JP2004274089A - ミニバンドを有する半導体素子 - Google Patents
ミニバンドを有する半導体素子 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 123
- 230000004888 barrier function Effects 0.000 claims description 61
- 238000005253 cladding Methods 0.000 claims description 41
- 239000000969 carrier Substances 0.000 claims description 11
- 238000000103 photoluminescence spectrum Methods 0.000 claims description 11
- 238000003475 lamination Methods 0.000 claims description 8
- 238000013139 quantization Methods 0.000 claims description 5
- 230000005945 translocation Effects 0.000 abstract 1
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 44
- 238000010586 diagram Methods 0.000 description 25
- 239000000758 substrate Substances 0.000 description 23
- 229910052950 sphalerite Inorganic materials 0.000 description 18
- 229910052984 zinc sulfide Inorganic materials 0.000 description 17
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 15
- 238000002347 injection Methods 0.000 description 13
- 239000007924 injection Substances 0.000 description 13
- 239000000243 solution Substances 0.000 description 13
- 230000010355 oscillation Effects 0.000 description 12
- 239000013078 crystal Substances 0.000 description 11
- 239000000463 material Substances 0.000 description 11
- 230000005428 wave function Effects 0.000 description 8
- 150000001875 compounds Chemical class 0.000 description 6
- 230000007423 decrease Effects 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 239000011701 zinc Substances 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 5
- 229910052738 indium Inorganic materials 0.000 description 5
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000002052 molecular layer Substances 0.000 description 5
- 229910052725 zinc Inorganic materials 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000001451 molecular beam epitaxy Methods 0.000 description 4
- 238000005424 photoluminescence Methods 0.000 description 4
- WGPCGCOKHWGKJJ-UHFFFAOYSA-N sulfanylidenezinc Chemical group [Zn]=S WGPCGCOKHWGKJJ-UHFFFAOYSA-N 0.000 description 4
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical group [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 3
- 230000004913 activation Effects 0.000 description 3
- 238000001994 activation Methods 0.000 description 3
- 230000000737 periodic effect Effects 0.000 description 3
- 238000004904 shortening Methods 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- 229910001199 N alloy Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000013590 bulk material Substances 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 238000005381 potential energy Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007725 thermal activation Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
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- H01S5/34333—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser with a well layer based on Ga(In)N or Ga(In)P, e.g. blue laser
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- H01S5/347—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIBVI compounds, e.g. ZnCdSe- laser
