KR0185431B1 - Magnetic recording medium magnetic head and magnetic recording apparatus - Google Patents

Abstract

In a magnetic recording medium having a carbon-based protective layer and a lubricating layer which prevents damage to a magnetic recording layer storing information and a magnetic recording layer sequentially formed on a nonmagnetic substrate, the carbon protective layer has a lubricating layer side more than the magnetic recording layer side. It has a relatively low hydrogen content. In the magnetic head slider on which the electron converting element is mounted, a carbon protective layer is laminated at least on the sliding surface side, and a lubricating layer is formed on the carbon-based protective layer. In a recording apparatus having a recording medium for storing information and a magnetic head for recording or reproducing information to / from the storage medium, the recording medium or the magnetic head has a carbon protective film having a lower hydrogen content in the upper surface layer than the lower layer as the initial layer. It forms in the sliding part of.

Description

Magnetic recording media, magnetic heads and magnetic recording devices

1A and 1B are model cross-sectional views showing a magnetic recording medium according to an embodiment of the present invention in comparison with a conventional configuration.

2 is a table showing the characteristics of the embodiment of the present invention shown in FIGS. 1A and 1B in comparison with the conventional configuration.

3 is a graph of the results of FIG. 2;

4 is a graph showing the relationship between the hydrogen content and the film hardness of the carbon-based protective film.

5A and 5B are model views showing a device for continuously sputtering two layers having different hydrogen contents.

6A and 6B are model cross-sectional views of the magnetic recording medium shown in comparison with the method for manufacturing the magnetic recording medium according to the present invention.

7 is a table comparing the method of the present invention shown in FIGS. 6A and 6B with the conventional method.

8A to 8D show measurement results showing the relationship between ultraviolet irradiation time and lubricant adhesion amount.

9A to 9C are cross-sectional views of principal parts of a magnetic head according to various embodiments of the present invention.

10A and 10B are model cross-sectional views of the magnetic head for evaluation, respectively.

11A and 11B are model views showing a device for continuously sputtering two layers having different hydrogen contents.

12A and 12B are model cross-sectional views comparing the magnetic head manufacturing method by ultraviolet irradiation with the magnetic head manufacturing method without ultraviolet irradiation.

13 is a perspective view of a conventional thin film magnetic head.

14 is a model showing a mass production method of a thin film magnetic head.

15A and 15B are side views showing a slider block state, respectively.

Fig. 16 is a sectional view showing a carbon protective film for a magnetic disk device according to the present invention.

Fig. 17 is a sectional view showing a carbon protective film for a magnetic disk device according to another embodiment of the present invention.

18 is Raman spectroscopy showing the relationship between the concentration of CH ₄ and Id / Ig in a hydrogen-containing carbon protective film.

19 is a graph of the measurement results showing the relationship between the CH ₄ concentration and the film resistance of the hydrogen-containing carbon protective film.

20A and 20B are side and front views each showing an apparatus for forming a hydrogen-containing carbon protective film.

Fig. 21 is a sectional view showing a magnetic disk manufactured by a substrate bias voltage application method.

Fig. 22 is a Raman spectroscopy showing the relationship between CH4 concentration and Id / Ig when the hydrogen-containing carbon protective film is produced by the substrate bias voltage application method.

FIG. 23A and FIG. 23B show the results of measuring the characteristic variation on the magnetic disk. FIG. 23A shows the conventional example, and FIG. 23B shows an example in which the substrate bias voltage is applied according to the present invention.

FIG. 24 shows the measurement results of the film term of the carbon protective film Cm of the magnetic disk. FIG.

FIG. 25 is a view showing Raman spectroscopy measurement results in order to evaluate the dependence of Id / Ig on the CH ₄ concentration and bias voltage when fabricating a hydrogen-containing carbon protective film by substrate bias voltage application as in FIG. 22.

Fig. 26 is a plan view of a sputtering chamber for reducing the magnetic field in the vertical direction.

FIG. 27 is a graph showing Raman ratio obtained by measuring CH 4 concentration and Id / Ig when the substrate temperature is kept at a low temperature.

28 is a plan view showing the overall structure of the internal structure of the magnetic disk apparatus.

29 is an enlarged cross-sectional view of a magnetic disk.

30A to 30F are sectional views showing the manufacturing method of the thin film magnetic disk according to the prior art in the order of process.

The present invention relates to a magnetic recording medium, a magnetic head and a magnetic recording apparatus. In particular, the present invention relates to a carbon protective film used for a sliding surface of a magnetic recording medium on a magnetic head in a magnetic disk device, a floppy disk device, a magnetic tape device or the like.

Recently, higher recording densities and larger capacities for magnetic disk devices are required. In order to promote such high density and large capacity, it is necessary to improve the performance of the head and the medium and to reduce the floating gap between the head and the medium. In fact, each manufacturer has attempted to use a magnetoresistive head for the head / hawk system or a new head / hawk system for vertical recording. On the other hand, the floating distance between the head and the medium was reduced to about 0.1 mu m.

In recent years, in accordance with the demand for increasing capacity and miniaturization of magnetic disk devices, the? Magnetic head using an MR element (or MR head) has been developed. In order to allow current to flow directly through the device, an insulating protective film is required on the insulating portion in the sliding portion of the MR head surface. Similarly, a protective film having excellent insulating properties is also required for the protective film on the magnetic disk.

In addition, since the reliability of the magnetic disk device is required, a magnetic disk and a magnetic head having high fracture resistance and high durability are required, and a protective film having a high hardness such as a hydrogen-containing carbon film is currently under development.

28 is a plan view showing the internal structure of the magnetic disk apparatus. In the state where the magnetic disk M is rotating at high speed, the magnetic head h moves almost radially to perform a seek operation to record / reproduce information.

FIG. 29 is an enlarged cross-sectional view of the magnetic disk M cut out from the portion of the magnetic head h and enlarged. In this thin film magnetic disk M, 1 denotes a substrate made of nonmagnetic material such as aluminum or glass. In order to increase the mechanical strength on the surface of the substrate, the Cr base layer 3 is formed to have a film thickness of about 1000 kPa in order to increase the horizontal orientation of the Co alloy while the NiP plating layer 2 is formed.

A magnetic substance such as CoCrTa or CoNiCr is sputtered to a thickness of about 500 GPa to form a thin film magnetic film 4, and then carbon is sputtered to a thickness of about 300 GPa as the protective film 5. Finally, a fluorine-based lubricating layer 6 such as perfluoropolyether is coated for several tens of kPas to complete the product.

When the magnetic disk M is rotated at a high speed in the direction of the arrow a1, the magnetic head slider 7 is lifted by a small amount of air due to the airflow flowing from the inclined surface S. Therefore, the magnetic disk M does not slide to the electron changing element 8 without sliding. This makes it possible to record and reproduce information on the magnetic film 4 of the magnetic disk.

The slider 7 of the magnetic head is attached to the spring arm 11 via a gimbal 10 so as to be searched by the drive arm 13 on the carriage 12. Since the mechanism is simple as mentioned above, the CSS (Contact Star Stop) system in which a core slider slides on the lubrication layer 6 at the time of starting and stopping of the apparatus is becoming popular.

30A to 30F are cross-sectional views showing, in process order, a method of seating a thin film magnetic disk according to the prior art, and this method is a Japanese patent application No. previously filed by the applicant of the present invention. It is also described in 3-336459. In the process shown in FIG. 30A, 1 denotes a donut-shaped substrate made of nonmagnetic material such as aluminum. The substrate is made into the same shape as the magnetic disk to be made.

For example, when manufacturing a 2.5-inch small diameter magnetic disk, a 2.5-inch nonmagnetic disk 1 is used.

In the process shown in FIG. 30B, the NiP plating layer 2 is formed on both sides of the nonmagnetic disk 1, and as shown in FIG. 30C, the polishing tape is pushed onto the sheet surface of the rotating nonmagnetic substrate. A fine texture groove 8 is formed in the circumferential direction.

In the next stem shown in FIG. 30d, a Cr base layer 30 is formed on the texture groove 8 to increase the horizontal orientation of the Co alloy to a thickness of about 1000 mm, and as shown in FIG. For example, a magnetic film 4 made of Co alloy or the like is formed to a thickness of about 500 kPa, and as shown in FIG. 30f, the hydrogen-containing carbon film 5 as a protective film is formed to a thickness of about 300 kPa. Finally, a fluorine-based lubricating layer 6 is formed on the carbon film 5. The Cr layer 3, the thin film magnetic film 4, and the carbon film 5 are formed by a thin film forming technique such as sputtering. .

The texture grooves 8 formed in the process shown in FIG. 30C are formed to provide magnetic anisotropy so that the electron conversion characteristics when recording and reproducing information are improved.

Since the carbon film (50 degrees) is affected by the texture groove (8), the lubricant can prevent the magnetic head from adsorbing between the magnetic head and the magnetic head surface, and reduce the friction between the magnetic head and the magnetic head surface.

In recent years, the head's contact with the medium has increased because the distance between the head and the medium has been reduced. Therefore, in order to manufacture such a head and a medium, the development of protection and lubrication is indispensable.

As a method of improving durability, a method of sputtering and forming an amorphous carbon film, a method of introducing hydrogen into a carbon film to form a diamond structure and improving the mechanical properties by increasing the film hardness and impact resistance, and having a functional group with a base layer as a lubricant Various methods, such as the method of applying a perfluoro polyether, have been proposed conventionally, and some of these methods are put to practical use.

As described above, it is confirmed that the application of the hydrogen-containing carbon film is effective for improving the mechanical properties.

However, when the inventors of the present invention intensively examined, it contained the hydrogen content more than a characteristic, and it turned out that adhesiveness with a lubricant falls.

