JP2004100594A - 真空ポンプ装置 - Google Patents

真空ポンプ装置 Download PDF

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Publication number
JP2004100594A
JP2004100594A JP2002264327A JP2002264327A JP2004100594A JP 2004100594 A JP2004100594 A JP 2004100594A JP 2002264327 A JP2002264327 A JP 2002264327A JP 2002264327 A JP2002264327 A JP 2002264327A JP 2004100594 A JP2004100594 A JP 2004100594A
Authority
JP
Japan
Prior art keywords
pump
housing
booster pump
booster
main
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002264327A
Other languages
English (en)
Japanese (ja)
Inventor
Satoru Kuramoto
藏本　覚
Masahiro Kawaguchi
川口　真広
Shinya Yamamoto
山本　真也
Nobuaki Hoshino
星野　伸明
Masahiro Ida
井田　昌宏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Industries Corp
Original Assignee
Toyota Industries Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Industries Corp filed Critical Toyota Industries Corp
Priority to JP2002264327A priority Critical patent/JP2004100594A/ja
Priority to TW092116447A priority patent/TW200404125A/zh
Priority to KR1020030044273A priority patent/KR20040023490A/ko
Priority to EP03020360A priority patent/EP1398509A3/fr
Priority to CNA031470238A priority patent/CN1495363A/zh
Priority to US10/660,313 priority patent/US20040081565A1/en
Publication of JP2004100594A publication Critical patent/JP2004100594A/ja
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/007—General arrangements of parts; Frames and supporting elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP2002264327A 2002-09-10 2002-09-10 真空ポンプ装置 Pending JP2004100594A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2002264327A JP2004100594A (ja) 2002-09-10 2002-09-10 真空ポンプ装置
TW092116447A TW200404125A (en) 2002-09-10 2003-06-17 Vacuum pump
KR1020030044273A KR20040023490A (ko) 2002-09-10 2003-07-01 진공펌프장치
EP03020360A EP1398509A3 (fr) 2002-09-10 2003-09-09 Pompe à vide
CNA031470238A CN1495363A (zh) 2002-09-10 2003-09-09 真空泵
US10/660,313 US20040081565A1 (en) 2002-09-10 2003-09-10 Vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002264327A JP2004100594A (ja) 2002-09-10 2002-09-10 真空ポンプ装置

Publications (1)

Publication Number Publication Date
JP2004100594A true JP2004100594A (ja) 2004-04-02

Family

ID=31884757

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002264327A Pending JP2004100594A (ja) 2002-09-10 2002-09-10 真空ポンプ装置

Country Status (6)

Country Link
US (1) US20040081565A1 (fr)
EP (1) EP1398509A3 (fr)
JP (1) JP2004100594A (fr)
KR (1) KR20040023490A (fr)
CN (1) CN1495363A (fr)
TW (1) TW200404125A (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012066780A1 (fr) * 2010-11-17 2012-05-24 株式会社アルバック Structure d'accouplement d'un dispositif pour réaliser le vide et système pour réaliser le vide
WO2012066782A1 (fr) * 2010-11-17 2012-05-24 株式会社アルバック Structure d'accouplement d'un dispositif pour réaliser le vide et système pour réaliser le vide
JP2013209928A (ja) * 2012-03-30 2013-10-10 Ebara Corp 真空排気装置
JP2014001668A (ja) * 2012-06-18 2014-01-09 Toshiba Corp ルーツポンプ
JPWO2021240620A1 (fr) * 2020-05-25 2021-12-02

