JP2008089613A5 - - Google Patents

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Publication number
JP2008089613A5
JP2008089613A5 JP2007335609A JP2007335609A JP2008089613A5 JP 2008089613 A5 JP2008089613 A5 JP 2008089613A5 JP 2007335609 A JP2007335609 A JP 2007335609A JP 2007335609 A JP2007335609 A JP 2007335609A JP 2008089613 A5 JP2008089613 A5 JP 2008089613A5
Authority
JP
Japan
Prior art keywords
sample
chamber
cartridge
atmosphere
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007335609A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008089613A (ja
JP4508239B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007335609A priority Critical patent/JP4508239B2/ja
Priority claimed from JP2007335609A external-priority patent/JP4508239B2/ja
Publication of JP2008089613A publication Critical patent/JP2008089613A/ja
Publication of JP2008089613A5 publication Critical patent/JP2008089613A5/ja
Application granted granted Critical
Publication of JP4508239B2 publication Critical patent/JP4508239B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2007335609A 2007-12-27 2007-12-27 試料作製装置 Expired - Lifetime JP4508239B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007335609A JP4508239B2 (ja) 2007-12-27 2007-12-27 試料作製装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007335609A JP4508239B2 (ja) 2007-12-27 2007-12-27 試料作製装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2005362596A Division JP4135013B2 (ja) 2005-12-16 2005-12-16 試料作製装置

Publications (3)

Publication Number Publication Date
JP2008089613A JP2008089613A (ja) 2008-04-17
JP2008089613A5 true JP2008089613A5 (enExample) 2008-11-13
JP4508239B2 JP4508239B2 (ja) 2010-07-21

Family

ID=39373888

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007335609A Expired - Lifetime JP4508239B2 (ja) 2007-12-27 2007-12-27 試料作製装置

Country Status (1)

Country Link
JP (1) JP4508239B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113804909B (zh) * 2020-06-12 2023-12-12 中国科学院苏州纳米技术与纳米仿生研究所 真空互联样品转移组件

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3553318B2 (ja) * 1997-05-20 2004-08-11 日本電子株式会社 ホルダ保持装置
JP3633325B2 (ja) * 1998-11-25 2005-03-30 株式会社日立製作所 試料作製装置および試料作製方法
JP3851464B2 (ja) * 1999-03-04 2006-11-29 株式会社日立製作所 マニピュレータおよびそれを用いたプローブ装置、試料作製装置

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