KR101321483B1 - An Improved Slit Die and A Coating Apparatus Having the Same - Google Patents

Abstract

The present invention discloses an improved slit die and a coating apparatus having the same.
The slit die according to the present invention comprises a pair of first and second lips facing each other; A coating liquid supply part formed inside the first lip; A manifold connected to the plating liquid supply part; A stepped portion formed over the entire first land portion of the manifold of the first lip; Closing members provided on opposite sides of the first lip and the second lip, respectively; A gap adjusting cavity provided vertically under the first lip or the second lip; And a plurality of horizontal gap adjusting devices provided horizontally across the gap adjusting cavity, wherein the stepped portion has a slit shape having a gap L when the first lip and the second lip are engaged. It is characterized by forming a discharge port.

Description

Improved Slit Die and A Coating Apparatus Having the Same}

The present invention relates to an improved slit die and a coating apparatus having the same. More specifically, the present invention replaces the manifold of the first lip or the second lip instead of the shim that is inserted and used inside both ends of the two gaps to form and maintain a gap between the two ribs of the slit die. As a reference, a step corresponding to the gap is formed over the entire lower surface, and a stainless steel finishing member is used at the ends of both sides of the two ribs, so that the gap of the entire lips can be easily adjusted and the gap of both ends of the lips can be adjusted. In addition, the maximum width that can be adjusted is increased to improve the uniformity of the coating liquid discharge height, and the possibility of uncoating and mura is significantly reduced, which significantly reduces the possibility of defective products. The present invention relates to an improved slit die and a coating apparatus having the same which is reduced and productivity is increased.

In addition, the present invention forms a step corresponding to the gap across the lower surface of the first lip or the second lip of the slit die, based on the manifold, and also uses a stainless steel finishing member at both ends of the two ribs. At the same time, electro-polishing (EP) on the inner opposing surfaces of the two ribs facilitates gap adjustment of the entire lip, enables gap adjustment at both ends of the lip, and increases the maximum width that can be adjusted. Uniformity of the coating liquid discharge height is greatly improved, and the possibility of uncoating and mura phenomenon is greatly reduced, thereby significantly reducing the possibility of defects in the final product and increasing productivity. With improved slit die, which speeds up and reduces the contact angle of the discharged coating liquid, further reducing the uncoating and consequently the mura phenomenon. It relates to one coating apparatus.

Generally, a flat panel display (FPD), such as a PDP or LCD, is used to apply a coating liquid onto a substrate or work piece (hereinafter, referred to as a "substrate"), such as glass, or a slit die. die coating device is used.

More specifically, in a table coater 100 (hereinafter referred to as a "coating apparatus") used to manufacture a flat panel display (FPD) schematically shown in FIG. 1A, the substrate 110 as a workpiece to be coated. ) And the necessary coating liquid on the substrate 110 while moving the slit die 120 attached to the gantry 125 in the horizontal direction after placing the on the stage or suction table (112) Is being used.

In the method of forming the coating film by applying the coating liquid onto the substrate 110 using the coating apparatus according to the related art described above, the precision of the coating film thickness accurately measures the discharge amount for supplying and discharging the coating liquid in the slit die 120. It is influenced by the gap adjusting device for adjusting.

FIG. 1B shows one embodiment of a slit die for discharging a coating liquid used in the coating apparatus according to the prior art shown in FIG. 1A described above.

Referring to FIG. 1B, the slit die 120 according to the prior art is composed of a pair of first lips 122a and second lips 122b facing each other. A coating liquid supply part (not shown) and a manifold 126 are formed in the first lip 122a. A gap L is formed between the inner surface of the first lip 122a of the lower end of the manifold 126 of the first lip 122a and the inner surface of the second lip 122b corresponding thereto. The slit-shaped discharge port 128 opened toward the lower outer side of the is formed. The coating liquid is discharged through the discharge port 128 to form a coating film on the surface of the substrate 110 (see FIG. 1A). In forming the coating film, the slit die 120 and the substrate 110 are moved relatively (see FIG. 1A). As one example, the color filter is manufactured by sequentially applying black, red, blue, and green coating liquid onto a substrate 110 such as a substrate. The manufacturing process of the color filter is a step of forming a pillar for forming a space of the liquid crystal injected between the color filter and the substrate 110 after the pattern processing by a photolithography process after forming a coating film of the photoresist, Or forming an overcoating coating film for making the surface irregularities very small.

