A7 B7 五、發明説明（） 本發明係提供一種製造磁片表面之碳保護 膜的濺鍍方法。 由磁片製成的磁碟機已廣泛應用於電腦及 5 通訊等相關產業中，如何提高磁片的記錄容量 是磁片製造上的主要研究課題之一。利用縮減 磁碟機的讀窝頭與磁片表面間的距離以增加磁 片記錄密度的技術，是業界為了增加磁片容量 而普遍使用的方法之一。由於降低磁頭的飛行 10 高度使其貼近磁片表面，會很容易引起摩擦而 造成磁頭及磁片的磨損，所以在磁片表面需濺 鍍一層碳保護膜以減少磁片的磨耗，而在碳保 護膜上再添加一層潤滑層則可以保護磁頭並增 進其磨潤度。 15 經濟部中央標準局員工消費合作社印製 (請先閲請背面之注意事項再填寫本頁) 請參考圖1，圖1為一含有碳保護膜之磁片 10的橫截面示意圖。磁片10包含一表面設有蝕 刻纹（texture)之硬質載體12(substrate)，一結晶 底層1 4濺鍍於載體12之上，一磁性材料層16濺 20 鍍於底層1 4之上，一碳保護膜1 8濺鍍於磁性材 料層1 6之上，以及一潤滑層2 0設於碳保護膜1 8 之上。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 五、發明説明（） A7 B7 不成 以製 常以 般應 一反 ， 生 上產 程子 製原 鍍碳 錢之 的鍍 8 Μ 1Χ 膜與 護份 保成 碳體 在氣 的 同 利得 專獲 文可 論氣 的氬 表加 發添 已獨 去單 過中 在體 〇 氣 18性 膜隋 護於 保示 碳表 之僅 需 ， 所中 護國氮 保美\ 加如氣 增例氬 可。有 氣等含 氮等於 加結之 添鍵出 獨的提 單間斤 或之申 ，質吃 質物1 性滑21 構潤2 結與52 之層第 佳表利 較膜專 中 體 氣 合 混 的 烷 甲， \法 氣方 第 利 國 美 在 是 或 的之 成出 形提 鍍所 濺中 膜號 護12 保75 碳56 下 體 氣 合 混 的 氣 氮 〇 \法 氣方 氬的 之成 例形 比鍍 定濺 一膜 有護 含保 於碳A7 B7 V. Description of the invention () The present invention provides a sputtering method for manufacturing a carbon protective film on the surface of a magnetic sheet. Disk drives made from magnetic disks have been widely used in computer and related industries. How to increase the recording capacity of magnetic disks is one of the main research topics in magnetic disk manufacturing. The technique of reducing the distance between the read head of the magnetic disk drive and the surface of the magnetic disk to increase the recording density of the magnetic disk is one of the methods commonly used in the industry to increase the capacity of the magnetic disk. As the flying height of the magnetic head is lowered to bring it closer to the surface of the magnetic sheet, it will easily cause friction and wear of the magnetic head and the magnetic sheet. Therefore, a carbon protective film must be sputtered on the surface of the magnetic sheet to reduce the wear of the magnetic sheet. Adding another layer of lubricating layer to the protective film can protect the magnetic head and increase its degree of wear. 15 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (please read the notes on the back before filling this page) Please refer to Figure 1, which is a schematic cross-sectional view of a magnetic sheet 10 containing a carbon protective film. The magnetic sheet 10 includes a hard carrier 12 with a texture on the surface, a crystalline base layer 14 is sputtered on the carrier 12, and a magnetic material layer 16 is sputtered 20 on the bottom layer 14. A carbon protective film 18 is sputtered on the magnetic material layer 16 and a lubricant layer 20 is disposed on the carbon protective film 18. This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) 5. Description of the invention () A7 B7 can not be reversed in the usual way, and the plating process of the original carbon plating money made by the production process is 8 Μ 1 × The film and the protective carbon body are in the same gas as the gas, and the argon meter of the gas can be added to the gas, and the argon meter