JP2004279431A5 - - Google Patents

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Publication number
JP2004279431A5
JP2004279431A5 JP2004170765A JP2004170765A JP2004279431A5 JP 2004279431 A5 JP2004279431 A5 JP 2004279431A5 JP 2004170765 A JP2004170765 A JP 2004170765A JP 2004170765 A JP2004170765 A JP 2004170765A JP 2004279431 A5 JP2004279431 A5 JP 2004279431A5
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JP
Japan
Prior art keywords
sample
sample preparation
probe
vacuum
vacuum vessel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004170765A
Other languages
English (en)
Japanese (ja)
Other versions
JP3771926B2 (ja
JP2004279431A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004170765A priority Critical patent/JP3771926B2/ja
Priority claimed from JP2004170765A external-priority patent/JP3771926B2/ja
Publication of JP2004279431A publication Critical patent/JP2004279431A/ja
Publication of JP2004279431A5 publication Critical patent/JP2004279431A5/ja
Application granted granted Critical
Publication of JP3771926B2 publication Critical patent/JP3771926B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2004170765A 2004-06-09 2004-06-09 試料作製装置 Expired - Lifetime JP3771926B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004170765A JP3771926B2 (ja) 2004-06-09 2004-06-09 試料作製装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004170765A JP3771926B2 (ja) 2004-06-09 2004-06-09 試料作製装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP32632698A Division JP3652144B2 (ja) 1998-11-17 1998-11-17 プローブ装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2005363432A Division JP4300211B2 (ja) 2005-12-16 2005-12-16 マニピュレータ

Publications (3)

Publication Number Publication Date
JP2004279431A JP2004279431A (ja) 2004-10-07
JP2004279431A5 true JP2004279431A5 (enExample) 2005-10-27
JP3771926B2 JP3771926B2 (ja) 2006-05-10

Family

ID=33297131

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004170765A Expired - Lifetime JP3771926B2 (ja) 2004-06-09 2004-06-09 試料作製装置

Country Status (1)

Country Link
JP (1) JP3771926B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100821196B1 (ko) 2007-02-09 2008-04-14 한국표준과학연구원 Ｌｃｄ 평판 내부 버블 기체 시료 포집장치
JP5152111B2 (ja) * 2009-06-22 2013-02-27 新日鐵住金株式会社 集束イオンビーム加工装置用プローブ、プローブ装置、及びプローブの製造方法

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