The above-described slit die 120 according to the prior art is provided with a plurality of vertical gap adjustment device 130 along the length direction of the second lip 122b. Hereinafter, one vertical gap adjusting device 130 will be described.

Referring again to FIG. 1B, the vertical gap adjusting device 130 according to the related art is provided in a vertical direction on one side of the second lip 122b. The second lip 122b is formed with a receiving space 131 for accommodating the vertical gap adjusting device 130. The prior art gap adjusting device 130 includes an adjusting nut 132, a fixing bolt 134, and a lower fixing member 148. The fixing bolt 134 is provided through the washer 150 by the lower fixing member 148 in the cavity 154 provided in the horizontal direction on the lower side of the second lip 122b. Is fixed to. The lower cap 152 is provided at the lower end of the lower fixing member 148. In addition, a stopper 144 is provided at the top of the adjustment nut 132, and an upper cap 142 is provided at the top of the stopper 144. In addition, a protective cover 156 is provided on an outer side surface of the second lip 122b provided with the cavity 154 to prevent foreign substances such as dust from entering the cavity 154.

In the above-described vertical gap adjusting device 130 according to the related art, a screwdriver or a hexagon of the driver groove or the hexagonal inner diameter groove 132a of the adjustment nut 132 is formed through the stopper driver groove or the hexagonal inner diameter groove 144a. When the adjusting nut 132 is rotated clockwise or counterclockwise by using the launch tool, the fixing bolt 134 engaged with the adjusting nut 132 by a thread is raised or lowered, and thus the gap L is opened or narrowed. The gap adjustment is made in such a way that the discharge port 128 is enlarged or reduced.

However, since the vertical gap adjusting device 130 according to the related art described above 1) adjusts the gap in the horizontal direction by the operation in the vertical direction, the gap is adjusted by a value that exactly matches the amount of rotation of the adjusting nut 132. This is difficult to precisely adjust the gap, 2) it is difficult to control the same adjustment operation of the plurality of adjustment nuts 132, a considerable time is required to adjust the gap, 3) the vertical gap adjustment device 130 In order to accommodate), a very long vertical receiving space 131 is required, so that the processing time and processing cost of the long receiving space 131 increases, and thus, maintenance is difficult.

As a solution for solving the problems of the conventional vertical gap adjusting device 130 described above, a horizontal gap adjusting device has been proposed.

Figure 2a is a view showing a horizontal gap adjusting device and a slit die having the same according to the prior art.

Referring to FIG. 2A, a slit die 220 according to the prior art includes a gap adjusting cavity 254 provided vertically under the first lip 222a or the second lip 222b; And a plurality of horizontal gap adjusting devices provided in the receiving space 231 formed horizontally across the gap adjusting cavity 254 on the lower side of the first lip 222a or the second lip 222b. 230. Each horizontal gap adjustment device 230 is provided in a horizontal direction, for example, below one side of the second lip 222b. An accommodation space 231 is formed in the second lip 222b to accommodate the horizontal gap adjusting device 230. The horizontal gap adjusting device 230 of the prior art rotates the gap adjusting nut 232 in a clockwise or counterclockwise direction, respectively, so that the gap adjusting nut has a fixing bolt 234 engaged with the gap adjusting nut 232 by a thread. The gap adjustment is made in such a way that the gap L is widened or narrowed so that the discharge port 228 is enlarged or reduced in the internal space 246 of the 232. The horizontal gap adjusting device 230 and the slit die 220 having the same shown in FIG. 2A are described by the present applicant on May 19, 2009, and the "gap adjusting device for the slit die and the slit die having the same are shown in FIG. And Korean Patent Application No. 10-2009-0043683 filed under the name of the invention "Coating Device", published on November 29, 2010 (hereinafter referred to as "592 published patent") In detail). These 592 published patents are incorporated herein by reference and form part of the invention.