Deterioration in adhesion between the protective film and the lubricant reduces the durability and reliability of the lubrication layer in the magnetic disk device employing the CSS (Contact Start Stop) method or the high-speed rotation.

The magnetic head shown in FIG. 29 is a monolithic type, whereas the head shown in FIG. 13 is a thin film magnetic head. The head element portion 14 is formed by a thin film technology and is covered with a protective film such as Al 2 O 3. The slider 7 has floating rails 15 and 16 on the left and right sides of the slide surface, and inflow slopes 15s and 16s are formed on the opposite side of the head element 14 to allow air flow.

14, 15A, and 15B are model diagrams effective for explaining a mass production method of the thin film magnetic head as illustrated in FIG. In FIG. 14, a plurality of head element portions 14 are first formed on the substrate by thin film technology, and then separated one by one from the positions of the cutting lines 18 and 19, thereby completing the thin film magnetic head shown in FIG. However, in the manufacturing procedure, first, the core slider block 20 in which the head element portions 14 are arranged in a row is formed by cutting apart at the position of the cutting line 18 in the horizontal direction.

By grinding the slider blocks 20 thus separated one by one, the floating rails 15 and 16 are formed as shown in FIG. 15A. That is, the grooves 21 between the left and right floating rails 15 and 16 and the grooves 22 between the adjacent sliders are formed.

Subsequently, in the state where the center of the groove 22 is cut off one by one at the position of the cutting line 19, it adheres to the jig 23 at regular intervals as shown in FIG. 15B, and the lapping adhered to the rubber base 24. It slides by pushing on the lapping tape 25, and polishes the edges of the outer circumferences of the floating rails 15 and 16 to chamfer. After the R chamfering, the slider is detached from the jig 233 and bonded and fixed one by one to the gimbal 10 at the tip of the spring arm 11 as shown in FIG. Next, information is recorded and reproduced in a state where the slider 7 floats by a small distance G with the wind power when the magnetic disk rotates at a high speed.

In the CSS system, since the floating force is not generated by the wind when the magnetic disk starts or stops rotating, the slider 7 slides on the lubrication layer 6 of the magnetic disk. For this reason, abrasion progresses gradually in both the lubrication layer 6 and the core slider 7, and in the worst case, the information of the magnetic film 4 of the magnetic disk is lost.

In order to prevent such a problem, as shown in FIG. 29, a carbon-based protective layer 5 is formed on the surface of the magnetic disk, and a layer of lubricant 6 is formed again on the carbon-based protective film 5 to form the surface of the magnetic disk. To reduce wear. However, as the use of magnetic disk devices increases, the frequency of starting / stopping increases in the small devices, and the CSS frequency is much higher than that of the large devices, so the countermeasure against wear is needed.

As the wear of the magnetic disk surface increases in the magnetic disk apparatus and the wear powder increases, the powder is mixed with lubricant on the surface of the magnetic disk to turn into debris. In other words, due to the viscosity of the lubricant, the wear powder is collected in one place to form a lump. Debris, which are agglomerates of abrasion powder and lubricant, are attached to the slider 7 as shown in FIG. 29, as shown in FIG. 29, to impair the balance of the slider. Therefore, stable injury is difficult, and the head may collide with the magnetic disk surface. Further, as shown in FIG. 13, when the debris adhere to the inclined inclined surfaces 15s and 16s, the floating distance decreases, making it easier to contact the magnetic disk.

If the debris are attached to the magnetic disk surface, the magnetic disk surface and the slider will be in close contact during the CSS operation, and the load on the motor will be too high. Therefore, the magnetic disk becomes impossible to rotate, or when the slider is detached from the magnetic disk surface, it collides with the magnetic disk surface and the head is destroyed or the magnetic disk surface is damaged.

On the other hand, a magnetoresistive magnetic head (MR head) has been developed in order to meet the demand for large capacity and miniaturization of a magnetic disk device. In the case of this MR head, an MR element is formed in the head element portion 14 shown in FIG.

If the magnetic head is easily collided with the magnetic disk due to the low height of the magnetic head, or in the case of a floppy disk device using an MR head, or in the case of a magnetic tape device or a device having a high sliding frequency or sliding, the head is destroyed. It is necessary to prevent and increase durability. However, the conventional carbon film did not have sufficient wear resistance.

Therefore, a thick protective film having a thickness in the range of about 300 GPa to 400 GPa is required, but when the film becomes thick, the distance between the electron converting element and the recording layer increases, and the recording and reproduction characteristics deteriorate. For this reason, the thickness of a protective film needs to be reduced to about 100-200 GPa.

In addition, since the conventional carbon film has low insulation characteristics, a current directly applied to the MR element tends to leak to a magnetic disk or the like.

An object of the present invention is to eliminate the above problems of the prior art and to provide a magnetic recording medium having a high mechanical strength protective film and an adhesion between the protective film and a lubricant.

Another object of the spring invention is to increase the sliding property between the magnetic disk surface and the magnetic head.

A magnetic recording layer for storing the information of the present invention, and a carbon-based protective layer for preventing damage to the magnetic recording layer and a lubrication layer sequentially laminated on a nonmagnetic material. The carbon-based protective layer includes a lubrication layer side and a magnetic recording layer. A magnetic recording medium having different hydrogen content between sides is provided.

The present invention also provides a magnetic head made of a carbon-based protective layer laminated on at least the sliding surface side of a magnetic head slider on which an electron conversion element is mounted.

In addition, the present invention provides a magnetic recording medium for storing information and a magnetic head for recording and reproducing information on the recording medium, wherein the carbon-based protective film has a hydrogen content recording between the upper side on the surface side and the lower side on the initial layer. Provided is a magnetic recording apparatus formed in a sliding portion of a medium or a magnetic head.

In the magnetic recording medium according to the present invention, the carbon-based protective layer includes a first carbon film 51 on the side of the magnetic recording layer 4 having a hydrogen content of 20% (or a CH content of 0.4 × 1022 cm ^-3 ) or more, and a hydrogen content of 20 It is preferable that it is set as the 2nd carbon film 52 by the side of the lubricating layer 6 whose% (or CH amount is less than 0.4 * 1022cm <^-3> ). However, the term hydrogen content used in this specification indicates an average value.

The carbon-based protective layer is formed continuously so that the hydrogen content between the magnetic recording layer 4 side and the lubrication layer 6 changes gradually.

In the carbon protective layer, the magnetic recording layer 4 may have a hydrogen content of less than 20% (or CH content of 0.4 × 10 ²² cm ⁻³ ).

The lubricant constituting the lubrication layer 6 is a perfluoro polyether having a functional group. The functional group of this fluoropolyether is preferably a hydroxyl group or an aromatic group.

When producing a magnetic recording medium in which a magnetic recording layer storing information on a nonmagnetic substrate, and a carbon-based protective layer and a lubricating layer which prevents damage to the magnetic recording layer are sequentially formed, the lubricating layer is coated after the lubricating oil is coated. The magnetic recording medium according to the present invention can be produced by irradiating ultraviolet rays.

In the above-described method of the present invention, the lubricating layer preferably has a ratio defined by lubricating film thickness after solvent rinse / lubricating film thickness before rinsing is 0.4% or more.

In the magnetic recording medium of the present invention, as described above, since the magnetic recording layer 4 side of the carbon-based protective layer has a higher hydrogen content than the lubrication layer 6 side, mechanical properties such as impact resistance when the magnetic head collides with each other. Its high characteristics make it durable. On the other hand, the carbon-based protective layer on the lubricating layer 6 side has a low hydrogen content, so that the adhesion to the lubricant is strong and the lubrication action can be maintained for a long time.

The hydrogen content between the magnetic recording layer 4 side and the lubrication layer 6 side of the carbonaceous protective layer is formed continuously so that the bond strength inside the film of the carbonaceous protective layer is increased.

When a perfluoro polyether having a hydroxyl group or an aromatic functional group is used as a lubricant, the reaction time can be shortened because the chemical reactivity is high, and the time required for producing the magnetic recording medium can be shortened.

In addition, the bonding force between the lubricant and the carbon-based protective layer is increased.

According to the method of manufacturing the magnetic recording medium of the present invention, the chemical bonding force between the carbon protective film and the lubricant is promoted by irradiating ultraviolet rays after coating the lubricant on the carbon-based protective layer, so that the film shrinkage of the lubricant layer is suppressed, thereby improving the lubricating performance over a long period of time. I can keep it.

When the carbon-based protective layer in the magnetic recording medium irradiated with ultraviolet rays is a hydrogen-containing carbon film containing 20% or more of hydrogen or a CH content of 0.4 × 1022cm-3 or more, it has excellent mechanical properties and strong bonding force with the lubricant. Long life of lubricant

The carbon protective layer in the magnetic recording medium irradiated with ultraviolet rays becomes a protective layer excellent in mechanical properties when the magnetic content layer has a hydrogen content of 20% or more (or CH amount of 0.4 × 10 ² cm ⁻³ ). In addition, when the hydrogen content is less than 20% (or CH content of 0.4 × 102 ² cm ⁻³ ) on the lubricating layer side, the adhesion between the carbon-based protective layer and the lubricant is increased, and the life of the lubricating performance is long.

In addition, when the lubricating layer is a perfluoro polyether having a functional group, especially a perfluoro polyether having a hydroxyl group or an aromatic group as a functional group, the adhesion between the protective layer and the lubricant is increased, resulting in a long service life of the lubricating layer and a time required for manufacturing. It is shortened.

When the ratio defined by the lubrication film thickness after solvent rinse / lubrication film thickness before rinsing is 0.4% or more as a characteristic of the lubricating agent, the adhesion between the protective layer and the lubricating agent becomes strong, resulting in a long life lubricating layer.

Next, how the magnetic recording medium according to the present invention and its manufacturing method are actually specified will be described with reference to Examples.