has been added separately. The 18 gas film is only necessary to protect the carbon table. Protect the country nitrogen and protect the United States. There is gas and nitrogen, which is equal to the addition of the bond. The quality of the product is 1 and the texture is 21. The structure is 2 and the layer 52 is the best. A, \ French gas, Dili Gome in the shape of the formation of the positive or negative splashing film No. 12 protection 75 carbon 56 lower body gas mixed nitrogen ○ \ French gas square argon example Definitely splash a film to protect the carbon
氣 L氣 Μ 氮 提h \ 係♦氣 明0f氫 發同制 本.·控 此法由 因方藉 的， 成中 5 1A 供 新 \ 的及氬 碳 氮 氣 形體， 鐘氣數 M.陡參 膜惰例 護於比 保氣之 與性 膜磁 護之 保佳 碳更 加出 增現 且呈 並片 ，磁 度使 厚 ， 之結 膜鍵 護的 保間 碳之 1^-^ 層 Ο 減滑能 來潤效 I;---1-----L'·裝-- (請先閲讀背面之注意事項再填寫本頁) Τ» n^— · -s 經濟部中央標準局員工消費合作社印製 意 示 面 截 橫 的 片 磁 之 膜 護 保 明碳 説有 單含 簡 一 之為 示 1 圖圖 20 圖 意 示 之 統 系 鍍 濺 之 膜 護 保 碳 成 。形 圖為 2 圖 本紙張尺度適用中國國家標準（CNS ) A4规格（210X297公釐） 經濟部中央標準局員工消費合作社印袋 A7 B7 五、發明説明（） 圖3為改變形成碳保護膜之混合氣體中氫氣之 百分比，所造成碳保護膜Ram an光譜中 I ( D ) / I ( G )比値之變化情形。 圖4為改變形成碳保護膜之混合氣體中氮氣之 5 百分比，所造成碳保護膜Raman光譜中 I ( D ) / I ( G )比値之變化情形。 圖5為改變形成碳保護膜之混合氣體中氫氣與 氮氣之比値，所造成碳保護膜Ram an光譜中 1(D)/ 1(G)比値之變化情形。 10 圖6為改變形成碳保護膜之混合氣體中氮氣與 氫氣之比値，所造成礙保護膜Raman光譜中 I (D ) / I ( G)比値之變化情形。 圖7為在混合氣體之氫氣固定為百分之十的情 形下，因氮氣比例改變，所造成碳保護膜 15 中氫或氮成份之變化情形。 圖8為在混合氣體之氮氣固定為百分之十的情 形下，因氫氣成份改變，所造成碳保護膜 中氫或氮成份之變化情形。 圖9為改變混合氣體中不同氮氣/氫氪比例之 20 條件下磁片表面之黏滯特性圖。 請參考圖2。圖2為含碳保護膜磁片濺鍍系 統之製程示意圖。將濺鍍系統3 0以眞空幫浦3 2 抽眞空，使眞空濺鍍艙3 4之環境氣壓低於2微托 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 1^---\-----vi'k------tr!-----φ (請先閎讀背面之注意事項再填寫本頁) A8 B8 C8 D8 六、申請專利範圍 里切利（# torr.)下，注入氬氣36、氮氣38及 氫氣4 0之混合氣體，控制氮氣/氫氣比例在〇 . 5 至1.2之間，而其中混合氣體之成份組成為氫氣 佔百分之十至三十，氮氣佔百分之十至二十， 5 其餘為氬氣，濺鍍艙34的氣壓係保持於5〜1〇 毫托里切利（m t 〇 r r.)的狀態。此外，調整電 源4 2，使石墨靶材44、46與欲濺鍍碳保護膜的 磁片4 8間之電壓維持在4 0 0到6 0 0伏特，而電源 42輸出設在〇·8至4千瓦的範圍，使碳濺鍍於磁 10片表面之上，形成一厚度約為80A至150A非晶 質化的碳保護膜（Amorphous carbon film)。 在有關碳保護膜之特性研究中，R a m a η光 譜分析（Raman Spectra Analysis)為測定竣保護 15 膜中原子成份結構及鍵結種類之有效方法。在 含有C - C、C - H、C - N鍵結物質之Raman光譜 中，常包含有兩個呈高斯分侔且互相重疊之光 譜，其峰値約分別在1 3 5 5 (^111^( 1(D))及1 5 7 5 cm·1 (1(G))左右。研究顯示1(D)/ 1(G)之比値和碳 20 保護膜表面原子之鍵結及種類有密切關係：1(D) / I (G)之比値愈小，碳保護膜中之S P3立體共價 晶體結構的數量愈多，呈現鑽石結構。 請參考圖3。圖3中之縱軸為碳保護膜Raman 本紙張尺度適用中國囷家標準（CNS)A4規格（210x297公釐） --；---〆-----/iL·^ 11 (請先閱讀背面之注項再填寫本頁) 訂 f 經濟部中央標準局貝工消费合作社印裝 A7 B7 五、發明説明（） 光譜中I ( D ) / I ( G )之比値，橫軸則為形成碳保 護膜之混合氣體中氫氣之百分比。由圖中曲線 之走向可看出混合氣體中氫氣之成份百分比愈 高，I ( D ) / I ( G )之比値愈小。此一結果顯示出 5 氫氣的存在，有助於碳保護膜中S P 3立體鑽石共 價結構之形成與穩定存在。而若如美國專利第 5 2 2 7 2丨1號中導入甲烷（C H4 )的混合氣體環境 下，則碳保護膜中就容易形成S P2共價平面結 構，此一石墨結構在共價平面的面與面之間容 10 易產生滑移，磁片表面之碳保護膜的耐磨耗性 就會大幅降低。 經濟部中央標準局員工消费合作社印取 (請先闊讀背面之注意事項再填寫本頁) 請參考圖4。圖4中之縱軸為破保護膜Raman 光譜中I ( D ) / I ( G )之比値，橫軸則為形成碳保 15 護膜之混合氣體中氮氣含量之百分比。由實驗 結果圖中曲線之走向可看出，混合氣體中氮氣 之百分比愈高，I(D)/I(G)之比値基本上愈大， 但在比値為1 . 1 5左右達到飽和。此結果顯示出 氮氣的存在，和氫氣之作用相反，在某個範圍 20 内會抑止SP3鍵結之形成，但是氮原子之導入可 降低碳保護膜表面的配位數（Coordination N u m b e r )， 形成較多的旋擺键結（d a n g 1 i n g b ο n d s )，增加表面能量，有利於破保護膜表層 與潤滑物質之間的結合。而且氮原子之陰電性 本紙張尺度適用中國闼家標準（CNS ) Λ4規格（；! 10 297公t ) 經濟部中央標準局®?