The above-described horizontal gap adjusting device 230 of the prior art has the advantage that it can solve the problem of the vertical gap adjusting device 130 of the prior art.

However, the slit dies 100 and 200 provided with the vertical gap adjusting device 130 and the horizontal gap adjusting device 230 of the prior art described above still have the following problems. Here, since the slit die 120 and the slit die 220 are substantially the same, they will be described with reference to the slit die 220 for convenience.

The slit die 200 of the prior art uses a shim 260 inside both side ends of the first lip 222a and the second lip 222b.

More specifically, FIG. 2B is a partial perspective view schematically illustrating a shim used inside one side end of a lip used in a slit die according to the prior art.

Referring to FIG. 2B in conjunction with FIG. 2A, one shim 260 provided inside the end of one side of the first lip 222a or the second lip 222b used in the slit die 220 according to the prior art. Is shown. However, one of ordinary skill in the art will fully appreciate that another shim (not shown) provided within the end of the other side of the first lip 222a or the second lip 222b is provided. The shim 260 is fastened to a first lip 222a or a second lip 222b by a fastening member such as a bolt. In addition, shim 260 has a predetermined width (eg, 80 μm), which allows a gap between first lip 222a and second lip 222b at the bottom of manifold 226. (L) is formed. In addition, the shim 260 has a length of approximately 15 mm along the longitudinal direction of the first lip 222a or the second lip 222b.

In the slit die 220 according to the prior art described above, gap adjustment is performed by the horizontal gap adjusting device 230 shown in FIG. 2A (the vertical gap adjusting device 130 shown in FIG. 1B may also be used). At this time, due to the presence of a shim 260 made of a rigid body such as a steel material, it is provided inside both side ends of the first lip 222a and the second lip 222b of the lip, and the gap is adjusted on both sides. This is difficult or impossible.

More specifically, when the gap L is enlarged to be larger than the width of the shim 260, leakage of the plating liquid occurs due to a gap formed between the shim 260 and the discharge port 228. On both sides of the first lip 222a and the second lip 222b, the plating liquid is under-discharged. In addition, when the gap L is reduced to be smaller than the width of the shim 260, the gap 260 is adjusted on both sides of the first lip 222a and the second lip 222b by the shim 260. This is not impossible and does not shrink. As a result, the coating liquid is excessively discharged from both side surfaces of the first lip 222a and the second lip 222b.

Therefore, when the shim 260 is used, it is difficult or impossible to adjust the gap, so that it is not easy to adjust the discharge amount of the coating liquid, and thus it is difficult to reproduce the uniformity of the coating height of the coating liquid.

On the other hand, the inner surfaces of the first lip 222a and the second lip 222b forming the ejection openings 228 from the manifold 226 ensure good flowability of the plating liquid to facilitate ejection, and In order to reduce the contact angle as much as possible, the surface is smoothed by general mechanical polishing with a grinding machine. In the case of the surface treatment by such mechanical polishing, the flow rate of the coating liquid is typically 11 seconds (that is, the time taken for the coating liquid to be discharged from the manifold 226 through the discharge port 228), and the contact angle of the coating liquid is 30 (to be described later). 3d).

In order to improve the flowability and contact angle achieved by the general mechanical polishing of the prior art described above, a method of surface treatment in which the inner surface of the discharge port 228 is coated with Teflon is conventionally used. However, in the case of the surface treatment of the Teflon coating, the flow rate of the coating liquid is greatly improved to 5 seconds, the response speed (the reaction speed until the liquid is pumped and discharged by the pressure of the pump), but the contact angle of the coating liquid is rather increased to 45 (See FIG. 3D described later). If the contact angle of the coating liquid increases, uncoating occurs due to breakage of the coating liquid, or uniform discharge at both ends where the shim 260 is present at the time of initial discharging of the coating liquid is difficult. Phenomenon (the appearance of white edges in the final product) is more likely to occur.

Therefore, a new method for solving the above-mentioned problems is required.