Magnetic recording media

1A and 1B are model cross-sectional views showing embodiments of the magnetic recording medium according to the present invention in comparison with the magnetic recording medium according to the prior art. 2 shows the results of examining the adhesion with the lubrication layer 6 using the hydrogen content of both the carbon-based protective layers 5 and 51 as a parameter.

An evaluation sample of the prior art configuration shown in FIG. 1B is made of 1000 ns of Cr base layer 3, 500 ns CoCrTa recording layer 4 on a non-magnetic disc substrate made of Ni-P plating using a sputtering apparatus. Hydrogen-containing carbon protective film (5) was prepared by sequentially stacking 300 kPa. Next, on the hydrogen-containing carbon protective film 5, a purple puor polyether (trade name: manufactured by Phonbrin AM 3001 Monte Cassini Co) having an aromatic functional group was coated to a thickness of about 25 kPa.

The hydrogen content of the carbon protective film 5 was controlled by changing the mixing ratio of Ar and methane gas, and the adhesion of the lubricant was evaluated by the residual amount after rinsing with a fluorine-based solvent.

As is apparent from FIG. 2, when the hydrogen content in the carbon film 5 exceeds 33%, 52% and 54%, the lubricant having a functional group of about 25 kPa is left after the rinse layer having an initial film thickness of 25 kPa is rinsed. Even if it is, it turns out that the adhesiveness falls remarkably.

That is, the conventional carbon protective layer having a hydrogen content of 20% or more is excellent in mechanical properties but weak in adhesion with a lubricant.

FIG. 3 graphically shows the measurement results of FIG. 2 to show the relationship between the hydrogen content and the lubricant in the carbon-based protective layer. As is apparent from this graph, as the hydrogen content in the carbon-based protective layer decreases, the film thickness of the remaining lubricant after solvent rinsing tends to be thick, and the effect of lubricant adhesion is shown.

4 is the contents of the 16th Japanese Society for Applied Magnetics (1992) p. 529, where the horizontal axis represents hydrogen content (%) in the carbon membrane and the vertical axis represents the Vickers hardness of the membrane. As is apparent from this graph, when the hydrogen content is about 52% or less, the carbon film hardness increases as the hydrogen content increases, thereby improving wear resistance and sliding characteristics.

As shown in FIG. 1A, the magnetic recording medium according to the present invention was also coated with a Cr base layer 3 on a nonmagnetic disk plate 1 made of Ni-P plated aluminum using a sputtering apparatus, and a CoCrTa recording layer ( It is the same as the above-mentioned prior art until the lamination of 4) to 500 mW is sequentially performed.

However, in the embodiment of the present invention, the hydrogen-containing carbon protective film has a two-layer structure in which the hydrogen content is different. That is, the first carbon film 51 on the magnetic recording layer 4 side has a hydrogen content of 20% or more (or a CH content of 0.4 × 102 ² cm ⁻³ ) or more, and the second carbon film 52 on the lubricating layer 6 side has The hydrogen content is less than 20% (Fig. CH content is 0.4 × 1022 cm- ³ ).

The lubricating layer 6 is comprised with perfluoro polyether which has a functional group.

As apparent from FIG. 2, when the hydrogen content exceeds 20%, the adhesiveness of the lubricant is inferior, but the mechanical properties are excellent. On the other hand, in the case where the hydrogen content is less than 20%, that is, 16%, 10 kPa of lubricant remains after rinsing with a solvent, indicating that the adhesion is excellent.

Therefore, according to the laminated structure of the two layers of the present invention, the second carbon film 52 having excellent adhesion to the lubricant having a hydrogen content of less than 20% on the first carbon film 51 having a high hydrogen content of 20% or more and excellent mechanical properties. The two-layer structure in which the structure is laminated can realize a magnetic recording medium having good mechanical properties, excellent durability, and good adhesion with a lubricant, and which maintains a lubrication action, thereby satisfying both demands for durability and reliability.

As the thickness of the carbon-based protective layer increases, the distance between the magnetic head and the magnetic recording layer 4 increases, and the electron conversion efficiency decreases. Therefore, the thickness of the two-layer protective layers 51 and 52 combined is preferably 500 kPa or less. Do. The carbon-based protective layer 52 on the lubricating layer 6 side may have a film thickness such that the adhesion of the lubricant is increased, while the first carbon film 51 on the magnetic recording layer 4 side for enhancing mechanical strength. It is preferable to make a relatively thick film thickness.

Although the sputtering method which mixed methane gas was used as a formation method of a carbon type protective layer in this Example, what is necessary is just a mixed gas containing hydrogen, and CVD method etc. may be used instead of sputtering method. As the lubricant, the same effect can be obtained by using not only Phonbrin AM 3001 but also perfluoropolyether having other functional groups such as Phonbrin Zdol.

In the description of FIG. 1A, the hydrogen content is changed at the interface between the first carbon film 51 and the second carbon film 52, but the hydrogen content may be changed little by little. In this case, the hydrogen content on the magnetic recording layer 4 side is 20% or more, and the hydrogen content gradually decreases, so that the hydrogen content on the lubrication layer 6 side is 20% or less. As such, the adhesion strength within the carbon-based protective layer can be increased by removing the boundary as the carbon-based protective layer in which the hydrogen content gradually decreases.

The formation of the Cr base layer 3, the recording layer 4, and the carbon-based protective layers 51 and 52 in FIG. 1A causes the disk 1 to be supported by the substrate holder 8 as shown in FIG. 5A. In this state, the carrier 9 is passed through the front of the Cr target t1, the magnetic material target t2, and the hydrogen containing carbon targets t3 and t4 as shown in FIG. Lamination is carried out.

In FIG. 5B, the hydrogen-containing carbon target t3 in the sputtering chamber 10 is for forming the first hydrogen-containing carbon film 51 shown in FIG. 1, and the hydrogen-containing carbon target 51 in the sputtering chamber 10 so that the hydrogen content is 20% or more. The methane gas mixing ratio is set to 105 or more. The hydrogen-containing carbon target t4 in the next sputter chamber 11 is for forming the second hydrogen-containing carbon film 52 shown in FIG. 1 and the methane gas in the sputter chamber 11 so that the hydrogen content is less than 20%. The mixing ratio is set to less than 105.

If the partition hole 12 between both sputter chambers 10 and 11 is made as narrow as possible, the film formation in which hydrogen content differs between the 1st carbon film 51 and the 2nd carbon film 52 like FIG. 1a will be formed.

Manufacturing method of magnetic recording medium

6A and 6B are model cross sectional views showing an embodiment of a method of manufacturing a magnetic recording medium according to the present invention in comparison with the method of the prior art. FIG. 7 shows the results of examining the adhesion to the lubricant using the hydrogen content and the ultraviolet irradiation time of both carbon-based protective layers as parameters.

The evaluation sample of the prior art configuration shown in Fig. 6B is made of 1000 Å of Cr base layer 3 and CoCrTa recording layer 4 on a nonmagnetic disk plate 1 made of Ni-P plating aluminum using a sputtering apparatus. After 500 mW and 300 m3 of the hydrogen-containing carbon protective film 5 were sequentially laminated, a perfluoropolyether (trade name: manufactured by Phonbrin AM 3001 Monte Cassini Co) having an aromatic group on the hydrogen-containing carbon protective film 5 was approximately 25 mW. It was prepared by coating with a thickness. The hydrogen content of the carbon-based protective film 5 was controlled by changing the mixing ratio of Ar and methane gas, and evaluated by the residual amount after rinsing with a fluorine-based solvent.

As apparent from FIG. 7, when the hydrogen content in the carbon film 5 exceeds 33% and reaches 33%, the lubricant having a initial film thickness of 25 kPa remains only about 5 kPa after rinsing, so that even if the lubricant has a functional group, its adhesion is significantly lowered. It can be seen that.

On the contrary, as shown in FIG. 6A, a non-magnetic disk substrate 1 of Ni-P plating was formed by using a sputtering apparatus to sequentially stack 1000 Å of Cr base layer 3 and 500 Å of CoCrTa recording layer 4. When the ultraviolet ray is irradiated to the lubricant made of perfluoropolyether, the residual amount of lubricant is more than doubled even when the hydrogen content is 33%. As the ultraviolet rays, those having wavelength components of 185 nm and 254 nm were used.

8A to 8D show different measurement results. The horizontal axis represents the ultraviolet irradiation time, the vertical axis represents the thickness of the lubricating layer, and the diagonal region represents the film thickness remaining after the solvent rinse. 8A and 8B are examples of ordinary carbon in which the lubricating layer has a different film thickness but a hydrogen content of less than 20%. Even in this case, when the ultraviolet ray is irradiated for 30 seconds or more, the adhesion of the lubricant is improved.

8C and 8D are examples of diamond carbon having a hydrogen content of 20% or more although the film thickness of the lubricating layer is different from each other. Even in this case, when the ultraviolet rays are irradiated for 30 seconds or more, the adhesion of the lubricant is improved.

According to the above-described findings, the magnetic recording medium was irradiated with ultraviolet light after applying a lubricant to the magnetic recording medium having a carbon-based protective layer 5 having a hydrogen content of 20% or more as a fertilizer with the prior art to complete the magnetic recording medium. When the ratio of the lubricant thickness after the solvent rinse to the lubricant thickness before the rinse was used as an index of adhesion, the lubricant on the carbon film sputtered with the pure Ar atmosphere of the prior art was about 40%, and the magnetic recording medium of the present invention was also irradiated with ultraviolet rays. The ratio can be set to 40% or more. In addition, the film thickness of the carbon-based protective layer 5 is preferably 500 Å or less so that the distance between the magnetic head and the magnetic recording layer 4 increases so that the signal quality does not deteriorate.

