JP2004152462A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2004152462A5 JP2004152462A5 JP2003138084A JP2003138084A JP2004152462A5 JP 2004152462 A5 JP2004152462 A5 JP 2004152462A5 JP 2003138084 A JP2003138084 A JP 2003138084A JP 2003138084 A JP2003138084 A JP 2003138084A JP 2004152462 A5 JP2004152462 A5 JP 2004152462A5
- Authority
- JP
- Japan
- Prior art keywords
- recording medium
- magnetic recording
- protective film
- film
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001681 protective effect Effects 0.000 description 13
- 238000000034 method Methods 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- 229910052799 carbon Inorganic materials 0.000 description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 5
- 125000004432 carbon atom Chemical group C* 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 239000001257 hydrogen Substances 0.000 description 5
- 229910052739 hydrogen Inorganic materials 0.000 description 5
- 239000002994 raw material Substances 0.000 description 5
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 description 4
- 125000004433 nitrogen atom Chemical group N* 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000010410 layer Substances 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 239000001272 nitrous oxide Substances 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000007737 ion beam deposition Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003138084A JP2004152462A (ja) | 2002-09-04 | 2003-05-16 | 磁気記録媒体及びその製造方法 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002258389 | 2002-09-04 | ||
| JP2003138084A JP2004152462A (ja) | 2002-09-04 | 2003-05-16 | 磁気記録媒体及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004152462A JP2004152462A (ja) | 2004-05-27 |
| JP2004152462A5 true JP2004152462A5 (enExample) | 2006-03-02 |
Family
ID=32472941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003138084A Pending JP2004152462A (ja) | 2002-09-04 | 2003-05-16 | 磁気記録媒体及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2004152462A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5095524B2 (ja) * | 2008-06-26 | 2012-12-12 | 株式会社ユーテック | プラズマcvd装置及び磁気記録媒体の製造方法 |
| JP2013037731A (ja) | 2011-08-04 | 2013-02-21 | Fuji Electric Co Ltd | 記録媒体 |
-
2003
- 2003-05-16 JP JP2003138084A patent/JP2004152462A/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Erdemir et al. | Tribological properties of nanocrystalline diamond films | |
| KR20080073258A (ko) | 자기 기록 헤드 및 매체 오버코트 | |
| JPH04214230A (ja) | 炭素膜形成方法と磁気メモリ構造と磁気ディスク製造方法 | |
| JP2007257756A (ja) | 磁気ディスクの製造方法及び磁気ディスク | |
| JPH04311569A (ja) | 硬質多層膜形成体およびその製造方法 | |
| EP1238122A2 (en) | Method and apparatus for forming carbonaceous film | |
| JP2002285333A5 (enExample) | ||
| JP2004152462A5 (enExample) | ||
| JP4839723B2 (ja) | 保護膜形成方法およびその保護膜を備えた磁気記録媒体 | |
| US8334028B2 (en) | Method of forming a protective film | |
| US8597527B2 (en) | Method for forming a concavo-convex pattern and a method of manufacturing a patterned medium type magnetic recording medium | |
| RU2008135371A (ru) | Тонкопленочная многослойная структура, компонент, включающий такую структуру, и способ ее осаждения | |
| WO2012060023A1 (ja) | 保護膜および該保護膜を備えた磁気記録媒体、保護膜を製造する方法 | |
| JP2005314791A (ja) | 金属磁性体膜の加工方法 | |
| KR20100049003A (ko) | 수직 자기 기록 매체의 제조 방법 | |
| TW200623438A (en) | A method for the synthesis of qunatum dots | |
| JP4762485B2 (ja) | 垂直磁気記録媒体 | |
| JPH10326406A5 (enExample) | ||
| JP3898622B2 (ja) | 炭素膜形成方法及びその装置、並びに炭素膜及びその炭素膜を被覆された製造物 | |
| CN112513320A (zh) | 通过控制气相瞬态物种形成的薄膜沉积工艺 | |
| TW201224189A (en) | A diamond-like carbon film and manufacturing method thereof | |
| JP5207134B2 (ja) | 磁気記録媒体の製造方法 | |
| JP3687117B2 (ja) | 磁気記録媒体及びその製造方法 | |
| JP5720311B2 (ja) | Dlc膜の製造方法および製造装置 | |
| TW378318B (en) | Method of sputtering a carbon overcoat as a protective film on magnetic recording disk |