工消費合作社印製 A7 B7__ 五、發明説明（） (electronegativity)高達3.0，對於保護膜18與潤 滑層2 0間形成氫鍵鍵結有很大的助益。 所以本發明即同時在氬氣之惰性氣體中添 5加氫氣及氮氣，藉著控制氫氣/氮氣的比例# 數，就可以減少碳保護膜之厚度，提升硬度及 耐磨耗性（t r i b ο 1 o g y )，增加碳保護膜與潤滑層 之間的鍵結，降低磁頭及磁片間物理接觸轉停 (C ο n t a c t S t a r t S t ο p )之磨損，消弱磁頭及磁片 10 之黏滯性，並使磁片呈現出更佳之磁性效能 (magnetic performance) ° 請參考圖5及圖6。圖5中之縱軸為碳保護膜 R a m a η光譜中I ( D ) / I ( G )之比値，而橫軸則為形 15 成碳保護膜之混合氣體中氫氣與氮氣的比例。 圖6中之縱軸亦為碳保護膜Raman光譜中1(^)/ 1(G)之比値，而橫軸則為形成碳保護膜之混合 氣體中氮氣與氫氣的比例。由實驗圖中的曲線 可證實.：混合氣體中氫氣比氮氣之比例愈高， 20 I ( D ) / I ( G )之比値愈小。而相反地在圖6中，氮 氣之於氫氣的比例愈高，1(D)/ 1(G)之比値愈 大，而約在比値為1.2左右達到飽和。此實驗結 果顯示出氫氣對於碳保護膜的活性比氮氣要 大，故氫氣的存在對1(D)/ 1(G)之比値有更決 7 本紙張尺度適用中國國家標準（CNS ) M規格（21〇:<297公釐〉 (請先閲讀背面之注意事項再填寫本頁) 裝·Gas L Gas M Nitrogen extraction h \ System ♦ Gas Ming 0f Hydrogen generation with the same production system. · This method was borrowed by the party to form a 5 1A supply of new and argon carbon nitrogen, the number of clocks M. Steep reference film The inertial protection is better than that of Baojia carbon, which is protected by gas and magnetic protection of the film, and is present on the same sheet. The magnetism is thick, and the 1 ～-^ layer of interlayer carbon protected by the conjunctival bond can reduce slippage. Runxiao I; --- 1 ----- L '· Pack-- (Please read the precautions on the back before filling this page) Τ »n ^ — · -s Printed by the Staff Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs The sliced magnetic film protects the bright carbon that is cut across the surface. It is shown in Figure 1. Figure 20 shows the system of the sputtered film to protect the carbon. The figure is 2 The size of this paper is applicable to China National Standard (CNS) A4 (210X297 mm) The central government bureau of the Ministry of Economic Affairs Consumer Cooperative Printing Bag A7 B7 V. Description of the invention () Figure 3 is a mix of changing the formation of a carbon protective film The percentage of hydrogen in the gas changes the I (D) / I (G) ratio 値 in the Ram an spectrum of the carbon protective film. Figure 4 shows the change of the ratio I (D) / I (G) in the Raman spectrum of the carbon protective film by changing 5% of nitrogen in the mixed gas forming the carbon protective film. Figure 5 shows the change of the ratio 1 (D) / 1 (G) in the Ram an spectrum of the carbon protective film by changing the ratio 値 of hydrogen to nitrogen in the mixed gas forming the carbon protective film. 10 Figure 6 shows the change in the ratio I (D) / I (G) of the protective film Raman spectrum due to the change of the ratio of nitrogen to hydrogen in the mixed gas forming the carbon protective film. Fig. 7 shows the change of the hydrogen or nitrogen content in the carbon protective film 15 due to the change in the proportion of nitrogen when the hydrogen content of the mixed gas is fixed at 10%. Fig. 8 shows the change of the hydrogen or nitrogen content in the carbon protective film due to the change of the hydrogen content in the case where the nitrogen of the mixed gas is fixed at 10%. Fig. 9 