When the second carbon film 52 having a hydrogen content of less than 20% is laminated on the first carbon film 51 having a hydrogen content of 20% or more on the magnetic recording layer side using the sputtering apparatus of FIG. 5 and coated with a lubricant, the ultraviolet ray is irradiated. The synergy of the adhesive and the adhesive force of the lubricant of the second carbon film 52 improves the adhesion between the lubricant and the hydrogen-containing carbon-based protective layer.

In the above embodiment, a sputtering method using a mixed gas of methane gas was used. However, mixed gas containing hydrogen may be sufficient, and CVD method etc. may be used instead of sputtering method. The same effect can be also obtained by using a perfluoropolyether having a different functional group such as Phonbirn Zidol as well as Phonbirn AM3001. The evaluation of the lubricant layer was made at a film thickness of 20 kPa or more, but a film thickness of 20 kPa or less is possible, and in particular, 10 g or less may be possible if the adhesiveness of the lubricant is improved by the present invention.

According to the magnetic recording medium of the present invention, the carbon-based protective layer has a structure in which the hydrogen content of the magnetic recording layer 4 side is relatively higher than that of the lubricating layer 6 side. Therefore, the magnetic recording layer has high mechanical properties such as impact resistance and excellent durability. In addition, since the hydrogen content on the lubrication layer 6 side is small and the adhesion between the carbon-based protective layer and the lubricant is improved, the lubrication action can be maintained for a long time. Therefore, both the mechanical strength and the adhesion of the lubricant as the protective layer can satisfy both requirements, so that a highly reliable magnetic recording medium can be realized in the long term.

Since the adhesion between the carbon-based protective film and the lubricating layer is improved, the film shrinkage of the lubricating film can be suppressed. Therefore, the film thickness of the lubricating layer or the carbon-based protective layer can be reduced by the amount in consideration of the film alignment. As a result, the distance between the magnetic head and the magnetic recording layer can be shortened, the electronic conversion characteristics are improved, the signal quality is improved, and the film of the magnetic recording medium can be reduced.

If the carbon-based protective layer is formed continuously so that the hydrogen content gradually changes between the magnetic recording layer side and the lubricating layer side, the film bonding force inside the carbon-based protective film also increases.

According to the method of manufacturing a magnetic recording medium irradiating ultraviolet rays after coating of lubricant, even if a carbon-based protective layer having a hydrogen content of 20% or more having excellent mechanical properties is used, the chemical bond between the lubricant and the carbon-based protective layer is promoted, thereby reducing the film of the lubricant layer. As the phenomenon is suppressed, a highly reliable magnetic recording medium having a long lubricating effect and excellent durability can be realized as in the invention of the magnetic recording medium.

According to the magnetic head according to the second aspect of the present invention, the carbon-based protective layer has a first carbon film 271 and a lubricating layer 28 having a hydrogen content of 20% or more (or CH content of 0.4 × 1022 cm ^-3 ). It is preferable that the second carbon film 272 has a hydrogen content of less than 20% (or CH amount of 0.4x10 ²² cm ^-3 ) on the side.

This hydrogen-containing carbon film is formed continuously so that the hydrogen content gradually changes from the magnetic head slider 7 side to the lubricating layer 28 side.

Or hydrogen-containing carbon film has a hydrogen content of less than 20% of the magnetic head slider side (or CH amount of 0.4 × 1022㎝ ^-3) over 205 the hydrogen content of the lubricating layer 28 side (or the amount of 0.4 × CH 1022㎝ ^-3) You can also do

The lubricating layer 28 is preferably made of perfluoropolyether having functional groups such as hydroxyl group and aromatic group.

As illustrated in FIG. 9C, the magnetic head according to the present invention is coated with the lubrication layer when the magnetic head is formed by sequentially stacking the protective film 27 and the lubrication layer 28 on which the electron conversion element is mounted. Can be produced by irradiation.

In the production method according to the present invention, the lubrication layer 28 side may be formed so that the hydrogen content is relatively smaller than that of the magnetic head slider 7 side, and the ultraviolet ray may be irradiated after coating the lubrication layer. After UV irradiation, the solvent is rinsed.

As described above, the magnetic head according to the present invention has a structure in which a carbon protective layer 270 is laminated on at least the sliding surface side of the magnetic head slider, and a lubricant layer is formed on the protective layer 27. Since the carbon-based protective layer 27 having mechanical properties is opposed to the magnetic disk surface, it is possible to prevent damage to the sliding surface of the slider such as head fracture, etc. Also, since the adhesive force between the carbon-based protective layer and the lubricant is strong, wear powder is also applied. Rarely occurs

When using a carbon-based protective layer on the sliding surface of a slider made of a hydrogen-containing carbon film having a hydrogen content of 205 or more and a CH content of 0.4 × 1022 cm ^-3 or more, the mechanical properties such as hardness and impact resistance are excellent, resulting in no head fracture. And since the lubricant is attached to the surface, the slideability to the magnetic disk surface is increased.

In addition, since the slider 7 side of the hydrogen-containing carbon film has more hydrogen content than the lubrication layer 28 side, mechanical properties such as impact resistance when the magnetic head collides with the magnetic disk surface are high, so that the head fracture does not occur and the durability is high. outstanding.

On the other hand, since the hydrogen-containing carbon film on the lubricating layer 28 side has a low hydrogen content, the adhesive force of a lubricant such as a perfluoropolyether having a functional group is very strong, so that the lubrication action can be maintained between them. In this way, the magnetic head according to the present invention can satisfy both the mechanical strength as a protective layer and the adhesion of a lubricant for lubricating the magnetic disk when contacted with the magnetic disk.

If the film is continuously formed such that the hydrogen content between the slider 7 side and the lubrication layer 28 side of the hydrogen-containing carbon film is gradually changed, the bond strength in the film of the hydrogen-containing carbon film is increased, thereby improving the durability of the magnetic head.

In the case of using perfluoropolyether having a hydroxyl group or an aromatic functional group as a lubricant, since the chemical reactivity is high, the reaction time can be shortened and the time required for manufacturing the magnetic head can be shortened. In addition, the bonding force between the lubricant and the carbon-based protective layer is also increased, the service life of the lubricating layer of the slider sliding surface is long.

Irradiating ultraviolet rays after coating the lubrication layer 28 on the carbon-based protective layer 27 of the magnetic head slider promotes the chemical bonding force between the carbon-based protective film 27 and the lubricating layer 28. Membrane streak can be suppressed to maintain lubrication performance over a long period of time and to suppress the occurrence of debris due to wear powder.

In addition, if the solvent rinsing treatment after UV irradiation, only a lubricant having strong chemical adsorption power with the carbon-based protective layer remains, so that the lubrication action can be maintained for a longer period of time.

Next, how the magnetic head of the present invention and its manufacturing method are actually specified will be described with reference to Examples.

About magnetic head

9A is a sectional view showing the main parts of a magnetic head according to the first embodiment of the present invention. In the magnetic head slider 7 equipped with the electron conversion element 14, the carbon-based protective layer 27 is laminated at least on the sliding surface 7a side, and the lubricant layer 28 is laminated on the protective layer 27. It is.

The carbon-based protective layer 27 and the lubrication layer 28 need only be formed on a surface which may come into contact with the magnetic disk D on the slider surface, that is, at least on the sliding surface side of the slider. The carbon-based protective layer 27 is preferably formed by sputtering, and the lubricant layer 28 is preferably formed by a coating method.

As a method of laminating the carbon-based protective layer 27 and the lubricating layer 28 on the sliding surface of the slider, one may be laminated one by one after completing the magnetic head as shown in FIG. One or more pieces may be attached to the jig to sputter the carbon protective film 27. Coating of the lubricant may be carried out in a block state or may be applied after completion. As shown in Fig. 15B, when R chamfering, a plurality of sliders are attached to the jig after R chamfering, and the carbon protective layer 27 and the lubrication layer 28 are laminated at a time.

When the carbon-based protective layer 27 in the slider shown in Fig. 9a is composed of a hydrogen-containing carbon film containing 20% or more of hydrogen or a CH amount of 0.4 × 10 ²² cm ^-3 or more, the hardness, impact resistance, etc. Because of its excellent mechanical properties, it does not cause head breakage. In addition, since lubricant is attached to the surface, the sliding property with the magnetic disk surface is improved. In addition, the present invention can be applied to various sliders having different slider shapes and materials.

Evaluation of the magnetic head of the present invention

Next, the operation and effect of laminating the carbon-based protective layer 27 and the lubricating layer 28 on the sliding surface of the slider as in the present invention will be described based on Examples. 10A and 10B are magnetic head sliders prepared for the evaluation of actions and effects. In FIG. 10A, the carbon-based protective layer 27 is laminated on at least the sliding surface 27a side of the magnetic slider 7, and the lubricant layer 28 is formed on this protective layer 27. As shown in FIG.

In FIG. 10B, a first carbon film 271 having a hydrogen content of 20% (or CH content of 0.4 × 102 ² cm ⁻³ ) or more is formed on the magnetic head slider 7 side, and 20% hydrogen content is formed on the first carbon film 271. The second carbon film 272 (or less than 0.4 × 102 ² cm ⁻³ ) is formed to form a lubricating layer 28.

Thus, two kinds of evaluation samples having different layer structures were prepared, and the adhesion to the lubricating layer 28 was investigated using the hydrogen content of the carbon-based protective layers 271 and 272 as the parameters. The results are shown in FIG.

An evaluation sample composed of one layer of the carbon-based protective layer shown in FIG. 10A was formed by sputtering a hydrogen-containing carbon protective film 27 on a substrate made of Al 2 O 3 TiC by 500 Å sputtering, followed by a perflow having an aromatic functional group thereon. Oro polyether (trade name: manufactured by Phonbrin AM3001 Monte Cassini Co.) was coated to a thickness of about 25 mm 3 and completed. The hydrogen content of the carbon-based protective film 27 was controlled by changing the mixing ratio of Ar and methane gas, and the adhesion of the lubricant was evaluated by the residual amount after rinsing with a fluorine-based solvent.

