JP2004295146A5 - - Google Patents

Download PDF

Info

Publication number
JP2004295146A5
JP2004295146A5 JP2004171000A JP2004171000A JP2004295146A5 JP 2004295146 A5 JP2004295146 A5 JP 2004295146A5 JP 2004171000 A JP2004171000 A JP 2004171000A JP 2004171000 A JP2004171000 A JP 2004171000A JP 2004295146 A5 JP2004295146 A5 JP 2004295146A5
Authority
JP
Japan
Prior art keywords
probe
sample
sample preparation
vacuum chamber
preparation device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004171000A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004295146A (ja
JP3851640B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004171000A priority Critical patent/JP3851640B2/ja
Priority claimed from JP2004171000A external-priority patent/JP3851640B2/ja
Publication of JP2004295146A publication Critical patent/JP2004295146A/ja
Publication of JP2004295146A5 publication Critical patent/JP2004295146A5/ja
Application granted granted Critical
Publication of JP3851640B2 publication Critical patent/JP3851640B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2004171000A 2004-06-09 2004-06-09 マニピュレータおよびそれを用いたプローブ装置、試料作製装置 Expired - Lifetime JP3851640B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004171000A JP3851640B2 (ja) 2004-06-09 2004-06-09 マニピュレータおよびそれを用いたプローブ装置、試料作製装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004171000A JP3851640B2 (ja) 2004-06-09 2004-06-09 マニピュレータおよびそれを用いたプローブ装置、試料作製装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP05660299A Division JP3851464B2 (ja) 1999-03-04 1999-03-04 マニピュレータおよびそれを用いたプローブ装置、試料作製装置

Publications (3)

Publication Number Publication Date
JP2004295146A JP2004295146A (ja) 2004-10-21
JP2004295146A5 true JP2004295146A5 (enExample) 2005-12-22
JP3851640B2 JP3851640B2 (ja) 2006-11-29

Family

ID=33411337

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004171000A Expired - Lifetime JP3851640B2 (ja) 2004-06-09 2004-06-09 マニピュレータおよびそれを用いたプローブ装置、試料作製装置

Country Status (1)

Country Link
JP (1) JP3851640B2 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4752080B2 (ja) * 2005-02-15 2011-08-17 株式会社三友製作所 電子顕微鏡微細作業用マニピュレーション装置
JP4597045B2 (ja) * 2005-12-13 2010-12-15 株式会社日立ハイテクノロジーズ 微小試料移送装置及び方法
JP2009139865A (ja) * 2007-12-10 2009-06-25 Olympus Corp チップ駆動装置
JP5152111B2 (ja) * 2009-06-22 2013-02-27 新日鐵住金株式会社 集束イオンビーム加工装置用プローブ、プローブ装置、及びプローブの製造方法
EP2378342A1 (de) * 2010-04-15 2011-10-19 Mmi Ag Mikromanipulationssystem mit Schutzvorrichtung für Kapillaren
KR101861823B1 (ko) * 2011-09-16 2018-05-29 삼성디스플레이 주식회사 유기 발광 표시 장치 검사 장비, 및 이를 이용한 유기 발광 표시 장치 제조 시스템
KR102383571B1 (ko) 2014-06-30 2022-04-06 가부시키가이샤 히다치 하이테크 사이언스 자동 시료 제작 장치
JP6629502B2 (ja) * 2014-08-29 2020-01-15 株式会社日立ハイテクサイエンス 自動試料片作製装置
US9620333B2 (en) 2014-08-29 2017-04-11 Hitachi High-Tech Science Corporation Charged particle beam apparatus
CN107102066B (zh) * 2017-03-27 2020-06-30 河海大学 一种室内超声检测气泡混合轻质土强度的装置及方法

Similar Documents

Publication Publication Date Title
US9865428B2 (en) Preparation of cryogenic sample for charged-particle microscopy
CN103348439B (zh) 电子显微镜用试样支架及试样观察方法
US9741527B2 (en) Specimen holder for a charged particle microscope
KR102646113B1 (ko) 집속 이온 빔 장치
US8933400B2 (en) Inspection or observation apparatus and sample inspection or observation method
JP2004295146A5 (enExample)
KR101903783B1 (ko) 샘플을 준비하는 방법 및 시스템
US9881768B2 (en) Charged Particle Beam System With Receptacle Chamber For Cleaning Sample and Sample Stage
US9466457B2 (en) Observation apparatus and optical axis adjustment method
WO2014054477A1 (ja) 荷電粒子線装置、隔膜の位置調整方法および隔膜位置調整ジグ
US20150311033A1 (en) Charged Particle Beam Device, Sample Stage Unit, and Sample Observation Method
JP2011154917A (ja) 試料搬送装置
JP6359351B2 (ja) 平面視試料の調製
JP4942180B2 (ja) 試料作製装置
JP2006329844A (ja) 試料作製装置および方法
JP4534273B2 (ja) 試料作成装置
JP6140298B2 (ja) 試料ホルダ及び真空分析装置
JP2010055988A (ja) 薄膜試料観察システム及び冷却試料ホルダ並びに薄膜試料観察方法
JP2007180403A5 (enExample)
US20120080406A1 (en) Method and system for preparing a lamela
WO2014041876A1 (ja) 荷電粒子線装置及び試料観察方法
JP2009037910A (ja) 複合荷電粒子ビーム装置及び加工観察方法
JP5875500B2 (ja) 電子ビーム顕微装置
JP5560033B2 (ja) 冷却試料ホールダ及び試料の冷却加工方法
JP2004279431A5 (enExample)