JP2004242493A5 - - Google Patents

Download PDF

Info

Publication number
JP2004242493A5
JP2004242493A5 JP2003416765A JP2003416765A JP2004242493A5 JP 2004242493 A5 JP2004242493 A5 JP 2004242493A5 JP 2003416765 A JP2003416765 A JP 2003416765A JP 2003416765 A JP2003416765 A JP 2003416765A JP 2004242493 A5 JP2004242493 A5 JP 2004242493A5
Authority
JP
Japan
Prior art keywords
piezoelectric
protrusion
piezoelectric driving
driving
face
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003416765A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004242493A (ja
JP4578799B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2003416765A priority Critical patent/JP4578799B2/ja
Priority claimed from JP2003416765A external-priority patent/JP4578799B2/ja
Publication of JP2004242493A publication Critical patent/JP2004242493A/ja
Publication of JP2004242493A5 publication Critical patent/JP2004242493A5/ja
Application granted granted Critical
Publication of JP4578799B2 publication Critical patent/JP4578799B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2003416765A 2003-01-14 2003-12-15 圧電アクチュエータ及びそれを用いた電子機器 Expired - Fee Related JP4578799B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003416765A JP4578799B2 (ja) 2003-01-14 2003-12-15 圧電アクチュエータ及びそれを用いた電子機器

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003005727 2003-01-14
JP2003416765A JP4578799B2 (ja) 2003-01-14 2003-12-15 圧電アクチュエータ及びそれを用いた電子機器

Publications (3)

Publication Number Publication Date
JP2004242493A JP2004242493A (ja) 2004-08-26
JP2004242493A5 true JP2004242493A5 (https=) 2007-06-14
JP4578799B2 JP4578799B2 (ja) 2010-11-10

Family

ID=32964722

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003416765A Expired - Fee Related JP4578799B2 (ja) 2003-01-14 2003-12-15 圧電アクチュエータ及びそれを用いた電子機器

Country Status (1)

Country Link
JP (1) JP4578799B2 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4506704B2 (ja) * 2006-03-28 2010-07-21 セイコーエプソン株式会社 圧電アクチュエータ
JP2007325466A (ja) * 2006-06-05 2007-12-13 Konica Minolta Opto Inc 駆動装置
JP2010226895A (ja) * 2009-03-24 2010-10-07 Nikon Corp アクチュエータ、駆動装置、レンズユニット及び撮像装置
JP5212397B2 (ja) * 2010-02-12 2013-06-19 セイコーエプソン株式会社 圧電アクチュエータ

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5893477A (ja) * 1981-11-26 1983-06-03 Sony Corp 圧電モ−タ
JPS62105489A (ja) * 1985-11-01 1987-05-15 Nippon Telegr & Teleph Corp <Ntt> 圧電アクチユエ−タユニツト
JPH0619340Y2 (ja) * 1987-09-25 1994-05-18 日産自動車株式会社 超音波リニアモータのレールへの支持構造
JPH01315269A (ja) * 1988-06-13 1989-12-20 Hitachi Ltd 超音波モータ
JPH08228494A (ja) * 1995-02-22 1996-09-03 Olympus Optical Co Ltd 超音波振動子および超音波モータ
JPH08275558A (ja) * 1995-03-28 1996-10-18 Fanuc Ltd 圧電モータ
JPH0993965A (ja) * 1995-09-25 1997-04-04 Olympus Optical Co Ltd 超音波振動子及び該超音波振動子を用いた超音波 モータ
JPH09117166A (ja) * 1995-10-12 1997-05-02 Olympus Optical Co Ltd 超音波モータ
JPH1175379A (ja) * 1997-08-29 1999-03-16 Nikon Corp 駆動装置
JP2000152671A (ja) * 1998-11-05 2000-05-30 Japan Science & Technology Corp 超音波モータ
JP2002112563A (ja) * 2000-09-29 2002-04-12 Minolta Co Ltd アクチュエータの駆動方法および装置
JP4075363B2 (ja) * 2001-11-30 2008-04-16 コニカミノルタホールディングス株式会社 アクチュエータ
JP2003309986A (ja) * 2002-04-11 2003-10-31 Sony Corp 駆動機構
JP2003329941A (ja) * 2002-05-14 2003-11-19 Seiko Instruments Inc 可変遮蔽機構及びこれを用いた光可変減衰器

Similar Documents

Publication Publication Date Title
JPH11346486A5 (https=)
JP2005094957A5 (https=)
ATE538505T1 (de) Piezoelektrische antriebsvorrichtung
WO2007038426A3 (en) Pneumatic biasing of a linear actuator and implementations thereof
DK1972822T3 (da) Kilebremse
ATE444138T1 (de) Stiftklemmanordnung
EP2645560A1 (en) Piezoelectric motor
JP2005168281A5 (https=)
WO2008149718A1 (ja) Ｘｙテーブルアクチュエータ
JP2008278720A5 (https=)
WO2008152820A1 (ja) 振動型アクチュエータ及びそれを備えた駆動装置
JP2006325387A (ja) 変位拡大手段を有する圧電線形モータ
JP2004242493A5 (https=)
WO2008126354A1 (ja) 超音波アクチュエータ
JP2015065809A5 (ja) アクチュエータ
JP2005033943A5 (https=)
JP4376225B2 (ja) テーブル装置
JP5093098B2 (ja) 駆動装置
WO2003090288A3 (en) Drive circuit for piezo ceramic device
ATE341716T1 (de) Fluidischer stellantrieb für ebene stellbewegungen
TW200516564A (en) A microactuator for a hard disk drive with an integrated gimbal function
WO2008126246A1 (ja) 駆動装置
JP4740054B2 (ja) 射出成形機のトグル式型締装置
KR100679914B1 (ko) 압전 변환기를 이용한 정밀 회전구동장치
ATE369513T1 (de) Piezo-biegewandler