As evident from FIG. 2, when the hydrogen content in the hydrogen-containing carbon film 27 exceeds 20% and reaches 33%, 52%, and 54%, a lubricating layer having an initial film thickness of 25 kPa remains only 5 kPa after rinsing, and thus has a functional group. Even if it is a lubricant, it turns out that the adhesiveness falls remarkably. That is, the carbon-based protective layer having a hydrogen content of 20% or more is excellent in mechanical properties but weak in adhesion to the lubricant.

Also, as is apparent from FIG. 3, as the hydrogen content in the carbon-based protective layer decreases, the film thickness of the residual lubricant after solvent rinsing tends to be thick, and the effect of adhesive adhesion is exhibited.

As is apparent from FIG. 4, when the hydrogen content is about 52% or less, the carbon film hardness increases as the hydrogen content increases, thereby improving wear resistance and impact resistance.

As shown in FIG. 10B, the magnetic head slider including the carbon-based protective layer composed of two layers of the first carbon film 271 and the second carbon film 272 also has a hydrogen content on the Al ₂ O ₃ TiC substrate by using a sputtering apparatus. A first carbon film 271 having 20% (or CH amount of 0.4 × 1022 cm ⁻³ ) or more is formed, and a second carbon film of less than 20% of hydrogen content (or CH amount of 0.4 × 1022 cm ⁻³ ) is formed on the first carbon film 271. 272 is formed to coat perfluoro polyether having a functional group as the lubricating layer 28.

As apparent from FIG. 2, when the hydrogen content exceeds 20%, the adhesiveness of the lubricant is inferior, but the mechanical properties are excellent. On the other hand, when the hydrogen content is less than 20%, that is, 16%, it can be seen that even after rinsing with a solvent, a lubricant of 10 kPa remains, resulting in excellent adhesion.

Therefore, when the hydrogen content is 20% or more and the hydrogen content is less than 20% on the first carbon film 271, which has excellent mechanical properties, the second carbon film 272 having excellent adhesion to lubricant is laminated. It is excellent in durability, excellent in adhesion with a lubricant, and can realize a magnetic head having a long lubrication action, thereby realizing both demands for durability and reliability.

As the carbon-based protective layer becomes thicker, the distance between the head element portion 14 of the magnetic head and the magnetic disk D increases, so that the electron conversion efficiency is lowered. Therefore, the film thickness of the two protective layers 271 and 272 is 500 kV. It is preferable to set it as follows. The carbon-based protective layer 272 on the lubricant side may have a film thickness such that adhesion of the lubricant is increased, and the slider side and the carbon-based protective film 271 for increasing the mechanical strength are preferably formed thicker.

In this embodiment, a sputtering method in which methane gas is mixed is used as a method of forming a carbon-based protective layer, but a mixed gas containing hydrogen may be used, and a CVD method or the like may be used instead of the sputtering method. The same effect is also obtained when the lubricant is used not only Phonbrin AM3001 but also perfluoropolyether having other functional groups such as Phonbrin Zdol.

In the description of FIG. 10B, the hydrogen content is changed at the interface between the first carbon film 271 and the second carbon film 272, but the hydrogen content may be changed little by little. In this case, the hydrogen content on the slider 7 side is made 20% or more, and the hydrogen content on the lubrication layer 28 side is made 20% or less by gradually reducing the hydrogen content.

As described above, the adhesion strength inside the carbon-based protective layer can be increased by removing the boundary as a carbon-based protective layer in which the hydrogen content gradually decreases. Therefore, it is also effective to continuously change the hydrogen content so that the boundary between the carbon-based protective layers 271 and 272 on the slider sliding surface in the embodiment shown in FIG. 9B disappears.

As shown in FIG. 10B, in order to form the second carbon film 272 on the first carbon film 271, as shown in FIG. 11A, the jig 34 having the slider block attached to the jig holder 29 is supported. In this state, the carrier 30 is sequentially stacked on the sliding surface side of the slider block by passing the front of the Cr target t1, the magnetic material target t2, and the hydrogen containing targets t3 and t4.

In FIG. 11B, the hydrogen-containing target t3 in the sputter chamber 31 is for forming the first hydrogen-containing carbon film 271 in FIG. 10B, and the methane gas mixing ratio in the sputter chamber 31 is set to 10% or more. do. The hydrogen-containing target t4 in the next sputtering chamber 32 is for forming the second hydrogen-containing carbon film 272 in FIG. 10B, and the methane gas mixing ratio in the sputtering chamber 32 is set to less than 10%.

If the partition structure 33 between both sputter chambers 31 and 32 is made as narrow as possible, a thin film formation with a different hydrogen content is formed between the first carbon film 271 and the second carbon film 272 as shown in FIG. 10B.

About manufacturing method of magnetic head

Next, the manufacturing method of the magnetic head by ultraviolet irradiation is demonstrated. In the magnetic head of the present invention, as shown in FIG. 9C, the carbon-based protective layer 27 and the lubricating layer 28 are sequentially stacked on at least the slider surface side of the magnetic head slider 7 having the electron conversion element 14 mounted thereon. When manufacturing one magnetic head, this lubrication layer 28 is coated, and then it is completed by irradiating an ultraviolet-ray. Thus, in order to evaluate the effect | action and effect by ultraviolet irradiation, the evaluation magnetic heads like FIG. 12A and FIG. 12B were manufactured.

FIG. 12A shows a magnetic head irradiated with ultraviolet rays after coating the lubricant with the carbon-based protective film 27 formed on the slider 7 FIG. 12B shows a magnetic head without irradiating ultraviolet rays after the lubricant coating. Adhesion with a lubricant is investigated using the hydrogen content and ultraviolet irradiation time of both carbon-based protective films 27 as parameters, and the result is shown in FIG.

An evaluation sample not irradiated with ultraviolet rays shown in FIG. 12B was formed by sequentially stacking a hydrogen-containing carbon protective film 27 at 500 kPa on an Al ₂ O ₃ TiC substrate using a sputtering apparatus, and then on the carbon protective film 27. Perfluoro polyether (trade name: Phonbrin AM3001, manufactured by Monte Cassini Co.) having an aromatic functional group was coated to a thickness of about 25 mm 3. The hydrogen content of the carbon protective film 27 was controlled by varying the mixing ratio of Ar and methane gas, and the adhesion of the lubricant was evaluated by the residual amount after rinsing with a fluorine-based solvent.

As is apparent from FIG. 7, when the hydrogen content in the carbon film 27 exceeds 20% and reaches 33%, in the absence of ultraviolet irradiation, the lubricant having an initial film thickness of 25 kV remains only about 5 kV after rinsing, even if it is a lubricant having a functional group. It can be seen that the adhesion is significantly lowered.

On the contrary, as shown in FIG. 12A, a hydrogen-containing carbon-based protective film 27 was formed on the Al ₂ O ₃ TiC substrate by 500 kPa and coated with a lubricant made of perfluoropolyether to irradiate ultraviolet light for 50 seconds and 60 degrees. In the first embodiment, even in the case where the hydrogen content is 33% as shown in FIG. 7, the residual amount of the lubricant is more than doubled. When the ratio of the lubricating film thickness after the solvent rinse / the lubricating film thickness before the rinse is used as an index of adhesion of the lubricant, the lubricant on the conventional carbon film having a hydrogen content of less than 20% as shown in Fig. 7 is about 40%, The evaluation magnetic head shown in Fig. 2 can also set the ratio to 40% or more under the conditions of ultraviolet irradiation. As ultraviolet rays, those having an illuminance of 8mw and a wavelength component of 185nm and 254nm were used.

The relationship between the irradiation time and the lubrication layer thickness is the same as shown in FIG.

Based on the above findings, the inventors of the present invention form the ordinary carbon protective layer 27 having a hydrogen content of less than 20% on the sliding surface of the slider as shown in FIG. Completed. As apparent from the results of FIG. 7, FIG. 8A, and FIG. 8B, in the case of irradiating ultraviolet rays after coating the lubricant on the carbon film, the adhesion of the lubricant is further improved, and thus the life of the lubrication action is longer.

On the other hand, as apparent from the results of FIGS. 7, 8c, and 8d, the adhesiveness of the lubricant is also improved when the ultraviolet ray is coated by applying a lubricant to a hydrogen-containing carbon film having a hydrogen content of 20% or more. When sputtering the hydrogen-containing carbon film 27 having a hydrogen content of 20% or more and irradiating ultraviolet rays after coating the lubricant, the adhesion of the lubricant is not only improved, but the hydrogen-containing carbon film having a hydrogen content of 20% or more is high in mechanical strength, so that A magnetic head excellent in impact resistance is obtained.

A second carbon film 272 having a hydrogen content of less than 20% and less than 20% is laminated on the first carbon film 271 having a hydrogen content of 20% or more by using the sputtering apparatus shown in FIGS. 11A and 11B and irradiated with ultraviolet rays. The lower surface irradiates with ultraviolet light and the lubricant adhesion action of the second carbon film 272 having a small hydrogen content increases synergistically, thereby improving the adhesion between the lubricant and the hydrogen-containing carbon protective layer. Therefore, if the first carbon film having a high hydrogen content and the second carbon film having a low hydrogen content are formed on the sliding surface of the slider and irradiated with ultraviolet rays after coating the lubricant, the adhesion of the lubricant can be improved.

