EP1398509A3 - Pompe à vide - Google Patents

Pompe à vide Download PDF

Info

Publication number
EP1398509A3
EP1398509A3 EP03020360A EP03020360A EP1398509A3 EP 1398509 A3 EP1398509 A3 EP 1398509A3 EP 03020360 A EP03020360 A EP 03020360A EP 03020360 A EP03020360 A EP 03020360A EP 1398509 A3 EP1398509 A3 EP 1398509A3
Authority
EP
European Patent Office
Prior art keywords
pump
housing
coupling member
vacuum pump
booster
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03020360A
Other languages
German (de)
English (en)
Other versions
EP1398509A2 (fr
Inventor
Satoru Kuramoto
Masahiro Kawaguchi
Shinya Yamamoto
Nobuaki Hoshino
Masahiro Ida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Industries Corp
Original Assignee
Toyota Industries Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Industries Corp filed Critical Toyota Industries Corp
Publication of EP1398509A2 publication Critical patent/EP1398509A2/fr
Publication of EP1398509A3 publication Critical patent/EP1398509A3/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/007—General arrangements of parts; Frames and supporting elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP03020360A 2002-09-10 2003-09-09 Pompe à vide Withdrawn EP1398509A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002264327 2002-09-10
JP2002264327A JP2004100594A (ja) 2002-09-10 2002-09-10 真空ポンプ装置

Publications (2)

Publication Number Publication Date
EP1398509A2 EP1398509A2 (fr) 2004-03-17
EP1398509A3 true EP1398509A3 (fr) 2005-06-15

Family

ID=31884757

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03020360A Withdrawn EP1398509A3 (fr) 2002-09-10 2003-09-09 Pompe à vide

Country Status (6)

Country Link
US (1) US20040081565A1 (fr)
EP (1) EP1398509A3 (fr)
JP (1) JP2004100594A (fr)
KR (1) KR20040023490A (fr)
CN (1) CN1495363A (fr)
TW (1) TW200404125A (fr)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4218756B2 (ja) * 2003-10-17 2009-02-04 株式会社荏原製作所 真空排気装置
KR100809852B1 (ko) * 2007-05-17 2008-03-04 (주)엘오티베큠 일체형 진공발생장치
DE102009037010A1 (de) * 2009-08-11 2011-02-17 Oerlikon Leybold Vacuum Gmbh Vakuumpumpensystem
TWI518245B (zh) * 2010-04-19 2016-01-21 荏原製作所股份有限公司 乾真空泵裝置、排氣單元，以及消音器
US9273568B2 (en) 2010-11-17 2016-03-01 Ulvac, Inc. Coupling structure for vacuum exhaust device and vacuum exhaust system
JP2014029114A (ja) * 2010-11-17 2014-02-13 Ulvac Japan Ltd 真空排気装置の連結構造及び真空排気装置
GB2499217A (en) * 2012-02-08 2013-08-14 Edwards Ltd Vacuum pump with recirculation valve
GB2500603A (en) * 2012-03-26 2013-10-02 Edwards Ltd Vacuum pump stators and vacuum pumps
JP6009193B2 (ja) * 2012-03-30 2016-10-19 株式会社荏原製作所 真空排気装置
JP2014001668A (ja) * 2012-06-18 2014-01-09 Toshiba Corp ルーツポンプ
DE202013003819U1 (de) * 2013-04-24 2014-07-25 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-System
JP6472653B2 (ja) * 2014-03-17 2019-02-20 株式会社荏原製作所 除害機能付真空ポンプ
JP6441660B2 (ja) * 2014-03-17 2018-12-19 株式会社荏原製作所 除害機能付真空ポンプ
WO2017031807A1 (fr) * 2015-08-27 2017-03-02 上海伊莱茨真空技术有限公司 Pompe à vide non coaxiale à multiples chambres d'entraînement
GB201700995D0 (en) 2017-01-20 2017-03-08 Edwards Ltd Multi-stage vacuum booster pump rotor
GB2564381B (en) 2017-06-12 2020-07-01 Edwards Ltd Twin shaft pumps and a method of pumping
CN107084135A (zh) * 2017-06-29 2017-08-22 德耐尔节能科技（上海）股份有限公司 一种干式螺旋真空泵
US11313368B2 (en) * 2020-03-05 2022-04-26 Elivac Company, Ltd. Multistage pump assembly with at least one co-used shaft
WO2021240620A1 (fr) * 2020-05-25 2021-12-02 樫山工業株式会社 Dispositif d'échappement sous vide pourvu d'un silencieux
CN112879290B (zh) * 2021-01-25 2022-06-14 马鞍山赛力文机械有限公司 一种前后端齿轮驱动的双螺杆主机结构

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05113180A (ja) * 1991-09-05 1993-05-07 Ebara Corp 真空ポンプの連結装置
JPH05231369A (ja) * 1991-07-09 1993-09-07 Ebara Corp 多段スクリュー真空ポンプ
JPH05231366A (ja) * 1991-07-09 1993-09-07 Ebara Corp 多段式真空ポンプ装置
JPH08296557A (ja) * 1995-04-21 1996-11-12 Ulvac Japan Ltd 真空ポンプ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2721694A (en) * 1954-01-29 1955-10-25 New York Air Brake Co First stage mechanical pump for use in a two stage vacuum pumping system
GB8808608D0 (en) * 1988-04-12 1988-05-11 Boc Group Plc Dry pump with booster

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05231369A (ja) * 1991-07-09 1993-09-07 Ebara Corp 多段スクリュー真空ポンプ
JPH05231366A (ja) * 1991-07-09 1993-09-07 Ebara Corp 多段式真空ポンプ装置
JPH05113180A (ja) * 1991-09-05 1993-05-07 Ebara Corp 真空ポンプの連結装置
JPH08296557A (ja) * 1995-04-21 1996-11-12 Ulvac Japan Ltd 真空ポンプ

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 017, no. 479 (M - 1471) 31 August 1993 (1993-08-31) *
PATENT ABSTRACTS OF JAPAN vol. 017, no. 686 (M - 1529) 15 December 1993 (1993-12-15) *
PATENT ABSTRACTS OF JAPAN vol. 1997, no. 03 31 March 1997 (1997-03-31) *

Also Published As

Publication number Publication date
KR20040023490A (ko) 2004-03-18
US20040081565A1 (en) 2004-04-29
EP1398509A2 (fr) 2004-03-17
CN1495363A (zh) 2004-05-12
JP2004100594A (ja) 2004-04-02
TW200404125A (en) 2004-03-16

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