is a graph showing the viscosity characteristics of the surface of the magnetic sheet under different conditions of different nitrogen / hydrogen ratios of 20 in the mixed gas. Please refer to Figure 2. FIG. 2 is a schematic diagram of a manufacturing process of a carbon film-containing magnetic sheet sputtering system. Evacuate the sputtering system 30 with the empty pump 3 2 so that the ambient air pressure of the empty sputtering chamber 3 4 is lower than 2 microtorls. This paper applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 1 ^- -\ ----- vi'k ------ tr! ----- φ (Please read the notes on the back before filling this page) A8 B8 C8 D8 (# Torr.), Inject a mixture of argon 36, nitrogen 38, and hydrogen 40 to control the nitrogen / hydrogen ratio between 0.5 and 1.2, and the composition of the mixed gas is hydrogen as a percentage From ten to thirty, nitrogen accounts for ten to twenty percent, and the rest is argon. The pressure of the sputtering chamber 34 is maintained at a state of 5 to 10 millitoricelli (mt οr r.). In addition, the power supply 42 is adjusted so that the voltage between the graphite targets 44 and 46 and the magnetic sheet 48 to be coated with a carbon protective film is maintained at 400 to 600 volts, and the output of the power supply 42 is set at 0.8 to In the range of 4 kilowatts, carbon is sputtered on the surface of the 10 magnetic sheets to form an amorphous carbon film with a thickness of about 80A to 150A. In the study of the characteristics of carbon protective films, Raman Spectra Analysis is an effective method for determining the structure of atomic components and the types of bonds in the protective 15 films. The Raman spectrum containing C-C, C-H, and C-N bonded substances often includes two spectra that are Gaussian and overlapped with each other. The peaks are about 1 3 5 5 (^ 111 ^ (1 (D)) and 1 5 7 5 cm · 1 (1 (G)). Studies show that the ratio of 1 (D) / 1 (G) 値 and the bond and type of the atoms on the surface of the carbon 20 protective film are close Relationship: The smaller the ratio 1 (D) / I (G), the more the number of SP 3 covalent crystal structures in the carbon protective film, showing a diamond structure. Please refer to Figure 3. The vertical axis in Figure 3 is Carbon protective film Raman This paper size is applicable to the Chinese standard (CNS) A4 (210x297 mm)-; --- 〆 ----- / iL · ^ 11 (Please read the notes on the back before filling in this Page) Ordered by the Central Standards Bureau of the Ministry of Economic Affairs and printed by Aigong Consumer Cooperatives A7 B7 5. Explanation of the invention () The ratio of I (D) / I (G) in the spectrum is 横, and the horizontal axis is in the mixed gas forming the carbon protective film The percentage of hydrogen. From the curve of the graph, it can be seen that the higher the percentage of hydrogen in the mixed gas, the smaller the ratio I (D) / I (G). This result shows that the presence of 5 hydrogen