When manufacturing the sample for evaluation, sputtering method in which methane gas is mixed is used as a method of forming a carbon-based protective layer, but a mixed gas containing hydrogen may be used, and CVD or the like may be used instead of the sputtering method. The same results are also obtained when the lubricant is used not only Phonbrin AM3001 but also perfluoro polyether having other functional groups such as Phonbrin Zdon. The lubricant layer was evaluated for a film thickness of 20 kPa or more, but a film thickness of 20 kPa or less is also possible. In particular, if the adhesion is high according to the present invention, 10 kPa or less may be possible.

Like the magnetic head of the present invention, a carbon protective layer of a material having a hydrogen content of 20% or more or at least a hydrogen content between the slider side and the lubrication layer side is formed on at least the sliding surface of the magnetic head slider, and a layer of lubricant is laminated thereon. According to the configuration, since the carbon-based protective layer having excellent mechanical properties opposes the surface of the magnetic recording medium, damage to the slider sliding surface such as head breakage can be prevented. In addition, since the adhesion between the carbon-based protective layer and the lubrication layer is high, wear powder or debris is less likely to occur, and even if debris is generated, it does not adhere to the sliding surface of the slider.

According to the method of manufacturing a magnetic head which irradiates ultraviolet rays after coating a lubricating layer on the carbon-based protective layer of the magnetic head slider, the chemical bonding force between the carbon-based protective film and the lubricant is promoted, the film shrinkage of the lubricant on the surface of the core slider is suppressed, The lubrication performance can be maintained throughout the process, and the occurrence of debris due to wear powder can be suppressed.

As described above, the present invention has developed a hydrogen-containing carbon film having high wear resistance in order to improve wear resistance of a magnetic recording medium. However, the inventors' continuous investigation found that the insulation resistance of the hydrogen-containing carbon layer is sometimes insufficient for the MR head.

According to the third aspect of the present invention, a carbon protective film used for a recording medium or a sliding surface of a magnetic head in a magnetic disk device, a floppy disk device, a magnetic tape device, or the like, and hydrogen-containing carbon capable of satisfying both high resistance and high hardness. It is possible to realize a protective film and to provide a safe quality one.

In the magnetic recording apparatus according to the third aspect of the present invention, the hydrogen content in the lower portion of the film is preferably 20% or more, and the hydrogen content in the upper portion is less than 20%.

That is, in the apparatus according to the present invention, the hydrogen concentration of the carbon protective film is high under the protective film which is the initial layer. Therefore, the resistance value is increased, which can have a remarkable effect on the MR head and the magnetic disk for the MR head. On the contrary, since the upper portion of the protective film on the surface side has a low hydrogen concentration, the wear resistance of the upper protective film on the sliding surface is improved, thereby improving durability. As a result, it becomes a carbon protective film which can satisfy both abrasion resistance and high resistance. This effect is especially noticeable when the hydrogen content under the protective film is 20% or more and the hydrogen content above the protective film is less than 20%.

In the case of forming a carbon protective film used as a recording medium or a sliding portion of the magnetic head of the recording apparatus, first, the carbon protective film is formed in an atmosphere containing hydrogen so that the hydrogen concentration in the film is increased at the lower part of the protective film, This carbon protective film is formed by controlling the partial pressure of hydrogen so as to be lowered in the upper protective film layer.

When the hydrogen partial pressure is controlled in an atmosphere containing hydrogen, the hydrogen concentration in the film is formed so as to be high in the lower portion (Cm1) of the protective film and low in the protective film lower portion (Cm2) on the surface side.

The atmosphere containing hydrogen used for forming the carbon film is preferably an inert gas atmosphere containing CmHn. In this case, initially formed in a CmHn- inert gas atmosphere containing 20% or more of CmHn content to form a lower protective layer (Cm1), which is an initial layer, and then formed in a CmHn- inert gas atmosphere having a CmHn content of less than 20%, to form a protective film on the surface side. The upper portion Cm2 is formed. In this way, a carbon protective film having a different hydrogen content between the upper part and the lower part can be easily manufactured.

Alternatively, when the carbon protective film is formed, it is initially formed in a CmHn-inert gas atmosphere containing 20% or more of CmHn, thereby forming a lower portion of the protective film (Cm1), which is an initial layer, followed by a CmHn- of less than 10-20%. It may be formed in an inert gas atmosphere to form the protective film upper portion Cm 2 on the surface side.

The CmHn-inert gas forming the carbon protective film may initially be a CmHn-inert gas atmosphere containing 20% or more of CmHn, and may gradually increase the inert gas during film formation.

When changing the CmHn concentration in the CmHn-inert gas atmosphere in the upper and lower parts of the carbon protective film, the carbon film having different hydrogen concentration in the upper and lower parts is initially a CmHn-inert gas atmosphere containing 20% or more of CmHn, and gradually increases the inert gas during film formation. This can be easily achieved by diluting CmHn.

The carbon protective film used for the recording medium or the sliding portion of the magnetic head of the recording apparatus according to the present invention is formed in a CmHn inert gas atmosphere, and a lower protective film Cm1 is formed in a CmHn-inert gas atmosphere containing 20% or more of CmHn content. According to the method of forming the upper portion of the protective film Cm2 by applying a negative direct current bias to the substrate on which the carbon protective film is formed, the hydrogen concentration in the upper and lower portions of the carbon protective film can be changed without controlling the CmHn concentration.

When forming the carbon protective film, the substrate temperature is set to 150 ° C. or lower and a film is formed by sputtering or the like at low temperature. According to this method, the bond of carbon atoms becomes diamond-like, the film strength is improved, and the film resistance is also increased.

When the carbon protective film is formed, it is formed by the same device as the base layer film and the magnetic film, and the method is allowed to stand in a high pressure inert gas atmosphere for a predetermined time before cooling the carbon protective film. Is improved.

In addition, by forming a carbon protective film in an atmosphere containing hydrogen and applying a negative DC voltage to the substrate side where the carbon protective film is formed, the film characteristic (Id / Ig) with respect to the amount of hydrogen (hydrogen partial pressure) can be kept low and constant. .

In general, carbon films formed in an atmosphere having a high hydrogen partial pressure have organic bonds and increase Id / Ig (decrease in film hardness). In this case, when a negative bias voltage is applied to the substrate side, the energy state of the sputter particles may be activated to improve the binding property on the substrate.

For this reason, the carbon film which has high binding property (diamond nature) can be formed, and organic materialization can be suppressed. Therefore, it is possible to realize the formation of a carbon protective film having a low Id / Ig irrespective of the hydrogen partial pressure, so that the protective film can be stably manufactured.

The film resistance tends to increase as the amount of hydrogen (CH ₄ amount) increases regardless of the bias voltage. This is because the film resistance depends on the amount of hydrogen in the film and the amount of hydrogen in the film depends only on the film forming atmosphere, so that a high film resistance is obtained even when a bias voltage is applied. In other words, by applying a bias under high hydrogen partial pressure, a protective film having high hardness and high resistance is realized.

For the above reason, it is possible to stably produce a high hardness hydrogen-containing carbon film irrespective of fluctuations in hydrogen partial pressure. Moreover, fluctuations in characteristics in the magnetic disk surface can be suppressed, and the quality thereof can be improved. In addition, corresponding to the thinning of the protective film, a high hardness and high resistance protective film can be realized. As a result, a large capacity and high quality of the magnetic disk device can be realized.

Hydrogen partial pressure is easily controlled by forming a lower portion of the protective film in a CmHn-inert gas atmosphere containing 20% or more of CmHn content using a CmHn-inert gas as an atmosphere containing hydrogen to lower the film characteristics (Id / Ig). I can keep it.

When the substrate bias during the formation of the carbon protective film is in the range of -50 to -300 V, as shown in FIGS. 22 and 27, the increase in Id / Ig can be suppressed even if the CmHn concentration is increased, thereby improving durability. .

When the carbon protective film is formed in a CmHn-inert gas atmosphere, as the amount of hydrogen increases, the substrate bias voltage is lowered, so that power consumption input to the substrate can be kept constant. In this way, the effect of ion assist by the substrate bias can be optimized to form a high quality protective film in any amount of hydrogen.

When forming a carbon protective film in a CmHn-inert gas atmosphere, the higher the amount of hydrogen, the weaker the vertical magnetic field of the target surface, and the increase in Id / Ig can be suppressed by a method other than the substrate bias, thereby improving durability.

By setting the substrate bias voltage in the range of -50 to -150V and the substrate temperature at the time of forming the carbon protective film at a low temperature of 150 ° C or less, Id / Ig due to Raman spectroscopy decreases, the film strength is improved and the film resistance is also increased.

By suppressing the current value flowing to the substrate side at 0.6 A when the substrate bias voltage is applied, damage to the formed carbon protective film can be suppressed.

When the substrate bias voltage is applied in a pulsed cycle at regular intervals, the control when the substrate bias voltage is applied becomes easy.

When the hydrogen-containing carbon protective film is formed between the magnetic disk and the magnetic head, the substrate bias voltage at the time of forming the carbon protective film of the magnetic disk is set lower than the carbon protective film of the magnetic head, so that the wear characteristics of the carbon protective film of the magnetic disk are reduced. It can be made better than the carbon protective film. In this way, the carbon protective film of the magnetic disk can be made thinner, so that a medium having excellent recording and reproducing characteristics can be processed.

When the carbon protective film is formed, the carbon protective film can be formed in the same device as the base layer film and the magnetic film forming device, so that the film forming device can be used in common. Therefore, heat is easily transferred from the substrate, thereby improving the cooling effect and improving the film performance due to low temperature film formation.

Next, how the carbon protective film and the method of manufacturing the magnetic disk device according to the present invention are actually specified will be described with reference to Examples.

Example of Carbon Protective Film for Magnetic Disk Device

16 is a cross-sectional view showing the basic structure of the carbon protective film of the magnetic recording apparatus according to the present invention.

