JP2004079511A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2004079511A5 JP2004079511A5 JP2003155741A JP2003155741A JP2004079511A5 JP 2004079511 A5 JP2004079511 A5 JP 2004079511A5 JP 2003155741 A JP2003155741 A JP 2003155741A JP 2003155741 A JP2003155741 A JP 2003155741A JP 2004079511 A5 JP2004079511 A5 JP 2004079511A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/159,790 | 2002-05-31 | ||
| US10/159,790 US6661009B1 (en) | 2002-05-31 | 2002-05-31 | Apparatus for tilting a beam system |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011061583A Division JP5485209B2 (ja) | 2002-05-31 | 2011-03-02 | ビームシステムのビームカラムを傾動する方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004079511A JP2004079511A (ja) | 2004-03-11 |
| JP2004079511A5 true JP2004079511A5 (enExample) | 2006-07-13 |
| JP5022557B2 JP5022557B2 (ja) | 2012-09-12 |
Family
ID=29419713
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003155741A Expired - Fee Related JP5022557B2 (ja) | 2002-05-31 | 2003-05-30 | ビームシステムのビームカラムを傾動する方法とその装置並びにビームシステム |
| JP2011061583A Expired - Fee Related JP5485209B2 (ja) | 2002-05-31 | 2011-03-02 | ビームシステムのビームカラムを傾動する方法 |
| JP2013096896A Expired - Fee Related JP5635645B2 (ja) | 2002-05-31 | 2013-05-02 | ビームシステムのビームカラムを傾動する装置並びにビームシステム |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011061583A Expired - Fee Related JP5485209B2 (ja) | 2002-05-31 | 2011-03-02 | ビームシステムのビームカラムを傾動する方法 |
| JP2013096896A Expired - Fee Related JP5635645B2 (ja) | 2002-05-31 | 2013-05-02 | ビームシステムのビームカラムを傾動する装置並びにビームシステム |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US6661009B1 (enExample) |
| EP (1) | EP1367629A3 (enExample) |
| JP (3) | JP5022557B2 (enExample) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU2003211027A1 (en) | 2002-03-27 | 2003-10-13 | Nanoink, Inc. | Method and apparatus for aligning patterns on a substrate |
| US20040051053A1 (en) * | 2002-05-22 | 2004-03-18 | Barletta William A. | Universal pattern generator with multiplex addressing |
| US6661009B1 (en) * | 2002-05-31 | 2003-12-09 | Fei Company | Apparatus for tilting a beam system |
| KR100664307B1 (ko) * | 2004-08-13 | 2007-01-04 | 삼성전자주식회사 | 쉐도우 마스크, 및 이를 이용한 수직 테이퍼링 구조물제작방법 |
| JP5033314B2 (ja) * | 2004-09-29 | 2012-09-26 | 株式会社日立ハイテクノロジーズ | イオンビーム加工装置及び加工方法 |
| DE102005002006A1 (de) * | 2005-01-15 | 2006-07-27 | Kuratorium Offis E.V. | Vorrichtung zur Herstellung von 3D-Strukturen |
| US7298495B2 (en) * | 2005-06-23 | 2007-11-20 | Lewis George C | System and method for positioning an object through use of a rotating laser metrology system |
| JP2007164992A (ja) * | 2005-12-09 | 2007-06-28 | Sii Nanotechnology Inc | 複合荷電粒子ビーム装置 |
| JP2008157673A (ja) * | 2006-12-21 | 2008-07-10 | Sii Nanotechnology Inc | 試料把持体の把持面作製方法 |
| US8524139B2 (en) * | 2009-08-10 | 2013-09-03 | FEI Compay | Gas-assisted laser ablation |
| JP4994516B2 (ja) | 2010-04-20 | 2012-08-08 | パナソニック株式会社 | 薄膜を基板に接合する方法 |
| JP5564346B2 (ja) * | 2010-07-08 | 2014-07-30 | 株式会社キーエンス | 拡大観察装置 |
| US8766213B2 (en) | 2012-09-07 | 2014-07-01 | Fei Company | Automated method for coincident alignment of a laser beam and a charged particle beam |
| KR101615513B1 (ko) | 2014-06-17 | 2016-04-27 | 한국표준과학연구원 | 하전입자 빔 정렬 장치 및 이의 이용방법 |
| CN104267288B (zh) * | 2014-10-08 | 2017-08-25 | 国家电网公司 | 基于阀电压或阀电流的hvdc换相失败故障诊断方法 |
| CN106783493B (zh) | 2016-12-01 | 2018-07-10 | 聚束科技（北京）有限公司 | 一种真空气氛处理装置、样品观测系统及方法 |
| TW202534727A (zh) * | 2023-11-06 | 2025-09-01 | 德商卡爾蔡司Ｓｍｔ有限公司 | 用於可互換製程模組的模組化計量裝置 |
Family Cites Families (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0067987A4 (en) * | 1979-12-26 | 1983-04-06 | Varian Associates | FLAT VACUUM SEAL FOR THE INSULATION OF A PNEUMATIC BEARING. |
