JP3771926B2 - 試料作製装置 - Google Patents

試料作製装置 Download PDF

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Publication number
JP3771926B2
JP3771926B2 JP2004170765A JP2004170765A JP3771926B2 JP 3771926 B2 JP3771926 B2 JP 3771926B2 JP 2004170765 A JP2004170765 A JP 2004170765A JP 2004170765 A JP2004170765 A JP 2004170765A JP 3771926 B2 JP3771926 B2 JP 3771926B2
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JP
Japan
Prior art keywords
sample
probe
vacuum
sample preparation
substrate
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Expired - Lifetime
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JP2004170765A
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English (en)
Japanese (ja)
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JP2004279431A (ja
JP2004279431A5 (enExample
Inventor
勝 松島
馨 梅村
聡 富松
正文 金友
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Hitachi Ltd
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Hitachi Ltd
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Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2004170765A priority Critical patent/JP3771926B2/ja
Publication of JP2004279431A publication Critical patent/JP2004279431A/ja
Publication of JP2004279431A5 publication Critical patent/JP2004279431A5/ja
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Publication of JP3771926B2 publication Critical patent/JP3771926B2/ja
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  • Sampling And Sample Adjustment (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2004170765A 2004-06-09 2004-06-09 試料作製装置 Expired - Lifetime JP3771926B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004170765A JP3771926B2 (ja) 2004-06-09 2004-06-09 試料作製装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004170765A JP3771926B2 (ja) 2004-06-09 2004-06-09 試料作製装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP32632698A Division JP3652144B2 (ja) 1998-11-17 1998-11-17 プローブ装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2005363432A Division JP4300211B2 (ja) 2005-12-16 2005-12-16 マニピュレータ

Publications (3)

Publication Number Publication Date
JP2004279431A JP2004279431A (ja) 2004-10-07
JP2004279431A5 JP2004279431A5 (enExample) 2005-10-27
JP3771926B2 true JP3771926B2 (ja) 2006-05-10

Family

ID=33297131

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004170765A Expired - Lifetime JP3771926B2 (ja) 2004-06-09 2004-06-09 試料作製装置

Country Status (1)

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JP (1) JP3771926B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100821196B1 (ko) 2007-02-09 2008-04-14 한국표준과학연구원 Ｌｃｄ 평판 내부 버블 기체 시료 포집장치
JP5152111B2 (ja) * 2009-06-22 2013-02-27 新日鐵住金株式会社 集束イオンビーム加工装置用プローブ、プローブ装置、及びプローブの製造方法

Also Published As

Publication number Publication date
JP2004279431A (ja) 2004-10-07

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