JP4508239B2 - 試料作製装置 - Google Patents

試料作製装置 Download PDF

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Publication number
JP4508239B2
JP4508239B2 JP2007335609A JP2007335609A JP4508239B2 JP 4508239 B2 JP4508239 B2 JP 4508239B2 JP 2007335609 A JP2007335609 A JP 2007335609A JP 2007335609 A JP2007335609 A JP 2007335609A JP 4508239 B2 JP4508239 B2 JP 4508239B2
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Japan
Prior art keywords
sample
cartridge
chamber
wafer
sample stage
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Expired - Lifetime
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JP2007335609A
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Japanese (ja)
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JP2008089613A5 (enExample
JP2008089613A (ja
Inventor
秀夫 鹿島
広康 志知
英巳 小池
浩之 鈴木
聡 富松
宗行 福田
幸二 金杉
正作 山岡
昌和 菅谷
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Hitachi Ltd
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Hitachi Ltd
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Priority to JP2007335609A priority Critical patent/JP4508239B2/ja
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Publication of JP2008089613A5 publication Critical patent/JP2008089613A5/ja
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Publication of JP4508239B2 publication Critical patent/JP4508239B2/ja
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  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
JP2007335609A 2007-12-27 2007-12-27 試料作製装置 Expired - Lifetime JP4508239B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007335609A JP4508239B2 (ja) 2007-12-27 2007-12-27 試料作製装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007335609A JP4508239B2 (ja) 2007-12-27 2007-12-27 試料作製装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2005362596A Division JP4135013B2 (ja) 2005-12-16 2005-12-16 試料作製装置

Publications (3)

Publication Number Publication Date
JP2008089613A JP2008089613A (ja) 2008-04-17
JP2008089613A5 JP2008089613A5 (enExample) 2008-11-13
JP4508239B2 true JP4508239B2 (ja) 2010-07-21

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ID=39373888

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007335609A Expired - Lifetime JP4508239B2 (ja) 2007-12-27 2007-12-27 試料作製装置

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JP (1) JP4508239B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113804909B (zh) * 2020-06-12 2023-12-12 中国科学院苏州纳米技术与纳米仿生研究所 真空互联样品转移组件

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3553318B2 (ja) * 1997-05-20 2004-08-11 日本電子株式会社 ホルダ保持装置
JP3633325B2 (ja) * 1998-11-25 2005-03-30 株式会社日立製作所 試料作製装置および試料作製方法
JP3851464B2 (ja) * 1999-03-04 2006-11-29 株式会社日立製作所 マニピュレータおよびそれを用いたプローブ装置、試料作製装置

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Publication number Publication date
JP2008089613A (ja) 2008-04-17

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