Thickness of shim 304 (size L of lip gap 312): 498 μm
Lip gap accuracy: 5.0 μm.

  It can be seen from Table 2 that the slit die of the present invention (Example 2) also achieves lip gap accuracy on the order of submicron. Further, it can be seen that the thickness accuracy of the coating film has been dramatically improved as compared with Comparative Examples 3 and 4.

A substrate manufactured by applying a coating liquid with the slit die of the present invention (Example 2) is exposed using a photomask designed to form a partition wall between adjacent electrodes, and then exposed to light. By baking, 1,921 partition walls were formed in each region at a pitch of 220 μm, a line width of 30 μm, and a height of 130 μm.
Thereafter, R, G, and B phosphor pastes were sequentially applied by screen printing, dried at 80 ° C. for 15 minutes, and finally baked at 460 ° C. for 15 minutes to produce a back plate of the plasma display. The quality of the back plate of the obtained plasma display was satisfactory. Next, the back plate and the front plate of this plasma display were joined together, and after sealing, a mixed gas of Xe 5% and Ne 95% was sealed, and a drive circuit was connected. When the obtained plasma display was driven, it was confirmed that the plasma display was free from defects and had good image quality.

It is a perspective view showing the state where each part of one embodiment of the slit die of the present invention was disassembled. FIG. 2 is a cross-sectional view of the slit die of FIG. 1. FIG. 3C is a cross-sectional view (FIG. 3C) illustrating an assembling procedure of a first block (FIG. 3A), a second block (FIG. 3B), and a positioning block, which constitute a first lip in the slit die of FIG. FIG. 4 is a cross-sectional view of another embodiment of the slit die of the present invention. FIG. 5 is a cross-sectional view of yet another embodiment of the slit die of the present invention. FIG. 5 is a cross-sectional view of yet another embodiment of the slit die of the present invention. FIG. 5 is a cross-sectional view of yet another embodiment of the slit die of the present invention. FIG. 5 is a cross-sectional view of yet another embodiment of the slit die of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic perspective view of an example of the apparatus (die coater) for implementing the manufacturing method of the base material which has a coating film of this invention. FIG. 10 is a schematic system diagram illustrating an example of a coating liquid supply system, a coating liquid coating procedure, and a control system therefor in the die coater of FIG. 9. It is a cross-sectional view of an example of a conventional slit die. It is a cross section of other examples of the conventional slit die. It is a cross-sectional view of yet another example of the conventional slit die.

Explanation of reference numerals

1: slit die of the present invention (Example 1)
2: Second lip 3: First lip 4: First block 5: Second block 6a: Seal plate 6b: Seal plate 7: Assembly bolt (lip fastening element)
8: bolt (block engaging element, block fastening element)
9: Nut (block engaging element, block fastening element)
10: Stepped block (positioning element)
10a: Upper inner surface of stepped block (position defining surface)
10b: Lower inner surface of stepped block (position defining surface)
11: Application liquid supply port 12: Liquid supply path (manifold)
13: Lip gap 14: Discharge port 15a: Inner surface of first block (Inner surface of first lip)
15b: Inner surface of second block (inner surface forming lip gap of first lip)
16a: outer surface 16b of the first block: outer surface 17a of the second block 17a: inner surface 17b of the second lip: inner surface 18 of the second lip forming a lip gap: tip 19 of the second lip: first Lip tip 20: bolt (fixing element for positioning element)
21: Die coater 26: Stage 27: Feed screw 64: Syringe pump (coating liquid supply means)
70: tank 101: slit die of the present invention (Example 2)
110: Flat block (positioning element)
111: Shim (position definition assisting means)
112: expansion / contraction means (position definition assisting means)
A: Glass substrate (member to be coated)
C: Bead D: Coating

Claims (12)

A lip fastening element comprising a first lip and a second lip, wherein the first lip and the second lip are arranged such that an inner surface of the first lip and an inner surface of the second lip face each other. The liquid supply path and the lip gap extending in the longitudinal direction of the lip are formed by partly disposing the opposed inner surfaces at intervals, and the lower end of the lip gap extends outward. Forming an open discharge port, both ends in the longitudinal direction of the lip gap are closed to the outside, the upper end of the lip gap is a slit die connected to the liquid supply path,
(A) the first lip comprises a first block and a second block,
(B) the first block and the second block so that the relative position between the first block and the second block in a direction perpendicular to the surface of the first lip forming the lip gap can be adjusted; A block engaging element for engaging with the block of
(C) a block fastening element for fastening and integrating the first block and the second block after the relative position is adjusted;
(D) engaging the outer surface of the first block and the outer surface of the second block on the opposite side of the inner surface of the first lip, and connecting the first block and the second block; A positioning element that defines the relative position;
(E) a positioning element fixing element for fixing the positioning element to the first lip,
(F) The slit die, wherein a gap width distribution in a longitudinal direction of the lip gap can be adjusted by the positioning element and a fixing element of the positioning element. The slit die according to claim 1, wherein a plurality of the positioning elements are provided at intervals in a longitudinal direction of the lip. The positioning element comprises a positioning block, the positioning block having a position defining surface that contacts at least one of the outer surface of the first block and the outer surface of the second block, and the other outer surface 3. The slit die according to claim 1, further comprising a position defining assisting unit that engages with the part and the outer surface when there is a part that does not contact the part. 4. The slit die according to claim 3, wherein a maximum height Ry of surface roughness of the position defining surface of the positioning block is 0.1S to 1.0S. The first block and the second block each have a thickness in a direction perpendicular to a surface forming the lip gap of 30 mm or more, and a cross-sectional shape of the positioning block in a direction along the position defining surface is rectangular. The length of the rectangular lip in the longitudinal direction is 20 mm to 100 mm, and the length in the direction perpendicular to the longitudinal direction is 20 mm to 100 mm, and at least the portion at the position where the position defining surface is located The slit die according to claim 3, wherein a thickness of the positioning block is 30% or more of a thickness of the second block. The slit die according to claim 3, wherein a plurality of the positioning blocks are provided at intervals in a longitudinal direction of the lip. The slit die according to claim 1, wherein the second lip has a structure similar to that of the first lip. The inner surface of the first block and the inner surface of the second lip are in contact with each other or are located via a shim, and the inner surface of the second block and the inner surface of the second lip are The slit die according to claim 1, wherein the lip gap is formed between the slit dies. 9. The method according to claim 8, wherein the inner surface of the second lip facing the inner surface of the first block and the inner surface of the second lip forming the lip gap are substantially coplanar. The slit die described. 9. The method according to claim 8, wherein an inner surface of the first block facing an inner surface of the second lip and an inner surface of the second block forming the lip gap are substantially coplanar. The slit die described. The coating liquid is supplied to the liquid supply path of the slit die by using the slit die according to any one of claims 1 to 10, and the coating liquid is discharged from the discharge port through the lip gap. At least one of the member to be coated and the slit die positioned at an interval from an outlet is relatively moved to apply the coating liquid discharged from the discharge port onto the member to be coated, and A method for producing a substrate having a coating film formed by forming a coating film of a liquid on the member to be coated. A slit die according to any one of claims 1 to 10, a coating liquid supply unit engaged with the liquid supply path of the slit die, and the slit gap for supplying a coating liquid supplied to the liquid supply path. And a coating liquid discharge unit that discharges from the discharge port via at least one of the member to be coated and the slit die that are positioned at an interval with respect to the discharge port, and is relatively discharged to be discharged from the discharge port. An apparatus for producing a substrate having a coating film comprising: a coating film forming means for applying the coating liquid on the member to be coated and forming a coating film of the coating liquid on the member to be coated.

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