JP2004186681A5 - - Google Patents

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Publication number
JP2004186681A5
JP2004186681A5 JP2003386369A JP2003386369A JP2004186681A5 JP 2004186681 A5 JP2004186681 A5 JP 2004186681A5 JP 2003386369 A JP2003386369 A JP 2003386369A JP 2003386369 A JP2003386369 A JP 2003386369A JP 2004186681 A5 JP2004186681 A5 JP 2004186681A5
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JP
Japan
Prior art keywords
substrate
unit
transport unit
mounting table
clamp mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003386369A
Other languages
English (en)
Japanese (ja)
Other versions
JP4546066B2 (ja
JP2004186681A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2003386369A priority Critical patent/JP4546066B2/ja
Priority claimed from JP2003386369A external-priority patent/JP4546066B2/ja
Publication of JP2004186681A publication Critical patent/JP2004186681A/ja
Publication of JP2004186681A5 publication Critical patent/JP2004186681A5/ja
Application granted granted Critical
Publication of JP4546066B2 publication Critical patent/JP4546066B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003386369A 2002-11-21 2003-11-17 基板の位置決め方法及びこの方法を用いた検査装置 Expired - Fee Related JP4546066B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003386369A JP4546066B2 (ja) 2002-11-21 2003-11-17 基板の位置決め方法及びこの方法を用いた検査装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002337504 2002-11-21
JP2003386369A JP4546066B2 (ja) 2002-11-21 2003-11-17 基板の位置決め方法及びこの方法を用いた検査装置

Publications (3)

Publication Number Publication Date
JP2004186681A JP2004186681A (ja) 2004-07-02
JP2004186681A5 true JP2004186681A5 (https=) 2006-11-16
JP4546066B2 JP4546066B2 (ja) 2010-09-15

Family

ID=32774663

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003386369A Expired - Fee Related JP4546066B2 (ja) 2002-11-21 2003-11-17 基板の位置決め方法及びこの方法を用いた検査装置

Country Status (1)

Country Link
JP (1) JP4546066B2 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4691375B2 (ja) * 2005-03-24 2011-06-01 株式会社日立国際電気 測定装置
CN100401014C (zh) * 2005-04-08 2008-07-09 株式会社日立国际电气 线宽测量装置
JP2007207807A (ja) * 2006-01-31 2007-08-16 Hitachi Kokusai Electric Inc 試料位置決め装置
JP2008145762A (ja) * 2006-12-11 2008-06-26 Sharp Corp 基板処理装置および基板処理方法
JP2008187156A (ja) * 2007-01-31 2008-08-14 Hitachi Kokusai Electric Inc 基板検出装置
JP2015132497A (ja) * 2014-01-10 2015-07-23 セイコーエプソン株式会社 検査装置および検査方法
US11867747B2 (en) 2019-01-24 2024-01-09 Koh Young Technology Inc. Transfer apparatus for inspection apparatus, inspection apparatus, and object inspection method using same

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2807905B2 (ja) * 1989-09-14 1998-10-08 日立電子エンジニアリング株式会社 基板チャック機構
JP2941505B2 (ja) * 1991-08-08 1999-08-25 株式会社東芝 基板位置決め方法
JPH0846017A (ja) * 1994-07-29 1996-02-16 Sony Corp 基板の位置決め装置および位置決め方法
JPH08313815A (ja) * 1995-05-23 1996-11-29 Olympus Optical Co Ltd 基板部材の位置決め保持装置
JPH09278179A (ja) * 1996-04-16 1997-10-28 Hitachi Ltd 搬送機
JPH11214486A (ja) * 1998-01-27 1999-08-06 Komatsu Ltd 基板処理装置
JP2002270678A (ja) * 2001-03-08 2002-09-20 Nikon Corp 基板処理装置、基板処理方法、基板ホルダ及び基板搬送装置

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