17 is a sectional view of a magnetic disk to which a carbon protective film according to the present invention is applied.

On the Ni-P plated layer 2 formed on the surface of the substrate 1 made of a nonmagnetic material such as aluminum, 500 to 3000 GPa of the Cr base layer 3 and about 300 to 500 GPa of the recording layer 4 of the CoCr alloy are Each is formed by sputtering in an Ar atmosphere. On the recording layer 4, a hydrogen-containing carbon protective film Cm of about 100 to 300 mV is formed by sputtering in a CH4-Ar atmosphere.

Here, the carbon protective film is initially formed in a CH 4 -Ar atmosphere containing about 35% CH4, and then adjusted to about 15% by increasing the net Ar gas in the same atmosphere. The base layer 3 and the recording layer 4 were formed under a gas pressure of 5 to 30 mTorr and a substrate temperature of about 150 to 260 ° C, and a carbon protective film Cm under a gas pressure of 5 to 30 mTorr and a substrate temperature of about 150 to 200 ° C. .

As described above, when forming the carbon protective film Cm, the concentration of CH 4 gas in the CH ₄ -Ar atmosphere is about 35% at the beginning of forming the lower portion of the protective film, and when forming the upper portion of the protective film, the amount of CH ₄ is increased by increasing the net Ar gas amount. When the concentration is about 15%, the hydrogen concentration in the film of the hydrogen-containing carbon protective film becomes higher at the lower portion of the protective film and lowers at the upper portion of the protective film.

As a result of testing the relationship between the hydrogen concentration and the abrasion resistance, the hydrogen / carbon ratio in the hydrogen-containing carbon protective film was 0.45893, that is, when the hydrogen concentration was too high, the wear resistance was low at 45.7% and abrasion at 135 kPa, whereas the hydrogen / carbon ratio was 0.38142. In this case, the wear resistance improved to 75.2% and the wear decreased to 62Å. Therefore, it is effective to lower the hydrogen concentration in the magnetic head and the upper portion of the protective film that slides compared to the lower portion of the protective film.

Next, the relationship between the amount of hydrogen (hydrogen partial pressure), the wear resistance and the resistance value during the formation of the hydrogen-containing carbon protective film is verified. 18 is an experimental result showing the relationship between the amount of hydrogen in the CH ₄ -Ar atmosphere during the film formation and Raman spectroscopy, the horizontal axis is CH ₄ gas concentration (%), and the vertical axis is Id / Ig due to Raman spectroscopy.

Here, Id / Ig by Raman spectroscopy is a guideline for indicating the bondability of carbon atoms, and it is thought that the smaller the value, the greater the amount of diamondoid bonds. In other words, the smaller the Id / Ig, the higher the hardness and excellent wear resistance.

According to the experimental results of FIG. 18, the concentration of CH ₄ gas in the CH ₄ -Ar atmosphere is about 15-25%, the Id / Ig of Raman spectroscopy is low and the film hardness is high. In this case, it is observed that the film hardness decreases. 19 is an experimental result showing the relationship between the amount of hydrogen in the CH ₄ -Ar atmosphere and the film resistance value during film formation, the abscissa being the CH ₄ gas concentration (%), and the ordinate being the resistance value. As is apparent from the graph, it is observed that the film resistance increases with the increase in the amount of hydrogen CH4 during film formation. As described above, the film resistance increases with the increase in the amount of hydrogen. However, as apparent from FIG. 18, the film hardness decreases when the amount of CH ₄ exceeds about 25%. Therefore, it is difficult to form a protective film capable of satisfying both high resistance and wear resistance. I think.

However, according to the present invention, the hydrogen partial pressure is produced so that the hydrogen concentration at the time of forming the carbon protective film is high when the lower portion of the protective film is formed and lower when the upper portion of the protective film is formed, thereby increasing the hydrogen concentration in the film of the carbon protective film at the lower portion of the protective film. Lower it at the top.

As a result, the wear resistance is low in the lower portion of the hydrogen-containing carbon protective film, but the resistance value is high, and thus high resistance can be realized to the extent that it can be applied to the MR head.In the upper portion of the protective film on which the magnetic head slides, the resistance is low, but the wear resistance is high, so the durability is improved. do. As described above, according to the present invention, the hydrogen concentration in the carbon protective film is made higher than the upper part to satisfy both high resistance and wear resistance.

The hydrogen-containing carbon protective film may be three or more layers, and the formation conditions may be gradually changed to form a carbon protective film having different hydrogen concentrations continuously.

Example of Manufacturing Method of Carbon Protective Film by Hydrogen Concentration Control

When changing the hydrogen concentration at the upper side and the lower side of the carbon protective film as described above, the upper hydrogen (CH ₄ gas) concentration is set to the best wear resistance range, and the lower hydrogen (CH ₄ gas) concentration is lower than that at the upper formation. By setting it high, both high resistance and abrasion resistance can be made into the optimum value.

That is, the quantity of CH ₄ -Ar atmosphere of CH ₄ at the time of forming the protective film in the lower portion when the amount of CH ₄ CH ₄ -Ar atmosphere at the time of forming the protective film in the top 10 to 20% to 20% . In this case, since the hydrogen content of the upper part of the protective film and the lower part of the protective film needs to be changed, it is preferable that the difference in the amount of CH 4 between forming the upper part of the protective film and the lower part of the protective film is large. In addition, reducing the amount of hydrogen at the time of forming the upper portion of the protective film can be easily realized by gradually increasing the Ar gas.

20A and 20B show another embodiment of the method of the present invention. FIG. 20A is a side view of the substrate holder and FIG. 20B is a front view. In this embodiment, when forming the upper portion of the protective film, a negative DC voltage is applied to the substrate side without controlling the CH ₄ gas concentration in the CH ₄ -Ar atmosphere.

That is, when sputtering the carbon protective film, the substrate 1m on which the magnetic film is formed is supported on the substrate holder 17 to drive the substrate holder 17 on the metal rails 18 between the carbon targets 20 and 20 on both sides. The DC rail 19 is connected to the metal rail 18.

CH ₄ amount of a CH ₄ forming the protective film in the lower -Ar atmosphere and then in forming the upper protective film by applying a negative voltage to the metal rail (18) of the metal wheel 21, the substrate holder 17 containing at least 20% A negative voltage is applied to each substrate 1m through the through. In this way, when a negative substrate bias voltage is applied to the substrate 1m at the time of sputtering film formation, the amount of hydrogen adhering to the substrate 1m is reduced, and the effect of substantially lowering the CH ₄ gas concentration is obtained.

Therefore, in the case of forming the upper portion of the protective film in the hydrogen atmosphere at the same concentration as the lower portion of the protective film, it is only necessary to apply a negative DC bias to the substrate side when the film thickness reaches a certain thickness or more. Therefore, it is necessary to change the hydrogen partial pressure when forming both carbon protective films. No control is simplified.

In addition, the film performance can be improved by setting the substrate temperature at the time of forming the hydrogen-containing carbon protective film at a low temperature of about 150 ° C or lower. In other words, the lower the substrate temperature, the more sputtered films are formed at lower temperatures, so that the Id / Ig due to Raman spectroscopy decreases, so that the bonds of carbon atoms are diamond-shaped and the film strength is improved. In addition, both the film resistance and the wear resistance are improved. However, if the film formation temperature is low, the adhesion between the film and the substrate is lowered, so that the adhesion is secured and the temperature is low in the range in which the film strength can be increased.

As mentioned above, in order to make board | substrate temperature low, it is effective to provide the sputtering apparatus with the cooling chamber which enables cooling before forming a protective film. For example, when forming a hydrogen-containing carbon protective film, a sputtering apparatus is shared by forming a carbon protective film in the same apparatus as the apparatus which forms a base film and a magnetic film.

Then, it is allowed to stand for a certain time in a high pressure inert gas atmosphere before cooling the carbon protective film. In this way, when the pressure of the inert gas is increased, heat is easily transferred from the substrate, thereby improving the cooling effect.

Example of Manufacturing Method of Carbon Protective Film by Substrate Bias Voltage Application

21 is a sectional view of a magnetic disk manufactured by the method of the present invention. On the Ni-P plated layer 2 formed on the surface of the nonmagnetic substrate 1, 500 to 300 mV of the Cr base layer 3 and about 300 to 500 mV of the recording layer 4 of the CoCr alloy are sputtered in the Ar atmosphere. Formed by law. On the recording layer 4, about 100 to 300 kV of the hydrogen-containing carbon protective film Cm is formed by sputtering in a state where a DC voltage of -50 to -300 V is applied to the substrate side in a CH ₄ -Ar atmosphere.

In addition, the base layer 3 and the recording layer 4 each had a gas pressure of 5 to 30 mTorr and a substrate temperature of about 150 to 260 ° C., and the carbon protective film Cm had a gas pressure of 5 to 30 mTorr and a substrate temperature of about 150 to 200 ° C., respectively. Formed.

FIG. 22 shows the results of Raman spectroscopy in order to evaluate the dependence of the CH ₄ content and the bias voltage of the hydrogen-containing carbon protective film of FIG. 6 formed by the above method. The horizontal axis represents the concentration (%) in the CH4-Ar atmosphere, and the vertical axis represents the Id / Ig value by Raman spectroscopy. As the value of Id / Ig decreases, the diamond bond of the carbon atom increases and the hardness increases as described above.

In the case where the substrate bias voltage is not applied as shown in FIG. 18, when the concentration of CH4 exceeds 20%, the Id / Ig increases and the film strength decreases.However, even when the substrate bias voltage is -150V as shown in the 0 table of FIG. In addition, as shown in the table, Id / Ig does not increase even if the concentration of CH ₄ exceeds 20%.