Republic of Korea Patent Publication No. 10-2010-0124592

SUMMARY OF THE INVENTION The present invention solves the problems of the prior art described above, wherein the first lip is used instead of a shim inserted and used inside both side ends of the two gaps to form and maintain a gap between the two ribs of the slit die. It is easy to adjust the gap of the entire lip by forming a stepped portion corresponding to the gap across the lower surface of the second lip based on the manifold of the second lip, and using a closing member made of stainless steel at both ends of the two lips. Gap adjustment at both ends is possible, and the maximum width that can be adjusted is increased, which greatly improves the uniformity of the coating liquid discharge height, and significantly reduces the possibility of uncoating and mura occurring. It is to provide an improved slit die and a coating apparatus having the same, which greatly reduces the possibility of product defects and increases productivity.

In addition, the present invention forms a step corresponding to the gap across the lower surface of the first lip or the second lip of the slit die, based on the manifold, and also uses a stainless steel finishing member at both ends of the two ribs. At the same time, electro-polishing (EP) on the inner opposing surfaces of the two ribs facilitates gap adjustment of the entire lip, enables gap adjustment at both ends of the lip, and increases the maximum width that can be adjusted. Uniformity of the coating liquid discharge height is greatly improved, and the possibility of uncoating and mura phenomenon is greatly reduced, thereby significantly reducing the possibility of defects in the final product and increasing productivity. With improved slit die, which speeds up and reduces the contact angle of the discharged coating liquid, further reducing the uncoating and consequently the mura phenomenon. To provide a coating apparatus.

The slit die according to the first aspect of the present invention comprises a pair of first and second lips facing each other; A coating liquid supply part formed inside the first lip; A manifold connected to the plating liquid supply part; A stepped portion formed over the entire first land portion of the manifold of the first lip; Closing members provided on opposite sides of the first lip and the second lip, respectively; A gap adjusting cavity provided vertically under the first lip or the second lip; And a plurality of horizontal gap adjusting devices provided horizontally across the gap adjusting cavity, wherein the stepped portion has a slit shape having a gap L when the first lip and the second lip are engaged. It is characterized by forming a discharge port.

The slit die according to the second aspect of the present invention comprises a pair of first and second lips facing each other; A coating liquid supply part formed inside the first lip; A manifold connected to the plating liquid supply part; A stepped portion formed over the entire first land portion of the manifold of the first lip; Closing members provided on opposite sides of the first lip and the second lip, respectively; A gap adjusting cavity provided vertically under the first lip or the second lip; And a plurality of horizontal gap adjusting devices provided horizontally across the gap adjusting cavity, wherein the stepped portion has a slit shape having a gap L when the first lip and the second lip are engaged. A discharge port is formed, and the first land portion and the second land portion of the second lip corresponding to the first land portion are each surface-treated by electrolytic polishing (EP).

A coating apparatus according to a third aspect of the present invention includes a suction table; A substrate located on the suction table; A gantry for linear reciprocating motion on the suction table; And a slit die attached to the gantry, the slit die for applying a coating liquid onto the substrate, wherein the slit die comprises a pair of first and second lips facing each other; A coating liquid supply part formed inside the first lip; A manifold connected to the plating liquid supply part; A stepped portion formed over the entire first land portion of the manifold of the first lip; Closing members provided on opposite sides of the first lip and the second lip, respectively; A gap adjusting cavity provided vertically under the first lip or the second lip; And a plurality of horizontal gap adjusting devices provided horizontally across the gap adjusting cavity, wherein the stepped portion has a slit shape having a gap L when the first lip and the second lip are engaged. It is characterized by forming a discharge port.

In the improved slit die of the present invention and a coating apparatus having the same, the following advantages are achieved.

1. Since the step is used instead of the shim of the prior art, the gap adjustment of the entire lip is easy, the gap adjustment of both ends of the lip is possible, and the maximum width that the gap adjustment is possible is increased. Therefore, the uniformity of the coating liquid discharge height is greatly improved.

2. The possibility of uncoating and Mura is significantly reduced, resulting in a significant reduction in the probability of failure of the final product and an increase in productivity.

3. The surface treatment by electro-polishing (EP) improves the flowability in discharging the coating liquid, thereby increasing the response speed. In addition, the contact angle of the discharged coating liquid is reduced to further reduce the uncoating and consequently the Mura phenomenon.