Abstract
【解決手段】 第1および第2半導体の積層パターンを有する超格子領域13内にミニバンド18を形成することによって活性領域2へのキャリヤの移動が向上する半導体素子が提供される。パターン積層膜厚は代表的には25ナより小さい。ミニバンド18の最小エネルギー準位21は、活性領域2と超格子領域13との間のガイド領域3のエネルギー準位に等しいかまたはこれより大きい。
【選択図】 図6
Description
)。閾値電流を下げレーザ発振波長を短くするためには、ZnS0.07Se0.93ガイド層および、GaAsに格子整合したZnMgSSeクラッド層が必要であるということが報告されている("Room temperature continuous operation of blue-green laser diode"、N. Nakayamaら、Electron. Lett. 29、1488頁)。
akayamaら、Electron. Lett. 29、2164頁)。
wide-gap II-VI materials"、I. Suemune、J. Appl. Phys. 67、2364頁)。さらに、超格子構造を導入する別の方法もまた提案されている("One-hour-long room temperature CW operation ofZnMgSSe-based blue-green laser diodes"、
A. Ishibashiら、7th annual meeting on the IEEE Lasers andElectro-Optics
Society (1994))。
2a、10 量子井戸
2b、12 バリヤ層
3、92、96 ガイド領域
4、64、70、74、90、98 クラッド領域
13、34、42、58、76、78、100、102 超格子領域
18、107 ミニバンド
20 注入領域
Claims (18)
- 活性領域と、
超格子領域と
を備える、半導体素子であって、
前記超格子領域は、第1半導体と第2半導体の積層パターンを有し、
前記半導体素子は480nmより短い波長の光を発光し、
前記第1半導体および前記第2半導体は、II−VI族半導体からなるか、または、前記第1半導体および前記第2半導体は、(AlGaIn)NからなるIII−V族半導体からなり、
前記第1半導体および前記第2半導体の両方のバンドギャップが前記活性領域のバンドギャップより大きく、
前記超格子領域は、前記第1半導体および前記第2半導体の膜厚が6分子の厚さより薄くなるように構成されている、半導体素子。 - 前記活性領域と前記超格子領域との間に設けられたガイド領域をさらに備える、請求項1に記載の半導体素子。
- 前記第1半導体および前記第2半導体の膜厚は、前記超格子領域内にミニバンドが形成されるように十分に薄くされ、前記ミニバンドを通ってキャリヤが輸送される、請求項1に記載の半導体素子。
- 前記活性領域と前記超格子領域との間に設けられたガイド領域をさらに備え、
前記第1半導体および前記第2半導体の膜厚は、前記超格子領域内にミニバンドが形成されるように十分に薄くされ、
前記ミニバンドの最小エネルギー準位は、前記ガイド領域のエネルギー準位または最小エネルギー準位より大きいかまたはこれに等しい、請求項1に記載の半導体素子。 - 前記活性領域は、量子井戸構造を有する、請求項1に記載の半導体素子。
- 前記量子井戸構造は、バリヤ層と量子井戸層とを含み、
前記第1半導体および前記第2半導体の膜厚は、前記超格子領域内にミニバンドが形成されるように十分に薄くされ、
前記ミニバンドの最小エネルギー準位は、前記バリヤ層の準位より大きいかまたはこれに等しい、請求項1に記載の半導体素子。 - クラッド領域をさらに備え、
前記超格子領域は、前記ガイド領域と前記クラッド領域との間に設けられる、請求項2に記載の半導体素子。 - クラッド領域をさらに備え、
前記超格子領域は、前記活性領域と前記クラッド領域との間に設けられる、請求項1に記載の半導体素子。 - 前記前記超格子領域を含むクラッド領域をさらに備える、請求項1に記載の半導体素子。
- 前記超格子領域は、前記活性領域のためのキャリヤ閉じ込めバリヤを形成する、請求項8に記載の半導体素子。
- 前記超格子領域内にミニバンドが形成される、請求項7〜10のいずれかに記載の半導体素子。
- PLスペクトルにおいて、前記超格子領域からの発光のエネルギーと、前記活性領域のバンドギャップエネルギーとの間の差が0.3eVより大きい、請求項1ないし11のいずれかに記載の半導体素子。
- 前記超格子領域の最小量子化エネルギー準位は、前記ガイド領域のエネルギー準位または最小エネルギー準位よりも大きいかまたはこれに等しい、請求項2、4または7に記載の半導体素子。
- 前記活性領域は、量子井戸構造を有し、
前記量子井戸構造は、バリヤ層と量子井戸層とを含み、
前記超格子領域の最小量子化エネルギー準位は、前記バリヤ層のエネルギー準位よりも大きいかまたはこれに等しい、請求項1ないし13のいずれかに記載の半導体素子。 - 前記超格子領域において、前記第1半導体および前記第2半導体の少なくとも一方がn型ドープされている、請求項1ないし14のいずれかに記載の半導体素子。
- 前記超格子領域において、前記第1半導体および前記第2半導体の少なくとも一方がp型ドープされている、請求項1ないし14のいずれかに記載の半導体素子。
- 前記第1半導体は、ZnSxSe1−x(0≦x≦1)であり、前記第2半導体が、MgSySe1−y(0≦y≦1)である、請求項1ないし16のいずれかに記載の半導体素子。
- 前記半導体素子は、II−VI族半導体、または、(AlGaIn)NからなるIII−V族半導体から形成される、請求項1ないし17のいずれかに記載の半導体素子。
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GB9504666A GB2298735A (en) | 1995-03-08 | 1995-03-08 | Semiconductor device having a miniband |
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JP05213596A Division JP3909884B2 (ja) | 1995-03-08 | 1996-03-08 | 半導体レーザ素子 |
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JP2007232324A Division JP4685845B2 (ja) | 1995-03-08 | 2007-09-07 | 半導体発光素子 |
