JP4578799B2 - 圧電アクチュエータ及びそれを用いた電子機器 - Google Patents

圧電アクチュエータ及びそれを用いた電子機器 Download PDF

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Publication number
JP4578799B2
JP4578799B2 JP2003416765A JP2003416765A JP4578799B2 JP 4578799 B2 JP4578799 B2 JP 4578799B2 JP 2003416765 A JP2003416765 A JP 2003416765A JP 2003416765 A JP2003416765 A JP 2003416765A JP 4578799 B2 JP4578799 B2 JP 4578799B2
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Japan
Prior art keywords
piezoelectric
driving
protrusion
piezoelectric actuator
bodies
Prior art date
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Expired - Fee Related
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JP2003416765A
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English (en)
Japanese (ja)
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JP2004242493A (ja
JP2004242493A5 (https=
Inventor
義朗 富川
朗弘 飯野
聖士 渡辺
政雄 春日
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Seiko Instruments Inc
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Seiko Instruments Inc
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Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP2003416765A priority Critical patent/JP4578799B2/ja
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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2003416765A 2003-01-14 2003-12-15 圧電アクチュエータ及びそれを用いた電子機器 Expired - Fee Related JP4578799B2 (ja)

Priority Applications (1)

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JP2003416765A JP4578799B2 (ja) 2003-01-14 2003-12-15 圧電アクチュエータ及びそれを用いた電子機器

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003005727 2003-01-14
JP2003416765A JP4578799B2 (ja) 2003-01-14 2003-12-15 圧電アクチュエータ及びそれを用いた電子機器

Publications (3)

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JP2004242493A JP2004242493A (ja) 2004-08-26
JP2004242493A5 JP2004242493A5 (https=) 2007-06-14
JP4578799B2 true JP4578799B2 (ja) 2010-11-10

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ID=32964722

Family Applications (1)

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JP2003416765A Expired - Fee Related JP4578799B2 (ja) 2003-01-14 2003-12-15 圧電アクチュエータ及びそれを用いた電子機器

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JP (1) JP4578799B2 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4506704B2 (ja) * 2006-03-28 2010-07-21 セイコーエプソン株式会社 圧電アクチュエータ
JP2007325466A (ja) * 2006-06-05 2007-12-13 Konica Minolta Opto Inc 駆動装置
JP2010226895A (ja) * 2009-03-24 2010-10-07 Nikon Corp アクチュエータ、駆動装置、レンズユニット及び撮像装置
JP5212397B2 (ja) * 2010-02-12 2013-06-19 セイコーエプソン株式会社 圧電アクチュエータ

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5893477A (ja) * 1981-11-26 1983-06-03 Sony Corp 圧電モ−タ
JPS62105489A (ja) * 1985-11-01 1987-05-15 Nippon Telegr & Teleph Corp <Ntt> 圧電アクチユエ−タユニツト
JPH0619340Y2 (ja) * 1987-09-25 1994-05-18 日産自動車株式会社 超音波リニアモータのレールへの支持構造
JPH01315269A (ja) * 1988-06-13 1989-12-20 Hitachi Ltd 超音波モータ
JPH08228494A (ja) * 1995-02-22 1996-09-03 Olympus Optical Co Ltd 超音波振動子および超音波モータ
JPH08275558A (ja) * 1995-03-28 1996-10-18 Fanuc Ltd 圧電モータ
JPH0993965A (ja) * 1995-09-25 1997-04-04 Olympus Optical Co Ltd 超音波振動子及び該超音波振動子を用いた超音波 モータ
JPH09117166A (ja) * 1995-10-12 1997-05-02 Olympus Optical Co Ltd 超音波モータ
JPH1175379A (ja) * 1997-08-29 1999-03-16 Nikon Corp 駆動装置
JP2000152671A (ja) * 1998-11-05 2000-05-30 Japan Science & Technology Corp 超音波モータ
JP2002112563A (ja) * 2000-09-29 2002-04-12 Minolta Co Ltd アクチュエータの駆動方法および装置
JP4075363B2 (ja) * 2001-11-30 2008-04-16 コニカミノルタホールディングス株式会社 アクチュエータ
JP2003309986A (ja) * 2002-04-11 2003-10-31 Sony Corp 駆動機構
JP2003329941A (ja) * 2002-05-14 2003-11-19 Seiko Instruments Inc 可変遮蔽機構及びこれを用いた光可変減衰器

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JP2004242493A (ja) 2004-08-26

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