helps In carbon protective film SP 3 Formation and stable existence of the covalent structure of bulk diamond. However, if the mixed gas environment of methane (C H4) is introduced in US Patent No. 5 2 7 2 丨 1, the S P2 covalent is easily formed in the carbon protective film. Planar structure, this graphite structure is liable to slip between the covalent plane surface and the surface. The abrasion resistance of the carbon protective film on the surface of the magnetic sheet will be greatly reduced. (Please read the precautions on the back and then fill out this page) Please refer to Figure 4. The vertical axis in Figure 4 is the ratio I (D) / I (G) in the Raman spectrum of the protective film, and the horizontal axis is The percentage of nitrogen content in the mixed gas forming the carbon 15 protective film. From the curve of the experimental results, it can be seen that the higher the percentage of nitrogen in the mixed gas, the greater the ratio of I (D) / I (G). It is larger, but reaches saturation at about 1.15. This result shows that the presence of nitrogen, contrary to the effect of hydrogen, will inhibit the formation of SP3 bonds within a certain range of 20, but the introduction of nitrogen atoms may Reduce the coordination number of the surface of the carbon protective film (Coordination N umber), Forming more dangling bonds (dang 1 ingb ο nds), increasing surface energy, is conducive to breaking the bond between the surface of the protective film and the lubricating substance. In addition, the negative electricity of the nitrogen atom is based on the Chinese standard ( CNS) Λ4 specification (;! 10 297gt) Printed by the Central Bureau of Standards of the Ministry of Economic Affairs® Industrial Consumer Cooperative A7 B7__ 5. Description of the invention (electronegativity) is up to 3.0, for the formation of hydrogen between the protective film 18 and the lubricant layer 20 Bonding helps a lot. Therefore, the present invention adds 5 and hydrogen and nitrogen to the inert gas of argon at the same time. By controlling the number of hydrogen / nitrogen ratio #, the thickness of the carbon protective film can be reduced, and the hardness and wear resistance can be improved (trib ο 1 ogy), increasing the bond between the carbon protective film and the lubricating layer, reducing the wear of the physical contact between the magnetic head and the magnetic sheet (C ntact S tart S t ο p), weakening the viscosity of the magnetic head and the magnetic sheet 10 And make the magnetic sheet exhibit better magnetic performance ° Please refer to FIG. 5 and FIG. 6. The vertical axis in FIG. 5 is the ratio I (D) / I (G) of the carbon protective film R a m a η spectrum, and the horizontal axis is the ratio of hydrogen to nitrogen in the mixed gas forming the carbon protective film. The vertical axis in Fig. 6 is also the ratio 1 (^) / 1 (G) in the Raman spectrum of the carbon protective film, and the horizontal axis is the