JP2004085314A - 振動型ジャイロセンサ - Google Patents

振動型ジャイロセンサ Download PDF

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Publication number
JP2004085314A
JP2004085314A JP2002245590A JP2002245590A JP2004085314A JP 2004085314 A JP2004085314 A JP 2004085314A JP 2002245590 A JP2002245590 A JP 2002245590A JP 2002245590 A JP2002245590 A JP 2002245590A JP 2004085314 A JP2004085314 A JP 2004085314A
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JP
Japan
Prior art keywords
vibration mode
primary
vibrator
gyro sensor
driving
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Pending
Application number
JP2002245590A
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English (en)
Japanese (ja)
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JP2004085314A5 (enExample
Inventor
Toru Kitamura
北村　透
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Precision Products Co Ltd
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Sumitomo Precision Products Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Sumitomo Precision Products Co Ltd filed Critical Sumitomo Precision Products Co Ltd
Priority to JP2002245590A priority Critical patent/JP2004085314A/ja
Publication of JP2004085314A publication Critical patent/JP2004085314A/ja
Publication of JP2004085314A5 publication Critical patent/JP2004085314A5/ja
Pending legal-status Critical Current

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JP2002245590A 2002-08-26 2002-08-26 振動型ジャイロセンサ Pending JP2004085314A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002245590A JP2004085314A (ja) 2002-08-26 2002-08-26 振動型ジャイロセンサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002245590A JP2004085314A (ja) 2002-08-26 2002-08-26 振動型ジャイロセンサ

Publications (2)

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JP2004085314A true JP2004085314A (ja) 2004-03-18
JP2004085314A5 JP2004085314A5 (enExample) 2005-10-27

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ID=32053743

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JP2002245590A Pending JP2004085314A (ja) 2002-08-26 2002-08-26 振動型ジャイロセンサ

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JP (1) JP2004085314A (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105333886A (zh) * 2014-06-26 2016-02-17 无锡华润上华半导体有限公司 校正陀螺仪传感器驱动幅度的方法和系统
CN114719887A (zh) * 2022-06-08 2022-07-08 中国人民解放军国防科技大学 一种微壳体振动陀螺在线修调装置及方法
CN115280099A (zh) * 2020-03-24 2022-11-01 住友精密工业株式会社 振动型角速度传感器
CN115315612A (zh) * 2020-03-24 2022-11-08 住友精密工业株式会社 振动型角速度传感器
WO2023079849A1 (ja) * 2021-11-05 2023-05-11 住友精密工業株式会社 振動型ジャイロスコープ及びこれを備えた角速度センサ

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0642971A (ja) * 1990-05-18 1994-02-18 British Aerospace Plc <Baf> センサー
JPH11230758A (ja) * 1998-02-09 1999-08-27 Miyota Kk 角速度センサ
JP2001509588A (ja) * 1997-07-11 2001-07-24 ビ−エイイ− システムズ パブリック リミテッド カンパニ− 振動構造センサにおけるバイアスエラー低減方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0642971A (ja) * 1990-05-18 1994-02-18 British Aerospace Plc <Baf> センサー
JP2001509588A (ja) * 1997-07-11 2001-07-24 ビ−エイイ− システムズ パブリック リミテッド カンパニ− 振動構造センサにおけるバイアスエラー低減方法
JPH11230758A (ja) * 1998-02-09 1999-08-27 Miyota Kk 角速度センサ

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105333886A (zh) * 2014-06-26 2016-02-17 无锡华润上华半导体有限公司 校正陀螺仪传感器驱动幅度的方法和系统
US10466065B2 (en) 2014-06-26 2019-11-05 Csmc Technologies Fab2 Co., Ltd. Method and system for correcting driving amplitude of gyro sensor
US10782148B2 (en) 2014-06-26 2020-09-22 Csmc Technologies Fab2 Co., Ltd. Method and system for correcting driving amplitude of gyro sensor
CN115280099A (zh) * 2020-03-24 2022-11-01 住友精密工业株式会社 振动型角速度传感器
CN115315612A (zh) * 2020-03-24 2022-11-08 住友精密工业株式会社 振动型角速度传感器
CN115315612B (zh) * 2020-03-24 2024-08-13 住友精密工业株式会社 振动型角速度传感器
CN115280099B (zh) * 2020-03-24 2024-11-26 住友精密工业株式会社 振动型角速度传感器
WO2023079849A1 (ja) * 2021-11-05 2023-05-11 住友精密工業株式会社 振動型ジャイロスコープ及びこれを備えた角速度センサ
CN114719887A (zh) * 2022-06-08 2022-07-08 中国人民解放军国防科技大学 一种微壳体振动陀螺在线修调装置及方法
US11703356B1 (en) 2022-06-08 2023-07-18 National University Of Defense Technology Online trimming device and method for micro-shell resonator gyroscope

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