Further advantages of the present invention can be clearly understood from the following description with reference to the accompanying drawings, in which like or similar reference numerals denote like elements.

1A is a schematic illustration of a coating apparatus for manufacturing flat panel displays (FPDs) of the prior art.
FIG. 1B is a view showing an embodiment of a slit die for discharging a plating liquid used in the coating apparatus according to the related art shown in FIG. 1A described above.
Figure 2a is a view showing a horizontal gap adjusting device and a slit die having the same according to the prior art.
2B is a schematic partial exploded view of a gap adjusting device for a slit die according to the present invention.
3A schematically illustrates an exploded side and front view of a slit die according to a first embodiment of the present invention.
3b schematically illustrates an exploded side and front view of a slit die according to a second embodiment of the present invention.
3C is a graph showing the application state of the coating liquid discharged using the slit die according to the embodiment of the present invention and the two types of slit dies of the prior art.
3D shows the inside of the slit die used to measure the flowability of the coating liquid in the case of the surface treatment by general mechanical polishing and Teflon coating according to the prior art and the surface treatment by electropolishing (EP) according to the present invention. It is a figure which shows the contact angle obtained by the surface photograph and coating liquid application.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail below with reference to embodiments and drawings of the present invention.

FIG. 3A schematically illustrates an exploded side view and a front view of a slit die according to a first embodiment of the present invention, and FIG. 3B schematically illustrates an exploded side view and a front view of a slit die according to a second embodiment of the present invention. One drawing. The coating apparatus with slit die 320 according to the present invention is characterized in that the slit die 320 has a step 360 instead of the shim 260 of the prior art and uses the finishing member 370 on both sides. Except that it is substantially the same as the coating apparatus 200 shown in FIG. 2A.

Referring to FIG. 3A, the slit die 320 according to the first embodiment of the present invention includes a pair of first lips 322a and second lips 322b facing each other; A coating liquid supply part (not shown) formed in the first lip 322a; A manifold 326 connected to the plating liquid supply part; A stepped portion 360 formed over the entire first land portion 324a of the manifold 326 of the first lip 322a; Closing members 370 provided on opposite sides of the first lip 322a and the second lip 322b, respectively; A gap adjusting cavity 354 provided in a vertical direction from the lower portion of the first lip 322a or the second lip 322b; And a plurality of horizontal gap adjusting devices 330 provided across the gap adjusting cavity 354 in a horizontal direction, and the stepped portion 360 includes the first lip 322a and the second lip ( When the 322b is coupled to each other, a slit-shaped discharge port 328 having a gap L is formed.

In addition, referring to FIG. 3B, the slit die 320 according to the second embodiment of the present invention has a stepped portion 360 in which the second lip corresponding to the first land portion 324a of the manifold 326. It is substantially the same as the slit die 320 according to the first embodiment of the invention shown in FIG. 3A except that it is formed throughout the second land portion 324b of 322b.

In the slit die 320 according to the first and second embodiments of the present invention described above, although the gap adjusting cavity 354 and the plurality of horizontal gap adjusting devices 330 provided in the vertical direction are preferably used, Those skilled in the art will fully understand that the gap adjusting cavity 154 and the plurality of vertical gap adjusting devices 130 provided in the horizontal direction as shown in FIG. 1B may be used.

3A and 3B together with FIG. 1A, a coating apparatus 100 according to an embodiment of the present invention may include a suction table 112; A substrate (110) positioned on the suction table (112); A gantry 125 for linear reciprocating motion on the suction table 112; And a slit die 320 attached to the gantry 125 and for applying a coating liquid onto the substrate 110. Here, the slit die 320 is used as the slit die 320 of the present invention described with reference to FIGS. 3A and 3B.

In the slit die 320 and the coating apparatus 100 having the same according to the embodiment of the present invention described above, unlike the prior art, since the shim 260 (see FIG. 2B) is not used, the spacing between the ribs L A plurality of horizontal gap adjusting devices 330 that are easy to adjust are used. As a result, in the prior art, the maximum width that can be adjusted by the gap is about 110 µm, whereas in the present invention, the maximum width that can be adjusted by the gap is increased by about 64 µm to about 180 µm.