ratio of nitrogen to hydrogen in the mixed gas forming the carbon protective film. It can be confirmed from the curves in the experimental graphs that: the higher the ratio of hydrogen to nitrogen in the mixed gas, the smaller the ratio of 20 I (D) / I (G) 値. Conversely, in Figure 6, the higher the ratio of nitrogen to hydrogen, the greater the ratio 1 (D) / 1 (G) 値, and the saturation will be reached at about 1.2. The results of this experiment show that hydrogen is more active on the carbon protective film than nitrogen, so the presence of hydrogen is more important than the ratio of 1 (D) / 1 (G). 7 The paper size applies the Chinese National Standard (CNS) M specification. (21〇: <297 mm> (Please read the precautions on the back before filling in this page)
訂I B7 五、發明説明（） 定性之影響，.也就是説適當控制氫氣的份量， 可進而控制碳保護膜中s p 3鍵結結構之形成。 再分別使用氫散佈分析（Hydrogen Forward 5 Scattering Analysis - HFS)及愛克斯光光電分析 (X-Ray Photoelectron Analysis - XPS)來定量出 碳保護膜中氫與氮之成份。請參考圖7及圖8， 圖7中之縱軸為碳保護膜中各別原子之百分 比，橫軸則為形成碳保護膜之混合氣體中，在 10 氫氣固定為百分之十的條件下，氮氣之百分 比。由圖中曲線之走向可看出，混合氣體中氮 氣之百分比愈高，碳_保護膜中氮原子成份僅承 呈現微幅之增加，而氫原子成份則減少。相反 的，混合氣體中氫氣之百分比愈高，則碳保護 15 膜中之氫原子成份隨著大幅上揚，而氮之成份 則幾乎保持不變。由此一結果與圖5及圖6之實 驗可以顯示，在濺鍍形成碳保護膜之過程中， 氩氣確較氮氣更為活躍，而且是形成SP3共價結 構的主要氣體成份。 20 經濟部中央標準局員工消費合作社印製 (讀先閱讀背面之注意事項再填寫本頁) 請參考圖 9。經 Single Disk Contact Start Stop ( SDCSS )的測試顯示，在不同氮與氫混 合比例之條件參數下，磁片表面之黏滯特性， 在氮、氫比例為〇 · 5與1 . 0的碳保護膜製程條件 8 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） A7 A7 經濟部中央標準局貝工消費合作社印製 B7 五、發明説明（） 時，磁頭與磁片表面之摩擦力隨讀寫的接觸時 間，其振幅變化較小，擁有較低之磨耗，較快 之讀窝速率，及較弱之雜訊產生。 5 故本發明係提供一種更佳之製造磁片表面 之碳保護膜的濺鍍方法，其藉由控制氬氣/氮氣 /氫氣之混合氣體中，將氮氣與氫氣之比例設定 在0.5至1 . 2之間，且將混合氣體内之氫氣成份 控制在百分之十至三十，氮氣成份控制在百分 10 之十至二十，其餘為氬氣。此種同時加入氫氣 和氮氣於磁片保護膜之濺鍍製造的氣體環境 中，來製造磁片表面保護膜之新製程，可使保 護膜中的碳原子形成s P3共價晶體結構，增加硬 度，以減少碳保護膜之厚度，縮短磁頭與磁片 15 之間的距離，擴大磁頭感應磁區資料訊號（data i s i g n a 1)之清晰度，以增加磁片記錄密度，同時 讓磁片具有更好的耐磨耗性質；並且可增加潤 滑層與碳保護膜表面之間的键結，降低磁頭與 磁片間.之黏滯效果及磨耗損失，提升讀寫速率 20 及耐用程度，保護磁讀寫頭，抑制雜訊產生， 使磁片可表現出更佳之磁性效能特質。 本紙張尺度適用中國國家標準（CNS ) Λ4规格（210X297公釐） I;--^-----L / 裝------訂 ------—Φ (請先鬩讀背面之注意事項再填寫本頁)Order I B7 V. Description of the invention () Qualitative effects, that is, proper control of the amount of hydrogen can further control the formation of the s p 3 bonding structure in the carbon protective film. Hydrogen Forward 5 Scattering Analysis (HFS) and X-Ray Photoelectron Analysis (XPS) were used to quantify the hydrogen and nitrogen components in the carbon protective film. Please refer to FIG. 7 and FIG. 8. The vertical axis in FIG. 7 is the percentage of individual atoms in the carbon protective film, and the horizontal axis is the mixed gas forming the carbon protective film under the condition that 10 hydrogen is fixed to 10 percent. , The percentage of nitrogen. It can be seen from the trend of the curve in the figure that the higher the percentage of nitrogen in the mixed gas, the nitrogen atomic component in the carbon-protective film only increases slightly, while the hydrogen atomic component decreases. Conversely, the higher the percentage of hydrogen in the mixed gas, the higher the hydrogen atom content in the carbon protection film, while the nitrogen content remains almost unchanged. From this result and the experiments of Figs. 5 and 6, it can be shown that in the process of forming a carbon protective film by sputtering, argon is indeed more active than nitrogen, and it is the main gas component forming the SP3 covalent structure. 