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4218756B2 (ja) * 2003-10-17 2009-02-04 株式会社荏原製作所 真空排気装置
KR100809852B1 (ko) * 2007-05-17 2008-03-04 (주)엘오티베큠 일체형 진공발생장치
DE102009037010A1 (de) * 2009-08-11 2011-02-17 Oerlikon Leybold Vacuum Gmbh Vakuumpumpensystem
TWI518245B (zh) * 2010-04-19 2016-01-21 荏原製作所股份有限公司 乾真空泵裝置、排氣單元，以及消音器
GB2499217A (en) 2012-02-08 2013-08-14 Edwards Ltd Vacuum pump with recirculation valve
GB2500603A (en) * 2012-03-26 2013-10-02 Edwards Ltd Vacuum pump stators and vacuum pumps
DE202013003819U1 (de) * 2013-04-24 2014-07-25 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-System
JP6472653B2 (ja) * 2014-03-17 2019-02-20 株式会社荏原製作所 除害機能付真空ポンプ
JP6441660B2 (ja) * 2014-03-17 2018-12-19 株式会社荏原製作所 除害機能付真空ポンプ
WO2017031807A1 (fr) * 2015-08-27 2017-03-02 上海伊莱茨真空技术有限公司 Pompe à vide non coaxiale à multiples chambres d'entraînement
GB201700995D0 (en) 2017-01-20 2017-03-08 Edwards Ltd Multi-stage vacuum booster pump rotor
GB2564381B (en) 2017-06-12 2020-07-01 Edwards Ltd Twin shaft pumps and a method of pumping
CN107084135A (zh) * 2017-06-29 2017-08-22 德耐尔节能科技（上海）股份有限公司 一种干式螺旋真空泵
US11313368B2 (en) * 2020-03-05 2022-04-26 Elivac Company, Ltd. Multistage pump assembly with at least one co-used shaft
CN112879290B (zh) * 2021-01-25 2022-06-14 马鞍山赛力文机械有限公司 一种前后端齿轮驱动的双螺杆主机结构

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2721694A (en) * 1954-01-29 1955-10-25 New York Air Brake Co First stage mechanical pump for use in a two stage vacuum pumping system
GB8808608D0 (en) * 1988-04-12 1988-05-11 Boc Group Plc Dry pump with booster
JPH05231366A (ja) * 1991-07-09 1993-09-07 Ebara Corp 多段式真空ポンプ装置
JPH05231369A (ja) * 1991-07-09 1993-09-07 Ebara Corp 多段スクリュー真空ポンプ
JPH05113180A (ja) * 1991-09-05 1993-05-07 Ebara Corp 真空ポンプの連結装置
JP3563152B2 (ja) * 1995-04-21 2004-09-08 株式会社アルバック 真空ポンプ

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9273568B2 (en) 2010-11-17 2016-03-01 Ulvac, Inc. Coupling structure for vacuum exhaust device and vacuum exhaust system
WO2012066782A1 (fr) * 2010-11-17 2012-05-24 株式会社アルバック Structure d'accouplement d'un dispositif pour réaliser le vide et système pour réaliser le vide
CN103228921A (zh) * 2010-11-17 2013-07-31 株式会社爱发科 真空排气装置的联接结构和真空排气系统
KR101465925B1 (ko) * 2010-11-17 2014-11-26 가부시키가이샤 아루박 진공 배기 장치의 연결 구조 및 진공 배기 시스템
JP5645229B2 (ja) * 2010-11-17 2014-12-24 株式会社アルバック 真空排気装置の連結構造及び真空排気システム
CN103228921B (zh) * 2010-11-17 2015-11-25 株式会社爱发科 真空排气装置的联接结构和真空排气系统
TWI512199B (zh) * 2010-11-17 2015-12-11 Ulvac Inc 真空排氣裝置之連結構造及真空排氣系統
WO2012066780A1 (fr) * 2010-11-17 2012-05-24 株式会社アルバック Structure d'accouplement d'un dispositif pour réaliser le vide et système pour réaliser le vide
JP2013209928A (ja) * 2012-03-30 2013-10-10 Ebara Corp 真空排気装置
JP2014001668A (ja) * 2012-06-18 2014-01-09 Toshiba Corp ルーツポンプ
JPWO2021240620A1 (fr) * 2020-05-25 2021-12-02
WO2021240620A1 (fr) * 2020-05-25 2021-12-02 樫山工業株式会社 Dispositif d'échappement sous vide pourvu d'un silencieux
JP7350398B2 (ja) 2020-05-25 2023-09-26 樫山工業株式会社 サイレンサ付き真空排気装置

Also Published As

Publication number Publication date
EP1398509A2 (fr) 2004-03-17
KR20040023490A (ko) 2004-03-18
CN1495363A (zh) 2004-05-12
US20040081565A1 (en) 2004-04-29
TW200404125A (en) 2004-03-16
EP1398509A3 (fr) 2005-06-15

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