3C is a graph showing the application state of the coating liquid discharged using the slit die according to the embodiment of the present invention and the two types of slit dies of the prior art.

Referring to FIG. 3C, the first type of slit die of the prior art is denoted by A, the second type of slit die of the prior art is denoted by B, and the slit die of the present invention is denoted by C. Each specification is as follows.

Item First type (A) Second type (B) Invention (C) Whether to use shim use use unused Manifold capacity 60 cc 150 cc 150 cc Gap (L) 80 탆 80 탆 80 탆 Gap adjusting device Vertical Vertical Horizontal

As a result of discharging the plating liquid with the three types of slit dies having the above-described specifications, the slit dies A of the first type were formed at both end portions where the shims existed (i.e., in a range of approximately 15 mm on the left and right sides corresponding to the lateral lengths of the shims). It can be seen that the application height was generally significantly lower than the central part. Further, although the slit die B of the second type is improved over the slit die A of the first type, it can be seen that the application height is still applied at the left end of both ends where the shim is present compared to the center part. On the other hand, the slit die (C) of the present invention shows that the application height at both ends is applied almost uniformly to the center portion as compared with the slit die (A) of the first type and the slit die (B) of the second type. Able to know. In addition, it can be seen that the slit die C of the present invention has a higher coating height of the coating liquid as a whole compared with the slit die A of the first type and the slit die B of the second type. This result is considered to be because the slit die C of the present invention does not use a shim, so that arbitrary adjustment of the gap L is possible at both ends. Therefore, in the present invention, not only the coating of the coating liquid is more uniformly applied over the entire length of the slit die, but also the coating height is increased, compared to the prior art using the shim, and the possibility of uncoating and mura phenomenon is significantly reduced.

On the other hand, in the slit die 320 according to the present invention, the first land portion 324a of the manifold 326 of the first lip 322a and the second land portion 324b of the second lip 322b are respectively. Surface treatment is performed by electropolishing (EP). Such electropolishing (EP) surface treatment improves the coating liquid flowability of the surfaces of the first land portion 324a and the second land portion 324b, and also reduces the contact angle of the discharged liquid.

3D shows the inside of the slit die used to measure the flowability of the coating liquid in the case of the surface treatment by general mechanical polishing and Teflon coating according to the prior art and the surface treatment by electropolishing (EP) according to the present invention. It is a figure which shows the contact angle obtained by the surface photograph and coating liquid application.

Referring to FIG. 3D, the flowability of the surface treatment by conventional general mechanical polishing (D) is 11 seconds, the contact angle (θ1) of the coating liquid is 30 °, and the surface treatment by the conventional Teflon coating (E). The flowability is 5 seconds, the contact angle θ2 of the coating liquid is 45 °, the flowability in the case of the surface treatment (F) by the electrolytic polishing (EP) of the present invention is 7 seconds, and the contact angle θ3 of the coating liquid is 20 °. Appeared.

As described above, in the present invention, it is possible to maintain a substantially similar flow rate as in the case of Teflon coating having the best flowability (E) while maintaining a significantly lower value than the prior art with a contact angle of 20 °. .

Accordingly, in the present invention, since both the flowability and the contact angle of the coating liquid are similar or remarkably improved compared to the prior art, uncoating and mura phenomenon are further prevented.

Various modifications may be made by those skilled in the art without departing from the spirit and scope of the invention as defined by the following claims. It is not. Accordingly, the scope of the present invention should not be limited by the above-described exemplary embodiments, but should be determined only in accordance with the following claims and their equivalents.

100,200: coating apparatus 110: substrate
112: suction table 125: gantry
130,230,320: slit die 122a, 222a, 322a: first rib
122b, 222b, 322b: second rib 126,226,326: manifold
128,228,328: outlet 130,230,330: gap adjusting device
154,254,354: cavity 260: shim
324a; 324b: land portion 360: stepped portion
370: finishing member

Claims (16)