As described above, when a negative bias voltage is applied to the substrate, the Id / Ig is maintained at a low value of about 0.8 even when the CH4 gas concentration is increased to 20% or more. In addition, there is almost no characteristic variation due to the site of the magnetic device on the order of 0.05, and compared with the conventional 0.15, a good result is obtained.

FIG. 23A and FIG. 23B show the results of measuring the characteristic variation on the magnetic disc. FIG. 23A is a prior art example and FIG. 23B is an example of applying the substrate bias according to the present invention. Even when the substrate bias voltage is not applied as shown in FIG. 23A, the Id / Ig fluctuates greatly from 0.75 to 0.89, whereas when the substrate bias voltage is applied as shown in FIG. 23B, the Id / Ig decreases from 0.78 to 0.83. I can see that.

FIG. 24 shows measurement results of the film resistance of the carbon protective film Cm of the magnetic jisk shown in FIG. The film resistance is not significantly different even when the substrate bias voltage of -150V is applied, even when no bias voltage is applied as in the nineteenth embodiment. That is, it can be seen that the amount of CH ₄ at the time of film formation is largely dependent on the bias voltage. In addition, as the amount of CH ₄ at the time of film formation increases, the film resistance is remarkably increased, and the protective film formed in a high hydrogen partial pressure atmosphere (high CH ₄ ) can realize a high hardness and a fixed term.

FIG. 25 shows the results of Raman spectroscopy in order to evaluate the dependence of the CH ₄ content and the bias voltage of the hydrogen-containing carbon protective film. The graph shows the result of negative substrate bias voltage. Grass represents a case where no negative substrate bias voltage is applied and a case where a substrate bias voltage of -50 to 150V is applied.

As is apparent from this graph, the curve in Table 0 that does not apply the substrate bias voltage increases the Id / Ig as the CH ₄ concentration increases and the film hardness deteriorates. However, when -50V is applied as indicated by the curve in the table. When -100V is applied as indicated by the curve of the table, when -150V is applied as indicated by the curve of the table, Id / Ig does not increase even when CH ₄ concentration is increased. Of the tendency is observed.

Accordingly, the results of FIG. 25 and FIG. 22 are combined, and the substrate bias voltage is about -50 to 300 V in the optimum range, but when the substrate bias voltage is too high, the reverse sputtering effect of the recording layer formed on the substrate becomes remarkable. Not windy

When the negative substrate bias voltage is applied as described above, damage to the carbon protective film formed by suppressing the current value flowing to the substrate side to 0.6 A can be suppressed. The specific value is determined by this voltage and film thickness when forming the film. However, if the current value is larger than 0.6A, damage to the film is increased.

The negative substrate bias voltage according to the present invention may be applied continuously, but it does not matter whether the application is performed at regular intervals in the form of a pillar. Applying a voltage in the shape of a pulse in this manner facilitates the control when the substrate bias voltage is applied.

In the above, the case where the hydrogen-containing carbon protective film is formed on the magnetic disk has been described. However, the present invention can also be applied to the case where the hydrogen-containing carbon protective film is formed on the slide surface of the magnetic head. When the hydrogen-containing carbon protective film is formed on both the magnetic disk and the magnetic head, it is effective to set the substrate bias voltage at the time of forming the carbon protective film of the magnetic disk lower than the substrate bias voltage when the magnetic head is formed.

In this way, the abrasion resistance of the carbon protective film of the magnetic disk can be made better than that of the magnetic head. As a result, the carbon protective film of the magnetic disk can be made thinner, thereby providing a medium having excellent recording and reproduction characteristics.

In order to suppress the increase in Id / Ig, it is also effective to reduce the magnetic field in the vertical direction of the target surface instead of applying the substrate bias voltage. FIG. 26 is a plan view in the sputtering chamber, in which electromagnets 22 and 23 are disposed on both sides of the substrate holder 17 for supporting the substrate on which the carbon protective film is formed.

The electromagnets 22 and 23 are provided with the coil 1, the coil 2, and the coil 3, but if the electric current of the coil 3 is small, the vertical magnetic field may be weakened. In general, at a current of 20 to 40 A, the vertical magnetic field is about several hundred Gauss, but as the amount of CH ₄ increases, the lower the current value and the lower the vertical magnetic field, the higher the Id / Ig. Specific values need to be optimized by the film thickness of the carbon protective film and the amount of CH ₄ .

When forming a carbon protective film by applying a substrate bias voltage of -50 to 300 V in a CH ₄ -Ar atmosphere, when the substrate temperature is lower than 150 ° C., the film performance can be improved. In other words, as described in the embodiment of the carbon protective film formation by the hydrogen concentration control method, the substrate temperature is lowered to form sputtering at low temperature, thereby reducing the Id / Ig due to Raman spectroscopy, thereby improving the film strength. In addition, both the film resistance and the wear resistance are improved.

FIG. 27 shows Raman ratio by measuring CH ₄ concentration and Id / Ig when the substrate temperature is set at 150 ° C. In the case where the substrate bias voltage is -150V and -300V, even if the CH ₄ concentration increases to 20% or more, Id / Ig does not increase but tends to decrease, and the effect of lowering the substrate temperature is confirmed.

As mentioned above, in order to make board | substrate temperature low, it is effective to provide the cooling chamber which enables cooling before forming a protective film etc. in a sputtering apparatus etc. For example, when forming a hydrogen-containing carbon protective film, a sputtering apparatus is shared by forming this carbon protective film in the same apparatus as the apparatus which forms a base film and a magnetic film.

And it cools by leaving it to stand for a predetermined time in high pressure inert gas atmosphere before carbon film formation.

Since CH ₄ is safe and easy to control the amount of CH, in each of the above embodiments, a CH ₄ containing quantum was used as an atmosphere containing hydrogen when forming a carbon protective film. In addition, C ₂ H ₂ , C ₂ H ₂ , C ₂ H ₆ , C ₄ H _10, etc. may be used. As an inert gas constituting the CmHn-inert gas, Ar having excellent safety is exemplified, but is not limited thereto. Each embodiment is still applicable to the case where a hydrogen-containing carbon protective film is formed on the sliding surface of the magnetic head.

In each embodiment, as the nonmagnetic substrate 1 for the magnetic disk, a substrate such as glass or ceramic other than aluminum may be used, and the material, the film thickness, and the formation method of the base layer fulfill their respective functions. The lubricating layer may be formed on the upper portion of the carbon protective film Cm as necessary.

As described above, according to the present invention, the protective film of the magnetic disk or the magnetic head sliding surface is formed in an atmosphere containing hydrogen, and the initial layer has a high hydrogen concentration, and the magnetic film side has high resistance and excellent wear resistance. . Therefore, the durability of the magnetic film (including the magnetic circuit in the case of the magnetic head) can be improved, and the protective film can be thinned to about 200 to 300A. As a result, since the electron conversion efficiency is improved, higher recording density can be realized.

When forming a carbon protective film in an atmosphere containing hydrogen, by applying a site direct current bias to the substrate side, a stable high hardness protective film is realized regardless of the hydrogen partial pressure. That is, the quality of each magnetic disk and the magnetic head can be stabilized to improve the production yield. In addition, corresponding to the thinning of the protective film, a higher resistance and high hardness protective film can be realized.

Claims (12)

A recording medium comprising a magnetic recording layer for storing information, which is sequentially formed on a nonmagnetic substrate, and a carbon protective layer and a lubricating layer for preventing damage to the magnetic recording layer. The carbon protective layer has a hydrogen content on the lubrication layer side that is different from the hydrogen content on the magnetic recording layer side, and on the magnetic recording layer side, a hydrogen atom content of 20% or more of the carbon atom content (or 04. × 10 ²² cm ⁻³ or more CH content) And a second hydrogen-containing carbon film having a hydrogen atom content (or a CH content of less than 0.4 × 10 ² cm ⁻³ ) of less than 20% of the carbon atom content on the lubricating layer side, And the lubricating layer is irradiated with ultraviolet rays to increase the adhesion of the lubricating layer to the carbon protective layer. The recording medium of claim 1, wherein the lubricant constituting the lubricating layer is a perfluoro polyether. The recording medium of claim 2, wherein the perfluoro polyether comprises a hydroxyl group or an aromatic functional group. A magnetic head comprising a carbon protective layer deposited on at least the sliding side of a magnetic head slider mounted with an electron conversion element, and a lubrication layer formed on the carbon protective layer, The carbon protective layer has a hydrogen content on the lubrication layer side that is different from the hydrogen content on the magnetic head slider side, and a hydrogen atom content (or 0.4 on the order of 0.4 x 1022 cm ^-3 or more) of the carbon atom content on the magnetic head slider side. Consisting of a second hydrogen-containing carbon film having And the lubricating layer is irradiated with ultraviolet rays to increase the adhesion of the lubricating layer to the carbon protective layer. 5. The magnetic head of claim 4 wherein the lubricant constituting the lubrication layer is perfluoro polyether. 6. The magnetic head of claim 5 wherein the perfluoro polyether comprises a hydroxyl group or an aromatic functional group. The recording medium according to claim 1, wherein the first and second hydrogen-containing carbon films are continuously formed such that hydrogen content gradually changes between the magnetic recording side and the lubrication layer side. 8. The magnetic head of claim 7, wherein the lubricant constituting the lubricating layer is a perfluoro polyether. The recording medium of claim 8, wherein the perfluoro polyether comprises a hydroxyl group or an aromatic functional group. 11. The magnetic head according to claim 10, wherein the first and second hydrogen-containing carbon films are continuously formed such that hydrogen content gradually changes between the magnetic head slider side and the lubrication layer side. 11. The magnetic head of claim 10 wherein the lubricant constituting the lubrication layer is perfluoro polyether. 12. The magnetic head of claim 11 wherein the perfluoro polyether comprises a hydroxyl group or an aromatic functional group.