20 Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs (Read the precautions on the back before filling this page) Please refer to Figure 9. Single Disk Contact Start Stop (SDCSS) tests show that under different conditions of nitrogen and hydrogen mixing ratio parameters, the viscosity characteristics of the surface of the magnetic sheet, the carbon protective film in the nitrogen and hydrogen ratio of 0.5 and 1.0 Process conditions 8 This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) A7 A7 Printed by B7 Consumers Cooperative of Central Standards Bureau of the Ministry of Economic Affairs 5. When the description of the invention (), the friction between the surface of the magnetic head and the magnetic sheet With the contact time of reading and writing, its amplitude changes less, with lower wear, faster litter reading rate, and weaker noise. 5 Therefore, the present invention provides a better sputtering method for manufacturing a carbon protective film on the surface of a magnetic sheet. By controlling the mixed gas of argon / nitrogen / hydrogen, the ratio of nitrogen to hydrogen is set to 0.5 to 1.2. In addition, the hydrogen content in the mixed gas is controlled to 10 to 30 percent, the nitrogen content is controlled to 10 to 20 percent, and the rest is argon. This new process of simultaneously adding hydrogen and nitrogen to the gaseous environment produced by the sputtering of the magnetic film protective film to produce a magnetic film surface protective film can make the carbon atoms in the protective film form an s P3 covalent crystal structure and increase hardness. In order to reduce the thickness of the carbon protective film, shorten the distance between the magnetic head and the magnetic sheet 15, and increase the clarity of the data signal (data isigna 1) of the magnetic induction field of the magnetic head, in order to increase the recording density of the magnetic sheet and make the magnetic sheet better Wear resistance; and can increase the bond between the lubricating layer and the surface of the carbon protective film, reduce the sticky effect and wear loss between the magnetic head and the magnetic sheet, improve the read and write rate 20 and durability, protect magnetic read and write Head, suppressing noise generation, so that the magnetic sheet can show better magnetic performance characteristics. This paper size applies to Chinese National Standard (CNS) Λ4 specification (210X297 mm) I;-^ ----- L / Packing ------ Order ---------- Φ (Please read first (Notes on the back then fill out this page)