In the slit die,
A pair of first and second lips facing each other;
A coating liquid supply part formed inside the first lip;
A manifold connected to the plating liquid supply part;
A stepped portion formed over the entire first land portion of the manifold of the first lip;
Closing members provided on opposite sides of the first lip and the second lip, respectively;
A gap adjusting cavity provided vertically under the first lip or the second lip; And
A plurality of horizontal gap adjusting device provided across the gap adjusting cavity in the horizontal direction
Lt; / RTI >
The stepped portion forms a slit-shaped outlet having a gap L when the first lip and the second lip are coupled to each other.
Slit die. The method of claim 1,
And the stepped portion is formed over the entire second land portion of the second lip corresponding to the first land portion. 3. The method according to claim 1 or 2,
The gap adjusting cavity is provided in a horizontal direction under the first lip or the second lip,
A plurality of horizontal gap adjusting device is implemented by a plurality of vertical gap adjusting device provided across the gap adjusting cavity in the vertical direction.
Slit die. 3. The method according to claim 1 or 2,
And a slit die having a maximum adjustable width of the gap L by the plurality of horizontal gap adjusting devices is 180 µm. In the slit die,
A pair of first and second lips facing each other;
A coating liquid supply part formed inside the first lip;
A manifold connected to the plating liquid supply part;
A stepped portion formed over the entire first land portion of the manifold of the first lip;
Closing members provided on opposite sides of the first lip and the second lip, respectively;
A gap adjusting cavity provided vertically under the first lip or the second lip; And
A plurality of horizontal gap adjusting device provided across the gap adjusting cavity in the horizontal direction
Lt; / RTI >
The stepped portion forms a slit-shaped discharge port having a gap L when the first lip and the second lip are coupled,
The second land portions of the second ribs corresponding to the first land portions and the first land portions are each surface-treated by electropolishing (EP).
Slit die. 6. The method of claim 5,
The slit die, wherein the stepped portion is formed over the entire second land portion. The method according to claim 5 or 6,
The gap adjusting cavity is provided in a horizontal direction under the first lip or the second lip,
A plurality of horizontal gap adjusting device is implemented by a plurality of vertical gap adjusting device provided across the gap adjusting cavity in the vertical direction.
Slit die. The method according to claim 5 or 6,
And a slit die having a maximum adjustable width of the gap L by the plurality of horizontal gap adjusting devices is 180 µm. In the coating apparatus,
A suction table;
A substrate located on the suction table;
A gantry for linear reciprocating motion on the suction table; And
A slit die attached to the gantry, for applying a coating liquid onto the substrate
Lt; / RTI >
The slit die is
A pair of first and second lips facing each other;
A coating liquid supply part formed inside the first lip;
A manifold connected to the plating liquid supply part;
A stepped portion formed over the entire first land portion of the manifold of the first lip;
Closing members provided on opposite sides of the first lip and the second lip, respectively;
A gap adjusting cavity provided vertically under the first lip or the second lip; And
A plurality of horizontal gap adjusting device provided across the gap adjusting cavity in the horizontal direction
Including;
The stepped portion forms a slit-shaped outlet having a gap L when the first lip and the second lip are coupled to each other.
Coating device. The method of claim 9,
And the stepped portion is formed over the entire second land portion of the second lip corresponding to the first land portion. 11. The method according to claim 9 or 10,
The gap adjusting cavity is provided in a horizontal direction under the first lip or the second lip,
A plurality of horizontal gap adjusting device is implemented by a plurality of vertical gap adjusting device provided across the gap adjusting cavity in the vertical direction.
Coating device. 11. The method according to claim 9 or 10,
The coating apparatus whose maximum width which can be adjusted of the said gap L by the said some horizontal gap adjusting apparatus is 180 micrometers. The method of claim 9,
And a second land portion of the second lip corresponding to the first land portion and the first land portion, respectively, is surface-treated by electrolytic polishing (EP). The method of claim 13,
And the stepped portion is formed over the entire second land portion. The method according to claim 13 or 14,
The gap adjusting cavity is provided in a horizontal direction under the first lip or the second lip,
A plurality of horizontal gap adjusting device is implemented by a plurality of vertical gap adjusting device provided across the gap adjusting cavity in the vertical direction.
Coating device. The method according to claim 13 or 14,
The coating apparatus whose maximum width which can be adjusted of the said gap L by the said some horizontal gap adjusting apparatus is 180 micrometers.

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