| US4465934A (en) | 1981-01-23 | 1984-08-14 | Veeco Instruments Inc. | Parallel charged particle beam exposure system |
| JPS57132657A (en) * | 1981-02-06 | 1982-08-17 | Akashi Seisakusho Co Ltd | Inclined moving body tube type scanning electron microscope and its similar apparatus |
| JPS57194531A (en) * | 1981-05-26 | 1982-11-30 | Toshiba Corp | Electron beam transfer device |
| US4864228A (en) * | 1985-03-15 | 1989-09-05 | Fairchild Camera And Instrument Corporation | Electron beam test probe for integrated circuit testing |
| US4706019A (en) * | 1985-11-15 | 1987-11-10 | Fairchild Camera And Instrument Corporation | Electron beam test probe system for analyzing integrated circuits |
| JPH084090B2 (ja) | 1986-08-27 | 1996-01-17 | 株式会社日立製作所 | Ｉｃ配線の切断方法及び装置 |
| DE3802598C1 (enExample) * | 1988-01-29 | 1989-04-13 | Karl Heinz 3057 Neustadt De Stellmann | |
| JPH0235725A (ja) | 1988-07-26 | 1990-02-06 | Matsushita Electric Ind Co Ltd | ドライエッチング方法およびドライエッチング装置 |
| US4891516A (en) * | 1989-02-27 | 1990-01-02 | Huntington Mechanical Laboratories, Inc. | Device for axially and angularly positioning a beam or the like in a sealed chamber |
| KR910016054A (ko) | 1990-02-23 | 1991-09-30 | 미다 가쓰시게 | 마이크로 전자 장치용 표면 처리 장치 및 그 방법 |
| US5229607A (en) * | 1990-04-19 | 1993-07-20 | Hitachi, Ltd. | Combination apparatus having a scanning electron microscope therein |
| JP2886649B2 (ja) | 1990-09-27 | 1999-04-26 | 株式会社日立製作所 | イオンビーム加工方法及びその装置 |
| JP3113674B2 (ja) | 1990-11-21 | 2000-12-04 | 株式会社日立製作所 | 荷電ビーム処理方法およびその装置 |
| JPH0629251A (ja) | 1992-07-13 | 1994-02-04 | Matsushita Electron Corp | 中性粒子ビームエッチング装置 |
| JP2854466B2 (ja) * | 1992-08-28 | 1999-02-03 | 株式会社日立製作所 | 荷電粒子線装置 |
| JPH0778737A (ja) | 1993-09-08 | 1995-03-20 | Fujitsu Ltd | 荷電粒子ビーム露光方法及び荷電粒子ビーム露光装置 |
| JP3404090B2 (ja) * | 1993-11-09 | 2003-05-06 | 株式会社日立製作所 | 電子顕微鏡用試料傾斜装置 |
| US5576542A (en) | 1993-12-08 | 1996-11-19 | Kabushiki Kaisha Toshiba | Substrate cross-section observing apparatus |
| DE4425090C1 (de) * | 1994-07-15 | 1996-03-07 | Saechsische Elektronenstrahl G | Schwenkbare Elektronenkanone |
| US5541411A (en) | 1995-07-06 | 1996-07-30 | Fei Company | Image-to-image registration focused ion beam system |
| JPH0933410A (ja) * | 1995-07-25 | 1997-02-07 | Matsushita Electric Ind Co Ltd | 透過型電子顕微鏡観察用試料の加工方法およびそれに用いるイオンミリング装置 |
| US5869833A (en) * | 1997-01-16 | 1999-02-09 | Kla-Tencor Corporation | Electron beam dose control for scanning electron microscopy and critical dimension measurement instruments |
| US6039000A (en) | 1998-02-11 | 2000-03-21 | Micrion Corporation | Focused particle beam systems and methods using a tilt column |
| JP2000208090A (ja) * | 1999-01-13 | 2000-07-28 | Sharp Corp | 集束イオンビ―ム加工装置およびエッチング加工方法 |
| JP3652912B2 (ja) * | 1999-03-08 | 2005-05-25 | 日本電子株式会社 | 欠陥検査装置 |
| JP2000306540A (ja) * | 1999-04-16 | 2000-11-02 | Nippon Steel Corp | イオン注入装置におけるビーム電流測定装置 |
| JP2001021334A (ja) * | 1999-07-05 | 2001-01-26 | Jeol Ltd | 試料検査装置 |
| US6501078B1 (en) * | 2000-03-16 | 2002-12-31 | Applied Materials, Inc. | Ion extraction assembly |
| JP2002093685A (ja) * | 2000-09-19 | 2002-03-29 | Nikon Corp | ステージ装置及び露光装置 |
| US6661009B1 (en) * | 2002-05-31 | 2003-12-09 | Fei Company | Apparatus for tilting a beam system |
-
2002
- 2002-05-31 US US10/159,790 patent/US6661009B1/en not_active Expired - Lifetime
-
2003
- 2003-05-30 JP JP2003155741A patent/JP5022557B2/ja not_active Expired - Fee Related
- 2003-05-30 EP EP03076961A patent/EP1367629A3/en not_active Withdrawn
-
2011
- 2011-03-02 JP JP2011061583A patent/JP5485209B2/ja not_active Expired - Fee Related
-
2013
- 2013-05-02 JP JP2013096896A patent/JP5635645B2/ja not_active Expired - Fee Related