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JP2004274089A true JP2004274089A (ja) | 2004-09-30 |
JP4067104B2 JP4067104B2 (ja) | 2008-03-26 |
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JP05213596A Expired - Fee Related JP3909884B2 (ja) | 1995-03-08 | 1996-03-08 | 半導体レーザ素子 |
JP2004190448A Expired - Fee Related JP4067104B2 (ja) | 1995-03-08 | 2004-06-28 | ミニバンドを有する半導体素子 |
JP2006348527A Expired - Fee Related JP4153966B2 (ja) | 1995-03-08 | 2006-12-25 | 半導体発光素子 |
JP2007232324A Expired - Fee Related JP4685845B2 (ja) | 1995-03-08 | 2007-09-07 | 半導体発光素子 |
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JP05213596A Expired - Fee Related JP3909884B2 (ja) | 1995-03-08 | 1996-03-08 | 半導体レーザ素子 |
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JP2007232324A Expired - Fee Related JP4685845B2 (ja) | 1995-03-08 | 2007-09-07 | 半導体発光素子 |
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US (1) | US5747827A (ja) |
EP (2) | EP0731510B1 (ja) |
JP (4) | JP3909884B2 (ja) |
DE (1) | DE69636110T2 (ja) |
GB (1) | GB2298735A (ja) |
Cited By (1)
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TWI427824B (zh) * | 2008-03-14 | 2014-02-21 | Asahi Kasei Emd Corp | 紅外線發光元件 |
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JP4681684B1 (ja) * | 2009-08-24 | 2011-05-11 | Dowaエレクトロニクス株式会社 | 窒化物半導体素子およびその製造方法 |
CN105161402B (zh) | 2010-04-30 | 2020-08-18 | 波士顿大学理事会 | 具有能带结构电位波动的高效紫外发光二极管 |
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-
1995
- 1995-03-08 GB GB9504666A patent/GB2298735A/en not_active Withdrawn
-
1996
- 1996-03-07 US US08/612,294 patent/US5747827A/en not_active Expired - Lifetime
- 1996-03-08 DE DE69636110T patent/DE69636110T2/de not_active Expired - Lifetime
- 1996-03-08 EP EP96301594A patent/EP0731510B1/en not_active Expired - Lifetime
- 1996-03-08 EP EP01204026A patent/EP1213771A3/en not_active Withdrawn
- 1996-03-08 JP JP05213596A patent/JP3909884B2/ja not_active Expired - Fee Related
-
2004
- 2004-06-28 JP JP2004190448A patent/JP4067104B2/ja not_active Expired - Fee Related
-
2006
- 2006-12-25 JP JP2006348527A patent/JP4153966B2/ja not_active Expired - Fee Related
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2007
- 2007-09-07 JP JP2007232324A patent/JP4685845B2/ja not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2007073606A (ja) * | 2005-09-05 | 2007-03-22 | Sophia School Corp | InP基板を有する光半導体装置 |
Also Published As
Publication number | Publication date |
---|---|
JP2007324628A (ja) | 2007-12-13 |
DE69636110T2 (de) | 2007-04-19 |
DE69636110D1 (de) | 2006-06-14 |
EP1213771A2 (en) | 2002-06-12 |
JP4153966B2 (ja) | 2008-09-24 |
GB9504666D0 (en) | 1995-04-26 |
EP0731510B1 (en) | 2006-05-10 |
JP2007081449A (ja) | 2007-03-29 |
GB2298735A (en) | 1996-09-11 |
JP3909884B2 (ja) | 2007-04-25 |
JP4067104B2 (ja) | 2008-03-26 |
EP0731510A2 (en) | 1996-09-11 |
JPH08250810A (ja) | 1996-09-27 |
EP1213771A3 (en) | 2002-10-02 |
US5747827A (en) | 1998-05-05 |
JP4685845B2 (ja) | 2011-05-18 |
EP0731510A3 (en) | 1997-01-15 |
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